基于MEMS的全固态双增益阿达玛光谱仪关键技术研究
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摘要
为了实现对微弱信号的光谱分析,通常需要增加光谱分析仪器的入射狭缝宽度来增加光谱仪的光通量,这必然会导致光谱仪的分辨率有所下降。为解决微小型光谱仪器中的光通量和分辨率的双增益问题,进行了阿达玛光谱仪的相关理论和关键技术研究。
本文进行了入射狭缝编码设计。采用MEMS工艺技术制作出最小狭缝单元为6μm×6μm的一系列阿达玛微硅片狭缝阵列。通过对目前几种色散型光谱仪的光学结构对比,建立了基于艾伯特-法斯梯光学结构的微小型多通道阿达玛光谱仪的模型。在光学模型的基础上进行了机械结构设计。利用MEMS技术实现了微小型阿达玛光谱仪的集成化。
由于光学软件的限制,对多狭缝的结构形式无法表示。为了描述在光谱仪器的输出端即CCD上接收的光谱辐射强度分布特征,构建了光谱仪器的全仪器函数,完善了色散型光谱仪的分析方法。利用全仪器函数法分析出经过光谱仪器后的光强分布与光谱分布,精确地描述出被测物体在焦平面上的光谱成分。本文研制出小型阿达玛光谱仪原理样机,并对系统的分辨率进行了理论分析。
为实现对多狭缝结构参数设计的优化分析,以衍射理论为基础,构造入射孔的孔径函数及衍射光栅的反射函数,得到经过衍射后的光振动分布,并运用Matlab对光振动分布仿真,搭建了试验测试装置对仿真结果验证。进行了单狭缝与阿达玛循环S23型的衍射光通量对比研究,得出后者比前者衍射光通量提高了3.10倍。以四种S型狭缝阵列为比较对象,分析了狭缝结构参数对光强分布的影响,发现了狭缝的单元边距、单元尺寸和阶数等参数对衍射光强的影响规律。测得阿达玛S15型狭缝阵列比阿达玛循环S15型狭缝阵列的衍射光强提高1.45倍,与理论推导结果相符。
阿达玛光谱仪具有高光通量,高分辨率,很好的机械稳定性,在微光探测上具有一定的优势。
Miniaturization and integration are now leading an important way for spectrum instruments development. However it brings a series of problems. For example how to get high sensitivity, at the same time get high thoughput when measuring. On the basis of theoretical analysis, the construction and principles of dispersive spectrometer and hadamard spectrometer is analyzed.According to the issues above the key technologies of mini spectrometer is proposed in this paper.
And the type and coding of the input slit of the spectrometer have been analyzed. Multi-micro-silicon-slitsmatrices is produced by MEMS technique. Each elment is only 6μm×6μm. We choose the symmetrical optical path system and use optical design software to simulate the actual situation of the optical path, and optimize the system to eliminate coma aberration. The pre and post silicon slits which have such features as small volume and high precision by MEMS technology up to the requirements are designed which brings theoretical support for miniaturization.
Because the limitation of the software,multi-micro-silicon-slits can’t use it. A new method to evaluate the throuput of the spectrometer was proposed,so we can know what the CCD received. The new parameter we call it“The whole spectrometer parameter”, that is based on the whole spectrometer. And it proved to have a good way to designing the spectrometer. The actual diffract situation of input slit of Hadamard spectrometer on throughput after all the optical element. The constant of the spectrom is described precisely on the detecting plane.
The way of analysis can provide some theoretic and applying foundations for slit design. Based on diffract theory, the formula is presented. The phenomenon of diffraction is analysed by using the software of Matlab. The experiment verified that the programmer using the Matlab programming language is reasonable. The performance of traditional silt and Hadamard slitis compared. Feature of the presented device with Hadamard slit is the throughput advantage (up to the factor of 3.10).In order to realize high throughput of Hadamard spectrometer, the performance of four Hadamard S slits are compared. Based on diffract theory, the formula with Hadamard S matrix is presented. The compare between the Matlab simulating picture and the actual diffract picture of S slits on throughput. The influence of the factors such as the spot distance、slit dimension and the matrix array on the throughput is analyzed, then the diffracting way of S slit was offered. The set of experiments run with the system compare the performance of Hadamard S (N=15) and Hadamard cyclic-S (N=15). Feature of the presented device with Hadamard S (N=15) is the throughput advantage (up to the factor of 1.45).
In order to realize spectral analysis of weak signal, a Hadamard spectrometer of high throughput ,high resolution and stable is established.
本文进行了入射狭缝编码设计。采用MEMS工艺技术制作出最小狭缝单元为6μm×6μm的一系列阿达玛微硅片狭缝阵列。通过对目前几种色散型光谱仪的光学结构对比,建立了基于艾伯特-法斯梯光学结构的微小型多通道阿达玛光谱仪的模型。在光学模型的基础上进行了机械结构设计。利用MEMS技术实现了微小型阿达玛光谱仪的集成化。
由于光学软件的限制,对多狭缝的结构形式无法表示。为了描述在光谱仪器的输出端即CCD上接收的光谱辐射强度分布特征,构建了光谱仪器的全仪器函数,完善了色散型光谱仪的分析方法。利用全仪器函数法分析出经过光谱仪器后的光强分布与光谱分布,精确地描述出被测物体在焦平面上的光谱成分。本文研制出小型阿达玛光谱仪原理样机,并对系统的分辨率进行了理论分析。
为实现对多狭缝结构参数设计的优化分析,以衍射理论为基础,构造入射孔的孔径函数及衍射光栅的反射函数,得到经过衍射后的光振动分布,并运用Matlab对光振动分布仿真,搭建了试验测试装置对仿真结果验证。进行了单狭缝与阿达玛循环S23型的衍射光通量对比研究,得出后者比前者衍射光通量提高了3.10倍。以四种S型狭缝阵列为比较对象,分析了狭缝结构参数对光强分布的影响,发现了狭缝的单元边距、单元尺寸和阶数等参数对衍射光强的影响规律。测得阿达玛S15型狭缝阵列比阿达玛循环S15型狭缝阵列的衍射光强提高1.45倍,与理论推导结果相符。
阿达玛光谱仪具有高光通量,高分辨率,很好的机械稳定性,在微光探测上具有一定的优势。
Miniaturization and integration are now leading an important way for spectrum instruments development. However it brings a series of problems. For example how to get high sensitivity, at the same time get high thoughput when measuring. On the basis of theoretical analysis, the construction and principles of dispersive spectrometer and hadamard spectrometer is analyzed.According to the issues above the key technologies of mini spectrometer is proposed in this paper.
And the type and coding of the input slit of the spectrometer have been analyzed. Multi-micro-silicon-slitsmatrices is produced by MEMS technique. Each elment is only 6μm×6μm. We choose the symmetrical optical path system and use optical design software to simulate the actual situation of the optical path, and optimize the system to eliminate coma aberration. The pre and post silicon slits which have such features as small volume and high precision by MEMS technology up to the requirements are designed which brings theoretical support for miniaturization.
Because the limitation of the software,multi-micro-silicon-slits can’t use it. A new method to evaluate the throuput of the spectrometer was proposed,so we can know what the CCD received. The new parameter we call it“The whole spectrometer parameter”, that is based on the whole spectrometer. And it proved to have a good way to designing the spectrometer. The actual diffract situation of input slit of Hadamard spectrometer on throughput after all the optical element. The constant of the spectrom is described precisely on the detecting plane.
The way of analysis can provide some theoretic and applying foundations for slit design. Based on diffract theory, the formula is presented. The phenomenon of diffraction is analysed by using the software of Matlab. The experiment verified that the programmer using the Matlab programming language is reasonable. The performance of traditional silt and Hadamard slitis compared. Feature of the presented device with Hadamard slit is the throughput advantage (up to the factor of 3.10).In order to realize high throughput of Hadamard spectrometer, the performance of four Hadamard S slits are compared. Based on diffract theory, the formula with Hadamard S matrix is presented. The compare between the Matlab simulating picture and the actual diffract picture of S slits on throughput. The influence of the factors such as the spot distance、slit dimension and the matrix array on the throughput is analyzed, then the diffracting way of S slit was offered. The set of experiments run with the system compare the performance of Hadamard S (N=15) and Hadamard cyclic-S (N=15). Feature of the presented device with Hadamard S (N=15) is the throughput advantage (up to the factor of 1.45).
In order to realize spectral analysis of weak signal, a Hadamard spectrometer of high throughput ,high resolution and stable is established.
引文
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