光纤定位硅V型槽的设计与制作
摘要
通过光纤把外部光源引入SOI集成光路时，为减少偶然因素对耦合效率的影响，需解决光纤定位问题，以及为提高多通道波导型器件、半导体激光器阵列、光开关阵列等与光纤的耦合效率问题，作者利用单晶硅材料，设计并制作出具有高精度光纤定位功能的硅V型槽及其阵列。
本文围绕硅V型槽的设计和制作，从理论上详细分析了单模光纤与脊形波导的模式特点，得出最佳的耦合条件，在此基础上设计出最合适的硅V型槽结构。在实践上，对制作工艺积极探索，提出新的制备硅掩蔽膜的工艺方案，对影响光刻质量的因素深入分析，试验摸索出适用于V型槽的各向异性湿法腐蚀的腐蚀液配方，独立优化设计了制作硅V型槽的相关工艺，制作出高质量的硅V型槽。并展示了它广阔的应用前景和科研产品的开发价值。
In this paper , an emphasis is put on the design and fabrication of V- groove arrays. The material we use is monocrystalline silicon . Silicon V- groove structure can provide fiber with high precision orientation . So the problems about how to make light into SOI efficiently and coupling between multichannel waveguide devices and fibers can be solved .
The coupled mode theory of single- mode fiber and ridge waveguide has been described and analyzed , and the best coupling condition is obtained . Based on the condition , the author makes a reasonable program . In order to make integration of theory with practice , a lot of experiments have been done . Mask-making technology , photoetching and wet-etching processes have been optimized . The author also presents the application and commercial value of silicon V- groove arrays.
本文围绕硅V型槽的设计和制作，从理论上详细分析了单模光纤与脊形波导的模式特点，得出最佳的耦合条件，在此基础上设计出最合适的硅V型槽结构。在实践上，对制作工艺积极探索，提出新的制备硅掩蔽膜的工艺方案，对影响光刻质量的因素深入分析，试验摸索出适用于V型槽的各向异性湿法腐蚀的腐蚀液配方，独立优化设计了制作硅V型槽的相关工艺，制作出高质量的硅V型槽。并展示了它广阔的应用前景和科研产品的开发价值。
In this paper , an emphasis is put on the design and fabrication of V- groove arrays. The material we use is monocrystalline silicon . Silicon V- groove structure can provide fiber with high precision orientation . So the problems about how to make light into SOI efficiently and coupling between multichannel waveguide devices and fibers can be solved .
The coupled mode theory of single- mode fiber and ridge waveguide has been described and analyzed , and the best coupling condition is obtained . Based on the condition , the author makes a reasonable program . In order to make integration of theory with practice , a lot of experiments have been done . Mask-making technology , photoetching and wet-etching processes have been optimized . The author also presents the application and commercial value of silicon V- groove arrays.
引文
[1] 黄德修 全光信息网络中的某些关键半导体光电子器件．北京：半导体学报．2000，21(3)：213～214
[2] 廖廷彪 光线光学北京：清华大学出版社，2000：1～4，55～56
[3] Wenke G et al. Appl. Opt., 1983, 22(23): 3837～3844
[4] Karstensen K. J. Opt. Comm., 1988, 9(6): 41～46
[5] Hatsueda H et at. J. Lightwave Tech, 1983, LT- 1(1):261～269
[6] Presby H M et al. J. Lightwave Tech., 1989,
[7] Amitay N et al. J. Lightwave Tech., 1987, LT- 5(1): 70～76
[8] Amitay N et at. J. Lightwave Tech., 1987, LT-7(7):1055～1062
[9] Shiraishi K et al. J. Lightwave Tech., 1990, LT-8(8): 1151～1161
[10] Karstensen H et al. J. Lightwave Tech., 1990,LT-8(5); 739～747.
[11] Komatsu K, Yamazaki, Kondo M Low-loss broad-band LiNbO_3 guided-wave phase modulator using titanium/magnesium double diffusion method J. Lightwave Technology, 1987, 5(9):1239～1245
[12] Nda J. Mikami O et al. single-mode optical-waveguide fiber coupler Appl. Optics, 1978, 17(13): 2092～2096
[13] T．塔米尔 主编：梁民基等译 集成光学 北京：科学出版社，1982：268～269
[14] T. G. Broun, et al, Appl. Phys Lett., 1986: 49(5): 245
[15] T. G. Broun, et al, Appl. Phys Lett., 1987: 51(20): 1585
[16] H. Ennen, et al, Appl. Phys Lett., 1985; 46(4): 381
[17] L.T. Canham, et al, Appl. Phys Lett. 1987; 51(19):1509
[18] M. Ghioni, et al., IEEE J. Quantum Electronics, 1992; 28(12):
2678
[19] W. F. Kosonocky, et al., IEEE Trans. Electron. Devices, 1985;32 (8): 1564
[20] 赵策洲 高勇 半导体硅基材料及其光波导 北京：电子工业出版社 1997，80～81
[21] [日]菅野卓雄 生驹俊明 武石喜幸等 著 杨沁清等译 北京：科学出版社 1990，197
[22] M. J. Declercq,et al., J. Solid-State Circuits, Vol SC-10 (4), 1975
[23] 孙彦卿，矿元，半导体技术，1981；(4)
[24] 温殿忠等，力敏传感器设计、研制、应用技术交流会学术论文集，杭州，1987
[25] N. F. Raley, et al., J. E; ectrochem. Soc., Vol. 131 (1), 1984
[26] 李跃进，朱作云，纪强，西安电子科技大学学报，Vol，18，P．112，1991
[27] 韩爱珍，半导体化学，南京：东南大学出版社，P，178 [28] Bulmer CH, sheem S K, Moeller R P. High-efficiency flip-chip coupling between single- mode fibers and LiNbO_3 channel waveguides. Appl. Phys. Lett., 1980, 37(4):351～353
[28] Bulmer C H, Sheem S K, Moeller R P, High—efficiency Flip—chip coupling between single—mode fibers and LiNbO_3 channel waveguides. Appl. LETT., 1980, 37 (4): 351～353
[29] 扬燔，单模光纤与条形波导的耦合封装技术，半导体光电，1989，10(2)：31～44
[30] Murphy E J, Rice T C, Self—alignment technique for fiber attachment to guided wave devices. IEEE J. Quantum Electron. 1986, 22 (6): 928～932
[31] Cohen M S, Cina M F, Bassous E et al, Passive laser—fiber alignment by index method, IEEE Photonics Technology Lett, 1991, 3 (11): 985～987
[32] 赵策洲 半导体导波光学器件理论及技术 北京：国防工业出版社 1998，103～105
[33] H. Yamata, K. Takata, and S. Mitachi, J. Lightwave Technology, 16 (3), 364 (1998)
[34] Y. Inoue, A. maneko, and F. Hanawa, et al., Electron. Lett., 33(23), 1945 (1997)
[35] 周炳琨主编，1989光电子器件与集成技术年会论文集，北京：清华大学出版社，1990．188～189
[2] 廖廷彪 光线光学北京：清华大学出版社，2000：1～4，55～56
[3] Wenke G et al. Appl. Opt., 1983, 22(23): 3837～3844
[4] Karstensen K. J. Opt. Comm., 1988, 9(6): 41～46
[5] Hatsueda H et at. J. Lightwave Tech, 1983, LT- 1(1):261～269
[6] Presby H M et al. J. Lightwave Tech., 1989,
[7] Amitay N et al. J. Lightwave Tech., 1987, LT- 5(1): 70～76
[8] Amitay N et at. J. Lightwave Tech., 1987, LT-7(7):1055～1062
[9] Shiraishi K et al. J. Lightwave Tech., 1990, LT-8(8): 1151～1161
[10] Karstensen H et al. J. Lightwave Tech., 1990,LT-8(5); 739～747.
[11] Komatsu K, Yamazaki, Kondo M Low-loss broad-band LiNbO_3 guided-wave phase modulator using titanium/magnesium double diffusion method J. Lightwave Technology, 1987, 5(9):1239～1245
[12] Nda J. Mikami O et al. single-mode optical-waveguide fiber coupler Appl. Optics, 1978, 17(13): 2092～2096
[13] T．塔米尔 主编：梁民基等译 集成光学 北京：科学出版社，1982：268～269
[14] T. G. Broun, et al, Appl. Phys Lett., 1986: 49(5): 245
[15] T. G. Broun, et al, Appl. Phys Lett., 1987: 51(20): 1585
[16] H. Ennen, et al, Appl. Phys Lett., 1985; 46(4): 381
[17] L.T. Canham, et al, Appl. Phys Lett. 1987; 51(19):1509
[18] M. Ghioni, et al., IEEE J. Quantum Electronics, 1992; 28(12):
2678
[19] W. F. Kosonocky, et al., IEEE Trans. Electron. Devices, 1985;32 (8): 1564
[20] 赵策洲 高勇 半导体硅基材料及其光波导 北京：电子工业出版社 1997，80～81
[21] [日]菅野卓雄 生驹俊明 武石喜幸等 著 杨沁清等译 北京：科学出版社 1990，197
[22] M. J. Declercq,et al., J. Solid-State Circuits, Vol SC-10 (4), 1975
[23] 孙彦卿，矿元，半导体技术，1981；(4)
[24] 温殿忠等，力敏传感器设计、研制、应用技术交流会学术论文集，杭州，1987
[25] N. F. Raley, et al., J. E; ectrochem. Soc., Vol. 131 (1), 1984
[26] 李跃进，朱作云，纪强，西安电子科技大学学报，Vol，18，P．112，1991
[27] 韩爱珍，半导体化学，南京：东南大学出版社，P，178 [28] Bulmer CH, sheem S K, Moeller R P. High-efficiency flip-chip coupling between single- mode fibers and LiNbO_3 channel waveguides. Appl. Phys. Lett., 1980, 37(4):351～353
[28] Bulmer C H, Sheem S K, Moeller R P, High—efficiency Flip—chip coupling between single—mode fibers and LiNbO_3 channel waveguides. Appl. LETT., 1980, 37 (4): 351～353
[29] 扬燔，单模光纤与条形波导的耦合封装技术，半导体光电，1989，10(2)：31～44
[30] Murphy E J, Rice T C, Self—alignment technique for fiber attachment to guided wave devices. IEEE J. Quantum Electron. 1986, 22 (6): 928～932
[31] Cohen M S, Cina M F, Bassous E et al, Passive laser—fiber alignment by index method, IEEE Photonics Technology Lett, 1991, 3 (11): 985～987
[32] 赵策洲 半导体导波光学器件理论及技术 北京：国防工业出版社 1998，103～105
[33] H. Yamata, K. Takata, and S. Mitachi, J. Lightwave Technology, 16 (3), 364 (1998)
[34] Y. Inoue, A. maneko, and F. Hanawa, et al., Electron. Lett., 33(23), 1945 (1997)
[35] 周炳琨主编，1989光电子器件与集成技术年会论文集，北京：清华大学出版社，1990．188～189