一种基于体硅微机械工艺的微机械光开关的研究
|
摘要
互联网的发展使得人们对现有的通信体系提出了更高的要求，其中一个目标就是建立全光通信的网络平台以提高数据传输的透明性。光开关是全光网络的基石，目前世界上各大公司和高校的研究小组都纷纷参与到光开关的研究当中。在光开关众多种类种，微机械光开关以其消光比大的特点备受世人瞩目。
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。并初步完成了光纤的耦合封装工作。
本论文使用传统的KOH腐蚀液，利用硅材料的各向异性的特点，加工出了垂直于衬底表面的微镜结构，利用这种微镜结构可以完成光线的切换，实现光路的开关功能。
本论文在阐述了常用的微机械加工工艺的基础上，重点介绍了这种微机械光开关的制作过程。同时对工艺中出现的问题就其原因进行了分析，给出了改进的办法。
本光开关使用静电作为微镜驱动的方式，所以本论文在对微机械中悬臂梁加质量块结构进行力学推导后，分析了在静电驱动下悬臂梁和质量块的运动规律，找出了一组光开关执行结构的参数，并用ANSYS软件对其进行了分析。
在完成光开关论文的过程中，还对光纤与光波导端面耦合封装进行了研究，分析了二者耦合损耗产生的原因并提出了一种耦合方案。在此基础上，对光开关的耦合封装进行了试验。对由于工艺的离散性造成微镜厚度对光纤封装耦合产生的损耗进行了分析。并提出了使用光束准直器改善光路传输效率的问题。
The Internet, especially the World Wide Web, is dramatic examples of new modes of communication that have placed heavy demands on the current infrastructure. The current fiber communication networks will be developed to All Optical Networks in the future. And the optical-switches are the basis of the future infrastructure. The development of optical-switches has fueled an increasing interest in many research and development groups of companies and universities. Between all kinds of optical-switches, MEMS optical-switches draw attention of all over the world because they have large contrast ratio.
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch. And attempt to package the optical-switch with fibers.
This dissertation brings forward a method to fabricate the vertical micro-mirror. We analyze the anisotropic wet etching of silicon, especially the relation between the etching speed and crystal orientation. So the mirror and mechanical part can be fabricated in a one-level mask step by bulk micromachning of (100) with KOH etching. We can on off the light path and switch the light exchange by controlling the movement
of mirror.
This dissertation introduces the technique of bulk micromachining, and explains the fabrication process of this optical-switch on emphases. And this dissertation analyzes some phenomena taking place in the process of switch, bring forwards the resolvents as possible as I can.
This MEMS optical-switch is driven by electrostatic. So after analyzing the force of cantilever beam with a concentrated end loading, this dissertation analyzes the movement of cantilever beam driven by electrostatic force. Then get the size of beam and capacitor plate and analyze their modes using ANSYS software.
Based on analyzing the loss because of scattering of thickness of vertical micro-muTor, this dissertation brings forwards the package method of using ball-lens and V grooves to align fibers.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。并初步完成了光纤的耦合封装工作。
本论文使用传统的KOH腐蚀液，利用硅材料的各向异性的特点，加工出了垂直于衬底表面的微镜结构，利用这种微镜结构可以完成光线的切换，实现光路的开关功能。
本论文在阐述了常用的微机械加工工艺的基础上，重点介绍了这种微机械光开关的制作过程。同时对工艺中出现的问题就其原因进行了分析，给出了改进的办法。
本光开关使用静电作为微镜驱动的方式，所以本论文在对微机械中悬臂梁加质量块结构进行力学推导后，分析了在静电驱动下悬臂梁和质量块的运动规律，找出了一组光开关执行结构的参数，并用ANSYS软件对其进行了分析。
在完成光开关论文的过程中，还对光纤与光波导端面耦合封装进行了研究，分析了二者耦合损耗产生的原因并提出了一种耦合方案。在此基础上，对光开关的耦合封装进行了试验。对由于工艺的离散性造成微镜厚度对光纤封装耦合产生的损耗进行了分析。并提出了使用光束准直器改善光路传输效率的问题。
The Internet, especially the World Wide Web, is dramatic examples of new modes of communication that have placed heavy demands on the current infrastructure. The current fiber communication networks will be developed to All Optical Networks in the future. And the optical-switches are the basis of the future infrastructure. The development of optical-switches has fueled an increasing interest in many research and development groups of companies and universities. Between all kinds of optical-switches, MEMS optical-switches draw attention of all over the world because they have large contrast ratio.
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch. And attempt to package the optical-switch with fibers.
This dissertation brings forward a method to fabricate the vertical micro-mirror. We analyze the anisotropic wet etching of silicon, especially the relation between the etching speed and crystal orientation. So the mirror and mechanical part can be fabricated in a one-level mask step by bulk micromachning of (100) with KOH etching. We can on off the light path and switch the light exchange by controlling the movement
of mirror.
This dissertation introduces the technique of bulk micromachining, and explains the fabrication process of this optical-switch on emphases. And this dissertation analyzes some phenomena taking place in the process of switch, bring forwards the resolvents as possible as I can.
This MEMS optical-switch is driven by electrostatic. So after analyzing the force of cantilever beam with a concentrated end loading, this dissertation analyzes the movement of cantilever beam driven by electrostatic force. Then get the size of beam and capacitor plate and analyze their modes using ANSYS software.
Based on analyzing the loss because of scattering of thickness of vertical micro-muTor, this dissertation brings forwards the package method of using ball-lens and V grooves to align fibers.
引文
[1] Rajiv Ramaswami, Optical Networks: A Practical Persperctive Morgan Kaufmann Publishers, Inc. San Francisco, California
[2] Zhao C Z, Chen A H, Liu E K, et al. Silicon-on-insulator asymmetric optical switch based on total internal reflection [J]. IEEE Photonics Technology Letters, 1997, 19(8):113～115.
[3] Mistuhiro Makihara, Makoto Sato, Fusao Shimokawa, et al. Micromechanical Optical Switches Based on Thermocapillary Integrated in Waveguide Substrate. [J] IEEE Journal of Lightwave Technology 1999 17(1)14～18
[4] U. Siebel, R. Hauffe, K. Peterman. An Improved Polymer Digital Optical Switch with Cross Talk of-46dB [A], OFC2001, California, March, WR4/1-4/3
[5] K. Sakuma, D. Fujita, H. Hosoya, etal. Low Insert-Loss and High Isolation Polymeric Y-Branching Thermo-optic Switch with Partitioned Heater[A], OFC2001, Califomia, March, WR3/1-3/3
[6] Kurt E Petersen. Silicon as a Mechanical Material Proceeding of The IEEE, Vol 70. No.5 1982 pp420-453
[7] 赵旭 《高速量子阱行波调制器的研究》 浙江大学博士学位论文 2001年3月
[8] 李昕欣 《硅多层微机械结构的无掩膜腐蚀技术和硅微机械振动陀螺的研究》 复旦大学博士学位论文 1997年
[2] Zhao C Z, Chen A H, Liu E K, et al. Silicon-on-insulator asymmetric optical switch based on total internal reflection [J]. IEEE Photonics Technology Letters, 1997, 19(8):113～115.
[3] Mistuhiro Makihara, Makoto Sato, Fusao Shimokawa, et al. Micromechanical Optical Switches Based on Thermocapillary Integrated in Waveguide Substrate. [J] IEEE Journal of Lightwave Technology 1999 17(1)14～18
[4] U. Siebel, R. Hauffe, K. Peterman. An Improved Polymer Digital Optical Switch with Cross Talk of-46dB [A], OFC2001, California, March, WR4/1-4/3
[5] K. Sakuma, D. Fujita, H. Hosoya, etal. Low Insert-Loss and High Isolation Polymeric Y-Branching Thermo-optic Switch with Partitioned Heater[A], OFC2001, Califomia, March, WR3/1-3/3
[6] Kurt E Petersen. Silicon as a Mechanical Material Proceeding of The IEEE, Vol 70. No.5 1982 pp420-453
[7] 赵旭 《高速量子阱行波调制器的研究》 浙江大学博士学位论文 2001年3月
[8] 李昕欣 《硅多层微机械结构的无掩膜腐蚀技术和硅微机械振动陀螺的研究》 复旦大学博士学位论文 1997年