压电式六维力传感器结构仿真及信号处理电路设计
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摘要
在机器人传感器中,力传感器是最基本的一种,能够检测三维力和三维力矩的六维力传感器是机器人最不可或缺的重要传感器。虽然,对多维力传感器的研究已有40多年的历史,科研工作者在这方面也已经做了大量的科研工作,但就目前的各种方法主要还是通过设计不同的弹性体和改变电阻应变片的贴片位置等来设计多维力传感器,由于贴片工艺和弹性体加工精度等因素的影响,制造出来的传感器几乎都存在结构复杂、加工制造困难、体积大、动态响应特性差等缺点。
为了解决目前六维力传感器的不足之处,本文研究了一种结构简单的直接输出型压电六维力传感器,该传感器具有体积小,质量轻,工作可靠,固有频率高,灵敏度和信噪比高,滞后小,且无需对输出信号进行解耦运算等优点。对该传感器的研究具有十分重要的研究意义和广阔的应用前景。
本文首先介绍了压电传感器的工作原理,接着分析了各种压电材料的压电特性,选择石英作为传感器的转换元件材料;根据传感器的受力范围,设计了石英晶片的尺寸;根据传感器测量六维力(力矩)的需要,提出了传感器敏感元件的布局方案。整个六维力传感器通过两个四维力传感器组合构成,该结构具有很好的对称性,可以避免施加纯力的过程中附加力矩的干扰。
论文运用三维有限元理论和ANSYS软件,针对设计的压电式六维力传感器,在ANSYS中建立了该传感器的模型。并运用ANSYS软件对六维力传感器进行了静力分析、电磁分析和模态分析。仿真结果表明,该传感器的结构设计合理,具有较好的线性度,高灵敏度,维间干扰较小,固有频率较高等特点。
最后论文分析了压电传感器对测量电路的要求,选用电荷放大器作为压电传感器的处理电路,在分析电荷放大器的各功能模块的基础上,研制了电荷放大器电路。
Force sensor is the most basic sensor in robot, and six axis force sensor that can measure three axis force and three axis moment is indispensable sensor in robot. Researchers have studied multi-axis force sensor for more than forty years and have gained many achievements. But at present and before, multi-axis sensors are designed by applying different elastomers and changing the position where resistance stain gauges stick on. Because of the influence of patch technics and elastomer processing precision, produced sensors almost have the shortcomings of complex structure, difficult manufacture, and large volume. Dynamic responses of these sensors are poor.
To overcome these shortcomings, this paper studies piezoelectric sensor with direct output. The sensor has small volume, light mass, high reliability, high natural frequency, high sensitivity and signal-to-noise, little delay. It doesn’t need decoupling operation. It has great research significance and wide foreground to study this sensor.
At first, principle of piezoelectric sensor is introduced in the paper. After compared many kinds of piezoelectric material, quartz is selected as the sensitive element material of sensor. The size of quartz wafer is decided by the measurement range of force. Arrangement of quartz wafer is designed to meet the requirement for measuring six axis force. The whole six axis force sensor is made up of two pieces of four axis force sensors. The structure is symmetric, which can avoid the interference of torque.
In this paper, based on three-dimensional finite element theory, the model of the six axis piezoelectric sensor is built in ANSYS. Static analysis, electromagnetic analysis, and modal analysis of the sensor are done through the ANSYS software. The result of simulation shows that the sensor has good linearity, high sensitivity, little interference among each dimension, high natural frequency.
At last, the requirement of charge amplifier is analyzed in the paper, and PCB of charge amplifier has been produced after studying circuit module.
为了解决目前六维力传感器的不足之处,本文研究了一种结构简单的直接输出型压电六维力传感器,该传感器具有体积小,质量轻,工作可靠,固有频率高,灵敏度和信噪比高,滞后小,且无需对输出信号进行解耦运算等优点。对该传感器的研究具有十分重要的研究意义和广阔的应用前景。
本文首先介绍了压电传感器的工作原理,接着分析了各种压电材料的压电特性,选择石英作为传感器的转换元件材料;根据传感器的受力范围,设计了石英晶片的尺寸;根据传感器测量六维力(力矩)的需要,提出了传感器敏感元件的布局方案。整个六维力传感器通过两个四维力传感器组合构成,该结构具有很好的对称性,可以避免施加纯力的过程中附加力矩的干扰。
论文运用三维有限元理论和ANSYS软件,针对设计的压电式六维力传感器,在ANSYS中建立了该传感器的模型。并运用ANSYS软件对六维力传感器进行了静力分析、电磁分析和模态分析。仿真结果表明,该传感器的结构设计合理,具有较好的线性度,高灵敏度,维间干扰较小,固有频率较高等特点。
最后论文分析了压电传感器对测量电路的要求,选用电荷放大器作为压电传感器的处理电路,在分析电荷放大器的各功能模块的基础上,研制了电荷放大器电路。
Force sensor is the most basic sensor in robot, and six axis force sensor that can measure three axis force and three axis moment is indispensable sensor in robot. Researchers have studied multi-axis force sensor for more than forty years and have gained many achievements. But at present and before, multi-axis sensors are designed by applying different elastomers and changing the position where resistance stain gauges stick on. Because of the influence of patch technics and elastomer processing precision, produced sensors almost have the shortcomings of complex structure, difficult manufacture, and large volume. Dynamic responses of these sensors are poor.
To overcome these shortcomings, this paper studies piezoelectric sensor with direct output. The sensor has small volume, light mass, high reliability, high natural frequency, high sensitivity and signal-to-noise, little delay. It doesn’t need decoupling operation. It has great research significance and wide foreground to study this sensor.
At first, principle of piezoelectric sensor is introduced in the paper. After compared many kinds of piezoelectric material, quartz is selected as the sensitive element material of sensor. The size of quartz wafer is decided by the measurement range of force. Arrangement of quartz wafer is designed to meet the requirement for measuring six axis force. The whole six axis force sensor is made up of two pieces of four axis force sensors. The structure is symmetric, which can avoid the interference of torque.
In this paper, based on three-dimensional finite element theory, the model of the six axis piezoelectric sensor is built in ANSYS. Static analysis, electromagnetic analysis, and modal analysis of the sensor are done through the ANSYS software. The result of simulation shows that the sensor has good linearity, high sensitivity, little interference among each dimension, high natural frequency.
At last, the requirement of charge amplifier is analyzed in the paper, and PCB of charge amplifier has been produced after studying circuit module.
引文
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[2]刘正士.机器人多维碗力传感器静、动态特性若干基本问题的研究[D].合肥工业大学,1996.
[3]姚智慧,张付祥.机器人六维力传感器研究概况及发展预测[J].广东自动化与信息工程,2002,(3):7-9,13..
[4] George. Arthur Folchi.“Six degree of freedom force transducer for a manipulator”US4094192
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[6]王巍,崔维娜.一种新结构的智能化六维腕力传感器[J].微计算机信息.2003,19(1):38-40.
[7] Koichi Nishiwaki Yoshifumi Murakami et. A six-axis force sensor with parallel support mechanism to measure the ground reaction force of humanoid robot. IEEE international conference on Robotics & Automation Washington. DC. May 2002: 2277-2282.
[8]王国泰,易秀芳.六维力传感器发展中的几个问题[J].机器人,1997,19(6):474-478.
[9]姚智慧,张付祥,陈华.新型力解耦机器人六维力传感器研究[J].哈尔滨工业大学报,2004,(2):160-162,166.
[10]黄心汉,胡建元,王健.一种非径向三梁结构六维腕力传感器弹性体及其优化设计[J].机器人,1992,14(5):1-7.
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[13] Sheng A Liu, Hung L Tzo .A novel six-component force sensor of good measurement isotropy and sensitivities[J]. Sensors and Actuators .A 100 (2002) 223–230
[14] Gab-Soon Kim .Design of a six-axis wrist force/moment sensor using FEM and its fabrication for an intelligent robot[J]. Sensors and Actuators A 133 (2007) 27–34
[15] WL Jin ,CD Mote Jr. A six-component silicon micro force sensor[J]. Sensors and Actuators. A 65 (1998) 109-115
[16] Kaneko M. A new design of six-axis force sensors. IEEE. International Conference on ,2-6 May 1993 PP 961-967 vol.1
[17] Hirose S and Yoneda K.Development of optical 6-axial force sensor and its signal calibration considering non linear calibration 1990 Proc. Int. Conf. on Robotics and Automation, pp 46–53.
[18] Kaneko M, Nishihara T. Twin-head type six-axis force sensors.Intelligent Robots and Systems'93, IROS '93. Proceedings of the 1993 IEEE/RSJ International Conference on , Volume: 2 , 26-30 July 1993 Pages:991-996 vol.2
[19] Dzung Viet Dao et. Development of six degree of freedom micro force sensor for application in geophysics.IEEE.2002:973-977.
[20]刘京诚,刘俊,李敏.基于压电式新型三维力传感器的设计[J].压电与声光,2005,27(6):643-645.
[21]黄惟一,王玉生.机器人腕力传感器的发展[J].机器人技术,1987,(1):30-35.
[22]张福学.智能机器人传感技术[M].北京:电子工业出版社,1996.
[23]杨兆建,王勤贤.测力传感器研究发展综述[J].山西机械,2003,(1):1-3,8.
[24]孙宝元,钱敏,张军.压电式传感器与测力仪研发回顾与展望[J].大连理工大学报,2001,41(2):127-134
[25]郭海文,孙改平.影响压电式传感器工作性能的主要因素[J].传感器技术,1999,18(3):18-32.
[26]李传兵,廖昌荣,陈伟民,等.压电智能结构的研究进展[J].压电与声光,2002, 24(2):42-46,60.
[27]张福学.现代压电学[M].北京:科学技术出版社,2001.
[28]何云峰,孔德仁,王昌明.传感与测试技术[M].北京:北京航空航天出版社,2004.
[29]陈艾.敏感材料与传感器[M].北京:化学工业出版社,2004.
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[31]甘国友,严继康.压电复合材料的现状与展望[J].功能材料,2000,31(5):456-459,463.
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[33]洪水棕.现代测试技术[M].上海:上海交通大学出版社,2002.
[34]强锡富.传感器[M].北京:机械工业出版社,1993.
[35]张福学.现代压电学(中册)[M].北京:科学出版社,2002.
[36] KISTLER COR.Multicomponent Cutting Force Measurement.ppt. www.kistle.com
[37]高长银.压电石英晶片扭转效应研究及新型扭矩传感器的研制[D].大连理工大学,2004.
[38]刘俊.基于差动式压电多维力((6维)传感器的研究[D].重庆大学硕士论文,2005.
[39]郁有文,常健.传感器原理及工程应用[M].西安:西安电子科技大学出版社,2000.
[40]王国强.实用工程数值模拟技术及其在ANSYS上的实践[M].西安:西北工业大学出版社, 2001.
[41]蓝宇,张连杰.大型有限元分析软件ANSYS[J].应用科技, 2000, 27(6): 11-15.
[42]王友海,颜慧军,胡长胜.大型有限元分析软件ANSYS的特点[J].建筑机械,2000,9:29-31.
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