CO_2激光器声光调制驱动电源及其特性的研究
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摘要
在中小功率激光器加工领域,CO_2激光器由于其卓越的性能而得到了广泛的应用,利用声光作用可以快速而有效地控制激光束地频率、方向和强度,从而更大程度地满足了激光加工领域地特殊需要。但是目前CO_2激光器较常见的是采用电调制实现脉冲输出,其脉冲宽度只能达到几百微秒的数量级,难以满足某些生产领域中的需要,而通过声光调制可获得较窄的脉冲。其次,目前CO_2激光器一般采用连续直流放电的方式,其控制速度较慢,如果采用声光调Q,我们不仅可以提高的响应速度,同时还可获得强脉冲。因此,本文就CO_2激光器的声光调制技术展开了论述。
论文首先对激光调制的概念和分类、声光调制的应用现状和声光技术在激光领域的应用进行了介绍。紧接着从声光调制的原理入手,详细的介绍了拉曼-纳斯衍射和布拉格衍射这两种基本的声光作用并给出其理论模型。在此基础上,论文进一步介绍了声光调制器的结构及重要参数。
纵观目前国内对声光调制的一些应用研究,基本都是采用高频信号发生器来驱动声光调制器,见于文献报道的声光驱动电源的设计研究较少,因此,本文对声光调制器的驱动电源进行了设计。鉴于实验室已有的硬件条件,本文采用的是IntraAction公司的AGM-406B1M型红外声光调制器,根据其参数要求,我们给出了符合要求的驱动电源的设计方法及试验结果。
通过前述的理论分析和电源的设计,最后我们对AGM-406B1M型红外声光调制器的幅度调制、频率偏移和声光偏移进行了研究,并给出了matlab仿真结果。
The CO_2 laser is widely applied for its excellent capability in the area of the low power laser process. And optic electricity technology meets the need of laser process for which can focus the laser beam on a diffraction limit spot, control the frequency, direction and intensity of laser beam very fast and efficiently. Nowadays, electro-optic modulation technology was used on the CO_2 laser generally to get the pulse of which the width is just hundreds of seconds, that is hardly to meet the need of special laser process area. And secondly the CO_2 laser can’t get high response speed that usually employs continuous DC charged excited technology. If the acoustic-optic modulation technology is employed, we can get short and high intensity pulse, and achieve high response speed. So AOM technology of CO_2 laser is discussed in this thesis.
At first, the concept and class of laser modulation and application of acoustic-photo modulation is presented. And then based on the theory of the interaction of acoustic wave and optic wave, the Raman-Nath and Bragg diffraction are introduced in detail, of which theoretical model is given. Later, the structure and key parameter of acoustic-photo modulator are presented.
Now, the research of acoustic-photo modulation technology almost uses the high frequency generator as the driver of acoustic-photo modulator, and the study and design of driver is seldom reported in literature. Based on the condition of my library, the design method and related result of experiment of the model AGM-406B1M infrared acoustic-optic modulator RF power are given based on the parameter in this thesis.
After the theory presenting and design of the driver, the research and simulation of amplitude modulation, frequency shifting, and deflection of AGM-406B1M infrared acoustic-optic modulator is presented at last.
论文首先对激光调制的概念和分类、声光调制的应用现状和声光技术在激光领域的应用进行了介绍。紧接着从声光调制的原理入手,详细的介绍了拉曼-纳斯衍射和布拉格衍射这两种基本的声光作用并给出其理论模型。在此基础上,论文进一步介绍了声光调制器的结构及重要参数。
纵观目前国内对声光调制的一些应用研究,基本都是采用高频信号发生器来驱动声光调制器,见于文献报道的声光驱动电源的设计研究较少,因此,本文对声光调制器的驱动电源进行了设计。鉴于实验室已有的硬件条件,本文采用的是IntraAction公司的AGM-406B1M型红外声光调制器,根据其参数要求,我们给出了符合要求的驱动电源的设计方法及试验结果。
通过前述的理论分析和电源的设计,最后我们对AGM-406B1M型红外声光调制器的幅度调制、频率偏移和声光偏移进行了研究,并给出了matlab仿真结果。
The CO_2 laser is widely applied for its excellent capability in the area of the low power laser process. And optic electricity technology meets the need of laser process for which can focus the laser beam on a diffraction limit spot, control the frequency, direction and intensity of laser beam very fast and efficiently. Nowadays, electro-optic modulation technology was used on the CO_2 laser generally to get the pulse of which the width is just hundreds of seconds, that is hardly to meet the need of special laser process area. And secondly the CO_2 laser can’t get high response speed that usually employs continuous DC charged excited technology. If the acoustic-optic modulation technology is employed, we can get short and high intensity pulse, and achieve high response speed. So AOM technology of CO_2 laser is discussed in this thesis.
At first, the concept and class of laser modulation and application of acoustic-photo modulation is presented. And then based on the theory of the interaction of acoustic wave and optic wave, the Raman-Nath and Bragg diffraction are introduced in detail, of which theoretical model is given. Later, the structure and key parameter of acoustic-photo modulator are presented.
Now, the research of acoustic-photo modulation technology almost uses the high frequency generator as the driver of acoustic-photo modulator, and the study and design of driver is seldom reported in literature. Based on the condition of my library, the design method and related result of experiment of the model AGM-406B1M infrared acoustic-optic modulator RF power are given based on the parameter in this thesis.
After the theory presenting and design of the driver, the research and simulation of amplitude modulation, frequency shifting, and deflection of AGM-406B1M infrared acoustic-optic modulator is presented at last.
引文
[1] Vidaud.P., He. D., Hall. D. R..High efficiency RF excited CO2 laser.Optics Communications, 1985, 56( 3): 185-190
[2] 周炳琨,高以智,陈家骅等.激光原理.国防工业出版社,1980
[3] W.Schock,Th. Hall, E. Wildernuth.Compact transverse flow CO2 laser with RF excitation.SPIE, 1988,1031 GCL:76～81
[4] He, D., Hall, D. R.Frequency dependence in RF discharge excited waveguide CO2 lasers, IEEE Journal of Quantum Electronics, 1984, QE-20(5): 509-514
[5] Jackson.P. E., Abramski, K. M., Hall, D. R..Automatic impedance matching and opto-hertzian effect in RF excited CO2 waveguide lasers, Applied Physics B: Photophysics and Laser Chemistry, 1988,47 (2): 149-157
[6] Bake. C. J., Hall, D. R.. Davies.A. R.Electron energy distributions,transport coefficients and electron excitation rates for RF excited CO2 lasers. Journal of Physics D.Applied Physics, 1984,17(8): 1597-1606
[7] Vidaud.P. He. D., Hall.D. R.High efficiency RF excited CO2 laser. Optics Communications, 1985,56(3): 185-190
[8] Oh Yong-Ho,Choi Nak-Heon,Choi Duk-in.A numerical simulation of RF glow discharge containing an electronegative gas composition. J.Appl.Phys, 1990, 67(7): 3264 – 3268
[9] Mikhail N.Shneider, Nikolai A.Yatsenko.Radio-frequency capacitive discharges. Boca Raton, CRC, 1995
[10] D.K Chen.Fundamentals of Engineering Electromagnetics.Addison-Weskey, Reading, MA, 1993
[11] Reinhold Ludwig,Pavel Bretchko.RF Circuit Design:Theory and Application. Publishing House of Electronics Industry ,2003
[12] K.F Sander.Microwave Components and Systems. Addison-Wesley, 1987
[13] J.A.Archer.Design and Performance of Small-Signal Microwave Transistors. Solid Stage Electronics,1972,1(15):249-258
[14] J.J.Ebers and J.L.Moll.Large-Scale Behaviour of Junction Transistors. Proc.ofIRE,1(42): 1761-1778
[15] M.B.Das.Millimeter-Wave Performance of Ultra-Submicrometer Gate Field-Effect Transistors.A Comparison of MODFET,MESFET,and HBT-Structure,IEEE Trans.on Electron Devices, 1987,l(34):1429-1440
[16] R.Allison.Silicon Bipolar Microwave Power Transistors.IEEE Transactions of MTT,1979, MTT-27:415-422.
[17] J.V.Dilorenzo and W.R.Wisgeman.GaAs Power MESFETS Design. Fabrication, and Performance, IEEE Trans. On MTT, 1979,MTT-23:367-378
[18] 藤学顺.军用超小型中小功率 CO2 激光电源的设计研究. 红外与激光技术,1994 (6)
[19] 闫润卿,李英惠.微波技术基础.北京理工大学出版社,2002
[20] 逯贵祯.射频电路的分析和设计.北京广播学院出版社,2003
[21] 李缉熙 .射频集成电路设计基础.北京大学微电子研究所,2004
[22] 张肃文,陆兆熊.高频电子线路.高等教育出版社,1993
[23] 王又青,安承武,陈清明. CO2 激光器功率传输中的阻抗匹配研究.兵工学报,1998,19(1):325-327
[24] Reinhold Ludwing,Pavel Pretchko.射频电路设计-理论与应用.电子工业出版社,2002
[25] 赵家升,黄商锐.电磁场与微波技术.华中理工大学出版社,1993:139～145,161～164,246～259
[26] 童诗白.模拟电子技术基础.高等教育出版社,1988
[27] 康华光.电子技术基础 模拟部分.高等教育出版社, 1988
[28] 曹锋光,王新兵,何云贵等.CO2 激光器实用功率控制器的设计. 激光杂志, 2004, 25(4):478-481
[29] 曹锋光,王新兵,何云贵等.射频电源中的阻抗匹配研究.应用激光,2004,2(5):98-102
[30] 蓝信钜.激光技术.华中理工大学出版社,1995
[31] 金发宏,刘志国,盛秋琴.CO_2 激光器声光 Q 开关的原理与设计.南开大学学报(自然科学),1995,28(1):536-538
[32] 彭江得.光电子技术基础.清华大学出版社,1988
[33] 杨臣华等.激光与红外技术手册.国防工业出版社,1990
[34] 曹跃祖.声光调制原理及应用.现代物理知识(增刊),2000
[35] 郝爱花,毛智礼,葛海波.声光技术在激光技术领域得的研究.西安邮电学院学报,2005,10(3):163-165
[36] 徐介平.声光器件的原理、设计和应用[M].北京:科学出版社,1982
[37] 张斌,潘珍吾.微型光学陀螺仪中声表面波声光移频器的研究[J].清华大学学报(自然科学版),1999(2):65-67.[3]
[38] 宗 德 蓉 , 罗 斌 . 红 外 可 调 声 光 滤 光 器 的 设 计 和 特 性 分 析 [ J ]. 光 电 工程,2002,29(5):65-67.
[39] 徐霞 , 余成波 , 涂巧玲 . 一种线性声光调制驱动电源的研制 . 激光杂志,2005,26(2):463-466
[40] 陈 文 友 . 声 光 技 术 的 发 展 动 态 及 其 在 军 事 上 的 应 用 〔 J 〕 . 压 电 与 声光,2000,16(2):21-28
[41] 蔡明秀.高速声光调制驱动源的研制〔J〕.压电与声光,2001,15(6):20-22
[42] 周子文.模拟乘法器及其应用〔M〕.北京:高等教育出版社,1999,54-57
[43] 〔德〕H-G翁格尔;W哈特.高频半导体电子学〔M〕.北京:科学出版社,1999,92-94.
[44] 衣汉威,张凤东.用 He_Ne 激光声光器件进行声光幅度调制和声光偏转实验.物理实验,2001,22(4)
[45] ChrostowskiJ,DelisleC.BistableOpticalSwitchingBasedonBraggDiffraction[J].OpticsCommunications,1982,41:71～732
[46] 刘敬海,徐荣甫.激光器件与技术[M].北京:北京大学出版社,1995.168～1843
[47] YiHanwei,ShenKe.ExperimentalStudyofSmallSignalAmplificationinBraggAcoustoopticBistableSystem[J].OpticsandLasersinEngineering,1998,29:41～47
[2] 周炳琨,高以智,陈家骅等.激光原理.国防工业出版社,1980
[3] W.Schock,Th. Hall, E. Wildernuth.Compact transverse flow CO2 laser with RF excitation.SPIE, 1988,1031 GCL:76～81
[4] He, D., Hall, D. R.Frequency dependence in RF discharge excited waveguide CO2 lasers, IEEE Journal of Quantum Electronics, 1984, QE-20(5): 509-514
[5] Jackson.P. E., Abramski, K. M., Hall, D. R..Automatic impedance matching and opto-hertzian effect in RF excited CO2 waveguide lasers, Applied Physics B: Photophysics and Laser Chemistry, 1988,47 (2): 149-157
[6] Bake. C. J., Hall, D. R.. Davies.A. R.Electron energy distributions,transport coefficients and electron excitation rates for RF excited CO2 lasers. Journal of Physics D.Applied Physics, 1984,17(8): 1597-1606
[7] Vidaud.P. He. D., Hall.D. R.High efficiency RF excited CO2 laser. Optics Communications, 1985,56(3): 185-190
[8] Oh Yong-Ho,Choi Nak-Heon,Choi Duk-in.A numerical simulation of RF glow discharge containing an electronegative gas composition. J.Appl.Phys, 1990, 67(7): 3264 – 3268
[9] Mikhail N.Shneider, Nikolai A.Yatsenko.Radio-frequency capacitive discharges. Boca Raton, CRC, 1995
[10] D.K Chen.Fundamentals of Engineering Electromagnetics.Addison-Weskey, Reading, MA, 1993
[11] Reinhold Ludwig,Pavel Bretchko.RF Circuit Design:Theory and Application. Publishing House of Electronics Industry ,2003
[12] K.F Sander.Microwave Components and Systems. Addison-Wesley, 1987
[13] J.A.Archer.Design and Performance of Small-Signal Microwave Transistors. Solid Stage Electronics,1972,1(15):249-258
[14] J.J.Ebers and J.L.Moll.Large-Scale Behaviour of Junction Transistors. Proc.ofIRE,1(42): 1761-1778
[15] M.B.Das.Millimeter-Wave Performance of Ultra-Submicrometer Gate Field-Effect Transistors.A Comparison of MODFET,MESFET,and HBT-Structure,IEEE Trans.on Electron Devices, 1987,l(34):1429-1440
[16] R.Allison.Silicon Bipolar Microwave Power Transistors.IEEE Transactions of MTT,1979, MTT-27:415-422.
[17] J.V.Dilorenzo and W.R.Wisgeman.GaAs Power MESFETS Design. Fabrication, and Performance, IEEE Trans. On MTT, 1979,MTT-23:367-378
[18] 藤学顺.军用超小型中小功率 CO2 激光电源的设计研究. 红外与激光技术,1994 (6)
[19] 闫润卿,李英惠.微波技术基础.北京理工大学出版社,2002
[20] 逯贵祯.射频电路的分析和设计.北京广播学院出版社,2003
[21] 李缉熙 .射频集成电路设计基础.北京大学微电子研究所,2004
[22] 张肃文,陆兆熊.高频电子线路.高等教育出版社,1993
[23] 王又青,安承武,陈清明. CO2 激光器功率传输中的阻抗匹配研究.兵工学报,1998,19(1):325-327
[24] Reinhold Ludwing,Pavel Pretchko.射频电路设计-理论与应用.电子工业出版社,2002
[25] 赵家升,黄商锐.电磁场与微波技术.华中理工大学出版社,1993:139～145,161～164,246～259
[26] 童诗白.模拟电子技术基础.高等教育出版社,1988
[27] 康华光.电子技术基础 模拟部分.高等教育出版社, 1988
[28] 曹锋光,王新兵,何云贵等.CO2 激光器实用功率控制器的设计. 激光杂志, 2004, 25(4):478-481
[29] 曹锋光,王新兵,何云贵等.射频电源中的阻抗匹配研究.应用激光,2004,2(5):98-102
[30] 蓝信钜.激光技术.华中理工大学出版社,1995
[31] 金发宏,刘志国,盛秋琴.CO_2 激光器声光 Q 开关的原理与设计.南开大学学报(自然科学),1995,28(1):536-538
[32] 彭江得.光电子技术基础.清华大学出版社,1988
[33] 杨臣华等.激光与红外技术手册.国防工业出版社,1990
[34] 曹跃祖.声光调制原理及应用.现代物理知识(增刊),2000
[35] 郝爱花,毛智礼,葛海波.声光技术在激光技术领域得的研究.西安邮电学院学报,2005,10(3):163-165
[36] 徐介平.声光器件的原理、设计和应用[M].北京:科学出版社,1982
[37] 张斌,潘珍吾.微型光学陀螺仪中声表面波声光移频器的研究[J].清华大学学报(自然科学版),1999(2):65-67.[3]
[38] 宗 德 蓉 , 罗 斌 . 红 外 可 调 声 光 滤 光 器 的 设 计 和 特 性 分 析 [ J ]. 光 电 工程,2002,29(5):65-67.
[39] 徐霞 , 余成波 , 涂巧玲 . 一种线性声光调制驱动电源的研制 . 激光杂志,2005,26(2):463-466
[40] 陈 文 友 . 声 光 技 术 的 发 展 动 态 及 其 在 军 事 上 的 应 用 〔 J 〕 . 压 电 与 声光,2000,16(2):21-28
[41] 蔡明秀.高速声光调制驱动源的研制〔J〕.压电与声光,2001,15(6):20-22
[42] 周子文.模拟乘法器及其应用〔M〕.北京:高等教育出版社,1999,54-57
[43] 〔德〕H-G翁格尔;W哈特.高频半导体电子学〔M〕.北京:科学出版社,1999,92-94.
[44] 衣汉威,张凤东.用 He_Ne 激光声光器件进行声光幅度调制和声光偏转实验.物理实验,2001,22(4)
[45] ChrostowskiJ,DelisleC.BistableOpticalSwitchingBasedonBraggDiffraction[J].OpticsCommunications,1982,41:71～732
[46] 刘敬海,徐荣甫.激光器件与技术[M].北京:北京大学出版社,1995.168～1843
[47] YiHanwei,ShenKe.ExperimentalStudyofSmallSignalAmplificationinBraggAcoustoopticBistableSystem[J].OpticsandLasersinEngineering,1998,29:41～47