基于激光多普勒的面内振动测试系统的研发
|
摘要
当前所进行的基于面内振动模态的超声电机研究需要进行定子面内振动模态测试,并且其他类型的超声电机也经常需要检查是否出现了不需要的面内振动模态而导致效率低下。Polytec公司的3-D激光测振设备可用于超声电机定子面内振动模态的测试,但价格非常昂贵。
因此基于以上情况,本文主要的研究内容和工作如下:
(1)在分析超声电机定子所用的面内振动模态的基础上,利用一维单点面内振动激光测头LSV065-306F(Polytec公司)构建用于超声电机定子面内振动模态测试系统。
(2)根据超声电机响应快、定位自锁等优点,选用超声电机作为X-Y定位平台的驱动电机,实验证明定位精度可以到微米级。
(3)采用直接数字频率合成技术生成模态实验所用的激励信号;采用基2时间的FFT算法处理扫频测试数据,得出振动频响谱,以此来确定各阶模态频率;利用最小二乘拟合法处理定频测试数据,得出各点的振动振幅、相位,在拟合出振型。
(4)利用所开发的测试系统进行一些定子的面内振动模态测试,取得了较好的结果。
This thesis is a part of the National Natural Science Foundation (No. 50235010) : The development of in-plane vibration measurement system with Laser Doppler vibrometer.
Currently, the research of such USM based on in-plane vibration mode needs to test the in-plane vibration mode, and the other types of USMs also need to check whether there existing such in-plane vibration mode, which is useless and leads to inefficiencies.The 3-D laser vibration measurement system of the Polytec company could be used to test the in-plane vibration mode of the stator of USM, but it is very expensive.
Based on the above reason, the main works of the thesis are summarized as follows:
(1) Analysing the characteristics of in-plane vibration mode and using the laser sensor head LSV065-306F (Polytec Company)to develop a measurement system which could be used for in-plane vibration modal testing.
(2) According to the good characteristics ( rapid response,self-locking and etc.) of USM, we use two traveling wave type rotary ultrasonic motors(TRUM) as the driver of the X-Yworktable, which can reach 2μm in precision.
(3 ) Using DDS technique to generate incentive signal for modal testing; using radix-2 FFT algorithm to handle sweep signal, then we can get the Amplitude- Frequency map. Through the Amplitude- Frequency map, we can find the modal frequency; using the Least-squares fitting method to get the amplitude and phase of every point, then drawing the modal shape.
(4) Using the measurement system to measure some stators and achieving good results.
因此基于以上情况,本文主要的研究内容和工作如下:
(1)在分析超声电机定子所用的面内振动模态的基础上,利用一维单点面内振动激光测头LSV065-306F(Polytec公司)构建用于超声电机定子面内振动模态测试系统。
(2)根据超声电机响应快、定位自锁等优点,选用超声电机作为X-Y定位平台的驱动电机,实验证明定位精度可以到微米级。
(3)采用直接数字频率合成技术生成模态实验所用的激励信号;采用基2时间的FFT算法处理扫频测试数据,得出振动频响谱,以此来确定各阶模态频率;利用最小二乘拟合法处理定频测试数据,得出各点的振动振幅、相位,在拟合出振型。
(4)利用所开发的测试系统进行一些定子的面内振动模态测试,取得了较好的结果。
This thesis is a part of the National Natural Science Foundation (No. 50235010) : The development of in-plane vibration measurement system with Laser Doppler vibrometer.
Currently, the research of such USM based on in-plane vibration mode needs to test the in-plane vibration mode, and the other types of USMs also need to check whether there existing such in-plane vibration mode, which is useless and leads to inefficiencies.The 3-D laser vibration measurement system of the Polytec company could be used to test the in-plane vibration mode of the stator of USM, but it is very expensive.
Based on the above reason, the main works of the thesis are summarized as follows:
(1) Analysing the characteristics of in-plane vibration mode and using the laser sensor head LSV065-306F (Polytec Company)to develop a measurement system which could be used for in-plane vibration modal testing.
(2) According to the good characteristics ( rapid response,self-locking and etc.) of USM, we use two traveling wave type rotary ultrasonic motors(TRUM) as the driver of the X-Yworktable, which can reach 2μm in precision.
(3 ) Using DDS technique to generate incentive signal for modal testing; using radix-2 FFT algorithm to handle sweep signal, then we can get the Amplitude- Frequency map. Through the Amplitude- Frequency map, we can find the modal frequency; using the Least-squares fitting method to get the amplitude and phase of every point, then drawing the modal shape.
(4) Using the measurement system to measure some stators and achieving good results.
引文
[1]赵淳生,21世纪超声电机技术展望,振动测试与诊断[J],2000,20(1):7-12
[2]Lionel Petit and Paul Gonnard.Industrial design of a centimetric "TWILA" ultrasonic motor.Sensors and Actuators A:Physical,29 April 2005,120(1):211-224
[3]赵淳生,超声马达的发展、应用与未来,电气时代[J],2001(15)1:8-10
[4]胡敏强,金龙,顾毓平,超声波电动机原理与设计[M],北京,科学出版社,1994.6
[5]上羽贞行,富川义郎.超声波马达理论与应用[M],上海,上海科学出版社,1998
[6]Y.Tomikawa,T.Takano,C.Kusakabe.Manabu Aoyagi and Seiji Hirose,Development of Ultrasonic Motors[J],9th Smart Actuator Symposium at ICAT The Pennsylvania State University 1994.4,1-11
[7]金龙,朱美玲,赵淳生,国外超声马达的发展与应用,振动、测试与诊断[J],1996.16(1):1-7
[8]陈明,陈新业,姜开利,周铁英,超声波马达的应用,应用声学[J],2000,19(4):38-43.
[9]S.Ueha,Y.Tomikawa,"Ultrasonic Motors Theory and Applications",Oxford University Press,1993
[10]赵淳生,世界超声电机技术的新进展,上海,第八届中国小电机技术研讨会论文集[C],2003.11.12-16
[11]李朝东,赵淳生,超声马达在日本的开发与应用,振动、测试与诊断[J],1996,16(2),1-6
[12]赵淳生,对发展我国超声电机技术的若干建议,杭州,全国第三届超声波电机理论和应用技术研讨会[C],2005.5:12-14
[13]P.Hagedorn,J.Wallaschek,Traveling Wave Ultrasonic Motors,Part Ⅰ:Working Principle and Mathematical Modelling of the Stator,Journal of Sound and Vibration[J],Vol.155,No.1,1992,31-46
[14]Sounkalo Dembélé and Karima Rochdi,A three DOF linear ultrasonic motor for transport and micropositioning,Sensors and Actuators A:Physical(In Press),Available online 22 September 2005,
[15]M.Mracek and J.Wallaschek.A system for powder transport based on piezoelectrically excited ultrasonic progressive waves.Materials Chemistry and Physics[J],2005 90(2-3):378-380
[16]Uchino K,Piezoelectric aetutors and ultrasonic motors,Klluwer Academic Publisher[J],1997,10-11
[17]J.Satonobu,N.Torii,K.Nakamura and S.Ueha.Construction of Megatorque Hybrid Transducer Type Ultrasonic Motor[J].Jpn.J.Appl.Phys.,1996,35:5038-5041
[18]栗大超,靳世久,曾周末等,压电超声微电机的研究现状与应用前景,微电机[J],2001,34(3):31-35
[19]杨志刚,马吴学,杨东平等,环形行波型超声波马达的设计与试验研究,中国电机工程学报[J],2005,25(12):138-142
[20]Flynn A M,Perform of ultrasonic minimotors using design of experiment,Smart Material Structures[J],1998,7(3):286-294
[21]赵淳生,黄卫清,超声电机的实验研究,微特电机[J],2003,36(2):16-20
[22]周斌,超声电机的驱动技术及其实验平台的研究,硕士学位论文[D],南京,南京航空航天大学, 2002.2
[23]张令弥,振动测试与动态分析[M],航空工业出版社,1992
[24]Otnes R.K.,Enochson L.,Applied Times Series Analysis[M],John Wiley & Sons,1978.
[25]Elliott D.F.Rao K.R.,Fast Transforms:Algorithms,Analysis,Application[M],Academic Press,1986
[26]Bendat J.S.,Piersol A.C,Random Data:Analysis and Measurement Procedure[M],2~(nd) Edition,John Wiley & Sons,1986
[27]D.J.EWINS著,赵淳生,周传荣译,陈树年,陈弘武校,模态试验理论与实践[M],南京,东南大学出版社,1991.8
[28]McConnell,K.G.,Modal testing,Philosophical Transactions of the Royal Society London,Series A (Mathematical,Physical and Engineering Sciences)[J],v 359,n 1778,15 Jan.2001,p 11-28
[29]陈超,旋转型超声电机理论模型的研究,博士学位论文[D],南京,南京航空航天大学,2005.12
[30]郭辉.应用平面内振动模态的超声电机的研究,博士学位论文[D],南京,南京航空航天大学,2000.12
[31]O.Ohnishi,O.Myohga,T.Uchikawa et al.Piezoelectric Ultrasonic Motor Using Longitudinal-Torsional Composite Resonance Vibration.IEEE Trans.On Ultrasonics,Ferroelectrics and Frequency Control[J],1993,40(6):687-693
[32]陶征,纵扭复合型超声电机的研究,硕士学位论文[D],南京,南京航空航天大学,2003.2
[33]Yabuki,M.Aoyagi,Y.Tomikawa and T.Takano.Piezoelectric Linear Motors for Driving Head Element of CD-ROM[J].Jpn.J.Appl.Phys.,1994,33:5365-5369
[34]白永明,纪跃波,黄卫清,激光多普勒面内振动测试系统,上海,第十一届中国小电机技术研讨会论文集[C],2006.11,12-16
[35]Polytec GmBH,In-Plane Vibrometer User Manual
[36]纪跃波,赵淳生,黄卫清等,基于旋转型超声电机的电控坐标平台[J],2006,12(315):4-6
[37]固高科技(深圳)有限公司,GT连续轨迹运动控制器编程手册
[38]固高科技(深圳)有限公司,GT连续轨迹运动控制器用户手册
[39]ADLINK TECHNOLOGY INC.,DAQ-2010 User's Guide
[40]孙明,林君,陈祖斌等,基于DDS技术的chirp信号产生系统,佛山科学技术学院学报(自然科学版)[J],2004,22(4):22-25
[41]Jiamei Jin,ChunSheng Zhao,Linear Stepping Ultrasonic Motor[C],3~(rd) INTERNATIONAL WORKSHOP ON PIEZOELECTRIC MATERIAL AND APPLICATION IN ACTUATORS,2006
[42]白永明,黄卫清,基于超声波电机的工作台精确定位系统,上海,第十届中国小电机技术研讨会论文集[C],2005.11,15-17
[43]朱华,纵扭复合型超声电机的研究,硕士学位论文[D],南京,南京航空航天大学,2003.2
[44]祖家奎,赵淳生,行波型超声波电动机驱动和控制技术的现状与发展,微特电机[J],2004,6:37-40
[45]陶永华,尹怡欣,新型PID控制及其应用[M],北京,机械工业出版社,1998.9
[46]陈志华,超声波电动机控制中的若干问题的研究,博士后研究工作报告[D],南京,南京航空航 天大学,2003.5
[47]张铁民,行波型超声波电动机伺服控制系统的研究,博士后研究工作报告[D],南京,南京航空航天大学,2001.12
[48]高钟毓,机电控制工程[M],北京,清华大学出版社,2001
[49]王晓升,基于DDS的任意波形发生器实现,长春工程学院学报(自然科学版)[J],2005,6(2):56-58
[50]张丽芝,王森章,DDS波形发生器幅度量化误差的分析及其抑制,微处理机[J],2006,4:1-5
[51]Henry Chang,etal Surviving the SOC Revolution:a guide to platform -based design,Boston/Dordrecht/London:KLUWER ACADEMIC PUBLISHERS,1999
[52]纪跃波,赵淳生,秦树人,基于通用计算机的超声电机试验用激励信号,重庆大学学报(自然科学版)[J],2006,29(1):12-14
[53]柳泽健,金元磐著,北京邮电学院数字通信专业译,有源滤波器的设计[M],北京,人民邮电出版社,1982
[54]John R.Buck,Michael M.Daniel,Andrew C.Singer,Computer Explorations in SIGNALS AND AYSTEMS-USING MATLAB,New York,NY:Prentice Hall,1990
[55]基于开关电容技术的8阶切比雪夫滤波器及PSpice仿真研究,郑州轻工业学院学报(自然科学版)[J],2003,18(1):34-37
[56]谷蔌隆嗣著,王友功译,薛培鼎校,数字滤波器与信号处理[M],北京,科学出版社,2003
[57]www.maxim-ic.com/an1762
[58]胡广书编著,数字信号处理-理论、算法与实现[M],北京,清华大学出版社,1997.8
[59]Geerts Y,Marques AM,Steyaert M S J,et al,A 3.3V 15 bit delta sigma ADC with a signal bandwidth of 1.1 MHz for ADSL application[J],IEEE JSSC,1999,34(7):927-936
[60]机械工程测试、信息、信号分析[M],南京,南京航空航天大学翻印,1996
[61]丁丽娟,程杞元,数值计算方法[M],北京,北京理工大学出版社,2005.8
[62]梁志国,张大治,李新良等,四参数正弦波曲线拟合的快速算法[J],计测技术,2006,26(1):4-7
[63]John Kuffel,Terence R McComb,Ryszard Malewshi Comparative Evaluation of Computer Method for Calculating the BestFit simusolid to the Digital Record of a High-Purity Sine Wave[J].IEEE Transactions on Instrumentation and Measurement,1987,36(3):418-422
[64]鹿存跃,基于扭转振动的旋转型压电电机的研究,博士学位论文[D],南京,南京航空航天大学,2004.4
论文:《拜师学艺创新双师型教师培养模式》,《中国职业技术教育》第29期
论文:《高职合作教学的实践与思考》,《作家》第11期
[2]Lionel Petit and Paul Gonnard.Industrial design of a centimetric "TWILA" ultrasonic motor.Sensors and Actuators A:Physical,29 April 2005,120(1):211-224
[3]赵淳生,超声马达的发展、应用与未来,电气时代[J],2001(15)1:8-10
[4]胡敏强,金龙,顾毓平,超声波电动机原理与设计[M],北京,科学出版社,1994.6
[5]上羽贞行,富川义郎.超声波马达理论与应用[M],上海,上海科学出版社,1998
[6]Y.Tomikawa,T.Takano,C.Kusakabe.Manabu Aoyagi and Seiji Hirose,Development of Ultrasonic Motors[J],9th Smart Actuator Symposium at ICAT The Pennsylvania State University 1994.4,1-11
[7]金龙,朱美玲,赵淳生,国外超声马达的发展与应用,振动、测试与诊断[J],1996.16(1):1-7
[8]陈明,陈新业,姜开利,周铁英,超声波马达的应用,应用声学[J],2000,19(4):38-43.
[9]S.Ueha,Y.Tomikawa,"Ultrasonic Motors Theory and Applications",Oxford University Press,1993
[10]赵淳生,世界超声电机技术的新进展,上海,第八届中国小电机技术研讨会论文集[C],2003.11.12-16
[11]李朝东,赵淳生,超声马达在日本的开发与应用,振动、测试与诊断[J],1996,16(2),1-6
[12]赵淳生,对发展我国超声电机技术的若干建议,杭州,全国第三届超声波电机理论和应用技术研讨会[C],2005.5:12-14
[13]P.Hagedorn,J.Wallaschek,Traveling Wave Ultrasonic Motors,Part Ⅰ:Working Principle and Mathematical Modelling of the Stator,Journal of Sound and Vibration[J],Vol.155,No.1,1992,31-46
[14]Sounkalo Dembélé and Karima Rochdi,A three DOF linear ultrasonic motor for transport and micropositioning,Sensors and Actuators A:Physical(In Press),Available online 22 September 2005,
[15]M.Mracek and J.Wallaschek.A system for powder transport based on piezoelectrically excited ultrasonic progressive waves.Materials Chemistry and Physics[J],2005 90(2-3):378-380
[16]Uchino K,Piezoelectric aetutors and ultrasonic motors,Klluwer Academic Publisher[J],1997,10-11
[17]J.Satonobu,N.Torii,K.Nakamura and S.Ueha.Construction of Megatorque Hybrid Transducer Type Ultrasonic Motor[J].Jpn.J.Appl.Phys.,1996,35:5038-5041
[18]栗大超,靳世久,曾周末等,压电超声微电机的研究现状与应用前景,微电机[J],2001,34(3):31-35
[19]杨志刚,马吴学,杨东平等,环形行波型超声波马达的设计与试验研究,中国电机工程学报[J],2005,25(12):138-142
[20]Flynn A M,Perform of ultrasonic minimotors using design of experiment,Smart Material Structures[J],1998,7(3):286-294
[21]赵淳生,黄卫清,超声电机的实验研究,微特电机[J],2003,36(2):16-20
[22]周斌,超声电机的驱动技术及其实验平台的研究,硕士学位论文[D],南京,南京航空航天大学, 2002.2
[23]张令弥,振动测试与动态分析[M],航空工业出版社,1992
[24]Otnes R.K.,Enochson L.,Applied Times Series Analysis[M],John Wiley & Sons,1978.
[25]Elliott D.F.Rao K.R.,Fast Transforms:Algorithms,Analysis,Application[M],Academic Press,1986
[26]Bendat J.S.,Piersol A.C,Random Data:Analysis and Measurement Procedure[M],2~(nd) Edition,John Wiley & Sons,1986
[27]D.J.EWINS著,赵淳生,周传荣译,陈树年,陈弘武校,模态试验理论与实践[M],南京,东南大学出版社,1991.8
[28]McConnell,K.G.,Modal testing,Philosophical Transactions of the Royal Society London,Series A (Mathematical,Physical and Engineering Sciences)[J],v 359,n 1778,15 Jan.2001,p 11-28
[29]陈超,旋转型超声电机理论模型的研究,博士学位论文[D],南京,南京航空航天大学,2005.12
[30]郭辉.应用平面内振动模态的超声电机的研究,博士学位论文[D],南京,南京航空航天大学,2000.12
[31]O.Ohnishi,O.Myohga,T.Uchikawa et al.Piezoelectric Ultrasonic Motor Using Longitudinal-Torsional Composite Resonance Vibration.IEEE Trans.On Ultrasonics,Ferroelectrics and Frequency Control[J],1993,40(6):687-693
[32]陶征,纵扭复合型超声电机的研究,硕士学位论文[D],南京,南京航空航天大学,2003.2
[33]Yabuki,M.Aoyagi,Y.Tomikawa and T.Takano.Piezoelectric Linear Motors for Driving Head Element of CD-ROM[J].Jpn.J.Appl.Phys.,1994,33:5365-5369
[34]白永明,纪跃波,黄卫清,激光多普勒面内振动测试系统,上海,第十一届中国小电机技术研讨会论文集[C],2006.11,12-16
[35]Polytec GmBH,In-Plane Vibrometer User Manual
[36]纪跃波,赵淳生,黄卫清等,基于旋转型超声电机的电控坐标平台[J],2006,12(315):4-6
[37]固高科技(深圳)有限公司,GT连续轨迹运动控制器编程手册
[38]固高科技(深圳)有限公司,GT连续轨迹运动控制器用户手册
[39]ADLINK TECHNOLOGY INC.,DAQ-2010 User's Guide
[40]孙明,林君,陈祖斌等,基于DDS技术的chirp信号产生系统,佛山科学技术学院学报(自然科学版)[J],2004,22(4):22-25
[41]Jiamei Jin,ChunSheng Zhao,Linear Stepping Ultrasonic Motor[C],3~(rd) INTERNATIONAL WORKSHOP ON PIEZOELECTRIC MATERIAL AND APPLICATION IN ACTUATORS,2006
[42]白永明,黄卫清,基于超声波电机的工作台精确定位系统,上海,第十届中国小电机技术研讨会论文集[C],2005.11,15-17
[43]朱华,纵扭复合型超声电机的研究,硕士学位论文[D],南京,南京航空航天大学,2003.2
[44]祖家奎,赵淳生,行波型超声波电动机驱动和控制技术的现状与发展,微特电机[J],2004,6:37-40
[45]陶永华,尹怡欣,新型PID控制及其应用[M],北京,机械工业出版社,1998.9
[46]陈志华,超声波电动机控制中的若干问题的研究,博士后研究工作报告[D],南京,南京航空航 天大学,2003.5
[47]张铁民,行波型超声波电动机伺服控制系统的研究,博士后研究工作报告[D],南京,南京航空航天大学,2001.12
[48]高钟毓,机电控制工程[M],北京,清华大学出版社,2001
[49]王晓升,基于DDS的任意波形发生器实现,长春工程学院学报(自然科学版)[J],2005,6(2):56-58
[50]张丽芝,王森章,DDS波形发生器幅度量化误差的分析及其抑制,微处理机[J],2006,4:1-5
[51]Henry Chang,etal Surviving the SOC Revolution:a guide to platform -based design,Boston/Dordrecht/London:KLUWER ACADEMIC PUBLISHERS,1999
[52]纪跃波,赵淳生,秦树人,基于通用计算机的超声电机试验用激励信号,重庆大学学报(自然科学版)[J],2006,29(1):12-14
[53]柳泽健,金元磐著,北京邮电学院数字通信专业译,有源滤波器的设计[M],北京,人民邮电出版社,1982
[54]John R.Buck,Michael M.Daniel,Andrew C.Singer,Computer Explorations in SIGNALS AND AYSTEMS-USING MATLAB,New York,NY:Prentice Hall,1990
[55]基于开关电容技术的8阶切比雪夫滤波器及PSpice仿真研究,郑州轻工业学院学报(自然科学版)[J],2003,18(1):34-37
[56]谷蔌隆嗣著,王友功译,薛培鼎校,数字滤波器与信号处理[M],北京,科学出版社,2003
[57]www.maxim-ic.com/an1762
[58]胡广书编著,数字信号处理-理论、算法与实现[M],北京,清华大学出版社,1997.8
[59]Geerts Y,Marques AM,Steyaert M S J,et al,A 3.3V 15 bit delta sigma ADC with a signal bandwidth of 1.1 MHz for ADSL application[J],IEEE JSSC,1999,34(7):927-936
[60]机械工程测试、信息、信号分析[M],南京,南京航空航天大学翻印,1996
[61]丁丽娟,程杞元,数值计算方法[M],北京,北京理工大学出版社,2005.8
[62]梁志国,张大治,李新良等,四参数正弦波曲线拟合的快速算法[J],计测技术,2006,26(1):4-7
[63]John Kuffel,Terence R McComb,Ryszard Malewshi Comparative Evaluation of Computer Method for Calculating the BestFit simusolid to the Digital Record of a High-Purity Sine Wave[J].IEEE Transactions on Instrumentation and Measurement,1987,36(3):418-422
[64]鹿存跃,基于扭转振动的旋转型压电电机的研究,博士学位论文[D],南京,南京航空航天大学,2004.4
论文:《拜师学艺创新双师型教师培养模式》,《中国职业技术教育》第29期
论文:《高职合作教学的实践与思考》,《作家》第11期