光纤光栅传感器的理论和技术研究
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摘要
本文对光纤光栅传感器的基本理论和技术进行了系统的研究，主要内容包
括：光纤光栅的耦合模理论分析；光纤光栅的制作方法；光纤光栅的传感机理；
光纤光栅的温度、压力增敏及去敏方法；光纤光栅传感器用宽带光源的研制及
光纤光栅波长解调技术。
首先对光纤光栅传感器的研究现状和发展趋势进行了回顾和展望。按照理
想波导模展开法推导了模式耦合方程，并用耦合模理论详细研究了光纤Bragg
光栅和啁啾光栅的反射特性（反射带宽和峰值反射率）与光纤光栅的参数（光
栅长度、耦合系数、啁啾系数等）之间的关系。提出了一种饱和情况下光纤Bragg
光栅折射率分布的数学模型，利用该模型研究了饱和情况下Bragg光栅的一、
二阶衍射特性，模拟了Bragg光栅一、二阶衍射的形成过程，模拟结果与实验
数据吻合的很好。
光纤光栅的制作技术是其批量生产和广泛应用的关键。本文系统论述了光
纤光栅的各种制作方法并比较了各种制作方法的优缺点。重点对相位掩模法进
行了讨论，采用标量衍射理论分析了相位掩模的近场衍射特性，研究了写入光
正入射和斜入射条件下的成栅特点，得出了一些重要结论。进行了用相位掩模
制作光纤Bragg光栅的实验研究。
系统研究了光纤Bragg光栅和长周期光栅对温度、应变及压力的传感机
理。分析了Bragg光栅的二阶温度、应变灵敏度和温度-应变交叉灵敏度对测
摘 要
一
量结果的影响。详细研究了Brngg光栅的温度增敏和去敏以及压力增敏的方法
和原理。此外，还详细论述了光纤光栅同时测量温度和应变的各种方案，对各，
种方案的优缺点进行了分析比较，并分析了各种方案的系统误差。对光纤Bragg。
光栅的温度、应力传感特性进行了实验研究，在25”C～100”C的温度范围和
0－809的应力范围内测出了Bragg光栅的波长－温度和波长－应力响应曲线。
宽带光源和波长解调是光纤光栅传感器在实际应用中必须解决的问题，我
们研制了多种半导体激光器驱动电源和半导体激光器冷却系统，合作研制了采
用掺饵光纤的宽带光源。本文还论述了光纤光栅的波长解调方法，包括匹配光
栅法、可调谐法布里－琅罗腔法、非平衡MachZehnder于涉仪法和可调谐光源
法等，提出了一种解调光纤光栅波长的可调谐法布里－琅罗腔结构并计算了法
布里－琅罗腔的参数。
This thesis focuses on the basic theoretical and technical researches on the
optical fiber grating sensors, including coupled mode analysis of optical fiber
gratings; the fabrication methods of optical fiber gratings; the sensing mechanism of
fiber gratings; the increasing and decreasing of temperature and pressure
sensitivities of optical fiber gratings, the fabrication of wide band light source for
fiber grating sensors and the demodulation technologies for the wavelength signals
of fiber grating sensors.
Firstly, the recent developments in the area of optical fiber grating sensors are
reviewed. The coupled mode equations are built by means of expanding perfect
waveguide modes. Using the coupled mode theory, the relationships between the
reflective spectrum characteristics of fiber Bragg gratings and chirped gratings (the
maximum reflectivity and the bandwidth) and their structural parameters (grating
length, coupled coefficient, chirped coefficient, etc.) are studied. A mathematical
model about refractive index distribution of fiber Bragg gratings under saturation is
? proposed Using this model, the first- and second-order diffraction characteristics of
fiber Bragg gratings under saturation are studied and the formation processes of the
first- and second-order diffraction are simulated. The simulated results are in
excellent agreement with the experimental results
Supported by Chinese National Nature Science Foundation (No. 69878001)
??
~~1
The key problem of optical fiber gratings to be wide application and batch
production is the techniques of fiber grating fabrication. In this thesis, various
fabrication methods of fiber gratings are described systematically. The advantages -~
and disadvantages of each method are analyzed and compared. The research work
mainly focuses on the phase mask method. The characteristics of near field
diffraction of the phase mask are analyzed with scalar diffraction theory. The
properties of grating formation are studied specifically when the writing light beam
incidents normally and slantingly, respectively. Some important conclusions are
obtained. The experimental study is accomplished to fabricate the fiber Bragg
gratings with phase mask.
The temperature, strain and pressure sensing mechanisms of fiber Bragg
gratings and long-period gratings are studied systematically. The influences on the
measurement results caused by the second-order temperature and strain sensitivities
as swell as temperature-strain cross sensitivity are analyzed. The methods and
mechanisms of increasing and decreasing of temperature sensitivity as well as
increasing of pressure sensitivity are also studied In addition, various schemes of
simultaneously measuring strain and temperature with fiber grating sensors are
described. The advantages and disadvantages of these schemes are compared. The
systematic errors of these schemes are also discussed. The temperature and stress
sensing characteristics of fiber Bragg gratings are studied experimentally. The
response curves of wavelength-temperature and wavelength-stress are measured in
the range of 250C-1000C and O?80g, respectively.
Broad band light source and wavelength demodulation technologies are two
括：光纤光栅的耦合模理论分析；光纤光栅的制作方法；光纤光栅的传感机理；
光纤光栅的温度、压力增敏及去敏方法；光纤光栅传感器用宽带光源的研制及
光纤光栅波长解调技术。
首先对光纤光栅传感器的研究现状和发展趋势进行了回顾和展望。按照理
想波导模展开法推导了模式耦合方程，并用耦合模理论详细研究了光纤Bragg
光栅和啁啾光栅的反射特性（反射带宽和峰值反射率）与光纤光栅的参数（光
栅长度、耦合系数、啁啾系数等）之间的关系。提出了一种饱和情况下光纤Bragg
光栅折射率分布的数学模型，利用该模型研究了饱和情况下Bragg光栅的一、
二阶衍射特性，模拟了Bragg光栅一、二阶衍射的形成过程，模拟结果与实验
数据吻合的很好。
光纤光栅的制作技术是其批量生产和广泛应用的关键。本文系统论述了光
纤光栅的各种制作方法并比较了各种制作方法的优缺点。重点对相位掩模法进
行了讨论，采用标量衍射理论分析了相位掩模的近场衍射特性，研究了写入光
正入射和斜入射条件下的成栅特点，得出了一些重要结论。进行了用相位掩模
制作光纤Bragg光栅的实验研究。
系统研究了光纤Bragg光栅和长周期光栅对温度、应变及压力的传感机
理。分析了Bragg光栅的二阶温度、应变灵敏度和温度-应变交叉灵敏度对测
摘 要
一
量结果的影响。详细研究了Brngg光栅的温度增敏和去敏以及压力增敏的方法
和原理。此外，还详细论述了光纤光栅同时测量温度和应变的各种方案，对各，
种方案的优缺点进行了分析比较，并分析了各种方案的系统误差。对光纤Bragg。
光栅的温度、应力传感特性进行了实验研究，在25”C～100”C的温度范围和
0－809的应力范围内测出了Bragg光栅的波长－温度和波长－应力响应曲线。
宽带光源和波长解调是光纤光栅传感器在实际应用中必须解决的问题，我
们研制了多种半导体激光器驱动电源和半导体激光器冷却系统，合作研制了采
用掺饵光纤的宽带光源。本文还论述了光纤光栅的波长解调方法，包括匹配光
栅法、可调谐法布里－琅罗腔法、非平衡MachZehnder于涉仪法和可调谐光源
法等，提出了一种解调光纤光栅波长的可调谐法布里－琅罗腔结构并计算了法
布里－琅罗腔的参数。
This thesis focuses on the basic theoretical and technical researches on the
optical fiber grating sensors, including coupled mode analysis of optical fiber
gratings; the fabrication methods of optical fiber gratings; the sensing mechanism of
fiber gratings; the increasing and decreasing of temperature and pressure
sensitivities of optical fiber gratings, the fabrication of wide band light source for
fiber grating sensors and the demodulation technologies for the wavelength signals
of fiber grating sensors.
Firstly, the recent developments in the area of optical fiber grating sensors are
reviewed. The coupled mode equations are built by means of expanding perfect
waveguide modes. Using the coupled mode theory, the relationships between the
reflective spectrum characteristics of fiber Bragg gratings and chirped gratings (the
maximum reflectivity and the bandwidth) and their structural parameters (grating
length, coupled coefficient, chirped coefficient, etc.) are studied. A mathematical
model about refractive index distribution of fiber Bragg gratings under saturation is
? proposed Using this model, the first- and second-order diffraction characteristics of
fiber Bragg gratings under saturation are studied and the formation processes of the
first- and second-order diffraction are simulated. The simulated results are in
excellent agreement with the experimental results
Supported by Chinese National Nature Science Foundation (No. 69878001)
??
~~1
The key problem of optical fiber gratings to be wide application and batch
production is the techniques of fiber grating fabrication. In this thesis, various
fabrication methods of fiber gratings are described systematically. The advantages -~
and disadvantages of each method are analyzed and compared. The research work
mainly focuses on the phase mask method. The characteristics of near field
diffraction of the phase mask are analyzed with scalar diffraction theory. The
properties of grating formation are studied specifically when the writing light beam
incidents normally and slantingly, respectively. Some important conclusions are
obtained. The experimental study is accomplished to fabricate the fiber Bragg
gratings with phase mask.
The temperature, strain and pressure sensing mechanisms of fiber Bragg
gratings and long-period gratings are studied systematically. The influences on the
measurement results caused by the second-order temperature and strain sensitivities
as swell as temperature-strain cross sensitivity are analyzed. The methods and
mechanisms of increasing and decreasing of temperature sensitivity as well as
increasing of pressure sensitivity are also studied In addition, various schemes of
simultaneously measuring strain and temperature with fiber grating sensors are
described. The advantages and disadvantages of these schemes are compared. The
systematic errors of these schemes are also discussed. The temperature and stress
sensing characteristics of fiber Bragg gratings are studied experimentally. The
response curves of wavelength-temperature and wavelength-stress are measured in
the range of 250C-1000C and O?80g, respectively.
Broad band light source and wavelength demodulation technologies are two
引文
1． B．Culshaw,J．Dakin．李少慧，宁雅农等译，光纤传感器．武汉：华中理工大 学出版社，1997年
2． 靳伟，廖延彪，张志鹏等著，导波光学传感器：原理与技术．北京：科学出 版社，1998年
3． V Vail and R W Shorthill，Fiber ring interferometer．Appl．Opt．，1976，15(5) ： 1099-1100
4． 张志鹏，W. A．Gambling，光纤传感器原理，北京：中国计量科学出版社， 1991年
5． P. H. Paul, and G. Kychakoff, Fiber-optic evanescent field absorption sensor. Appl. Phys. Lett, 1987, 51(1) : 12-14
6． E. H. Lee, R. E. Benner, J. B. Fenn et al., Angular distribution of fluorescence from liquids and monodispersed spheres by evanescent wave excitation. Appl. Opt., 1979, 18(6) : 862-868
7． M. T. Flanagan, and R. H. Pantell, Surface plasmon resonance and immunosensors. Electron. Lett., 1984, 20(23) : 968-970
8． R. A. Lieberman, L. L. Blyler, and L. G. Cohen, A distributed fiber optic sensor based on cladding flurorescence. J. of Lightwave Technol., 1990, 18(2) : 212-220
9． H. Hai, H. Tanaka, and T. Yoshino, Fiber-optic evanescent-wave methane-gas sensor using optical absorption for the 3． 392 μm line of a He-Ne laser. Opt. Lett., 1987, 12(6) :437-439
10． W. Jin, G. Steuart, M, Wilkinson et al., Compensation for surface contamination in a D-fiber evanescent wave methane sensor. J. of Lightwave Technol., 1995, 13(6) : 1177-1184
11． K. O. Hill, Y. Fujii, D. C. Johnson et al., Photosensitivity in optical fiber waveguides: Application to reflection filter fabrication. Appl. Phys. Lett., 1978, 32(10) : 647-649
12． G. Meltz, W. W. Morey, and W. H. Glenn, Formation of Bragg gratings in optical fibers by a transverse holographic method. Opt. Lett., 1989, 14(15) : 823-825
13． K. O. Hill, B. Malo, F. Bilodeau et al., Bragg gratings fabricated in monomode photosensitive optical fiber by exposure through a phase mask. Appl. Phys. Lett., 1993,62(10) : 1035-1037
14． D. Z. Anderson, V. Mizrahi, T. Erdogan et al., Production of in-fiber gratings using a diffractive optical element. Electron. Lett., 1993, 29(6) : 566-568
15． C. G. Askins, M. A. Putnam and E J. Friebele, Stepped-wavelength optical-fiber Bragg grating arrays fabricated in line on a draw tower. Opt. Lett., 1994, 19(2) : 147-149
16． L. Dong, J L. Archambault, L. Reekie et al., Single pulse Bragg gratings written during fiber drawing. Electron Lett., 1993, 29(17) : 1577-1578
17． K. O. Hill, F. Bilodeau, B. Malo et al., Chirped in-fiber gratings for compensation of optical-fiber dispersion Opt. Lett., 1994, 19(17) . 1314-1316
18 J. P. Burger, P. L. Swart, S. J. Spammer et al., Fiber laser with in-fiber Bragg reflector: Design formulae with experimental verification. Proc. SPIE., 1995, Vol. 2507: 53-64
19． W. W. Morey, G, A. Ball, and H. Singh, Applications of fiber grating sensors. Proc. SPIE., 1996, Vol. 2839: 2-7
20 G Meltz, Overview of fiber grating-based sensors. Proc. SPIE., 1996, Vol. 2838: 2-22
21． P. M. Nellen, R. Bronnimann, and U. Sennhayser, Applications of distributed fiber Bragg grating sensors in civil engineering. Proc. SPIE., 1995, Vol. 2507: 14-24
22． M. G. Xu, H. Geiger and J. P. Dakin, Multiplexed point and stepwise-continuous fiber grating based sensors: Practical sensor for structural monitoring? Proc. SPIE., 1994, Vol. 2294: 69-80
23 R. M. Measures, A. T. Alavie, R. Maaskant et al., Bragg grating structural
sensing system for bridge monitoring. Proc. SPIE., 1994, Vol. 2294: 53-59
24． D. R. Hjelme, L. Bjerkan, S. Neegard et al., Application of Bragg grating sensors in the characterization of scaled marine vehicle models. Appl. Opt., 1997, 36(1) : 328-336
25． D. R. Hjelme, B. Bakke, J. S. Rambech et al., Multiplexed fiber optic Bragg-grating strain sensor system for use in marine vehicle testing. Proc. SPIE., 1996, Vol. 2838:40-51
26． M. B. Reid and M. Ozcan, Temperature dependence of fiber optics Bragg gratings at low temperatures. Opt. Eng., 1998, 37(1) : 237-240
27． 葛璜，安贵仁，任泽英等，紫外写入光纤布喇格光栅的实验研究．光子学报， 1997，26(z1) ：227-230
28． 秦玉文，陈根祥，赵玉成等，光纤光栅制作及其温度稳定性研究．光电子· 激光，1998，9(3) ：173-176
29． 孙晓娜，冯锡钰，光纤布喇格光栅的制作技术．半导体光电，1999，20(3) ： 165-167
30． Yunqi Liu，Zhuanyun Guo，Yin Zhang et a1． ，Simultaneous pressure and temperature measurement with ploymer-coated fiber Bragg grating．Electron． Lett．，2000，36(6) ：564-566
31． 冯德军，开桂云，葛春风等，光纤光栅环形腔激光器的输出特性研究．光子 学报，1999，28(9) ．832-834
32． H. Geiger, M. G. Xu, N. C. Eaton, et al., Electronic tracking system for multiplexed fiber grating sensors. Electron. Lett., 1995, 31(12) : 1006-1007
33． Y. J. Rao, K. Kalli, G. Brady, et al., Spatially-multiplexed fiber-optic Bragg grating strain and temperature sensor system based on interferometric wavelength-shift dection. Electron. Lett., 1995, 31(12) : 1009-1010
34． R. Kashyap, P. F. McKee, R. J. Campbell et al., Novel method of producing all fiber photoinduced chirped gratings. Electron. Lett., 1994, 30(12) : 996-997
35． C. K. Gary and J. Rubin, Wavelength coded fiber optic sensors for verification
of identity. Proc. SPIE., 1996, Vol. 2839: 34-39
36 D. J. Hill and G. A. Cranch, Gain in hydrostatic pressure sensitivity of coated fiber Bragg grating. Electron. Lett. 1999, 35(15) : 1268-1269
37． M. G. Xu, J. L. Archambault, L. Reekie, et al. Discrimination between strain and temperature effects using dual-wavelength fiber grating sensors. Electron. Lett. 1994,30(13) : 1085-1087
2． 靳伟，廖延彪，张志鹏等著，导波光学传感器：原理与技术．北京：科学出 版社，1998年
3． V Vail and R W Shorthill，Fiber ring interferometer．Appl．Opt．，1976，15(5) ： 1099-1100
4． 张志鹏，W. A．Gambling，光纤传感器原理，北京：中国计量科学出版社， 1991年
5． P. H. Paul, and G. Kychakoff, Fiber-optic evanescent field absorption sensor. Appl. Phys. Lett, 1987, 51(1) : 12-14
6． E. H. Lee, R. E. Benner, J. B. Fenn et al., Angular distribution of fluorescence from liquids and monodispersed spheres by evanescent wave excitation. Appl. Opt., 1979, 18(6) : 862-868
7． M. T. Flanagan, and R. H. Pantell, Surface plasmon resonance and immunosensors. Electron. Lett., 1984, 20(23) : 968-970
8． R. A. Lieberman, L. L. Blyler, and L. G. Cohen, A distributed fiber optic sensor based on cladding flurorescence. J. of Lightwave Technol., 1990, 18(2) : 212-220
9． H. Hai, H. Tanaka, and T. Yoshino, Fiber-optic evanescent-wave methane-gas sensor using optical absorption for the 3． 392 μm line of a He-Ne laser. Opt. Lett., 1987, 12(6) :437-439
10． W. Jin, G. Steuart, M, Wilkinson et al., Compensation for surface contamination in a D-fiber evanescent wave methane sensor. J. of Lightwave Technol., 1995, 13(6) : 1177-1184
11． K. O. Hill, Y. Fujii, D. C. Johnson et al., Photosensitivity in optical fiber waveguides: Application to reflection filter fabrication. Appl. Phys. Lett., 1978, 32(10) : 647-649
12． G. Meltz, W. W. Morey, and W. H. Glenn, Formation of Bragg gratings in optical fibers by a transverse holographic method. Opt. Lett., 1989, 14(15) : 823-825
13． K. O. Hill, B. Malo, F. Bilodeau et al., Bragg gratings fabricated in monomode photosensitive optical fiber by exposure through a phase mask. Appl. Phys. Lett., 1993,62(10) : 1035-1037
14． D. Z. Anderson, V. Mizrahi, T. Erdogan et al., Production of in-fiber gratings using a diffractive optical element. Electron. Lett., 1993, 29(6) : 566-568
15． C. G. Askins, M. A. Putnam and E J. Friebele, Stepped-wavelength optical-fiber Bragg grating arrays fabricated in line on a draw tower. Opt. Lett., 1994, 19(2) : 147-149
16． L. Dong, J L. Archambault, L. Reekie et al., Single pulse Bragg gratings written during fiber drawing. Electron Lett., 1993, 29(17) : 1577-1578
17． K. O. Hill, F. Bilodeau, B. Malo et al., Chirped in-fiber gratings for compensation of optical-fiber dispersion Opt. Lett., 1994, 19(17) . 1314-1316
18 J. P. Burger, P. L. Swart, S. J. Spammer et al., Fiber laser with in-fiber Bragg reflector: Design formulae with experimental verification. Proc. SPIE., 1995, Vol. 2507: 53-64
19． W. W. Morey, G, A. Ball, and H. Singh, Applications of fiber grating sensors. Proc. SPIE., 1996, Vol. 2839: 2-7
20 G Meltz, Overview of fiber grating-based sensors. Proc. SPIE., 1996, Vol. 2838: 2-22
21． P. M. Nellen, R. Bronnimann, and U. Sennhayser, Applications of distributed fiber Bragg grating sensors in civil engineering. Proc. SPIE., 1995, Vol. 2507: 14-24
22． M. G. Xu, H. Geiger and J. P. Dakin, Multiplexed point and stepwise-continuous fiber grating based sensors: Practical sensor for structural monitoring? Proc. SPIE., 1994, Vol. 2294: 69-80
23 R. M. Measures, A. T. Alavie, R. Maaskant et al., Bragg grating structural
sensing system for bridge monitoring. Proc. SPIE., 1994, Vol. 2294: 53-59
24． D. R. Hjelme, L. Bjerkan, S. Neegard et al., Application of Bragg grating sensors in the characterization of scaled marine vehicle models. Appl. Opt., 1997, 36(1) : 328-336
25． D. R. Hjelme, B. Bakke, J. S. Rambech et al., Multiplexed fiber optic Bragg-grating strain sensor system for use in marine vehicle testing. Proc. SPIE., 1996, Vol. 2838:40-51
26． M. B. Reid and M. Ozcan, Temperature dependence of fiber optics Bragg gratings at low temperatures. Opt. Eng., 1998, 37(1) : 237-240
27． 葛璜，安贵仁，任泽英等，紫外写入光纤布喇格光栅的实验研究．光子学报， 1997，26(z1) ：227-230
28． 秦玉文，陈根祥，赵玉成等，光纤光栅制作及其温度稳定性研究．光电子· 激光，1998，9(3) ：173-176
29． 孙晓娜，冯锡钰，光纤布喇格光栅的制作技术．半导体光电，1999，20(3) ： 165-167
30． Yunqi Liu，Zhuanyun Guo，Yin Zhang et a1． ，Simultaneous pressure and temperature measurement with ploymer-coated fiber Bragg grating．Electron． Lett．，2000，36(6) ：564-566
31． 冯德军，开桂云，葛春风等，光纤光栅环形腔激光器的输出特性研究．光子 学报，1999，28(9) ．832-834
32． H. Geiger, M. G. Xu, N. C. Eaton, et al., Electronic tracking system for multiplexed fiber grating sensors. Electron. Lett., 1995, 31(12) : 1006-1007
33． Y. J. Rao, K. Kalli, G. Brady, et al., Spatially-multiplexed fiber-optic Bragg grating strain and temperature sensor system based on interferometric wavelength-shift dection. Electron. Lett., 1995, 31(12) : 1009-1010
34． R. Kashyap, P. F. McKee, R. J. Campbell et al., Novel method of producing all fiber photoinduced chirped gratings. Electron. Lett., 1994, 30(12) : 996-997
35． C. K. Gary and J. Rubin, Wavelength coded fiber optic sensors for verification
of identity. Proc. SPIE., 1996, Vol. 2839: 34-39
36 D. J. Hill and G. A. Cranch, Gain in hydrostatic pressure sensitivity of coated fiber Bragg grating. Electron. Lett. 1999, 35(15) : 1268-1269
37． M. G. Xu, J. L. Archambault, L. Reekie, et al. Discrimination between strain and temperature effects using dual-wavelength fiber grating sensors. Electron. Lett. 1994,30(13) : 1085-1087