微制造隔振平台的控制系统设计
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摘要
本论文结合国家自然科学基金项目“精密装置仿生隔振系统理论及基础技术研究”(No.50075078)，从理论分析和实验研究两方面，对微制造隔振平台控制理论和主动振动控制技术进行了深入、系统的研究。
第一章首先阐述了微制造隔振平台主动振动控制研究意义；然后，对国内外主动控制理论和致动器的研究现状进行回顾及评述，指出了微制造隔振平台控制理论和主动振动控制技术研究的重要意义；最后，介绍了本学位论文的主要研究内容。
第二章对微制造隔振平台结构和致动器安装方式进行了研究。首先，在分析啄木鸟头部独特生物构造和隔振机理的基础上，运用仿生学原理设计了微制造隔振平台结构；然后，对主动隔振致动器的安装方式的合理性进行了理论上的分析与验证。
第三章分析了微机数字PID控制算法，对位置型、增量型PID算法程序设计作了重点研究。结合微制造隔振平台隔振系统的结构特点和性能要求，提出了闭环二维F-PID主动控制系统，并采用Matlab软件对被动隔振、PID主动隔振和F-PID主动隔振分别进行了仿真，经分析比较得出结论。
第四章结合面向对象技术，对隔振平台的主动振动控制系统软件进行了面向对象的系统分析与设计，提出了整体框架的实现方法、PID控制模块的流程图和输出数据项的流程图。并在Windows 98操作系统下采用Visual C++6.0开发了微制造隔振平台主动振动控制软件PidAVC V1.0。
第五章进行了微制造隔振平台的被动隔振和PID主动隔振实验研究，并对实验结果作了比较分析，得出了相关结论。
第六章概括了全文的主要研究成果，并展望了今后需进一步开展的工作。
In this dissertation, associating with the project "RESEARCH ON THEORY AND SUPPORTING TECHNOLOGY OF BIONICS VIBRATION ISOLATION SYSTEM FOR PRECISION EQUIPMENT", which is aided financially by the National Natural Science Foundation of China (No.50075078), the control theory and active vibration control technology of the micro-manufacturing vibration-isolation platform (MMVIP) have been studied deeply and systematically both in theoretical analysis and experimental study.
In chapter 1, firstly, a survey of the importance of active vibration control technology of MMVIP is performed. Then the review and appraisement of the present research situation on and the development trend of the key technology of MMVIP, such as active vibration isolation technology and actuator, are discussed in details, and the significance of the study of active vibration control technology of MMVIP is pointed out. Finally the main content of the dissertation is introduced.
hi chapter 2, the structure of MMVIP and the installment style of actuator are studied. Firstly, based on the bionics of the woodpecker's brain vibration isolation mechanism, the bionic structure of MMVIP are designed. Then the feasibility of the actuator's installment style is analyzed and validated in theory.
In chapter 3, After analyzing the PID digital algorithm and fuzzy algorithm, a closed loop fuzzy-PID active vibration control system was adopted in consideration of complex and nonlinear vibration environment, it was simulated by Matlab. After the comparison and analysis with the results of simulations, some conclusions were drawn.
In chapter 4, using object oriented technology, the active vibration control software is analyzed and designed. The design of the flow charts of PID control module and output data module are also discussed. The PidAVC V 1.0 is developed with Visual C-H- 6.0 in Windows 98 operation system.
In chapter 5, some experiments of passive and PID active vibration control under disturbing signals based on giant magnetostrictive actuator are conducted. After the comparison and analysis with the results of experiments, some conclusions were drawn.
In chapter 6, all achievements of the dissertation are summarized and the further research work, which will be done from now on, is put forward.
第一章首先阐述了微制造隔振平台主动振动控制研究意义；然后，对国内外主动控制理论和致动器的研究现状进行回顾及评述，指出了微制造隔振平台控制理论和主动振动控制技术研究的重要意义；最后，介绍了本学位论文的主要研究内容。
第二章对微制造隔振平台结构和致动器安装方式进行了研究。首先，在分析啄木鸟头部独特生物构造和隔振机理的基础上，运用仿生学原理设计了微制造隔振平台结构；然后，对主动隔振致动器的安装方式的合理性进行了理论上的分析与验证。
第三章分析了微机数字PID控制算法，对位置型、增量型PID算法程序设计作了重点研究。结合微制造隔振平台隔振系统的结构特点和性能要求，提出了闭环二维F-PID主动控制系统，并采用Matlab软件对被动隔振、PID主动隔振和F-PID主动隔振分别进行了仿真，经分析比较得出结论。
第四章结合面向对象技术，对隔振平台的主动振动控制系统软件进行了面向对象的系统分析与设计，提出了整体框架的实现方法、PID控制模块的流程图和输出数据项的流程图。并在Windows 98操作系统下采用Visual C++6.0开发了微制造隔振平台主动振动控制软件PidAVC V1.0。
第五章进行了微制造隔振平台的被动隔振和PID主动隔振实验研究，并对实验结果作了比较分析，得出了相关结论。
第六章概括了全文的主要研究成果，并展望了今后需进一步开展的工作。
In this dissertation, associating with the project "RESEARCH ON THEORY AND SUPPORTING TECHNOLOGY OF BIONICS VIBRATION ISOLATION SYSTEM FOR PRECISION EQUIPMENT", which is aided financially by the National Natural Science Foundation of China (No.50075078), the control theory and active vibration control technology of the micro-manufacturing vibration-isolation platform (MMVIP) have been studied deeply and systematically both in theoretical analysis and experimental study.
In chapter 1, firstly, a survey of the importance of active vibration control technology of MMVIP is performed. Then the review and appraisement of the present research situation on and the development trend of the key technology of MMVIP, such as active vibration isolation technology and actuator, are discussed in details, and the significance of the study of active vibration control technology of MMVIP is pointed out. Finally the main content of the dissertation is introduced.
hi chapter 2, the structure of MMVIP and the installment style of actuator are studied. Firstly, based on the bionics of the woodpecker's brain vibration isolation mechanism, the bionic structure of MMVIP are designed. Then the feasibility of the actuator's installment style is analyzed and validated in theory.
In chapter 3, After analyzing the PID digital algorithm and fuzzy algorithm, a closed loop fuzzy-PID active vibration control system was adopted in consideration of complex and nonlinear vibration environment, it was simulated by Matlab. After the comparison and analysis with the results of simulations, some conclusions were drawn.
In chapter 4, using object oriented technology, the active vibration control software is analyzed and designed. The design of the flow charts of PID control module and output data module are also discussed. The PidAVC V 1.0 is developed with Visual C-H- 6.0 in Windows 98 operation system.
In chapter 5, some experiments of passive and PID active vibration control under disturbing signals based on giant magnetostrictive actuator are conducted. After the comparison and analysis with the results of experiments, some conclusions were drawn.
In chapter 6, all achievements of the dissertation are summarized and the further research work, which will be done from now on, is put forward.
引文
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