衍射波前测试方法的研究
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摘要
衍射光栅是应用在光谱仪器中最重要的元件之一。随着光谱仪器应用领域的扩展,衍射光栅不仅应用于物质元素的光谱分析,而且在天文学、量子光学、集成光学、生物学、光通讯、化工以及冶金等领域也得到了广泛应用。同时,随着科学技术的不断发展,光栅加工也达到了一个崭新的高度。衍射光栅应用领域的扩展使得制造光栅刻划技术的提高成为目前光栅研究领域的首要任务。光栅面型复杂化,面积增大,刻线密度的提高等均给光栅的制备带来新的挑战,与此同时光栅的质量检测就成为不可或缺的重要环节。
对于衍射光栅的检测,测量光栅衍射波面的波象差是评价光栅质量是否合格的重要环节,对其测量主要有干涉法、全息术法和位相对比法三种方法。通过对干涉条纹的获取、处理即可得知波前缺陷,从而反映出此光栅的质量水平和加工上的不足,并得以改进。目前衍射光栅波前检测已应用于在平面光栅的检测中,而对于凹面光栅的质量检测仅是对其衍射效率进行检测,未应用于其衍射波前进行检测。
本文在阐述了光栅衍射理论性质基础之上,论述了衍射波前检测在光栅加工质量评价的重要性,并对凹面衍射光栅波前检测方法进行研究。基于泰曼干涉仪检测原理搭建实验光路,针对于凹面光栅检测进行相应的改进,成功获得凹面光栅零级和一级干涉条纹,并用ZEMAX软件对本系统中凹面光栅模拟进行了相关的像差分析。从而证明了干涉检验针对凹面光栅衍射波前的可行性,为凹面光栅的加工质量检测提供了依据。
Diffraction grating is one of the most important components which have used in spectroscopic instruments. With the expansion of application fields, diffraction grating have not only been applied in diffraction grating spectrum, but also been widely used in astronomy, quantum optics, integrated optics, biological, optical communications, chemical and metallurgy and other fields.At the same time as the development of science and technology, craft of diffraction grating has reached a new height. The development in characterization technology and research in diffraction grating nature have become priority mission in diffraction grating research. It would be new challenges under the consideration of complex in grating face, increasing of the grating area, improving of grooves characterization density. Therefore, grating quality testing has become an indispensable link.
For the detection of diffraction grating, wave aberration measurement of diffraction grating is the important means in evaluating grating quality. Interference, holography and phase comparison have been widely applied. Wave-front defects can be discovered by acquisition and processing of the interference fringes. It will also reflect the lack of grating processing and grating quality,and improve the defects after that. Test in diffraction grating wave-front is mainly used in plane grating currently, as for concave grating diffraction, diffraction efficiency is only parameter can be tested.
Wavefront detection methods of concave diffraction grating is discussed in this paper. Wavefront detection methods of concave grating is improved from the plane grating, based on the principle of testing concave grating by the Twyman interferometer. Zero and one class grating fringes can be got by this experiment, Aberration in experiment have been analyzed by the ZEMAX.which has proved feasibility of interfere testing in concave grating.
对于衍射光栅的检测,测量光栅衍射波面的波象差是评价光栅质量是否合格的重要环节,对其测量主要有干涉法、全息术法和位相对比法三种方法。通过对干涉条纹的获取、处理即可得知波前缺陷,从而反映出此光栅的质量水平和加工上的不足,并得以改进。目前衍射光栅波前检测已应用于在平面光栅的检测中,而对于凹面光栅的质量检测仅是对其衍射效率进行检测,未应用于其衍射波前进行检测。
本文在阐述了光栅衍射理论性质基础之上,论述了衍射波前检测在光栅加工质量评价的重要性,并对凹面衍射光栅波前检测方法进行研究。基于泰曼干涉仪检测原理搭建实验光路,针对于凹面光栅检测进行相应的改进,成功获得凹面光栅零级和一级干涉条纹,并用ZEMAX软件对本系统中凹面光栅模拟进行了相关的像差分析。从而证明了干涉检验针对凹面光栅衍射波前的可行性,为凹面光栅的加工质量检测提供了依据。
Diffraction grating is one of the most important components which have used in spectroscopic instruments. With the expansion of application fields, diffraction grating have not only been applied in diffraction grating spectrum, but also been widely used in astronomy, quantum optics, integrated optics, biological, optical communications, chemical and metallurgy and other fields.At the same time as the development of science and technology, craft of diffraction grating has reached a new height. The development in characterization technology and research in diffraction grating nature have become priority mission in diffraction grating research. It would be new challenges under the consideration of complex in grating face, increasing of the grating area, improving of grooves characterization density. Therefore, grating quality testing has become an indispensable link.
For the detection of diffraction grating, wave aberration measurement of diffraction grating is the important means in evaluating grating quality. Interference, holography and phase comparison have been widely applied. Wave-front defects can be discovered by acquisition and processing of the interference fringes. It will also reflect the lack of grating processing and grating quality,and improve the defects after that. Test in diffraction grating wave-front is mainly used in plane grating currently, as for concave grating diffraction, diffraction efficiency is only parameter can be tested.
Wavefront detection methods of concave diffraction grating is discussed in this paper. Wavefront detection methods of concave grating is improved from the plane grating, based on the principle of testing concave grating by the Twyman interferometer. Zero and one class grating fringes can be got by this experiment, Aberration in experiment have been analyzed by the ZEMAX.which has proved feasibility of interfere testing in concave grating.
引文
[1]J. Strong. The Johns Hopkins University and diffraction gratings. J. Opt. Soc. Am. 1960,50(12):1148-1152
[2]梁铨廷主编.物理光学(第三版)[M].北京：电子工业出版社,2009：75,164-165.
[3]王文生主编.干涉测试技术[M].北京：兵器工业出版社,1992：1-4.
[4]李立峰.光栅的电磁场理论(讲义).清华大学精密测试技术及仪器国家重点实验室,2003,8
[5]张国平,叶嘉雄,李再光.二元光学元件的偏振效应.光子学报,1996,25(Z1)：168-171
[6]恽钢,于美文.平条纹面介质光栅衍射之二阶耦合波理论的进一步推广.光学学报,1985,5(6)：488-495.
[7]M. G. Moharam and T. K. Gaylord. Rigorous coupled-wave analysis of planar-grating diffraction. J. Opt. Soc_ Am.,1981,71(7):811-818.
[8]D. Raguin and G. M. Morris. Antireflection structured surfaces for the infrared spectral region. Appl Opt,1993,32(7):1154-1167
[9]傅克祥,王植恒,文军等.位相光栅的衍射级次.光学学报,1998,18(7)：870-876
[10]王植恒,傅克祥,文军等。亚波长位相光栅的反射率特性及其应用.中国激光,1998,25(8)：270-274
[11]E. Noponen, J. Turunen. Eigenmode method for electromagnetic synthesis of diffractive elements with three-dimensional profiles. J. Opt. Soc. Am.,1994, All (9):2494-2502
[12} E. Cz Grann, M. Cx Moharam, D. A. Pommet. Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings. J. Opt. Soc. Am.,1994, All(10):2695-2703
[13]张国平,明海,谢建平等.正交二元位相光栅的减反射特性.中国激光,1997,24(8)：699-702
[14]鱼卫星,卢振武,王鹏等.二维表面浮雕结构的矢量衍射分析。光学学报,2001,21(8)；980-986
[15]鱼卫星,卢振武,王鹏等.锥形轮廓二维亚波长表面浮雕结构的矢量衍射特性.光子学报,2001,30(3)：331-335.
[16]祝绍箕,邹海兴,包学诚等.衍射光栅[M].北京：机械工业出版社,1986.230-256
[17]T. K. Gaylord and M. G. Moharam. Analysis and applications of optical diffraction by gratings.1985,73(5):894-973
[18]王鹏.饰刻光栅的矢量耦合波分析与菲涅耳衍射理论.中国科学院上海光学精密机械研究所博士学位论文,1999,6.
[19]巴音贺希格.衍射光栅色散理论与光栅设计、制作和检验方法研究[博士学位论文].中国科学院长春光学精密机械与物理研究所,2004.5.
[20]平面镀铝衍射光栅的检验,中国科学院长春光学精密机械研究所报告；1979
[21]R.F. Jarrell, G. W. Stroke, Appl. Opfics,1964,3, No.11,1251-1262
[22]王国华等,金属光栅的测试方法及其应用,中国科学院上海光机所、上海光学仪器研究所报告,1982
[23]Lerner J M, Mckinney W R.International conference on the application and theory periodic structures, Proc. SPIE.1991. (1545)
[24]Stroke G W. Diffraction gratings. Encyclopedia of physics.1967. (29)
[25]Benoit deville. Francis Bonnemason and Bruno Touzer. Holographically recorded, ion-etched Variable line space gratings. Proc. DPIE.1998. (3450)
[26]王春霞.复制光栅质量分析[J].光学精密工程,1997,8(4)：70-75.
[27]冯胜.波前检测技术的研究[D].电子科技大学,2009.
[28]王娟,吕丽军.光栅波像差理论的推广[J].上海大学学报(自然科学版),2008,14(2)：177-182.
[29]张淑萍,左嘉,于志远.浅析应用光栅方程满足的实验误差条件[J].大学物理实验,2009,22(1)：82-84.
[30]张明霞,郭小花.斜入射条件下平面光栅的光栅方程研究[J].天水师范学院学报,2006,26(5)：44-47.
[31]Kathman A, Pitalo K. Binary Optics in Lens Design [A].Deenis R Pape. Computer and Optically Formed Holographic Optic[C]. SPIE,1990.1357:116-118.
[32](美)波士隆公司衍射光栅实验室,光栅手册.
[33]Kathman A, Johnson E. The Photonics Handbook [M].Massachusetts:Laurin Publishing,1995. 37-376.
[34]Veldkamp W, Swanson G. High-Efficiency, Multilevel, Diffractive Optical Elements[P]. US: 4895790,1990.
[35]Moharam M, Gaylord T. Diffraction analysis of surface-relief gratings [J]. JOSA,1982,72(10): 1385-1392.
[36]Johnson E, David Brown, H J Heimbeck, et al. Scalar limitations of diffractive optical elements [R]. NASA Pub,3227,1993:107-112.
[37]周倩,李立峰.光谱仪用平场凹面光栅的凸面母光栅的消像差设计思路[J].光谱学与刚谱分析,2009,29(8)：2281-2285.
[38]MalacaraD. Optical shop testing [M].New York/Chichester/Brisbane/Toronto:JohnW iley&Sons Inc,1978.43-45
[49]BriwesJD. Interferometeric testing of optical systems and components:a review [J].Opt and Laser Technol,1972,4:28-41
[40]Wegner P J. Henesian M A, Sainen J T, Wavefront and divergence of the beam let prototype laser [A].1999.:1019-1030.
[2]梁铨廷主编.物理光学(第三版)[M].北京：电子工业出版社,2009：75,164-165.
[3]王文生主编.干涉测试技术[M].北京：兵器工业出版社,1992：1-4.
[4]李立峰.光栅的电磁场理论(讲义).清华大学精密测试技术及仪器国家重点实验室,2003,8
[5]张国平,叶嘉雄,李再光.二元光学元件的偏振效应.光子学报,1996,25(Z1)：168-171
[6]恽钢,于美文.平条纹面介质光栅衍射之二阶耦合波理论的进一步推广.光学学报,1985,5(6)：488-495.
[7]M. G. Moharam and T. K. Gaylord. Rigorous coupled-wave analysis of planar-grating diffraction. J. Opt. Soc_ Am.,1981,71(7):811-818.
[8]D. Raguin and G. M. Morris. Antireflection structured surfaces for the infrared spectral region. Appl Opt,1993,32(7):1154-1167
[9]傅克祥,王植恒,文军等.位相光栅的衍射级次.光学学报,1998,18(7)：870-876
[10]王植恒,傅克祥,文军等。亚波长位相光栅的反射率特性及其应用.中国激光,1998,25(8)：270-274
[11]E. Noponen, J. Turunen. Eigenmode method for electromagnetic synthesis of diffractive elements with three-dimensional profiles. J. Opt. Soc. Am.,1994, All (9):2494-2502
[12} E. Cz Grann, M. Cx Moharam, D. A. Pommet. Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings. J. Opt. Soc. Am.,1994, All(10):2695-2703
[13]张国平,明海,谢建平等.正交二元位相光栅的减反射特性.中国激光,1997,24(8)：699-702
[14]鱼卫星,卢振武,王鹏等.二维表面浮雕结构的矢量衍射分析。光学学报,2001,21(8)；980-986
[15]鱼卫星,卢振武,王鹏等.锥形轮廓二维亚波长表面浮雕结构的矢量衍射特性.光子学报,2001,30(3)：331-335.
[16]祝绍箕,邹海兴,包学诚等.衍射光栅[M].北京：机械工业出版社,1986.230-256
[17]T. K. Gaylord and M. G. Moharam. Analysis and applications of optical diffraction by gratings.1985,73(5):894-973
[18]王鹏.饰刻光栅的矢量耦合波分析与菲涅耳衍射理论.中国科学院上海光学精密机械研究所博士学位论文,1999,6.
[19]巴音贺希格.衍射光栅色散理论与光栅设计、制作和检验方法研究[博士学位论文].中国科学院长春光学精密机械与物理研究所,2004.5.
[20]平面镀铝衍射光栅的检验,中国科学院长春光学精密机械研究所报告；1979
[21]R.F. Jarrell, G. W. Stroke, Appl. Opfics,1964,3, No.11,1251-1262
[22]王国华等,金属光栅的测试方法及其应用,中国科学院上海光机所、上海光学仪器研究所报告,1982
[23]Lerner J M, Mckinney W R.International conference on the application and theory periodic structures, Proc. SPIE.1991. (1545)
[24]Stroke G W. Diffraction gratings. Encyclopedia of physics.1967. (29)
[25]Benoit deville. Francis Bonnemason and Bruno Touzer. Holographically recorded, ion-etched Variable line space gratings. Proc. DPIE.1998. (3450)
[26]王春霞.复制光栅质量分析[J].光学精密工程,1997,8(4)：70-75.
[27]冯胜.波前检测技术的研究[D].电子科技大学,2009.
[28]王娟,吕丽军.光栅波像差理论的推广[J].上海大学学报(自然科学版),2008,14(2)：177-182.
[29]张淑萍,左嘉,于志远.浅析应用光栅方程满足的实验误差条件[J].大学物理实验,2009,22(1)：82-84.
[30]张明霞,郭小花.斜入射条件下平面光栅的光栅方程研究[J].天水师范学院学报,2006,26(5)：44-47.
[31]Kathman A, Pitalo K. Binary Optics in Lens Design [A].Deenis R Pape. Computer and Optically Formed Holographic Optic[C]. SPIE,1990.1357:116-118.
[32](美)波士隆公司衍射光栅实验室,光栅手册.
[33]Kathman A, Johnson E. The Photonics Handbook [M].Massachusetts:Laurin Publishing,1995. 37-376.
[34]Veldkamp W, Swanson G. High-Efficiency, Multilevel, Diffractive Optical Elements[P]. US: 4895790,1990.
[35]Moharam M, Gaylord T. Diffraction analysis of surface-relief gratings [J]. JOSA,1982,72(10): 1385-1392.
[36]Johnson E, David Brown, H J Heimbeck, et al. Scalar limitations of diffractive optical elements [R]. NASA Pub,3227,1993:107-112.
[37]周倩,李立峰.光谱仪用平场凹面光栅的凸面母光栅的消像差设计思路[J].光谱学与刚谱分析,2009,29(8)：2281-2285.
[38]MalacaraD. Optical shop testing [M].New York/Chichester/Brisbane/Toronto:JohnW iley&Sons Inc,1978.43-45
[49]BriwesJD. Interferometeric testing of optical systems and components:a review [J].Opt and Laser Technol,1972,4:28-41
[40]Wegner P J. Henesian M A, Sainen J T, Wavefront and divergence of the beam let prototype laser [A].1999.:1019-1030.