RFID封装线预绑定模块的视觉与运动集成研究
摘要
集成电路(IC)是现代信息产业和信息社会的基础,是改造和提升传统产业的核心技术。随着全球信息化和网络化的发展,IC产业的地位越来越重要。作为IC集成电路产业发展的基础性工作,IC制造已成为制造业最重要的领域之一,是集国家利益、人类智慧和最新科技于一体的基础性和战略性产业。然目前的IC封装设备主要还是由国外垄断,因此尽快实现微电子设备的自主开发就成了我国的迫切任务。本课题受到国家自然科学基金重大项目“先进电子制造中的重要科学技术问题研究”的资助,专门针对RFID倒装芯片封装设备中的预绑定模块进行视觉系统和运动控制集成的研究。
1.对倒装芯片封装设备的功能进行划分,详细介绍了每个功能模块的机构组成及实际作用,并提出模块单元所必须达到的基本要求,最终将研究目标主要锁定在其中最为复杂的模块——预绑定模块。
2.对预绑定模块的视觉系统的各个部件进行具体设计,根据机构上的实际工作空间选择摄像机、镜头、光源等。并根据标定的原理和现有的方法,对摄像机进行标定。
3.对预绑定模块的视觉定位算法进行了详尽的研究。预绑定
Integrate circuit is the foundation of the information industry and information society as well as the core technology which can improve the traditional industry. The position of the IC industry is more and more important as the development of the global information and network. IC manufacture is the most important field of the manufacturing, and is the basic and strategic industry. But the IC packaging machine now is mainly monopolized by market abroad. So it is a very urgent task to develop the packaging machine quickly by our own. The project researches the integration of the vision and motion parts of the pre-bonding module of RFID flip chip packaging machine.
1. We divide the function of the flip chip packaging machine into several modules, and demonstrate the composition and the use of every module very carefully. Then we mainly discuss about the most complex module, pre-bonding module.
2. Every part of the visual system of the pre-bonding module is
1.对倒装芯片封装设备的功能进行划分,详细介绍了每个功能模块的机构组成及实际作用,并提出模块单元所必须达到的基本要求,最终将研究目标主要锁定在其中最为复杂的模块——预绑定模块。
2.对预绑定模块的视觉系统的各个部件进行具体设计,根据机构上的实际工作空间选择摄像机、镜头、光源等。并根据标定的原理和现有的方法,对摄像机进行标定。
3.对预绑定模块的视觉定位算法进行了详尽的研究。预绑定
Integrate circuit is the foundation of the information industry and information society as well as the core technology which can improve the traditional industry. The position of the IC industry is more and more important as the development of the global information and network. IC manufacture is the most important field of the manufacturing, and is the basic and strategic industry. But the IC packaging machine now is mainly monopolized by market abroad. So it is a very urgent task to develop the packaging machine quickly by our own. The project researches the integration of the vision and motion parts of the pre-bonding module of RFID flip chip packaging machine.
1. We divide the function of the flip chip packaging machine into several modules, and demonstrate the composition and the use of every module very carefully. Then we mainly discuss about the most complex module, pre-bonding module.
2. Every part of the visual system of the pre-bonding module is
引文
[1]谢恩桓. 新世纪 IC 封装的回顾和发展趋势展望[J]. 电子与封装, 2003,3(4):1～5
[2]鲜飞. 芯片封装技术的发展演变[J].世界电子元器件,2004,No.03
[3]鲜飞.芯片封装技术的发展[J].电子元器件应用,2006,1:92～95
[4]罗兵、钟良吉.基于机器视觉的 SMT 自动检测[J].荆门职业技术学院学报,2006 Vol.21 No.3
[5]梅万余.半导体封装形式介绍[J].电子工业专用设备,2005 Vol.34 No.5
[6]胡永芳、薛松柏、禹胜林. QFP 结构微焊点强度的试验[J].焊接学报,2005 Vol.26 No.10
[7]关亚男、金娜、姚秀华.TAB 载体工艺技术研究[J].微处理机,2001 No.01
[8]胡志勇.对表面贴装设备带来影响的 BGA 器件[J].电子工业专用设备,2005 Vol.34 No.10
[9]胡强.BGA 组装技术与工艺[J].电子元件与材料,2006 Vol.25 No.6
[10]郭大琪、华丞.CSP 封装技术[J].电子与封装,2003 Vol.3 No.4
[11]何君.CSP--有前景的 IC 封装技术[J].电子与封装,2002 Vol.2 No.3
[12]鲜飞.QFN 封装元件组装工艺技术的研究[J].印制电路信息,2005 No.11
[13]田胜军.多芯片组件(MCM)技术及封装趋势[J].中国科技信息,2005 No.16
[14]杨建生.倒装芯片的高速度、低成本、无铅化挑战[J].电子与封装,2006 Vol.6 No.9
[15]黄强.倒装芯片与表面贴装工艺[J].电子与封装,2003,3(6):35～37
[16]张涛, 李莉. 面积阵列封装—BGA 和 Flip Chip[J]. 电子工艺技术, 1999,20(1):6～11
[17]黄玉财、程秀兰、蔡俊荣.集成电路封装中的引线键合技术[J].电子与封装,2006 Vol.6 No.7
[18]何田.引线键合技术的现状和发展趋势[J].电子工业专业设备,2004,Vol.33.NO.10
[19]裴为华、邓晖、陈弘达.现代微光电子封装中的倒装焊技术[J].微纳电子技术,2003 Vol.40 No.7
[20]李林炎. 倒装片装配的设备和工艺[J].今日电子,2000,2:23～24
[21]马孝松、陈建军.低膨胀系数底充胶对倒装焊焊点疲劳可靠性的影响[J].机械设计与研究,2005 Vol.21 No.3
[22]吴丰顺、郑宗林、吴懿平.倒装芯片封装材料-各向异性导电胶的研究进展[J].电子工艺技术,2004 Vol.25 No.4
[23]范敦浩.图像监控系统摄像机和镜头的选择[J].通信电源技术,2003,8:23-27
[24]杨明,白烨,王秋良等.面阵 CCD 摄像机光学镜头参数及选用[J].光电子技术与信息, 2005 Vol.18 No.3
[25]A. M.,Henderson, S. T.,灯与照明[M],轻工业出版社,1976
[26]周太明.电气照明设计[M],复旦大学出版社,2001
[27]CCS 系列光源产品说明书
[28] Roger Y.Tsai, A versatile camera calibration technique for high-accuracy 3D machine vision metrology using off-the-shelf TV cameras and lenses,IEEE Journal of robotics and automation, vol. RA-3, no.4, pp.323-344, 1987
[29]Mohamed, Bénallal, Jean Meunier. Camera Calibration with a Viewfinder, The 15th International Conference on Vision Interface, Calgary, Canada, May 27-29, 2002
[30] Dai, S., Ji, Q., A new technique for camera self-calibration, Robotics and Automation, 2001. Proceedings 2001 ICRA. IEEE International Conference on , Vol.3,pp.2165 – 2170, 2001
[31] B. Caprile and V. Torre, Using vanishing points for camera calibration, Int. J. Comput. Vision, vol.4, pp.127-140,1990
[32] Hanqi Zhuang and Wen-Chiang Wu.Camera Calibration with a Near-Parallel(ill-Conditioned) Calibration Board Configuration. IEEE transactions on Robotics and Automation, Vol. 12, no. 6, pp.918-921, 1996
[33] 叶其春,面向倒装芯片焊接的视觉对准系统的研究[D].上海交通大学硕士论文,2004
[34] Qiushuang Zhang and Harris I.G., A domain coverage metric for the validation of behavioral VHDL descriptions, Test Conference, 2000. Proceedings. International, 3-5 Oct. 2000, pp.302-308
[35]C Harris and M.Stephens. A Combined Corner and Edge Detector. In Proceedings Alvey Conference, 1988:189-192
[36]刘艳新, 冯志刚. 面阵列封装器件的贴装技术[J]. 电子工业技术,2003,24(1):10～12
[37]方志斌,莫锦秋,梁庆华.用不同扫描方式的CCD相机实现飞行取相[J], 光学仪器, 2003,Vo1.25No.2
[38]Kenneth R.Castleman. Digital image processing[M].北京:清华大学出版社,2003
[39]杨枝灵,王开.Visual C++数字图像获取、处理及实践应用[M],人民邮电出版社,2003
[40]冈萨雷斯.数字图像处理(MATLAB版)[M].北京:电子工业出版社,2005
[41]何斌,马天予,王运坚.Visual C++数字图像处理[M],人民邮电出版社,2001
[42]刘关松,吕嘉雯.徐建国,高敦岳.一种新的二值图像标记的快速算法[J].计算机工程与应用2002:(4):57-59
[43] B. Srinivasa. Reddy and B. N. Chatterji, An FFT-Based technique for translation, rotation, and scale-invariant image registration, IEEE Transactions on Image Processing, vol. 5, no. 8, pp. 1266-1271, 1996
[44] Y.Keller, A.Averbuch, M.Isreali, Pseudo-polar based estimation of large translations rotations andscalings in images[A]. IEEE Transactions on Image Processing. 2002.
[45] Onishi H,Suzuki H. Detection of rotation and paraller translation using Hough and Fourier transforms[A]. IEEE Inter Conf Image Processing[C]. 1996. 827-830.
[46]朱俊青,王林泉,葛元.基于模板匹配的快速人脸定位[J].计算机工程,2002,9:28-9
[47] Li Zhongke, Wu lenan. Image registration on Hough transform and phase correlation[A]. IEEE ICNNSP[C].2003.956-959.
[48] 李中科,杨晓辉,吴乐南. 针对旋转和平移运动的一种图像配准方法[J].应用科学学报,2005,5:23-3
[49] Alliney S,Morandi C.Digital image registration using projections[J].IEEE PAMI,1986,8(2):222—233.
[50]Delta Tau Data system Inc. PMAC User Manual,1998,4
[51]Delta Tau Data system Inc. PMAC/Pmac2 Software References.1998,4
[52] 吴玉厚、潘振宁、张珂.PMAC 控制器中 PID 调节的应用[J].沈阳建筑工程学院学报(自然科学版),2004 Vol.20 No.2
[53]景奉水,机器人视觉伺服控制及其实现的研究[D],中国科学院自动化研究所博士学位论文,2002
[54]Zhengyou Zhang.A flexible new technique for camera calibration[J].IEEE Transactions on pattern analysis and machine intelligence,2000;22(11):1330~1334
[2]鲜飞. 芯片封装技术的发展演变[J].世界电子元器件,2004,No.03
[3]鲜飞.芯片封装技术的发展[J].电子元器件应用,2006,1:92～95
[4]罗兵、钟良吉.基于机器视觉的 SMT 自动检测[J].荆门职业技术学院学报,2006 Vol.21 No.3
[5]梅万余.半导体封装形式介绍[J].电子工业专用设备,2005 Vol.34 No.5
[6]胡永芳、薛松柏、禹胜林. QFP 结构微焊点强度的试验[J].焊接学报,2005 Vol.26 No.10
[7]关亚男、金娜、姚秀华.TAB 载体工艺技术研究[J].微处理机,2001 No.01
[8]胡志勇.对表面贴装设备带来影响的 BGA 器件[J].电子工业专用设备,2005 Vol.34 No.10
[9]胡强.BGA 组装技术与工艺[J].电子元件与材料,2006 Vol.25 No.6
[10]郭大琪、华丞.CSP 封装技术[J].电子与封装,2003 Vol.3 No.4
[11]何君.CSP--有前景的 IC 封装技术[J].电子与封装,2002 Vol.2 No.3
[12]鲜飞.QFN 封装元件组装工艺技术的研究[J].印制电路信息,2005 No.11
[13]田胜军.多芯片组件(MCM)技术及封装趋势[J].中国科技信息,2005 No.16
[14]杨建生.倒装芯片的高速度、低成本、无铅化挑战[J].电子与封装,2006 Vol.6 No.9
[15]黄强.倒装芯片与表面贴装工艺[J].电子与封装,2003,3(6):35～37
[16]张涛, 李莉. 面积阵列封装—BGA 和 Flip Chip[J]. 电子工艺技术, 1999,20(1):6～11
[17]黄玉财、程秀兰、蔡俊荣.集成电路封装中的引线键合技术[J].电子与封装,2006 Vol.6 No.7
[18]何田.引线键合技术的现状和发展趋势[J].电子工业专业设备,2004,Vol.33.NO.10
[19]裴为华、邓晖、陈弘达.现代微光电子封装中的倒装焊技术[J].微纳电子技术,2003 Vol.40 No.7
[20]李林炎. 倒装片装配的设备和工艺[J].今日电子,2000,2:23～24
[21]马孝松、陈建军.低膨胀系数底充胶对倒装焊焊点疲劳可靠性的影响[J].机械设计与研究,2005 Vol.21 No.3
[22]吴丰顺、郑宗林、吴懿平.倒装芯片封装材料-各向异性导电胶的研究进展[J].电子工艺技术,2004 Vol.25 No.4
[23]范敦浩.图像监控系统摄像机和镜头的选择[J].通信电源技术,2003,8:23-27
[24]杨明,白烨,王秋良等.面阵 CCD 摄像机光学镜头参数及选用[J].光电子技术与信息, 2005 Vol.18 No.3
[25]A. M.,Henderson, S. T.,灯与照明[M],轻工业出版社,1976
[26]周太明.电气照明设计[M],复旦大学出版社,2001
[27]CCS 系列光源产品说明书
[28] Roger Y.Tsai, A versatile camera calibration technique for high-accuracy 3D machine vision metrology using off-the-shelf TV cameras and lenses,IEEE Journal of robotics and automation, vol. RA-3, no.4, pp.323-344, 1987
[29]Mohamed, Bénallal, Jean Meunier. Camera Calibration with a Viewfinder, The 15th International Conference on Vision Interface, Calgary, Canada, May 27-29, 2002
[30] Dai, S., Ji, Q., A new technique for camera self-calibration, Robotics and Automation, 2001. Proceedings 2001 ICRA. IEEE International Conference on , Vol.3,pp.2165 – 2170, 2001
[31] B. Caprile and V. Torre, Using vanishing points for camera calibration, Int. J. Comput. Vision, vol.4, pp.127-140,1990
[32] Hanqi Zhuang and Wen-Chiang Wu.Camera Calibration with a Near-Parallel(ill-Conditioned) Calibration Board Configuration. IEEE transactions on Robotics and Automation, Vol. 12, no. 6, pp.918-921, 1996
[33] 叶其春,面向倒装芯片焊接的视觉对准系统的研究[D].上海交通大学硕士论文,2004
[34] Qiushuang Zhang and Harris I.G., A domain coverage metric for the validation of behavioral VHDL descriptions, Test Conference, 2000. Proceedings. International, 3-5 Oct. 2000, pp.302-308
[35]C Harris and M.Stephens. A Combined Corner and Edge Detector. In Proceedings Alvey Conference, 1988:189-192
[36]刘艳新, 冯志刚. 面阵列封装器件的贴装技术[J]. 电子工业技术,2003,24(1):10～12
[37]方志斌,莫锦秋,梁庆华.用不同扫描方式的CCD相机实现飞行取相[J], 光学仪器, 2003,Vo1.25No.2
[38]Kenneth R.Castleman. Digital image processing[M].北京:清华大学出版社,2003
[39]杨枝灵,王开.Visual C++数字图像获取、处理及实践应用[M],人民邮电出版社,2003
[40]冈萨雷斯.数字图像处理(MATLAB版)[M].北京:电子工业出版社,2005
[41]何斌,马天予,王运坚.Visual C++数字图像处理[M],人民邮电出版社,2001
[42]刘关松,吕嘉雯.徐建国,高敦岳.一种新的二值图像标记的快速算法[J].计算机工程与应用2002:(4):57-59
[43] B. Srinivasa. Reddy and B. N. Chatterji, An FFT-Based technique for translation, rotation, and scale-invariant image registration, IEEE Transactions on Image Processing, vol. 5, no. 8, pp. 1266-1271, 1996
[44] Y.Keller, A.Averbuch, M.Isreali, Pseudo-polar based estimation of large translations rotations andscalings in images[A]. IEEE Transactions on Image Processing. 2002.
[45] Onishi H,Suzuki H. Detection of rotation and paraller translation using Hough and Fourier transforms[A]. IEEE Inter Conf Image Processing[C]. 1996. 827-830.
[46]朱俊青,王林泉,葛元.基于模板匹配的快速人脸定位[J].计算机工程,2002,9:28-9
[47] Li Zhongke, Wu lenan. Image registration on Hough transform and phase correlation[A]. IEEE ICNNSP[C].2003.956-959.
[48] 李中科,杨晓辉,吴乐南. 针对旋转和平移运动的一种图像配准方法[J].应用科学学报,2005,5:23-3
[49] Alliney S,Morandi C.Digital image registration using projections[J].IEEE PAMI,1986,8(2):222—233.
[50]Delta Tau Data system Inc. PMAC User Manual,1998,4
[51]Delta Tau Data system Inc. PMAC/Pmac2 Software References.1998,4
[52] 吴玉厚、潘振宁、张珂.PMAC 控制器中 PID 调节的应用[J].沈阳建筑工程学院学报(自然科学版),2004 Vol.20 No.2
[53]景奉水,机器人视觉伺服控制及其实现的研究[D],中国科学院自动化研究所博士学位论文,2002
[54]Zhengyou Zhang.A flexible new technique for camera calibration[J].IEEE Transactions on pattern analysis and machine intelligence,2000;22(11):1330~1334