窄线宽外腔可调谐激光器的理论与实验研究
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摘要
密集波分复用（Dense wavelength division multiplexing，DWDM）光纤通信系统的大规模应用使得业界对可调谐激光器的需求逐渐增加。外腔可调谐激光器由于光谱线宽窄、调谐范围宽、输出功率高等优点受到了广泛的关注。
本论文对基于微机电系统（Microelectromechanical systems，MEMS）技术的窄线宽外腔可调谐激光器进行了系统的理论和实验研究。着重开展了MEMS型外腔可调谐激光器的结构设计、理论模型建立和实际研制等工作，对设计及研制窄线宽外腔可调谐激光器有一定的参考价值。本论文的主要创新性研究内容包括以下几个方面：
提出了一种以衍射光栅结合普通单轴MEMS转镜为模式选择滤波器的窄线宽外腔可调谐激光器结构。为实现标准ITU-T波长输出，在激光器的谐振腔内加入了自由光谱范围为50GHz的熔石英标准具，在抑制相邻纵模的同时还起到了波长锁定的作用，从而避免了附加波长锁定装置的使用。该外腔可调谐激光器在完全保留了普通外腔激光器的线宽窄、调节范围宽等特点的同时还兼具结构简单、可靠性高的优点。
建立了一种新型的分析外腔激光器特性的理论模型：对于外腔无源光路部分，首先不考虑激光器的谐振特性，用ZEMAX光学设计软件和高斯光束耦合方法建立了外腔部分的光路模型，分析了外腔光路的包括外腔损耗，模式选择滤波器以及标准具带宽等特性；在获得了外腔无源光路的特性基础上，首次用改进的时域行波法（Timedomain travelling wave，TDTW）模拟并优化了整体器件的输出特性，着重分析了标准具的特性对该激光器的波长精度以及调节特性的影响；同时分析和讨论了该MEMS型可调谐激光器的线宽特性。该理论模型的建立为设计各类外腔可调谐激光器起到了良好的指导作用。
研制了国内首台符合OIF-MSA-ITLA-01.2标准的窄线宽集成可调谐激光器模块（Integrated tunable laser assembly，ITLA），该器件的能够实现光通信C波段100个通道的输出，波长精度在±1GHz以内，在整个调节范围内，其输出功率大于20mW，线宽小于50kHz；研制了低噪声、小型化、高稳定性的激光器驱动电路；探索并研究了外腔型可调谐激光器中微光学器件的高稳定固定及封装的工艺方法，建立了一整套的调试、封装及测试的工艺平台。
搭建了两套相干光通信传输平台来验证该MEMS外腔可调谐激光器模块在实际应用中的性能：首先在112Gb/s偏振复用正交相移键控（Polarization-multiplexedquadrature phase-shift keying，PM-QPSK）平台中，使用该激光器作为本振光源进行了背靠背传输实验。进一步地，在相干光正交频分复用（orthogonal frequency divisionmultiplexing，OFDM）系统中使用该激光器作为发送端的信号光源，在不同的FFT长度下进行了调制码型为正交幅度调制（quadrature amplitude modulation,4-QAM）的背靠背传输实验。实验结果表明，该窄线宽MEMS外腔可调谐激光器模块能够完全满足112Gb/s PM-QPSK系统应用的要求；在OFDM系统中，随着FFT长度的增加，该激光器仍然能够保持优异的性能，使得其有潜力成为更高速相干光通信系统（400Gb/s，1Tb/s）中的理想光源。
Starting with sparing in dense wavelength division multiplexing (DWDM) fiber-opticscommunication systems, tunable lasers is expected to find increased use in systems andnetworks. Among all kinds of tunable lasers, the external cavity tunable laser (ECTL)consisting of gain chip and separated bulky optical filters, due to its narrow linewidth andwide tuning range, has received extensive concerns.
This dissertation systematically analyzed the theory, design and manufacturing ofECTL based on microelectromechanical systems (MEMS) technology. The research resultsof this dissertation can be helpful to the design and manufacturing of commercial ECTL.The main innovations of the dissertation are summarized as follows:
A compact and narrow linewidth tunable laser with an external cavity based on adiffraction grating and a simple single-axis-MEMS mirror is presented. A fused silica etalonwith50GHz free spectral range (FSR) helps the laser’s output wavelength match thestandard ITU-T grid, and it also acts as a filter to suppress the neighboring lasing modes.The combination of the diffraction grating, MEMS mirror and the etalon filter, can selectdifferent ITU-T channels and make this ECTL tune over C-band with50GHz grid. TheMEMS-based ECTL features simpler mechanical structure and lower cost as well as highreliability, while keeping all the merits of conventional external cavity lasers.
A novel and hybrid analysis method is applied to design, analyze and optimize theECTL: for the passive external cavity without considering resonating behavior, ZEMAXand Gaussian beam propagation method are implemented to calculate the impact of thespecifications of collimating lens, etalon charicterstic and MEMS mirror on the passiveexternal cavity characteristics such as TOF bandwidth and cavity loss. Then we useimproved time domain traveling wave (TDTW) method to demonstrate the relationshipbetween wavelength accuracy and etalon specifications as well as the tuning characteristicsof the ECTL. The spectral linewidth of the ECTL is also theoretically discussed. Thishybrid method is also suitable for analyzing all kinds of external cavity lasers.
The fabricating and packaging methods for the MEMS ECTL are discussed, thecompact electrical circuit with low noise is researched and developed successfully, theoptical aligning, packaging and testing platforms for the MEMS ECTL are also constructed. An integrated tunable laser assembly (ITLA) based on the MEMS ECTL is successfullyresearched and developed. This module can fully comply with OIF-MSA-ITLA-01.2. Ahigh output power of more than20mW, a wide wavelength tuning range about40nm inC-band with a narrow linewidth of less than50kHz and a high wavelength accuracy of±1GHz over the entire tuning range can be obtained.
Several experiments in coherent fiber-optic communication systems under differentconditions are also conducted to test the performance of the MEMS ITLA: First, an112Gbit/s PM-QPSK back-to-back system is constructed to verify the ITLA’s performance.This ITLA is then used as transmitter laser source in a coherent optical OFDM (CO-OFDM)system with4–QAM modulation format, and its performance is further evaluated underdifferent FFT sizes. This device shows a slightly-improved performance in112Gbit/sPM-QPSK system compared with commercial narrow linewidth ITLA, and reveals anexcellent performance in CO-OFDM systems especially when the FFT size is larger than256. This MEMS ITLA can fully meet the requirement of commercial PM-QPSK coherentsystem and has the potential in the application of higher rate (400Gbit/s and1Tbit/s)coherent systems with higher-order modulation formats.
本论文对基于微机电系统（Microelectromechanical systems，MEMS）技术的窄线宽外腔可调谐激光器进行了系统的理论和实验研究。着重开展了MEMS型外腔可调谐激光器的结构设计、理论模型建立和实际研制等工作，对设计及研制窄线宽外腔可调谐激光器有一定的参考价值。本论文的主要创新性研究内容包括以下几个方面：
提出了一种以衍射光栅结合普通单轴MEMS转镜为模式选择滤波器的窄线宽外腔可调谐激光器结构。为实现标准ITU-T波长输出，在激光器的谐振腔内加入了自由光谱范围为50GHz的熔石英标准具，在抑制相邻纵模的同时还起到了波长锁定的作用，从而避免了附加波长锁定装置的使用。该外腔可调谐激光器在完全保留了普通外腔激光器的线宽窄、调节范围宽等特点的同时还兼具结构简单、可靠性高的优点。
建立了一种新型的分析外腔激光器特性的理论模型：对于外腔无源光路部分，首先不考虑激光器的谐振特性，用ZEMAX光学设计软件和高斯光束耦合方法建立了外腔部分的光路模型，分析了外腔光路的包括外腔损耗，模式选择滤波器以及标准具带宽等特性；在获得了外腔无源光路的特性基础上，首次用改进的时域行波法（Timedomain travelling wave，TDTW）模拟并优化了整体器件的输出特性，着重分析了标准具的特性对该激光器的波长精度以及调节特性的影响；同时分析和讨论了该MEMS型可调谐激光器的线宽特性。该理论模型的建立为设计各类外腔可调谐激光器起到了良好的指导作用。
研制了国内首台符合OIF-MSA-ITLA-01.2标准的窄线宽集成可调谐激光器模块（Integrated tunable laser assembly，ITLA），该器件的能够实现光通信C波段100个通道的输出，波长精度在±1GHz以内，在整个调节范围内，其输出功率大于20mW，线宽小于50kHz；研制了低噪声、小型化、高稳定性的激光器驱动电路；探索并研究了外腔型可调谐激光器中微光学器件的高稳定固定及封装的工艺方法，建立了一整套的调试、封装及测试的工艺平台。
搭建了两套相干光通信传输平台来验证该MEMS外腔可调谐激光器模块在实际应用中的性能：首先在112Gb/s偏振复用正交相移键控（Polarization-multiplexedquadrature phase-shift keying，PM-QPSK）平台中，使用该激光器作为本振光源进行了背靠背传输实验。进一步地，在相干光正交频分复用（orthogonal frequency divisionmultiplexing，OFDM）系统中使用该激光器作为发送端的信号光源，在不同的FFT长度下进行了调制码型为正交幅度调制（quadrature amplitude modulation,4-QAM）的背靠背传输实验。实验结果表明，该窄线宽MEMS外腔可调谐激光器模块能够完全满足112Gb/s PM-QPSK系统应用的要求；在OFDM系统中，随着FFT长度的增加，该激光器仍然能够保持优异的性能，使得其有潜力成为更高速相干光通信系统（400Gb/s，1Tb/s）中的理想光源。
Starting with sparing in dense wavelength division multiplexing (DWDM) fiber-opticscommunication systems, tunable lasers is expected to find increased use in systems andnetworks. Among all kinds of tunable lasers, the external cavity tunable laser (ECTL)consisting of gain chip and separated bulky optical filters, due to its narrow linewidth andwide tuning range, has received extensive concerns.
This dissertation systematically analyzed the theory, design and manufacturing ofECTL based on microelectromechanical systems (MEMS) technology. The research resultsof this dissertation can be helpful to the design and manufacturing of commercial ECTL.The main innovations of the dissertation are summarized as follows:
A compact and narrow linewidth tunable laser with an external cavity based on adiffraction grating and a simple single-axis-MEMS mirror is presented. A fused silica etalonwith50GHz free spectral range (FSR) helps the laser’s output wavelength match thestandard ITU-T grid, and it also acts as a filter to suppress the neighboring lasing modes.The combination of the diffraction grating, MEMS mirror and the etalon filter, can selectdifferent ITU-T channels and make this ECTL tune over C-band with50GHz grid. TheMEMS-based ECTL features simpler mechanical structure and lower cost as well as highreliability, while keeping all the merits of conventional external cavity lasers.
A novel and hybrid analysis method is applied to design, analyze and optimize theECTL: for the passive external cavity without considering resonating behavior, ZEMAXand Gaussian beam propagation method are implemented to calculate the impact of thespecifications of collimating lens, etalon charicterstic and MEMS mirror on the passiveexternal cavity characteristics such as TOF bandwidth and cavity loss. Then we useimproved time domain traveling wave (TDTW) method to demonstrate the relationshipbetween wavelength accuracy and etalon specifications as well as the tuning characteristicsof the ECTL. The spectral linewidth of the ECTL is also theoretically discussed. Thishybrid method is also suitable for analyzing all kinds of external cavity lasers.
The fabricating and packaging methods for the MEMS ECTL are discussed, thecompact electrical circuit with low noise is researched and developed successfully, theoptical aligning, packaging and testing platforms for the MEMS ECTL are also constructed. An integrated tunable laser assembly (ITLA) based on the MEMS ECTL is successfullyresearched and developed. This module can fully comply with OIF-MSA-ITLA-01.2. Ahigh output power of more than20mW, a wide wavelength tuning range about40nm inC-band with a narrow linewidth of less than50kHz and a high wavelength accuracy of±1GHz over the entire tuning range can be obtained.
Several experiments in coherent fiber-optic communication systems under differentconditions are also conducted to test the performance of the MEMS ITLA: First, an112Gbit/s PM-QPSK back-to-back system is constructed to verify the ITLA’s performance.This ITLA is then used as transmitter laser source in a coherent optical OFDM (CO-OFDM)system with4–QAM modulation format, and its performance is further evaluated underdifferent FFT sizes. This device shows a slightly-improved performance in112Gbit/sPM-QPSK system compared with commercial narrow linewidth ITLA, and reveals anexcellent performance in CO-OFDM systems especially when the FFT size is larger than256. This MEMS ITLA can fully meet the requirement of commercial PM-QPSK coherentsystem and has the potential in the application of higher rate (400Gbit/s and1Tbit/s)coherent systems with higher-order modulation formats.
引文
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