激光尘埃粒子计数器的国产化研究与开发
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摘要
随着电子、精密机械加工、军工、医疗、药品和食品生产等行业的发展，对空气中尘埃粒子和细菌微粒的控制要求越来越高。激光尘埃粒子计数器作为一种有效的空气洁净度监测设备，其市场需求量越来越大。由于目前这类监测设备多为国外产品，产品价格昂贵，维修困难，而国内生产厂家数量和生产能力有限，且激光尘埃粒子计数器的关键零件和相关器件受外商控制。因此，进行激光尘埃粒子计数器的国产化研究和开发具有现实意义和实用价值。
在分析国外产品的基础上，确定了仪器国产化研究和开发的方向、重点和难点，论文主要阐述了激光尘埃粒子计数器的关键部件——光学传感器的研究和开发生产，解决了如下问题：
(1)通过研究比较分析，确定了激光尘埃粒子计数器光学传感器的结构，主要包括光源的选择、照明系统设计和散射光收集系统设计。传感器采用半导体激光器作为光源，并采用直角方向散射光收集形式，与洁净室的环境相适应，而且能获得较高的信噪比，计数效率更高。
(2)探索了尘埃粒子计数器传感器中的主要结构件---椭球反射镜的设计和加工，在满足仪器性能的前提下，结合本地区的加工能力，通过一系列加工试验，采用Ly12制造椭球面反射镜，并将其加工分为四个阶段：精密数控车削成型、精密研磨、精密抛光和镜面镀膜，优化了加工工艺、降低了制造成本。
(3)由于喷嘴形状对被测气流的流动状态影响大，通过分析和实验改进了采样口喷嘴结构；并对仪器进行了产品的工业设计。
研制开发的激光尘埃粒子计数器，国产化程度高，关键结构零件及相关器件实现了国内制造和采购，因此，大大降低了生产成本。通过仪器对标准粒子的测量结果，验证说明了产品的设计生产是合格和成功的。产品采样流量2.83L／min，最小检测粒径0.3μm，六种粒径计数，结构简单，外形小巧、美观大方，安装调试方便，测试精度高，相对于国外同类产品，价格优势明显。
With the development of such industries as electronics, precision optical machinery processing, war industry, medical treatment, medicines and food production, it is increasingly demanded to control the airborne particles and germ particles in air. As an effective air cleanliness measuring equipment, Laser APC is needed increasingly in market. Because such measuring equipments are mostly imported production, the price is very high and it is very difficult to repair. Owing to the limited factories, low production ability and foreign tradesmen controlling the key and relative parts of Laser APC, it is practical and useful to make domestic research and development of laser airborne particle counter.
On the base of analyzing foreign products, the essay puts forward the domestic research and development of the instrument, mainly focusing on the key parts of laser APC——research and development of Optical Transducer——and resolves following questions:
(1) Defining the construction of optical transducer in laser APC,——mainly including the selection of light source, design for the lighting system and optical system through studying and comparing analyzing and in the form of right angle optical collecting.
(2) Exploring the main construction parts in the APC transducer——the design and processing of ellipse reflective mirror. Under the pre-condition for meeting the instrument's functions, according to the local ability to process ,we can divide the processing into four steps by a series of processing experiments with Ly12 making ellipse reflective mirror----precision numerical control turning shaping, precision grinding, precision polishing and coating high reflective film on turned aluminum mirror---- to modify processing technology and to reduce the cost.
(3) Improving the structure of the sample spray mouth because the shape of the spray head has great influence on the floating state of the tested air and making a industrial product designing for the instrument.
The laser APC is highly made in China; the key structural and relative partscan be made and bought at home. So the producing cost is decreased greatly. Bythe results of instrument's measuring standard particles, it proved that the designand manufacturing of the product are up to standard and successful. The samplingof air about the product is 2.83L/min; the tiniest particle diameter is 0.3μm; thereare six ways of measuring the particle diameter. Compared with the same ones inforeign country, the product—simple, small and exquisite, beautiful and dignified,convenient to fix and debug, highly precised----has the obvious advantage in price.
在分析国外产品的基础上，确定了仪器国产化研究和开发的方向、重点和难点，论文主要阐述了激光尘埃粒子计数器的关键部件——光学传感器的研究和开发生产，解决了如下问题：
(1)通过研究比较分析，确定了激光尘埃粒子计数器光学传感器的结构，主要包括光源的选择、照明系统设计和散射光收集系统设计。传感器采用半导体激光器作为光源，并采用直角方向散射光收集形式，与洁净室的环境相适应，而且能获得较高的信噪比，计数效率更高。
(2)探索了尘埃粒子计数器传感器中的主要结构件---椭球反射镜的设计和加工，在满足仪器性能的前提下，结合本地区的加工能力，通过一系列加工试验，采用Ly12制造椭球面反射镜，并将其加工分为四个阶段：精密数控车削成型、精密研磨、精密抛光和镜面镀膜，优化了加工工艺、降低了制造成本。
(3)由于喷嘴形状对被测气流的流动状态影响大，通过分析和实验改进了采样口喷嘴结构；并对仪器进行了产品的工业设计。
研制开发的激光尘埃粒子计数器，国产化程度高，关键结构零件及相关器件实现了国内制造和采购，因此，大大降低了生产成本。通过仪器对标准粒子的测量结果，验证说明了产品的设计生产是合格和成功的。产品采样流量2.83L／min，最小检测粒径0.3μm，六种粒径计数，结构简单，外形小巧、美观大方，安装调试方便，测试精度高，相对于国外同类产品，价格优势明显。
With the development of such industries as electronics, precision optical machinery processing, war industry, medical treatment, medicines and food production, it is increasingly demanded to control the airborne particles and germ particles in air. As an effective air cleanliness measuring equipment, Laser APC is needed increasingly in market. Because such measuring equipments are mostly imported production, the price is very high and it is very difficult to repair. Owing to the limited factories, low production ability and foreign tradesmen controlling the key and relative parts of Laser APC, it is practical and useful to make domestic research and development of laser airborne particle counter.
On the base of analyzing foreign products, the essay puts forward the domestic research and development of the instrument, mainly focusing on the key parts of laser APC——research and development of Optical Transducer——and resolves following questions:
(1) Defining the construction of optical transducer in laser APC,——mainly including the selection of light source, design for the lighting system and optical system through studying and comparing analyzing and in the form of right angle optical collecting.
(2) Exploring the main construction parts in the APC transducer——the design and processing of ellipse reflective mirror. Under the pre-condition for meeting the instrument's functions, according to the local ability to process ,we can divide the processing into four steps by a series of processing experiments with Ly12 making ellipse reflective mirror----precision numerical control turning shaping, precision grinding, precision polishing and coating high reflective film on turned aluminum mirror---- to modify processing technology and to reduce the cost.
(3) Improving the structure of the sample spray mouth because the shape of the spray head has great influence on the floating state of the tested air and making a industrial product designing for the instrument.
The laser APC is highly made in China; the key structural and relative partscan be made and bought at home. So the producing cost is decreased greatly. Bythe results of instrument's measuring standard particles, it proved that the designand manufacturing of the product are up to standard and successful. The samplingof air about the product is 2.83L/min; the tiniest particle diameter is 0.3μm; thereare six ways of measuring the particle diameter. Compared with the same ones inforeign country, the product—simple, small and exquisite, beautiful and dignified,convenient to fix and debug, highly precised----has the obvious advantage in price.
引文
[1] 建筑部标准定额研究所编，工程建设标准年册，2002
[2] 张建春，黄机质，郝新敏，织物防水透湿原理与层压织物生产技术，中国纺织出版社，2003：177-178
[3] 许钟麟编著，洁净室设计，地震出版社，1994：1-5
[4] 凌强编著，食品营养与卫生，旅游教育出版社，2002：146
[5] 马绪荣、苏德模，药品微生物学检验手册，科学出版社，2000：1-8
[6] US Fegeral Standard, FED-STD-209E, Airborne partigulate cleanliness classes in cleanrooms and clean zones[S]. September 11, 1992
[7] 曹光明主编，中药制药工程学，化学工业出版社，2004
[8] 宋业辉、王君山等．尘埃粒子计数器的性能试验方法．洁净与空调技术，2005．3：53-56
[9] M. Born and E. Wolf, Principle of Optics, New York: Pergoman Press, 1975
[10] 黄惠杰，邹海兴，马国欣，尘埃粒子的激光散射测量，光学仪器，1992．4：1-6
[11] 上海市测试技术研究所，JJG 547-88《尘埃粒子计数器试行检定规程》：1-5
[12] 张敏等，基于光散射原理的尘埃粒子检测仪，仪器仪表学报，2005．12：1298-1301
[13] 赫光生，雷仕湛编著，《激光器设计基础》，上海科学技术出版社，1979年：13-16
[14] K. Suda. Instrument for the size determination of submicron particulates system by sideway ligh scattering method. Rew. Sci. Instrum. 1980, 51(8), 1040-1058
[15] 黄惠杰、邹海兴，BCJ-1尘埃粒子计数器光学系统的设计，光学仪器，1995．17(6)：11-16
[16] 易磊隽，张溢．激光尘埃粒子计数器传感器的国产化研究．机械，2006．10：53
[17] 罗松保，张建明．非球面曲面的超精密加工与测量技术的研究．制造技术与机床，2003．9：58
[18] 王洪祥等，非球面超精密加工机床的发展状况，机械工程师，2005．5：14-15
[19] 杨叔子主编，机械加工工艺师手册，机械工业出版社，2001：1206-1214
[20] 李全胜等，光学自由曲面数控研磨技术研究，机械工艺师，1998．10；6-8
[21] 林洁琼等，采用混联机床研抛模具自由曲面，吉林大学学报，2006．3：209-212
[22] 张云熙，非球面超精密镜面的抛光加工，光学技术，1995．4：17-19
[23] 邸英浩，曹晓明．真空镀膜技术的现状及发展．天津冶金，2004．5：45-46
[24] 钱苗根，姚寿山等．现代表面技术．北京：机械工业出版社，2002．5：228-232
[25] 林永昌，卢维强．光学薄膜原理．北京：国防工业出版社，1988
[26] 朱瑾等，车削铝镜红外高反射膜镀制，光电工程，2004．5：70-72
[27] 顾培夫．薄膜技术．杭州：浙江大学出版社．1990
[28] 张东辉、郝勇超．层流等离子喷涂设备及工艺初步研究．机械工人，2006．1：55-56
[29] 易磊隽，张溢．激光尘埃粒子计数器传感器的国产化研究．机械，2006．10：54
[30] 纪运景等，不同光源对激光尘埃粒子计数器性能的影响，红外与激光工程，2004．6：264-266
[31] 陈焕等，浅析现代工业设计与产品、企业、市场的关系，河北建筑科技学院学报，2006．1：21-22
[32] 闫卫编著，工业产品造型设计程序与实例，机械工业出版社，2003．2：88-120
[2] 张建春，黄机质，郝新敏，织物防水透湿原理与层压织物生产技术，中国纺织出版社，2003：177-178
[3] 许钟麟编著，洁净室设计，地震出版社，1994：1-5
[4] 凌强编著，食品营养与卫生，旅游教育出版社，2002：146
[5] 马绪荣、苏德模，药品微生物学检验手册，科学出版社，2000：1-8
[6] US Fegeral Standard, FED-STD-209E, Airborne partigulate cleanliness classes in cleanrooms and clean zones[S]. September 11, 1992
[7] 曹光明主编，中药制药工程学，化学工业出版社，2004
[8] 宋业辉、王君山等．尘埃粒子计数器的性能试验方法．洁净与空调技术，2005．3：53-56
[9] M. Born and E. Wolf, Principle of Optics, New York: Pergoman Press, 1975
[10] 黄惠杰，邹海兴，马国欣，尘埃粒子的激光散射测量，光学仪器，1992．4：1-6
[11] 上海市测试技术研究所，JJG 547-88《尘埃粒子计数器试行检定规程》：1-5
[12] 张敏等，基于光散射原理的尘埃粒子检测仪，仪器仪表学报，2005．12：1298-1301
[13] 赫光生，雷仕湛编著，《激光器设计基础》，上海科学技术出版社，1979年：13-16
[14] K. Suda. Instrument for the size determination of submicron particulates system by sideway ligh scattering method. Rew. Sci. Instrum. 1980, 51(8), 1040-1058
[15] 黄惠杰、邹海兴，BCJ-1尘埃粒子计数器光学系统的设计，光学仪器，1995．17(6)：11-16
[16] 易磊隽，张溢．激光尘埃粒子计数器传感器的国产化研究．机械，2006．10：53
[17] 罗松保，张建明．非球面曲面的超精密加工与测量技术的研究．制造技术与机床，2003．9：58
[18] 王洪祥等，非球面超精密加工机床的发展状况，机械工程师，2005．5：14-15
[19] 杨叔子主编，机械加工工艺师手册，机械工业出版社，2001：1206-1214
[20] 李全胜等，光学自由曲面数控研磨技术研究，机械工艺师，1998．10；6-8
[21] 林洁琼等，采用混联机床研抛模具自由曲面，吉林大学学报，2006．3：209-212
[22] 张云熙，非球面超精密镜面的抛光加工，光学技术，1995．4：17-19
[23] 邸英浩，曹晓明．真空镀膜技术的现状及发展．天津冶金，2004．5：45-46
[24] 钱苗根，姚寿山等．现代表面技术．北京：机械工业出版社，2002．5：228-232
[25] 林永昌，卢维强．光学薄膜原理．北京：国防工业出版社，1988
[26] 朱瑾等，车削铝镜红外高反射膜镀制，光电工程，2004．5：70-72
[27] 顾培夫．薄膜技术．杭州：浙江大学出版社．1990
[28] 张东辉、郝勇超．层流等离子喷涂设备及工艺初步研究．机械工人，2006．1：55-56
[29] 易磊隽，张溢．激光尘埃粒子计数器传感器的国产化研究．机械，2006．10：54
[30] 纪运景等，不同光源对激光尘埃粒子计数器性能的影响，红外与激光工程，2004．6：264-266
[31] 陈焕等，浅析现代工业设计与产品、企业、市场的关系，河北建筑科技学院学报，2006．1：21-22
[32] 闫卫编著，工业产品造型设计程序与实例，机械工业出版社，2003．2：88-120