碳基薄膜的摩擦学性能及应用研究
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摘要
本文利用中频磁控溅射和等离子体增强化学气相沉积技术在硅片和不同金属表面上制备了一系列的类金刚石薄膜。研究了工艺参数与薄膜结构和性能之间的相关性,并考察了薄膜在不同测试条件下的摩擦学性能,主要的研究成果如下：
(1)利用中频磁控溅射沉积技术通过改变镍靶电流在单晶硅表面上制备了不同镍含量的掺镍类金刚石薄膜,并考察了镍含量对薄膜的结构和性能的影响。结果表明：镍元素的掺杂,能大幅降低薄膜的残余应力和提高薄膜与基底之间的结合力。当镍含量比较低时,薄膜表现出优异的摩擦学性能,但其机械性能却随着镍含量的增高而降低。
(2)利用等离子体增强化学气相沉积技术在316L不锈钢表面上制备了类金刚石薄膜,并考察了前驱气体流量比和沉积气压对薄膜的结构、机械性能和摩擦学性能的影响。结果表明：前驱气体流量比和沉积气压对所制备薄膜的结构和性能有着显著的影响。当CH4和H2流量比为20：10的时候,所制备的薄膜表现出优异的机械性能和摩擦学性能,薄膜的硬度和摩擦系数分别为25GPa和0.044;当沉积气压为15Pa时,所制备的薄膜表现出优异的机械性能,薄膜的硬度为18.4GPa,当沉积气压为31Pa时,所制备的薄膜表现出优异的摩擦学性能,摩擦系数为0.035。
(3)利用等离子体增强化学气相沉积技术在316L不锈钢表面上制备了类金刚石薄膜,并考察了薄膜在不同测试环境下的摩擦学性能。结果表明：随着载荷的增大,薄膜在空气中的摩擦系数逐渐减小,在水环境中的摩擦系数逐渐增大,在柴油环境中的摩擦系数先增大后减小。而随着滑动速度的增大,薄膜在空气、水和柴油环境中的摩擦系数都逐渐减小,且在空气中的摩擦系数最大,柴油环境中的摩擦系数最小。
(4)利用等离子体增强化学气相沉积技术在钛合金和316L不锈钢表面上制备了类金刚石薄膜,并考察了薄膜在不同润滑条件下的摩擦学性能。结果表明：在316L不锈钢表面上所制备的薄膜表现出优异的机械和摩擦学性能,表明了基底的材质对薄膜的结构和性能有着显著的影响。通过对薄膜在空气、合成机油和水环境中的摩擦学性能研究,表明了流体润滑的化学过程是一个需要被考虑的重要参数,且薄膜与合成机油接触时得到了最低的摩擦系数和磨损量。
Middle-frequency magnetron sputtering and plasma enhanced chemical vapor deposition techniques were used to deposit the diamond-like carbon films on silicon wafer and different metal surface. The effects of various process parameters on the microstructure and properties of the films were investigated systematically. The tribological behaviors of the films under different conditions were studied and possible tribological mechanisms were proposed. The main conclusions of the thesis were drawn as follows:
(1) Ni-doped diamond-like carbon films were deposited on silicon wafer by middle-frequency magnetron sputtering with different Ni content. The effect of Ni content on microstructure and properties of the films were studied systematically. The result showed that with the Ni doped, the stress was decreased and the adhesion was increased. The excellent tribological properties could be obtained at a low Ni content.
(2) Diamond-like carbon films were deposited on316L substrate by plasma enhanced chemical vapor deposition techniques. The influences of the precursor gases and working pressure on the microstructure, mechanical properties and tribological properties of the films were studied systematically. The result showed that the excellent properties could be obtained at a CH4/H2of20:10, the hardness about25GPa and the friction coefficient about0.044. When the working pressure of15Pa, the film hardness was as high as18.4GPa and showed the excellent mechanical properties. The film exhibited the low friction coefficient of0.035and excellent tribological properties at the working pressure of31Pa.
(3) Diamond-like carbon films were deposited on316L substrate by plasma enhanced chemical vapor deposition techniques. The tribological properties of the films were investigated systematically under different conditions. The result showed that with the increase of load, the friction coefficient of the films was decreased in air, increased in water and increased firstly then decreased in diesel. With the increase of sliding speed, the friction coefficient of the films was decreased under different conditions, and the friction coefficient in diesel was lower than in water.
(4) Diamond-like carbon films were deposited on Ti6AlV4and316L substrate by plasma enhanced chemical vapor deposition techniques. The tribological properties of the films were investigated systematically under different lubrication conditions. It's shown that the excellent properties of the film could be obtained prepared on316L substrate. The effect of the substrate on the microstructure and properties was obvious. The research result indicated that the chemical process of fluid lubrication was an important parameter and needed to be considered. The lower friction coefficient and wear were obtained when the film contacted with synthetic oil.
(1)利用中频磁控溅射沉积技术通过改变镍靶电流在单晶硅表面上制备了不同镍含量的掺镍类金刚石薄膜,并考察了镍含量对薄膜的结构和性能的影响。结果表明：镍元素的掺杂,能大幅降低薄膜的残余应力和提高薄膜与基底之间的结合力。当镍含量比较低时,薄膜表现出优异的摩擦学性能,但其机械性能却随着镍含量的增高而降低。
(2)利用等离子体增强化学气相沉积技术在316L不锈钢表面上制备了类金刚石薄膜,并考察了前驱气体流量比和沉积气压对薄膜的结构、机械性能和摩擦学性能的影响。结果表明：前驱气体流量比和沉积气压对所制备薄膜的结构和性能有着显著的影响。当CH4和H2流量比为20：10的时候,所制备的薄膜表现出优异的机械性能和摩擦学性能,薄膜的硬度和摩擦系数分别为25GPa和0.044;当沉积气压为15Pa时,所制备的薄膜表现出优异的机械性能,薄膜的硬度为18.4GPa,当沉积气压为31Pa时,所制备的薄膜表现出优异的摩擦学性能,摩擦系数为0.035。
(3)利用等离子体增强化学气相沉积技术在316L不锈钢表面上制备了类金刚石薄膜,并考察了薄膜在不同测试环境下的摩擦学性能。结果表明：随着载荷的增大,薄膜在空气中的摩擦系数逐渐减小,在水环境中的摩擦系数逐渐增大,在柴油环境中的摩擦系数先增大后减小。而随着滑动速度的增大,薄膜在空气、水和柴油环境中的摩擦系数都逐渐减小,且在空气中的摩擦系数最大,柴油环境中的摩擦系数最小。
(4)利用等离子体增强化学气相沉积技术在钛合金和316L不锈钢表面上制备了类金刚石薄膜,并考察了薄膜在不同润滑条件下的摩擦学性能。结果表明：在316L不锈钢表面上所制备的薄膜表现出优异的机械和摩擦学性能,表明了基底的材质对薄膜的结构和性能有着显著的影响。通过对薄膜在空气、合成机油和水环境中的摩擦学性能研究,表明了流体润滑的化学过程是一个需要被考虑的重要参数,且薄膜与合成机油接触时得到了最低的摩擦系数和磨损量。
Middle-frequency magnetron sputtering and plasma enhanced chemical vapor deposition techniques were used to deposit the diamond-like carbon films on silicon wafer and different metal surface. The effects of various process parameters on the microstructure and properties of the films were investigated systematically. The tribological behaviors of the films under different conditions were studied and possible tribological mechanisms were proposed. The main conclusions of the thesis were drawn as follows:
(1) Ni-doped diamond-like carbon films were deposited on silicon wafer by middle-frequency magnetron sputtering with different Ni content. The effect of Ni content on microstructure and properties of the films were studied systematically. The result showed that with the Ni doped, the stress was decreased and the adhesion was increased. The excellent tribological properties could be obtained at a low Ni content.
(2) Diamond-like carbon films were deposited on316L substrate by plasma enhanced chemical vapor deposition techniques. The influences of the precursor gases and working pressure on the microstructure, mechanical properties and tribological properties of the films were studied systematically. The result showed that the excellent properties could be obtained at a CH4/H2of20:10, the hardness about25GPa and the friction coefficient about0.044. When the working pressure of15Pa, the film hardness was as high as18.4GPa and showed the excellent mechanical properties. The film exhibited the low friction coefficient of0.035and excellent tribological properties at the working pressure of31Pa.
(3) Diamond-like carbon films were deposited on316L substrate by plasma enhanced chemical vapor deposition techniques. The tribological properties of the films were investigated systematically under different conditions. The result showed that with the increase of load, the friction coefficient of the films was decreased in air, increased in water and increased firstly then decreased in diesel. With the increase of sliding speed, the friction coefficient of the films was decreased under different conditions, and the friction coefficient in diesel was lower than in water.
(4) Diamond-like carbon films were deposited on Ti6AlV4and316L substrate by plasma enhanced chemical vapor deposition techniques. The tribological properties of the films were investigated systematically under different lubrication conditions. It's shown that the excellent properties of the film could be obtained prepared on316L substrate. The effect of the substrate on the microstructure and properties was obvious. The research result indicated that the chemical process of fluid lubrication was an important parameter and needed to be considered. The lower friction coefficient and wear were obtained when the film contacted with synthetic oil.
引文
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