大面积高精度衍射光栅刻划机结构优化与控制研究
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摘要
大面积高精度衍射光栅是大型空天地观测仪器的核心光学器件,由于其大尺寸高精度的要求,机械式刻划是其唯一的制造方式。光栅刻划机的整体精度要求极高,而机械结构和控制技术是其精度的决定性因素,二者关系紧密,不可分割,因此机械结构和控制技术也就成为了光栅刻划机研究的核心,进行光栅刻划机结构优化理论和控制理论的研究也是提高光栅刻划机制造技术水平的关键。随着各项大型天文物理项目的不断开展,对大面积高精度的衍射光栅制造精度提出了更高的要求。光栅刻线密度、刻线质量(直线度、槽型)由光栅刻划机定位精度和刀尖轨迹直接决定。因此,定位精度和刀尖轨迹是影响光栅光学性能的主要因素。本论文以衍射光栅刻划机作为实验和应用对象,对影响其精度的核心——刻划系统和分度系统两方面进行结构优化和控制研究。
由于光栅刻划机的零部件的加工精度要求高、制造难度大、周期长且造价昂贵,无法在结构优化过程中反复进行样机的试制,因而需要采用基于CAD/CAE集成技术的优化设计手段进行光栅刻划机结构优化的研究。首先探索了基于Parasolid的CAD参数化设计方法、CAE技术特点,同时研究CAD/CAE集成技术和设计模式,结合以上理论提出一个开发效率高,可移植性和可扩展性很强的通用CAD/CAE集成软件框架系统。同时为了进行机械结构CAE分析以及优化工作,着重分析光栅刻划机的刻划系统和分度系统机械结构,基于CAD参数化建模技术建立了光栅刻划机整体虚拟样机模型,并进行了光栅刻划的运动学仿真研究。
光栅划机机作为典型的超精密光机电一体化机械系统,其设计与优化需要一个综合的性能分析作为指导,本文中研究了光栅成像理论、计算傅里叶光学理论以及有限元模态分析,将其结合用于光栅刻划机刻划系统的振动问题分析,找出了刻划系统造成刻线误差的主要因素——刀架导轨的振动,并提出结构的改进和优化方案,取得了良好的优化效果。
考虑到分度系统定位工作台的结构特点和精度要求,开展了基于遗传算法的多目标优化理论研究工作,为了提高多目标优化的准确性,提出了基于Pro/E-Matlab集成优化技术的集成优化平台,运用Pro/E平台进行精确的实体模型CAE分析,基于分析结果在Matlab平台进行多目标最优解搜索,以光栅刻划机分度系统定位工作台为实例进行了多目标结构优化,通过仿真实验验证了优化平台的正确性。
最后进行了光栅刻划机分度系统的控制研究以及刻线误差分析,从状态空间角度分析了光栅刻划机控制模型可控性和可观性,提出将基于BP神经网络的PID控制方法用于光栅刻划机定位系统控制,并进行控制实验调试,最终获得了5nm以下的控制定位精度,而且刻线的质量取得了较大的改进。经过对采集的大量测试数据进行批量的数据统计分析,进行刻线的误差分析,验证了光栅刻划机机械结构优化以及控制算法的有效性。
The diffraction grating of large area and high precision is the core optical device of large observational instruments which are applied to various fields. Because of the characteristics of large size and high precision, the grating can only be manufactured by mechanical characterization. Since the high precision of the grating ruling machine is decided by such factors as mechanical structure and control technique, both of which are inseparable from each other, the core of the research of the grating ruling machine is to study the two factors. Thus, the crux of improving the manufacturing technology of the grating ruling machine is the research of its structure optimization theory and its control theory. With the developing of various large-scale astrophysics projects, the diffraction grating of large area and high precision needs higher manufacturing precision. The grating's groove density and groove quality (straightness and shape of the groove) are directly determined by the positioning accuracy and the tip trajectory of grating ruling machine. Therefore, the main factors that influence the optical function of the grating are the positioning accuracy and the tip trajectory. This paper focuses on the structure optimization and the control of the two factors which influence the precision of the diffraction grating ruling machine-the scribing system and the indexing system.
Because of the high precision, difficulty, long cycle and high cost of machining parts of the grating ruling machine and because it is impossible to repeatedly trial-produce prototype in the structure optimization process, the optimization design method based on the CAD/CAE integrated technology is adopted in the research of structure optimization of the grating machine. CAD parametric design method based on Parasolid and CAE technical characteristics are studied firstly. At the same time, CAD/CAE integrated technology and design patterns are studied. Based on the combination of these studies, an integrated CAD/CAE software framework system which has high development efficiency and strong portability and extendibility is put forward. In the meanwhile, based on CAD parametric modeling, the virtual prototype model of the grating machine is established to carry through CAE analysis and structure optimization, especially that of the scribing system and the indexing system. Besides, the grating kinematics simulation is conducted.
The design and optimization of the grating ruling machine which is a typical ultra-precision optical and electrical integration of mechanical system should be guided by an integrated performance analysis. In this paper, the study of grating imaging theory, computational Fourier optics theory and finite element modal analysis is used to analyze the vibration of the scribing system of the grating machine. The main error caused by scribing system---the vibration of the turret guide---has been found out. Then, the scheme of improving and optimizing the structure, which achieved good optimization effects, has been proposed.
Considering the structure features and the accuracy requirements of the positioning table in the indexing system, the multi-objective optimization theory research which is based on genetic algorithm is conducted. In order to improve the accuracy of multi-objective optimization, an integration optimization platform which is based on Pro/E-Matlab integrated optimization technology is proposed. Accurate CAE analysis based on3D model is conducted in the Pro/E platform and based on the results of the analysis, the search of optimum solution is conducted in the Matlab platform. Then, a multi-objective structural optimization is conducted in the positioning table of the indexing system, and the correctness of the optimization platform is verified through the simulation experiments.
At last, the present research studied the control of the indexing system of the grating ruling machine and analyzed errors of the groove. Controllability and observability of grating ruling machine's control model are analyzed from the perspective of the state space. PID feedback control based on neural network is utilized to the indexing system. Experiment results reveal the efficient and robust of the control scheme and show that the positional accuracy has been readily achieved within5nm and quality of the groove has made great improvements. After collecting a large number of experiment data, statistical analysis and error analysis of the groove is carried out to verify the validity of structure optimization and control algorithms.
由于光栅刻划机的零部件的加工精度要求高、制造难度大、周期长且造价昂贵,无法在结构优化过程中反复进行样机的试制,因而需要采用基于CAD/CAE集成技术的优化设计手段进行光栅刻划机结构优化的研究。首先探索了基于Parasolid的CAD参数化设计方法、CAE技术特点,同时研究CAD/CAE集成技术和设计模式,结合以上理论提出一个开发效率高,可移植性和可扩展性很强的通用CAD/CAE集成软件框架系统。同时为了进行机械结构CAE分析以及优化工作,着重分析光栅刻划机的刻划系统和分度系统机械结构,基于CAD参数化建模技术建立了光栅刻划机整体虚拟样机模型,并进行了光栅刻划的运动学仿真研究。
光栅划机机作为典型的超精密光机电一体化机械系统,其设计与优化需要一个综合的性能分析作为指导,本文中研究了光栅成像理论、计算傅里叶光学理论以及有限元模态分析,将其结合用于光栅刻划机刻划系统的振动问题分析,找出了刻划系统造成刻线误差的主要因素——刀架导轨的振动,并提出结构的改进和优化方案,取得了良好的优化效果。
考虑到分度系统定位工作台的结构特点和精度要求,开展了基于遗传算法的多目标优化理论研究工作,为了提高多目标优化的准确性,提出了基于Pro/E-Matlab集成优化技术的集成优化平台,运用Pro/E平台进行精确的实体模型CAE分析,基于分析结果在Matlab平台进行多目标最优解搜索,以光栅刻划机分度系统定位工作台为实例进行了多目标结构优化,通过仿真实验验证了优化平台的正确性。
最后进行了光栅刻划机分度系统的控制研究以及刻线误差分析,从状态空间角度分析了光栅刻划机控制模型可控性和可观性,提出将基于BP神经网络的PID控制方法用于光栅刻划机定位系统控制,并进行控制实验调试,最终获得了5nm以下的控制定位精度,而且刻线的质量取得了较大的改进。经过对采集的大量测试数据进行批量的数据统计分析,进行刻线的误差分析,验证了光栅刻划机机械结构优化以及控制算法的有效性。
The diffraction grating of large area and high precision is the core optical device of large observational instruments which are applied to various fields. Because of the characteristics of large size and high precision, the grating can only be manufactured by mechanical characterization. Since the high precision of the grating ruling machine is decided by such factors as mechanical structure and control technique, both of which are inseparable from each other, the core of the research of the grating ruling machine is to study the two factors. Thus, the crux of improving the manufacturing technology of the grating ruling machine is the research of its structure optimization theory and its control theory. With the developing of various large-scale astrophysics projects, the diffraction grating of large area and high precision needs higher manufacturing precision. The grating's groove density and groove quality (straightness and shape of the groove) are directly determined by the positioning accuracy and the tip trajectory of grating ruling machine. Therefore, the main factors that influence the optical function of the grating are the positioning accuracy and the tip trajectory. This paper focuses on the structure optimization and the control of the two factors which influence the precision of the diffraction grating ruling machine-the scribing system and the indexing system.
Because of the high precision, difficulty, long cycle and high cost of machining parts of the grating ruling machine and because it is impossible to repeatedly trial-produce prototype in the structure optimization process, the optimization design method based on the CAD/CAE integrated technology is adopted in the research of structure optimization of the grating machine. CAD parametric design method based on Parasolid and CAE technical characteristics are studied firstly. At the same time, CAD/CAE integrated technology and design patterns are studied. Based on the combination of these studies, an integrated CAD/CAE software framework system which has high development efficiency and strong portability and extendibility is put forward. In the meanwhile, based on CAD parametric modeling, the virtual prototype model of the grating machine is established to carry through CAE analysis and structure optimization, especially that of the scribing system and the indexing system. Besides, the grating kinematics simulation is conducted.
The design and optimization of the grating ruling machine which is a typical ultra-precision optical and electrical integration of mechanical system should be guided by an integrated performance analysis. In this paper, the study of grating imaging theory, computational Fourier optics theory and finite element modal analysis is used to analyze the vibration of the scribing system of the grating machine. The main error caused by scribing system---the vibration of the turret guide---has been found out. Then, the scheme of improving and optimizing the structure, which achieved good optimization effects, has been proposed.
Considering the structure features and the accuracy requirements of the positioning table in the indexing system, the multi-objective optimization theory research which is based on genetic algorithm is conducted. In order to improve the accuracy of multi-objective optimization, an integration optimization platform which is based on Pro/E-Matlab integrated optimization technology is proposed. Accurate CAE analysis based on3D model is conducted in the Pro/E platform and based on the results of the analysis, the search of optimum solution is conducted in the Matlab platform. Then, a multi-objective structural optimization is conducted in the positioning table of the indexing system, and the correctness of the optimization platform is verified through the simulation experiments.
At last, the present research studied the control of the indexing system of the grating ruling machine and analyzed errors of the groove. Controllability and observability of grating ruling machine's control model are analyzed from the perspective of the state space. PID feedback control based on neural network is utilized to the indexing system. Experiment results reveal the efficient and robust of the control scheme and show that the positional accuracy has been readily achieved within5nm and quality of the groove has made great improvements. After collecting a large number of experiment data, statistical analysis and error analysis of the groove is carried out to verify the validity of structure optimization and control algorithms.
引文
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