宽波段叶阶梯光栅光谱仪设计与标定方法研究
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摘要
中阶梯光栅光谱仪以中阶梯光栅为主色散元件，配合低色散元件进行交叉色散，采用面阵探测器进行接收，在像面上形成二维光谱图像。由于利用了中阶梯光栅大衍射角、高衍射级次、全波闪耀的特性，所以与传统光栅光谱仪相比，中阶梯光栅光谱仪具有高色散、高分辨率、宽波段、高能量输出的特点。中阶梯光栅光谱仪已成为天文观测、环境监测、军事防御、化学分析等领域关注的热点。宽波段、高分辨率中阶梯光栅光谱仪的设计是仪器开发者追求的目标。然而，中阶梯光栅光谱仪在拥有高性能的同时，也给仪器设计者带来诸多难题。由于探测器性能水平、棱镜色散特性的限制，要同时实现宽波段、高分辨率中阶梯光栅光谱仪全固态测量具有较大难度。同时，复杂的二维光谱信息还原与标定也给高精度中阶梯光栅光谱仪的应用带来较大限制。
基于此，本文对中阶梯光栅光谱仪的数值计算、宽波段实现、光学设计、谱图还原以及精确装调进行了深入研究。具体研究工作如下：
第一、提出了基于边界限制的中阶梯光栅光谱仪快速设计方法。讨论了中阶梯光栅光谱仪各性能参数的相互制约关系，建立了系统指标、结构参数与二维谱图的计算模型。利用该模型可快速计算出满足系统要求的初始结构参数，为中阶梯光栅光谱仪的快速设计与谱图分析提供有效方法。
第二、在现有探测器性能水平的限制下，本文提出了两种拓宽波段范围的结构方式：一种是复合棱镜型宽波段中阶梯光栅光谱仪，一种是分段测量型中阶梯光栅光谱仪，并详细讨论了这两种结构的设计方法与实现过程。
第三、为了保证宽波段范围内的光谱分辨率，本文根据中阶梯光栅光谱仪的结构特性提出了系统像差校正方法，分别对两种结构形式的中阶梯光栅光谱仪进行了像差分析与校正。
第四、建立了含有像面滚转因子的二维谱图模型，将中阶梯光栅光谱仪二维光谱快速还原为一维光谱信息。同时，提出了基于衍射级次的光斑质心提取算法，实现对信号光斑的精确定位，提高了波长标定精度。
第五、通过分析中阶梯光栅光谱仪各元件的误差灵敏度，采用关键元件精确装调与谱图判别相结合的方式，实现了对中阶梯光栅光谱仪的精确装调，为仪器设计指标的实现提供了保证。
第六、以分段测量型宽波段中阶梯光栅光谱仪为例，将其与ICP光源对接，进行了化学元素测量，并进行了元素的识别与标定，实验证明该仪器设计满足ICP-AES光谱分析需求。
第七、编写了集中阶梯光栅光谱仪结构参数快速设计、二维谱图还原、元素识别、图像读取与处理于一体的操作软件，为设计者实现中阶梯光栅光谱仪的快速设计与光谱标定提供便利。
Echelle spectrograph utilizes cross-dispersion to get two-dimension spectra onthe detector. Due to the characteristics of echelle grating, such as large dispersiveangle, high diffraction orders and wide wavelength range blazed, echellespectrograph obtains higher dispersion, higher resolution, wider spectral coverage,and higher energy efficiency than traditional grating spectrometers. Thus, echellespectrograph has received much more attention in astronomical observation,environmental monitoring, military dfense and chemical analysis. Goodperformance echelle spectrograph with both wide spectral coverage and highresolution is the target of instrumental developers. Although echelle spectrographhas so many merits, it brings lots of difficulties for design. Because of theconstraints of the detectors and prism dispersive property, it is hard to develop widespectral range echelle spectrograph with high resolution. Besides, how to reduce andcalibrate echelle spectra is also another factor to limit the application of echellespectrograph.
Given these reasons, the parameters calculation, wide spectral coverage opticaldesign, echelle spectra reduction and precise adjustment are all analyzed andresearched in this thesis.
First, an efficient algorithm based on the limits of boundary is described, andthe mathematic model is developed between the system requirements, structureparameters and two-dimension echelle spectra. Utilizing this model, the effectiveparameters can be calculated for echelle spectrograph quickly, which provide avaluable method for users.
Second, based on the limitations of detectors, two configurations are providedto extend the eschelle-spectral coverage: double-prism echelle spectrograph anddivided spectral range echelle spectrograph. The details of design are discussed.
Third, analyzing the optical characteristics of echelle spectrograph, the methodof deducing the aberration is described to ensure the resolution over the wholespectral range. The optical design results of these two structures are given.
Forth, an echelle spectral model with the image plane rotated factor isestablished, which can reduce two-dimension spectra to one-dimension spectraprecisely. And the method of signal spots position acquirement is discussed toimprove the precision of wavelength calibration.
Fifth, according to the sensitivity of the optical elements, an accurateadjustment means is discussed, which can ensure the design goals.
Sixth, combined the divide spectral range echelle spectrograph and ICP,specimen were measured and analyzed. Experiments show that multiple elementscan be detected within a short time correctly, and the echelle spectrograph can meetthe requirements of ICP-AES.
Seventh, the software is developed with the functions of parameters design,echelle spectra reduction, element analysis, and image processing, which providesconvenience for users.
基于此，本文对中阶梯光栅光谱仪的数值计算、宽波段实现、光学设计、谱图还原以及精确装调进行了深入研究。具体研究工作如下：
第一、提出了基于边界限制的中阶梯光栅光谱仪快速设计方法。讨论了中阶梯光栅光谱仪各性能参数的相互制约关系，建立了系统指标、结构参数与二维谱图的计算模型。利用该模型可快速计算出满足系统要求的初始结构参数，为中阶梯光栅光谱仪的快速设计与谱图分析提供有效方法。
第二、在现有探测器性能水平的限制下，本文提出了两种拓宽波段范围的结构方式：一种是复合棱镜型宽波段中阶梯光栅光谱仪，一种是分段测量型中阶梯光栅光谱仪，并详细讨论了这两种结构的设计方法与实现过程。
第三、为了保证宽波段范围内的光谱分辨率，本文根据中阶梯光栅光谱仪的结构特性提出了系统像差校正方法，分别对两种结构形式的中阶梯光栅光谱仪进行了像差分析与校正。
第四、建立了含有像面滚转因子的二维谱图模型，将中阶梯光栅光谱仪二维光谱快速还原为一维光谱信息。同时，提出了基于衍射级次的光斑质心提取算法，实现对信号光斑的精确定位，提高了波长标定精度。
第五、通过分析中阶梯光栅光谱仪各元件的误差灵敏度，采用关键元件精确装调与谱图判别相结合的方式，实现了对中阶梯光栅光谱仪的精确装调，为仪器设计指标的实现提供了保证。
第六、以分段测量型宽波段中阶梯光栅光谱仪为例，将其与ICP光源对接，进行了化学元素测量，并进行了元素的识别与标定，实验证明该仪器设计满足ICP-AES光谱分析需求。
第七、编写了集中阶梯光栅光谱仪结构参数快速设计、二维谱图还原、元素识别、图像读取与处理于一体的操作软件，为设计者实现中阶梯光栅光谱仪的快速设计与光谱标定提供便利。
Echelle spectrograph utilizes cross-dispersion to get two-dimension spectra onthe detector. Due to the characteristics of echelle grating, such as large dispersiveangle, high diffraction orders and wide wavelength range blazed, echellespectrograph obtains higher dispersion, higher resolution, wider spectral coverage,and higher energy efficiency than traditional grating spectrometers. Thus, echellespectrograph has received much more attention in astronomical observation,environmental monitoring, military dfense and chemical analysis. Goodperformance echelle spectrograph with both wide spectral coverage and highresolution is the target of instrumental developers. Although echelle spectrographhas so many merits, it brings lots of difficulties for design. Because of theconstraints of the detectors and prism dispersive property, it is hard to develop widespectral range echelle spectrograph with high resolution. Besides, how to reduce andcalibrate echelle spectra is also another factor to limit the application of echellespectrograph.
Given these reasons, the parameters calculation, wide spectral coverage opticaldesign, echelle spectra reduction and precise adjustment are all analyzed andresearched in this thesis.
First, an efficient algorithm based on the limits of boundary is described, andthe mathematic model is developed between the system requirements, structureparameters and two-dimension echelle spectra. Utilizing this model, the effectiveparameters can be calculated for echelle spectrograph quickly, which provide avaluable method for users.
Second, based on the limitations of detectors, two configurations are providedto extend the eschelle-spectral coverage: double-prism echelle spectrograph anddivided spectral range echelle spectrograph. The details of design are discussed.
Third, analyzing the optical characteristics of echelle spectrograph, the methodof deducing the aberration is described to ensure the resolution over the wholespectral range. The optical design results of these two structures are given.
Forth, an echelle spectral model with the image plane rotated factor isestablished, which can reduce two-dimension spectra to one-dimension spectraprecisely. And the method of signal spots position acquirement is discussed toimprove the precision of wavelength calibration.
Fifth, according to the sensitivity of the optical elements, an accurateadjustment means is discussed, which can ensure the design goals.
Sixth, combined the divide spectral range echelle spectrograph and ICP,specimen were measured and analyzed. Experiments show that multiple elementscan be detected within a short time correctly, and the echelle spectrograph can meetthe requirements of ICP-AES.
Seventh, the software is developed with the functions of parameters design,echelle spectra reduction, element analysis, and image processing, which providesconvenience for users.
引文
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