类SCARA动平台可连续回转并联机器人的性能分析
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摘要
本文在分析了满足现状发展的硅片传输机器人技术与设备基础上,研究了一种动平台可连续回转的三自由度并联机器人机构。在机构构型之后,研究了该机构的自由度、运动学建模与仿真、尺度综合、动力学建模与仿真等关键技术,为硅片搬运机械手样机的设计和平台建造提供了理论基础,论文主要研究内容如下:
第一部分分析IC产业对硅片搬运机器人的需求并结合串并联机器人的优缺点,研究了一种并联形式的硅片传输机器人机构(称它为类SCARA动平台可连续回转并联机器人)。与传统的并联机器人相比,该机构采用3个支链嵌套而成,其动平台可以实现360 ?连续回转以及机械手的径向进给动作。以螺旋理论为基础,写出了机构各支链的螺旋系,然后求得相应的反螺旋,最后利用修正的Grübler–Kutzbach(G-K)公式计算出了类SCARA并联机器人的自由度,完成了机构的构型。
第二部分在柱坐标中,建立了并联闭环机构的位置、速度、加速度模型,在此基础上分析了该机构的奇异位型,并对末端机械手的位置、速度和加速度进行了仿真,得到了末端机械手的运动变化曲线。通过结合雅克比矩阵条件数全域均值性能指标与波动幅度性能指标构造出全域综合性能指标,构建约束条件并给定初值范围。调用MATLAB工具箱中的fmincon函数优化出了满足约束条件的杆长,并通过仿真验证了优化的正确性。
第三部分在分析各个构件动能与势能的基础上,利用拉格朗日方程建立了机构的动力学模型并进行了必要的仿真,得到了伺服电动机驱动力矩的变化规律。
In this article, a three-DOF parallel manipulator with mobile platform rotating continuously is proposed, which is based on the trends of wafer handling robots. After the institutional constructed, it deals with its degrees of freedom, kinematic analysis, dimensional synthesis, dynamic analysis and some other key technologies. It provides a theoretical basis for the design and platform construction of wafer handling robots prototype, the main contents are as follows.
Firstly, through the analysis of the demands for wafer handling robot in IC industry and combining with the advantages and disadvantages of series-parallel robot, it studies a new wafer handling robot which structure is parallel (it named for the similar-SCARA parallel manipulator with mobile platform rotating continuously). Compared with the traditional parallel manipulators, the peculiarities are that the three limbs are embedding together and the mobile platform can achieve 360 degree rotation continuously. Besides, it can translate along a leader-rail in radial direction. Based on screw theory, it writes the screw system of each limb and then obtains the corresponding anti-screw. Finally, it calculates the degrees of freedom by using G-K formula which has been modified and completes the configuration of institutions.
Secondly, we established the position, velocity, acceleration model of the parallel loop body in the cylindrical coordinate, then analyses its singularity position and simulates the position, velocity and acceleration of the manipulator’end, the result of simulation showed the variation of it. Considering both the mean value and fluctuation of the condition number of Jacobian matrix, a global conditioning index is proposed. Meanwhile, a set of constraints has been built and given the initial value. We get rod length witch satisfies the constraints by MATLAB and verify the correctness of the optimization.
Thirdly, based on the analysis of the kinetic and potential energy of each component, the dynamic model of mechanism is established and some necessary simulations are carried out by using the Lagrange equation , finally we can get the variation of the torque which is driven by servo motors.
第一部分分析IC产业对硅片搬运机器人的需求并结合串并联机器人的优缺点,研究了一种并联形式的硅片传输机器人机构(称它为类SCARA动平台可连续回转并联机器人)。与传统的并联机器人相比,该机构采用3个支链嵌套而成,其动平台可以实现360 ?连续回转以及机械手的径向进给动作。以螺旋理论为基础,写出了机构各支链的螺旋系,然后求得相应的反螺旋,最后利用修正的Grübler–Kutzbach(G-K)公式计算出了类SCARA并联机器人的自由度,完成了机构的构型。
第二部分在柱坐标中,建立了并联闭环机构的位置、速度、加速度模型,在此基础上分析了该机构的奇异位型,并对末端机械手的位置、速度和加速度进行了仿真,得到了末端机械手的运动变化曲线。通过结合雅克比矩阵条件数全域均值性能指标与波动幅度性能指标构造出全域综合性能指标,构建约束条件并给定初值范围。调用MATLAB工具箱中的fmincon函数优化出了满足约束条件的杆长,并通过仿真验证了优化的正确性。
第三部分在分析各个构件动能与势能的基础上,利用拉格朗日方程建立了机构的动力学模型并进行了必要的仿真,得到了伺服电动机驱动力矩的变化规律。
In this article, a three-DOF parallel manipulator with mobile platform rotating continuously is proposed, which is based on the trends of wafer handling robots. After the institutional constructed, it deals with its degrees of freedom, kinematic analysis, dimensional synthesis, dynamic analysis and some other key technologies. It provides a theoretical basis for the design and platform construction of wafer handling robots prototype, the main contents are as follows.
Firstly, through the analysis of the demands for wafer handling robot in IC industry and combining with the advantages and disadvantages of series-parallel robot, it studies a new wafer handling robot which structure is parallel (it named for the similar-SCARA parallel manipulator with mobile platform rotating continuously). Compared with the traditional parallel manipulators, the peculiarities are that the three limbs are embedding together and the mobile platform can achieve 360 degree rotation continuously. Besides, it can translate along a leader-rail in radial direction. Based on screw theory, it writes the screw system of each limb and then obtains the corresponding anti-screw. Finally, it calculates the degrees of freedom by using G-K formula which has been modified and completes the configuration of institutions.
Secondly, we established the position, velocity, acceleration model of the parallel loop body in the cylindrical coordinate, then analyses its singularity position and simulates the position, velocity and acceleration of the manipulator’end, the result of simulation showed the variation of it. Considering both the mean value and fluctuation of the condition number of Jacobian matrix, a global conditioning index is proposed. Meanwhile, a set of constraints has been built and given the initial value. We get rod length witch satisfies the constraints by MATLAB and verify the correctness of the optimization.
Thirdly, based on the analysis of the kinetic and potential energy of each component, the dynamic model of mechanism is established and some necessary simulations are carried out by using the Lagrange equation , finally we can get the variation of the torque which is driven by servo motors.
引文
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[2]硅片传输机械手关键技术分析,半导体技术, 2005
[3]从明,杜宇,沈宝等-面向IC制造的硅片机器人综述.2007, 03: 261-266
[4] Dave Calhoun. Wafer handling management strategies. Miero, Mar. 1998: 15-24
[5] Cong M, Zhou Y M, Jiang Y. An automated wafer-handing system based on the integrated circuit equipments. IEEE International Conference on Robotics and Biomimetics,Hong Kong and Macau,China,2005: 240-245
[6] F. Pierrot, F. Marquet, O. Company, et al. H4 parallel robot: modeling, design and preliminary Experiments [C]. IEEE International Conference on Robotics & Automation, Seoul, Korea, 2001, 325-326
[7]刘善增,余跃庆,杜兆才等.并联机器人的研究进展与现状(一)[J].组合机床与自动化加工技术,2007, 7: 4-10
[8]刘善增,余跃庆,杜兆才等.并联机器人的研究进展与现状(二)[J].组合机床与自动化加工技术,2007, 7: 5-13
[9]王洪斌,魏立新,王洪瑞.并联机器人的理论研究现状[J].自动化博览,2002, 5: 45-48
[10]杨斌久,蔡光起,罗继曼等.少自由度并联机器人的研究现状[J].机床与液压,2006,5: 202-205
[11]张建军,李为民,李颖,高峰.一种新型正交结构6-PPPS并联机构及其运动学解耦性研究.机械设计与研究,2004年增刊:210-213
[12]张建军,高峰,李为民.新型6自由度并联微动机器人微运动学及其运动解耦性分析.机械设计,2003,Vol.20,No.12: 22-25
[13]张建军,高峰,王晓慧,李为民.新型3PUU&2PSS并联微操作机器人的运动学及其速度性能指标分析.机器人,2003,Vol.25,No.7:582-585
[14] Herve J. M. The Lie group of rigid body displacements, a fundamental tool for mechanism design. Mechanism and Machine theory, 1999, Vol.34: 719-730
[15] Huang Z, Li Q. C. Type synthesis principle of minor-mobility parallel manipulators. Science in China, Series E: Technological Sciences, 2002, Vol. 45, No. 3: 241-248
[16]杨廷力.机械系统基本理论-结构学运动学动力学[M].北京:机械工业出版社,1996
[17]曲义远,黄真.空间六自由度并联机构位置的三维搜索方法[J].机器人,1989, 3: 25-29
[18] Innocenti C, Castelli V P. Froward kinematics of the general 6-6 fully parallel mechanism: an exhaustive numerical approach via a mono-dimensional-search algorithm [J]. ASEM Journal of mechanical design, 1993, 115: 932-937
[19]孔宪文.多环空间连杆机构运动分析理论研究[D].南京:东南大学,1994
[20]沈辉,吴学忠.基于区间对分搜索法的并联机构位置正解问题求解[J].机械科学与技术,2004, 23(2): 185-188
[21]赵新华,彭新贤.一种分析并联机器人位置正解的高效算法[J].天津大学学报. 2000, 32(2): 134-137
[22]刘安心,杨廷力.求一般6-SPS并联机器人机构的全部位置正解[J].机械科学与技术, 1996,15(4): 543-546
[23] Innocenti C, Castelli V P. Direct position analysis of the Stewart platform mechanism [J]. Mechanism and Machine Theory, 1990, 25(6): 611-621
[24]梁崇高,荣辉.一种Stewart平台机械手位置正解[J].机械工程学报,1991, 27: 26-30
[25] Innocenti C, Castelli V P. Closed-form direct position analysis of a 5-5 parallel mechanism [J]. Journal of Mechanical design, 1993, 115(3): 515-521
[26] Wen F, Liang C G. Displacement analysis of the 6-6 Stewart platform mechanisms [J]. Mechanism and Machine Theory, 1994, 29(4): 547-557
[27]苏海军,廖启征.一种5-5型台体并联机器人机构的位置正解[J].北京邮电大学学报,1997, 20(3): 1-8
[28]赵铁石,黄真.一种新型四自由度并联平台机构及其位置分析[J].机械科学与技术,2000, 19(6): 927-929
[29]沈惠平,马正华,金琼等.一种新型解耦二腿三维平移并联机构及其运动分析[J].江苏工业学院学报,2003,15(3): 44-47
[30] Yin J P, Liang C G. The forward displacement analysis of a kind of special platform manipulator mechanisms [J]. Mechanism and Machine Theory,1994,29(1): 1-9
[31]文福安,李静宜,梁崇高.一般6-6型平台并联机器人机构位置正解[J].机械科学与技术,1993, 45(1): 41-47
[32] Thomas M,Tesar D. Dynamic Modeling of Serial Manipulator Arms[J].J of Dyn Sys Meas and Cont,1982,104(9): 218-227
[33] Mohamed M G, Duffy J. A Direct Determination of the Instantaneous Kinematics of Fully Parallel Robot Manipulators [J]. J Mech Transm Autom Des,1985,107(2) :226-229
[34]黄真,孔宪文.具有冗余度空间并联机构的运动分析[J].机械工程学报,1995,31(3): 44-50
[35] Ryu Jeha, Cha Jongeun. Volumetric error analysis and architecture optimization for accuracy of HexaSlide type parallel manipulators. Mechanism and Machine Theory, 2003, Vol. 38, No. 3: 227-240
[36]李铁民,郑浩峻,汪劲松等.并联机床不同位形下的运动精度评价指标.机械工程学报,2002,Vol.38, No. 9: 101-105
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