微小距离测量的方法研究和实现
摘要
液晶盒厚即液晶层的厚度。在生产过程中,由于工作人员的操作不当造成液晶盒厚度不均匀,从而无法达到特定的显示模式。所以,精确的测量液晶盒厚度至关重要。当然,不只是因为要计算液晶盒的厚度而需要实际测量PI层和ITO的膜厚。实际上精确测量这些薄膜厚度不仅对工艺控制、材料分析有重要作用,对了解器件与材料等关系也非常重要。
本论文研究了一种新型的LCD厚度/薄膜厚度以及折射率测量技术。不同与多数的激光光源,该方法入射光源为白光。现有的光谱仪主要用于测试反射光谱、反射率等特性曲线。计算过程中,通过对反射光谱的分析研究,最终得出被测液晶盒厚度、薄膜厚度和薄膜折射率。不同与以往的区域均匀度测量,本方法可以做到单点测量,测量过程简单,测量时间短暂。
在薄膜折射率未知的情况下,测量薄膜厚度和折射率要求光线能够斜入射到薄膜表面。而现有的光纤光谱仪只能实现光线垂直入射。本论文完成了光谱仪硬件电路的制作,为以后薄膜厚度测量和折射率测量奠定了基础。系统重点是基于ARM的线阵CCD数据采集系统的电路设计,也包括支持系统运行所需的软件。首先提出了系统的总体设计方案。整个系统分为三个模块:CCD驱动模块,对微处理器进行编程产生CCD的驱动脉冲及同步控制信号;输出信号经差分预处理后,由高精度模数转换模块进行采样,将CCD输出的模拟信号转换成数字量;最后,将数据送入ARM处理系统中进行后续处理。在系统硬件电路调试通过的基础上,编写了系统运行所需的软件,并进行了软件测试。
The gap of the LCD is the thickness of the LC. In the process of manufacture, improper operation will cause LCD gap asymmetry, and LCD will not achieve the specifically display mode. So it is very important to measure the gap of LCD accurately.Of course, in order to get the thickness of the LCD, the operator must measure the thickness of the IP and ITO film. Actually, the exact thickness measurement of film is very important for the technics control, material analysis and the relationship between implement and material.
A new thickness measurement technology of LCD gap and film was introduced in the paper. Being different from the mostly laser sourse, the method used the white light as the light source. The spectrum equipment was used to measure the reflected spectrum, reflected rato etc. By anglicizing the relationship between wavelength and the reflective light intense; the operator can obtain LCD gap, film thickness and the refractive index of the film. Being different from other methods, it can measure the thickness of the sigle dot quickly and expediently.
When the incident angle is not 0, and the refractive index of the film is unknown, the operator must get the reflective spectrum. However, the current equipment can only measure the reflective spectrum when the incident angle is 0.The hardware of the spectrum equipment was disigned, which laied a solid foundation of the film measurement. The focus of this system was to design the hardware of linear-CCD data sampling system based on ARM processor, and the related software to support the system. The system was composed of three modules. In order to produce CCD driving pulses, the CCD driver module was used to program the ARM. After preprocessing, the output signals were transmitted into ADC module, in which they were converted into digital signals. And then they were processed in ARM processing module. Finally, the debug process and the compiled system were demonstrated.
本论文研究了一种新型的LCD厚度/薄膜厚度以及折射率测量技术。不同与多数的激光光源,该方法入射光源为白光。现有的光谱仪主要用于测试反射光谱、反射率等特性曲线。计算过程中,通过对反射光谱的分析研究,最终得出被测液晶盒厚度、薄膜厚度和薄膜折射率。不同与以往的区域均匀度测量,本方法可以做到单点测量,测量过程简单,测量时间短暂。
在薄膜折射率未知的情况下,测量薄膜厚度和折射率要求光线能够斜入射到薄膜表面。而现有的光纤光谱仪只能实现光线垂直入射。本论文完成了光谱仪硬件电路的制作,为以后薄膜厚度测量和折射率测量奠定了基础。系统重点是基于ARM的线阵CCD数据采集系统的电路设计,也包括支持系统运行所需的软件。首先提出了系统的总体设计方案。整个系统分为三个模块:CCD驱动模块,对微处理器进行编程产生CCD的驱动脉冲及同步控制信号;输出信号经差分预处理后,由高精度模数转换模块进行采样,将CCD输出的模拟信号转换成数字量;最后,将数据送入ARM处理系统中进行后续处理。在系统硬件电路调试通过的基础上,编写了系统运行所需的软件,并进行了软件测试。
The gap of the LCD is the thickness of the LC. In the process of manufacture, improper operation will cause LCD gap asymmetry, and LCD will not achieve the specifically display mode. So it is very important to measure the gap of LCD accurately.Of course, in order to get the thickness of the LCD, the operator must measure the thickness of the IP and ITO film. Actually, the exact thickness measurement of film is very important for the technics control, material analysis and the relationship between implement and material.
A new thickness measurement technology of LCD gap and film was introduced in the paper. Being different from the mostly laser sourse, the method used the white light as the light source. The spectrum equipment was used to measure the reflected spectrum, reflected rato etc. By anglicizing the relationship between wavelength and the reflective light intense; the operator can obtain LCD gap, film thickness and the refractive index of the film. Being different from other methods, it can measure the thickness of the sigle dot quickly and expediently.
When the incident angle is not 0, and the refractive index of the film is unknown, the operator must get the reflective spectrum. However, the current equipment can only measure the reflective spectrum when the incident angle is 0.The hardware of the spectrum equipment was disigned, which laied a solid foundation of the film measurement. The focus of this system was to design the hardware of linear-CCD data sampling system based on ARM processor, and the related software to support the system. The system was composed of three modules. In order to produce CCD driving pulses, the CCD driver module was used to program the ARM. After preprocessing, the output signals were transmitted into ADC module, in which they were converted into digital signals. And then they were processed in ARM processing module. Finally, the debug process and the compiled system were demonstrated.
引文
[1]黄子强.液晶显示原理.国防工业出版社,2006,5
[2]王新久.液晶光学与液晶显示.科学出版社,2006.2,1-471
[3]马新力.A-HTN型LCD显示特性的研究:[电子科技大学硕士学位论文].成都:电子科技大学光电信息学院,2005.3,1
[4]尹树百.薄膜光学.科学出版社,1987,55
[5]丁建东,方晗峰,杨玉良.TN型液晶器件的显示反差对厚度或波长的依赖性.复旦学报,1997.2 36(1):103-106
[6]潘良玉,马少龙,张浩苗等.盒厚不均对STN-LCD显示“黑斑”形成的影响.河北工业大学学报,2005.4 34(2):78-81
[7]赵静安.铁电及反铁电液晶显示.现代显示,1995.4:4-13
[8]杨玉成.液晶盒反射谱用于盒厚测量的研究:[电子科技大学硕士学位论文].成都:电子科技大学光电信息学院,2006.6,8
[9] Xinyu Zhu,Wing-Kit Choi,Shin-Tson Wu. A Simple Method for Measuring the Cell Gap REFLECTIVE Twisted Nomadic LCD.IEEE TRANSATIONS ON ELECTRON DEVICES,2002.11:1863-1867
[10]沈奕,姚若河,吴永俊.基于光干涉原理的液晶空盒盒厚测量.仪器技术与传感器,2000:24-27
[11]沈奕,姚若河.液晶显示器若干关键制造技术的研究:[汕头大学硕士论文].汕头:汕头大学2002.5,51-56
[12]史若华,黄锡珉,郭建新.液晶材料参数及盒厚测试方法的研究.液晶通讯,1995.3:185-217
[13]林强,朱鹤年.两种液晶盒厚测量光电扫描方案的比较.大连理工大学学报,1997.8 37(2):281-284
[14] Gonz dez-cano A, Bernab eu.Automatic interference method for measuring transparent film thickness.Appl.Opt , 1993 ,32(13) : 2292 -2294
[15] Jungcs, Rheebk. Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance. Appl.Opt ,2002,41 (19) : 3861-3865
[16] Tami Kihara, Kiyoshi Yokomori. Simultaneous measurement ofthe refractive index and thickness of thin films by S2polarized.Appl. Opt ,1992 ,31 (22) :4482 -4487
[17] Hugo aguas. Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO2 thin films. Material Science in Semiconductor Processing[C], 2001 ,4 :319-321
[18] Laaziz Y. Optical characterization of low optical thickness thin films from transmittance and back reflectance measurements.ThinSolid Films, 2000, 372:149-155
[19] Rusli, Amaratunga GAJ. Determination of the optical constants and thickness of thin films on slightly absorbing substrates.Appl. Opt , 1995 ,34 (34) :7914-7917
[20] Holtslag AHM, Scholte pmlo. Optical measurement of the refractive index, layer hickness, and volume changes of thin films]. Appl. Opt ,1989,28 (23) :5095-5104
[21]孙艳.一种新的膜厚测试技术.计量技术,2002.3:6-9
[22]赵俊梅,林祥德.非接触方法测量薄膜厚度的研究.机械管理开发,2004.4:33-35
[23]宋敏,李波欣,郑亚茹.利用光学方法测量薄膜厚度的研究.光学技术,2004.1:10-106
[24]刘永智,杨开愚等.液晶显示技术.成都:电子科技大学出版社,2000,17-48
[25]康桂珍.Cell Measurement by Optimally Fitting of Reflective Spectrum.液晶与显示,2007.8,22(4):81-85
[26]陈燕平,余飞鸿.薄膜厚度与光学常数的主要测试方法.光学仪器,2006.12:84-88
[27]石顺祥,张海兴,刘劲松.物理光学与应用光学.西安:西安电子科技大学出版社,2000.8,72-75
[28]陆卫,王少伟,陈效双等.测量光学薄膜等效折射率及物理厚度的设备与方法.中国专利,1405550A,2003-3-26
[29]王庆有.图像传感器应用技术.北京:电子工业出版社,2003.9,78-88
[30]王飞.USB在CCD数据采集系统中的应用:[电子科技大学硕士学位论文].成都:电子科技大学光电信息学院,2006.5,3-5
[31] Datasheet of TCD1500C.TOSHIBA Corporation.1997
[32]张智辉,田地等.线阵CCD驱动电路设计的几种方法.仪表技术与传感器,2004.6:32-34
[33]张永林,熊爱民.衍射法测量细丝直径的CCD系统.暨南大学学报,1995,16(3):56
[34]伞宏力.一种用单片机驱动线阵CCD的方法.沈阳工业大学学报,2005,2:84-86
[35]杨敏虹.一种用AVR单片机驱动的线阵CCD数据采集系统.电子技术,2001(11):31-32
[36]蒋怀伟,尹志强,关胜晓.一种基于单片机的新型线阵CCD电路.电子世界,2003.5:65-67
[37]张永林,罗志军.CCD微型线度测量仪的研制.光学技术,1994,(6):40
[38]张林,胡学友等.基于CPLD的线阵CCD驱动时序发生器的设计.电测与仪表,2006.8:23-27
[39]王铁城,齐龙.基于MAX+plusII编写CCD的驱动电路.实验室科学,2006.4:48-50
[40]张雅绮,李锵等.Verilog HDL高级数字设计.北京:电子工业出版社,2006.1,136-140
[41]周立功,张华等.深入浅出ARM7-LPC2131x/214x.北京:北京航空航天大学出版社,2005.6,275-314
[42] Datasheet of LT1945.LINEAR Corporation.2001
[43] Datasheet of SN74LVC164245.TEXAS INSTRUMENTS.1999
[44] Datasheet of LF155. National Semiconductor Corporation 2001
[45] Datasheet of MAX153.MAXIM Corporation.1995
[46]赵凯生,刘爽,龙再川等.基于ARM的线阵CCD测量系统应用分析.光电子技术应用,2006.2 21(1):31-34
[47]黄战华,叶伟强,蔡怀宇等.基于ARM的线阵CCD测距系统设计.科学技术与工程,2007.10 7(22):5255-5259
[48]孙宁.应用CCD技术的相对位置非接触测量系统研究:[中国科学院研究生院硕士学位论文].长春:中国科学院长春光学精密机械与物理研究所,2003.3,25
[49]王增林.基于ARM7TDMI-S的便携式光谱仪的研究:[吉林大学硕士学位论文].吉林:吉林大学,2006.6,14-18
[50]朱宝旭.基于CCD的尺寸参量通用检测系统:[哈尔滨工业大学硕士学位论文].哈尔滨:哈尔滨工业大学,2006.6,20-40
[2]王新久.液晶光学与液晶显示.科学出版社,2006.2,1-471
[3]马新力.A-HTN型LCD显示特性的研究:[电子科技大学硕士学位论文].成都:电子科技大学光电信息学院,2005.3,1
[4]尹树百.薄膜光学.科学出版社,1987,55
[5]丁建东,方晗峰,杨玉良.TN型液晶器件的显示反差对厚度或波长的依赖性.复旦学报,1997.2 36(1):103-106
[6]潘良玉,马少龙,张浩苗等.盒厚不均对STN-LCD显示“黑斑”形成的影响.河北工业大学学报,2005.4 34(2):78-81
[7]赵静安.铁电及反铁电液晶显示.现代显示,1995.4:4-13
[8]杨玉成.液晶盒反射谱用于盒厚测量的研究:[电子科技大学硕士学位论文].成都:电子科技大学光电信息学院,2006.6,8
[9] Xinyu Zhu,Wing-Kit Choi,Shin-Tson Wu. A Simple Method for Measuring the Cell Gap REFLECTIVE Twisted Nomadic LCD.IEEE TRANSATIONS ON ELECTRON DEVICES,2002.11:1863-1867
[10]沈奕,姚若河,吴永俊.基于光干涉原理的液晶空盒盒厚测量.仪器技术与传感器,2000:24-27
[11]沈奕,姚若河.液晶显示器若干关键制造技术的研究:[汕头大学硕士论文].汕头:汕头大学2002.5,51-56
[12]史若华,黄锡珉,郭建新.液晶材料参数及盒厚测试方法的研究.液晶通讯,1995.3:185-217
[13]林强,朱鹤年.两种液晶盒厚测量光电扫描方案的比较.大连理工大学学报,1997.8 37(2):281-284
[14] Gonz dez-cano A, Bernab eu.Automatic interference method for measuring transparent film thickness.Appl.Opt , 1993 ,32(13) : 2292 -2294
[15] Jungcs, Rheebk. Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance. Appl.Opt ,2002,41 (19) : 3861-3865
[16] Tami Kihara, Kiyoshi Yokomori. Simultaneous measurement ofthe refractive index and thickness of thin films by S2polarized.Appl. Opt ,1992 ,31 (22) :4482 -4487
[17] Hugo aguas. Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO2 thin films. Material Science in Semiconductor Processing[C], 2001 ,4 :319-321
[18] Laaziz Y. Optical characterization of low optical thickness thin films from transmittance and back reflectance measurements.ThinSolid Films, 2000, 372:149-155
[19] Rusli, Amaratunga GAJ. Determination of the optical constants and thickness of thin films on slightly absorbing substrates.Appl. Opt , 1995 ,34 (34) :7914-7917
[20] Holtslag AHM, Scholte pmlo. Optical measurement of the refractive index, layer hickness, and volume changes of thin films]. Appl. Opt ,1989,28 (23) :5095-5104
[21]孙艳.一种新的膜厚测试技术.计量技术,2002.3:6-9
[22]赵俊梅,林祥德.非接触方法测量薄膜厚度的研究.机械管理开发,2004.4:33-35
[23]宋敏,李波欣,郑亚茹.利用光学方法测量薄膜厚度的研究.光学技术,2004.1:10-106
[24]刘永智,杨开愚等.液晶显示技术.成都:电子科技大学出版社,2000,17-48
[25]康桂珍.Cell Measurement by Optimally Fitting of Reflective Spectrum.液晶与显示,2007.8,22(4):81-85
[26]陈燕平,余飞鸿.薄膜厚度与光学常数的主要测试方法.光学仪器,2006.12:84-88
[27]石顺祥,张海兴,刘劲松.物理光学与应用光学.西安:西安电子科技大学出版社,2000.8,72-75
[28]陆卫,王少伟,陈效双等.测量光学薄膜等效折射率及物理厚度的设备与方法.中国专利,1405550A,2003-3-26
[29]王庆有.图像传感器应用技术.北京:电子工业出版社,2003.9,78-88
[30]王飞.USB在CCD数据采集系统中的应用:[电子科技大学硕士学位论文].成都:电子科技大学光电信息学院,2006.5,3-5
[31] Datasheet of TCD1500C.TOSHIBA Corporation.1997
[32]张智辉,田地等.线阵CCD驱动电路设计的几种方法.仪表技术与传感器,2004.6:32-34
[33]张永林,熊爱民.衍射法测量细丝直径的CCD系统.暨南大学学报,1995,16(3):56
[34]伞宏力.一种用单片机驱动线阵CCD的方法.沈阳工业大学学报,2005,2:84-86
[35]杨敏虹.一种用AVR单片机驱动的线阵CCD数据采集系统.电子技术,2001(11):31-32
[36]蒋怀伟,尹志强,关胜晓.一种基于单片机的新型线阵CCD电路.电子世界,2003.5:65-67
[37]张永林,罗志军.CCD微型线度测量仪的研制.光学技术,1994,(6):40
[38]张林,胡学友等.基于CPLD的线阵CCD驱动时序发生器的设计.电测与仪表,2006.8:23-27
[39]王铁城,齐龙.基于MAX+plusII编写CCD的驱动电路.实验室科学,2006.4:48-50
[40]张雅绮,李锵等.Verilog HDL高级数字设计.北京:电子工业出版社,2006.1,136-140
[41]周立功,张华等.深入浅出ARM7-LPC2131x/214x.北京:北京航空航天大学出版社,2005.6,275-314
[42] Datasheet of LT1945.LINEAR Corporation.2001
[43] Datasheet of SN74LVC164245.TEXAS INSTRUMENTS.1999
[44] Datasheet of LF155. National Semiconductor Corporation 2001
[45] Datasheet of MAX153.MAXIM Corporation.1995
[46]赵凯生,刘爽,龙再川等.基于ARM的线阵CCD测量系统应用分析.光电子技术应用,2006.2 21(1):31-34
[47]黄战华,叶伟强,蔡怀宇等.基于ARM的线阵CCD测距系统设计.科学技术与工程,2007.10 7(22):5255-5259
[48]孙宁.应用CCD技术的相对位置非接触测量系统研究:[中国科学院研究生院硕士学位论文].长春:中国科学院长春光学精密机械与物理研究所,2003.3,25
[49]王增林.基于ARM7TDMI-S的便携式光谱仪的研究:[吉林大学硕士学位论文].吉林:吉林大学,2006.6,14-18
[50]朱宝旭.基于CCD的尺寸参量通用检测系统:[哈尔滨工业大学硕士学位论文].哈尔滨:哈尔滨工业大学,2006.6,20-40