大功率激光二极管光束准直元件的设计与分析
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摘要
激光二极管器件的日益成熟,提供了一种高能量、低功耗、小型化、高可靠性的低值激光光源,促使激光测距和激光雷达技术向小型化方向发展。小型高效的激光二极管光束准直系统的设计是发展微型激光测距仪和激光雷达的关键所在,它直接影响着系统的探测能力和小型化程度。为此,本文引入衍射光学元件用作激光二极管光束的准直元件,发挥激光相干特性的作用,可突破几何光学原理的约束,从而实现激光二极管光束准直元件的小型化和高效率设计。
论文在概述了国内外激光二极管准直技术的研究现状,并对相关方法进行了分类评述的基础上,给出了激光二极管光束准直二元光学元件的设计和性能评价方法。在MATLAB6.5环境下,编写了二元光学元件的设计程序和准直性能的评价程序。
根据激光二极管(阵列)光束的理论描述模型,通过实验测量了典型激光二极管(阵列)输出光束在远场的光斑分布,验证了激光二极管光束理论模型的准确性。
以海特光电公司提供的LDM-0808-003W-X3型激光二极管单体(发光结大小为1μm×100μm)为准直对象,设计了相应的二元光学准直元件,对光束快慢轴方向分别实现了1mrad和1.5mrad的准直效果,耦合效率达到86.5%,元件尺寸仅为7mm×0.84mm。通过数值计算,讨论了算法参数对设计结果的影响,分析了波长温漂对二元光学元件准直效果的影响。
在此基础上,讨论了激光二极管线阵的二元光学准直技术。通过数值计算分析了单体间隔对于二元光学阵列实现激光二极管线阵光束准直效果的影响。针对三叠层隧道结激光二极管,设计了二元光学准直元件,快慢轴方向分别实现了1mrad和1.6mrad的准直效果,耦合效率达到86.5%,元件尺寸为7.5mm×0.94mm。
本论文利用二元光学元件对激光二极管(阵列)光束进行准直研究,取得的研究结果对于微型激光测距仪和激光雷达光学发射系统的设计有一定的参考价值。
The maturing of the laser diode provides a kind of light source with the advantage of high power, lower power consumption, small volume, high reliability and low cost, which pushes the laser range finder and laser radar to the direction of small size. And, the design of collimation system which is small and high efficiency is the sticking point. It affect the capability of the system. Therefore, we use the binary optical element for the collimation element. And, with the coherent effect, we can achieve a collimation design of small size and high efficiency.
We summarize the present situation of collimation technology, and analyze the current methods. On the base, we give the design and analysis methods, and compile the program for the collimation design and capability analysis.
The optical theory models are discussed, and the distributing of the far field beam is measured. Basing-on the experiment, the accuracy of the theory models is tested.
Using the laser diode provided by the HOTE company, the binary optical collimation element is designed. The beam angles of the fast and slow axis are collimated to 1 mrad and 1.5 mrad, and the diffraction efficiency comes to 86.5%. And the size of the collimation element is 7mm×0.84mm. The effect of the design parameter for the design result is discussed, and the effect of the wavelength's change following the temperature for the collimation effect is analyzed.
On the base, the collimation technology for the laser diode bar is discussed. The effect of the laser diode's interval for the collimation effect of the binary optics bar is analyzed. The collimation element for the SPLLL90-3 high power laser diode is designed. The beam angles of the fast and slow axis are collimated to 1 mrad and 1.6 mrad, and the diffraction efficiency comes to 86.5%. The size of the collimation element is 7.5mm×0.94mm.
We discuss the design of the collimation element for the high power laser diode, which will provide a effective method for the collimation design with small volume and high efficiency.
论文在概述了国内外激光二极管准直技术的研究现状,并对相关方法进行了分类评述的基础上,给出了激光二极管光束准直二元光学元件的设计和性能评价方法。在MATLAB6.5环境下,编写了二元光学元件的设计程序和准直性能的评价程序。
根据激光二极管(阵列)光束的理论描述模型,通过实验测量了典型激光二极管(阵列)输出光束在远场的光斑分布,验证了激光二极管光束理论模型的准确性。
以海特光电公司提供的LDM-0808-003W-X3型激光二极管单体(发光结大小为1μm×100μm)为准直对象,设计了相应的二元光学准直元件,对光束快慢轴方向分别实现了1mrad和1.5mrad的准直效果,耦合效率达到86.5%,元件尺寸仅为7mm×0.84mm。通过数值计算,讨论了算法参数对设计结果的影响,分析了波长温漂对二元光学元件准直效果的影响。
在此基础上,讨论了激光二极管线阵的二元光学准直技术。通过数值计算分析了单体间隔对于二元光学阵列实现激光二极管线阵光束准直效果的影响。针对三叠层隧道结激光二极管,设计了二元光学准直元件,快慢轴方向分别实现了1mrad和1.6mrad的准直效果,耦合效率达到86.5%,元件尺寸为7.5mm×0.94mm。
本论文利用二元光学元件对激光二极管(阵列)光束进行准直研究,取得的研究结果对于微型激光测距仪和激光雷达光学发射系统的设计有一定的参考价值。
The maturing of the laser diode provides a kind of light source with the advantage of high power, lower power consumption, small volume, high reliability and low cost, which pushes the laser range finder and laser radar to the direction of small size. And, the design of collimation system which is small and high efficiency is the sticking point. It affect the capability of the system. Therefore, we use the binary optical element for the collimation element. And, with the coherent effect, we can achieve a collimation design of small size and high efficiency.
We summarize the present situation of collimation technology, and analyze the current methods. On the base, we give the design and analysis methods, and compile the program for the collimation design and capability analysis.
The optical theory models are discussed, and the distributing of the far field beam is measured. Basing-on the experiment, the accuracy of the theory models is tested.
Using the laser diode provided by the HOTE company, the binary optical collimation element is designed. The beam angles of the fast and slow axis are collimated to 1 mrad and 1.5 mrad, and the diffraction efficiency comes to 86.5%. And the size of the collimation element is 7mm×0.84mm. The effect of the design parameter for the design result is discussed, and the effect of the wavelength's change following the temperature for the collimation effect is analyzed.
On the base, the collimation technology for the laser diode bar is discussed. The effect of the laser diode's interval for the collimation effect of the binary optics bar is analyzed. The collimation element for the SPLLL90-3 high power laser diode is designed. The beam angles of the fast and slow axis are collimated to 1 mrad and 1.6 mrad, and the diffraction efficiency comes to 86.5%. The size of the collimation element is 7.5mm×0.94mm.
We discuss the design of the collimation element for the high power laser diode, which will provide a effective method for the collimation design with small volume and high efficiency.
引文
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[3]梁一平,戴特力.用圆柱透镜准直半导体激光光束的分析.激光杂志,2004,25(3):140-148
[4]梁一平,戴特力.圆柱透镜对半导体激光光束准直性能的改进.中国激光,2004,31(11):35-43
[5]高雪松等.光纤微透镜用于阵列半导体激光器快轴准直的研究.激光与红外,2005,35(8):563-565
[6]高明伟等.阵列半导体激光器的光束参数测量与光纤耦合.光学技术,2002,28(3):201-203
[7]崔兆云,曾晓东,安毓英.LD光场柱透镜准直技术研究.激光杂志,2003,24(4):14-18
[8]王江等.大光束光纤耦合半导体激光准直系统.激光杂志,2006,1:28-31
[9]夏秀兰等.半导体激光器光束的准直.光电子.激光,1996,7(5):283-287
[10]王小妮,朱林泉.半导体激光器光束特性的研究.红外,2007,3:28-30
[11]谭佐军,等.激光引信中半导体激光器的准直和测试.应用光学,2007,28(4):454-457
[12]何修军,等.半导体激光器光束的准直设计.光学仪器,2005,27(4):65-68
[13]张倩琳.半导体激光器激光光束的研究.Experiment science&Technology,2006,12:21-25
[14]周崇喜等.半导体激光器阵列光束准直和聚焦系统设计.光学仪器,2000,22(6):25-29
[15]杨大林等.条形半导体激光器准直方法研究.激光杂志,2006,27(4):10-11
[16]张瑞锋.梯度折射率光纤透镜的薄透镜等效分析.光电子.激光,2005,16(12):1441-1444
[17]房启勇等.半导体激光器光束质量改善新技术综述.光学技术,2003,1:107-110
[18]廖廷悌.抛物型GRIN透镜用作激光准直器的设计研究.激光技术,1993,6:154-158
[19]廖廷悌.梯度折射率激光准直器的原理与设计.应用激光,1992,12(5):213-216
[20]王江,王磊,王楚.衍射极限非球面准直透镜.应用光学,2006,27(6):528-530
[21]H.G.Treusch,A.Ovtchinnikov,X.He.High-brightness semiconductor laser sources for materials processing:stacking,beam shaping,and bars.IEEE Journal of Selected Topics Quantum Electronics,2000,6(4):601-614
[22]Yongqi Fu,Ngoi Kok Ann Bryan.A novel one step integration of edge-emitting laser diode with micro-elliptical lens using focused ion beam direct deposition.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,2002,15(1):150-156
[23]Z.L.Liau,D.Z.Tsang,and J.N.Walpole.Simple compact diode- laser/microlens packaging.IEEE JOURNAL OF QUANTUM ELECTRONICS,1997,33:236-241
[24]Dante D Amato,Robert Centamore.Two applications for microlens arrays:detector fill factor improvement and laser diode collimation.Miniature and Micro-Optics:Fabrication and System Applications,1991,1544:166-177
[25]Alexis V.Kudryashov,Alan H.Paxton.Spatio-temporal control of laser beams with thin-film shapers.Laser Resonators and Beam Control,2004,7:277-285
[26]周崇喜,杜春雷.半导体激光器阵列光束准直和聚焦系统设计.光学仪器,2000,22(6):25-29
[27]姬扬,张静娟,姚德成,陈岩松.用于半导体激光器光束整形的衍射光学元件的设计研究.物理学报,1996,45(10):2027-2034
[28]严瑛白,王超.半导体激光器的二元光学消像散准直器件.红外与激光工程,1996,25:36-42
[29]陈颖,杨华军.半导体激光器的衍射准直透镜的优化设计.电子科技大学学报,2003,2:129-135
[30]谢梦,曾晓东.大功率半导体激光器消像散准直器件设计.红外与激光工程,2007,36:36-42
[31]H.P.Herzig,R.Dandliker,J.M.Teijido.Beam shaping for high power laser diode array by holographic optical elements.Holographic systems,1989,311:133-137
[32]周崇喜,邱传凯,郑永超,杨志卿.半导体激光器列阵二元光学准直器的设计和制作.光电工程,1998,25:38-45
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