基于半导体化合物微碟光开关研究
摘要
随着当今信息传输量急剧增长,全光通信网络已成为未来通信网络发展的方向。在全光网络中,光交叉连接设备(OXC)与光分叉复用设备(OADM)是重要模块,而光开关及其门阵列作为OADM模块和OXC模块中核心作用的器件,起着光信号传输和光路间交叉互联的作用,因此研制出高性能、低成本的光开关及其光开关阵列对提升光纤通信系统的工作效率具有重要作用。光子学和光逻辑器件的发展使超大规模集成光路产生希望,然而从理论到实践遇到诸如集成性、可测性和功率需求等问题。基于微碟谐振腔的光通信器件的研究和发展,使我们看到解决其中一些问题的希望。微碟谐振腔尺寸小、制作简单、易于集成、性能优良,已经成为集成光学领域的重要器件。由于微碟谐振腔的波长选择特性,它在滤波器和波长交换方面有很重要的应用。
本论文研究了一种基于GaAs化合物半导体微碟光开关器件,利用微碟谐振腔的耳语廊模谐振特性,可实现波长选择光开关功能。设计的微碟谐振腔光开关具有高速、低损耗和高耦合效率,临界耦合处其消光比在20dB以上。
论文首先综述光通信网络和光开关器件研究发展,介绍微谐振腔器件研究背景和应用情况。然后在理论上分析并阐述了微碟谐振腔的耳语廊模谐振机理和光开关的调制效应原理。重点研究了微碟谐振腔光开关的损耗机理和耦合机理模型,用定向耦合原理和传输矩阵方法计算分析来优化微碟谐振腔的性能参数。高Q值理论分析指导微碟谐振腔光开关的结构设计,提出多种耦合结构优化光开关性能参数,例如设计基于MMI耦合、定向耦合器、负耦合结构的微碟谐振腔光开关,并对光开关的传输特性和消光比特性进行分析。
基于绕线形微碟谐振腔结构的光开关,顺时针和逆时针耳语廊模谐振具有不同的传输特性,我们提出了一种基于绕线形微碟谐振腔的可调谐滤波器构想,拓宽了光开关的设计结构和功能。
最后针对p-i-n型结构半导体材料,我们设计了具体工艺制作流程,并进行版图设计和工艺流程的尝试性实验,为下一步继续深入研究做准备。
With the transmission of modern information's capacity increasing, all-optical communication networking has become the way of future communication networking development. The optical add-drop multiplexing (OADM) and optical cross connecting (OXC) modules are important in all-optical communication networking. Serving as kernel devices for OADM and OXC, the optical switch and optical switch array which have excellent performance and low cost is very important for the progress of optical fiber communication system. As a result, the research on optical switch and optical switch array which have excellent performance and low cost is very important for the progress of optical fiber communication system. Photonic or optical logic holds the promise of ultra-fast logic circuits .However, the jump from theory to practice has a high barrier set by critical issues such as integration, scalability and power requirements. Optical microdisk-resonator based schemes have the potential of addressing some of these issues. Because its compactness and excellent performance, microdisk resonator has become an important device unit in integrated optics. Due to its wavelength selectivity, it has attracted intensive attention to be used in filtering or wavelength selecting.
This paper research relates to a novel optical microdisk switch based on GaAs compound semiconductor materials. Using the resonator's whispering gallery modes(WGMS) theory, we can realize the selective wavelength function. The optical switch owns fast speed、low loss and high couple efficiency, the extinction ratio can reach above 20dB at critical couple.
The paper first describes the research development of optical communication networking and optical switch, then introduces resonator's background and application, it analyzes the whispering gallery mode theory of microdisk and the modulation principle of optical switch. The key of study is design and fabrication of microdisk on GaAs.The loss and coupling is described by models. According to microdisk's high Q theory, we put forward many structure to optimize the parameter and the performance of device. Such as MMI couple, direction coupler and negative gap couple and analyse the switch's extinction ratio and transmission characteristic.
The optical switch base on spiral disk resonator has different characteristic between cw and ccw WGMS. We put forward a filter base on spiral disk to enrich our design from structure and function. Finally, we design the microdisk's fabrication process for p-i-n semiconductor material and make the mask. Also we try doing some experiments and prepare for the next study.
本论文研究了一种基于GaAs化合物半导体微碟光开关器件,利用微碟谐振腔的耳语廊模谐振特性,可实现波长选择光开关功能。设计的微碟谐振腔光开关具有高速、低损耗和高耦合效率,临界耦合处其消光比在20dB以上。
论文首先综述光通信网络和光开关器件研究发展,介绍微谐振腔器件研究背景和应用情况。然后在理论上分析并阐述了微碟谐振腔的耳语廊模谐振机理和光开关的调制效应原理。重点研究了微碟谐振腔光开关的损耗机理和耦合机理模型,用定向耦合原理和传输矩阵方法计算分析来优化微碟谐振腔的性能参数。高Q值理论分析指导微碟谐振腔光开关的结构设计,提出多种耦合结构优化光开关性能参数,例如设计基于MMI耦合、定向耦合器、负耦合结构的微碟谐振腔光开关,并对光开关的传输特性和消光比特性进行分析。
基于绕线形微碟谐振腔结构的光开关,顺时针和逆时针耳语廊模谐振具有不同的传输特性,我们提出了一种基于绕线形微碟谐振腔的可调谐滤波器构想,拓宽了光开关的设计结构和功能。
最后针对p-i-n型结构半导体材料,我们设计了具体工艺制作流程,并进行版图设计和工艺流程的尝试性实验,为下一步继续深入研究做准备。
With the transmission of modern information's capacity increasing, all-optical communication networking has become the way of future communication networking development. The optical add-drop multiplexing (OADM) and optical cross connecting (OXC) modules are important in all-optical communication networking. Serving as kernel devices for OADM and OXC, the optical switch and optical switch array which have excellent performance and low cost is very important for the progress of optical fiber communication system. As a result, the research on optical switch and optical switch array which have excellent performance and low cost is very important for the progress of optical fiber communication system. Photonic or optical logic holds the promise of ultra-fast logic circuits .However, the jump from theory to practice has a high barrier set by critical issues such as integration, scalability and power requirements. Optical microdisk-resonator based schemes have the potential of addressing some of these issues. Because its compactness and excellent performance, microdisk resonator has become an important device unit in integrated optics. Due to its wavelength selectivity, it has attracted intensive attention to be used in filtering or wavelength selecting.
This paper research relates to a novel optical microdisk switch based on GaAs compound semiconductor materials. Using the resonator's whispering gallery modes(WGMS) theory, we can realize the selective wavelength function. The optical switch owns fast speed、low loss and high couple efficiency, the extinction ratio can reach above 20dB at critical couple.
The paper first describes the research development of optical communication networking and optical switch, then introduces resonator's background and application, it analyzes the whispering gallery mode theory of microdisk and the modulation principle of optical switch. The key of study is design and fabrication of microdisk on GaAs.The loss and coupling is described by models. According to microdisk's high Q theory, we put forward many structure to optimize the parameter and the performance of device. Such as MMI couple, direction coupler and negative gap couple and analyse the switch's extinction ratio and transmission characteristic.
The optical switch base on spiral disk resonator has different characteristic between cw and ccw WGMS. We put forward a filter base on spiral disk to enrich our design from structure and function. Finally, we design the microdisk's fabrication process for p-i-n semiconductor material and make the mask. Also we try doing some experiments and prepare for the next study.
引文
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