Si(Ge)/SiC/SiO_2多层介质膜红外空芯传能光纤的研究
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摘要
本论文评述了关于中红外传能光纤的国内外进展,从光射线理论和波导理论出发介绍了红外传能光纤的传输机理,从薄膜光学出发分析了多层介质膜传能光纤的膜层选择机理等基础理论,针对碳化硅(SiC)在中红外区的特点,在导师侯蓝田教授领导的科研组已有成果的基础上进行了以下几个方面的研究:
     发现了SiC是制备红外传能光纤的良好的红外材料,SiC/SiO_2空芯传能光纤在国际上还没有人进行研究:提出了具有Si/SiC/SiO_2和Ge/SiC/SiO_2膜结构的空芯传能光纤,据我们所知,这种光纤目前在国内外还没有人进行研究,并对其传输性能进行了可行性分析。
     利用化学气相沉积法(CVD)初步完成了具有SiC内膜的空芯传能光纤的制备,使用Auastar 360 IR-FT红外光谱仪、KYKY-2800型扫描电镜等先进仪器对样品进行分析研究,所研制的孔径为950微米、长3米的SiC/SiO_2空芯传能光纤,传输损耗约为0.7dB/m,为进一步提高光纤性能打下了良好的基础。
     最后,利用改进化学气相沉积法(MCVD)方法,对具有SiC内膜的空芯传能光纤的内层镀膜、拉丝一次性完成进行了探索。
The dissertation gives a comment on the field of energy-transmitting fibers for mid-infrared laser, an introduction to the mechanism of infrared-transmitting fibers in view of radiations and waveguides, and a theoretical analyze of the layer-selecting method for the fibers with multi-layer dielectric films.
    In view of the properties of SiC in the region of mid-infrared, the author has done many works about the energy-transmitting fibers with SiC, and summarized as follows:
    First, it is found that SiC is a very good material for the fabrication of power-transmitting fibers for mid-infrared laser, especially for CO2 laser that works at 10.6um wavelength, and SiC/SiO2 hollow fibers has not been studied in the world for the first time to our knowledge.
    Second, it is pointed out, for the first time to our knowledge, that the hollow fibers with a structure like Si/SiC/SiO2 or Ge/SiC/SiO2 have very good properties for the mid-infrared laser power transmitting, especially for CO2 laser.
    Third, the fabrication of hollow fibers with SiC films has been done with chemical vapor deposition (CVD), and the power-transmitting properties of the above samples have been obtained with an Austar 360 FTIR spectrometer and KYKY-2800 SEM. The kind of fiber has a 950um inner diameter and 3m length, and its transmitting loss is about 0.7dB/m which can be suitable for many applications.
    Finally, it is realized preliminarily that the fabrication of hollow fibers with SiC films, which concludes the process of fiber-drawing and coating, can be done in an organic whole with modified chemical vapor deposition (MCVD).
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