干式真空泵结构设计及其转子平衡分析与仿真
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摘要
干式真空泵广泛应用于航天、半导体、制药、化工等行业。随着我国工业化水平的不断提高,航天、半导体等行业对真空泵的需求也逐步提高。但是目前常用的干式真空泵体积大,质量重,而且转子的平衡性不理想。鉴于此,本论文对一种爪式真空泵进行了整体结构设计,并对核心部件——转子进行了平衡分析。
首先,论文阐述了真空、真空泵及干式真空泵的概念以及爪式真空泵的组成和工作原理,给出了国内外有关真空泵研究的一些现状以及发展趋势。
其次,提出了整体设计方法,完成了真空泵的整体结构设计。它主要包括泵壳的设计、转子型线的设计和主动轴的设计校核。,.泵壳的设计主要是考虑尽量减少重量和保证壳体的壁厚。转子型线是爪型转子主要的工作曲线,本文将它分为六段曲线,分别对每一段曲线的设计做了说明。
第三,进行了真空泵转子的平衡分析。转子平衡主要分为静平衡和动平衡两类。静平衡主要研究了单个转子,由于转子形状不规则,在计算不平衡量时采用了割补的思想,将转子分割成五部分,每部分的都为规则形状,计算得出各部分产生的不平衡量。动平衡是针对三个转子的情况,将每个转子的不平衡量投影到两个不同的平衡面上,这两个平衡面选在轴承附近。两个平衡面上计算得出总不平衡量,然后在适当的位置加上一个配重。与以往通过在转子上加配重来平衡的方法不同,本文通过计算不平衡量,在转子本身特定位置去掉特定质量,使转子达到平衡。通过这种方法的改进和优化,真空泵转子的加工和装配时间大大减小。
最后利用Pro/Engineer和ADAMS仿真软件对计算结果进行仿真。仿真结果验证了设计参数的可行性,为该真空泵产品化提供了设计基础。
Dry-type vacuum pump(VP) is widely used in aerospace, semiconductor, pharmacy, chemical and other fields. With the improvement of modern industrialization, the demand for VP is gradually increased, especially in the aerospace and semiconductor field. However, at present the VP is of huge volume and high weight, and the rotor is of bad balance. In view of this, an overall structural design on the claw-type VP is advanced. The balance of rotor, which is the core of the VP, is analysed.
First, the concepts of vacuum, VP and dry-type VP together with the composition and operation principle of claw-type VP are expatiated. What is more, it is given that the current situation of research and the trend of development concerning VP Domestic and Abroad.
Second, an overall design method is advanced, and the overall structural design of VP is finished. The overall structural design mainly includes the design of pump shells, the design of rotor type line and design and check of driving shaft. The design of pump shells must be mainly guaranteed lessening the weight and the wall thickness. As the main working curve line, the type line of rotor is divided into six phases. Then the design of each curve line is given the clarification respectively.
Third, the balance analysis of VP rotor is analysed. The balance of VP rotor can be classified into two types, namely static balance and dynamic balance. The static balance mainly researches single rotor. Because the shapes of rotor is irregular, when the imbalance is calculated, cession and supplement method is used. The rotor is divided into five parts in this method and each part with a regular shape, is calculated respectively. The dynamic balance is used to analyse three rotors. In this method, the quantity of imbalance of every rotor is shadowed into different balance surface, where the two balance surface is near the bearing. The total imbalance quantity on the two surfaces is calculated. Then, given weight is added at demand position. This method is different from previous methods which adds weight on rotors to achieve balance. A certain quality on rotors'certain place is cutted to achieve balance in this paper Through the amelioration and optimization of this method, VP rotors'processing and assemble time is decreased effectively.
Finally, the Pro/Engineer Software and ADMAS Software is used to simulate. the designed parameter is verified to be viable. It provides a design basis for this VP products.
首先,论文阐述了真空、真空泵及干式真空泵的概念以及爪式真空泵的组成和工作原理,给出了国内外有关真空泵研究的一些现状以及发展趋势。
其次,提出了整体设计方法,完成了真空泵的整体结构设计。它主要包括泵壳的设计、转子型线的设计和主动轴的设计校核。,.泵壳的设计主要是考虑尽量减少重量和保证壳体的壁厚。转子型线是爪型转子主要的工作曲线,本文将它分为六段曲线,分别对每一段曲线的设计做了说明。
第三,进行了真空泵转子的平衡分析。转子平衡主要分为静平衡和动平衡两类。静平衡主要研究了单个转子,由于转子形状不规则,在计算不平衡量时采用了割补的思想,将转子分割成五部分,每部分的都为规则形状,计算得出各部分产生的不平衡量。动平衡是针对三个转子的情况,将每个转子的不平衡量投影到两个不同的平衡面上,这两个平衡面选在轴承附近。两个平衡面上计算得出总不平衡量,然后在适当的位置加上一个配重。与以往通过在转子上加配重来平衡的方法不同,本文通过计算不平衡量,在转子本身特定位置去掉特定质量,使转子达到平衡。通过这种方法的改进和优化,真空泵转子的加工和装配时间大大减小。
最后利用Pro/Engineer和ADAMS仿真软件对计算结果进行仿真。仿真结果验证了设计参数的可行性,为该真空泵产品化提供了设计基础。
Dry-type vacuum pump(VP) is widely used in aerospace, semiconductor, pharmacy, chemical and other fields. With the improvement of modern industrialization, the demand for VP is gradually increased, especially in the aerospace and semiconductor field. However, at present the VP is of huge volume and high weight, and the rotor is of bad balance. In view of this, an overall structural design on the claw-type VP is advanced. The balance of rotor, which is the core of the VP, is analysed.
First, the concepts of vacuum, VP and dry-type VP together with the composition and operation principle of claw-type VP are expatiated. What is more, it is given that the current situation of research and the trend of development concerning VP Domestic and Abroad.
Second, an overall design method is advanced, and the overall structural design of VP is finished. The overall structural design mainly includes the design of pump shells, the design of rotor type line and design and check of driving shaft. The design of pump shells must be mainly guaranteed lessening the weight and the wall thickness. As the main working curve line, the type line of rotor is divided into six phases. Then the design of each curve line is given the clarification respectively.
Third, the balance analysis of VP rotor is analysed. The balance of VP rotor can be classified into two types, namely static balance and dynamic balance. The static balance mainly researches single rotor. Because the shapes of rotor is irregular, when the imbalance is calculated, cession and supplement method is used. The rotor is divided into five parts in this method and each part with a regular shape, is calculated respectively. The dynamic balance is used to analyse three rotors. In this method, the quantity of imbalance of every rotor is shadowed into different balance surface, where the two balance surface is near the bearing. The total imbalance quantity on the two surfaces is calculated. Then, given weight is added at demand position. This method is different from previous methods which adds weight on rotors to achieve balance. A certain quality on rotors'certain place is cutted to achieve balance in this paper Through the amelioration and optimization of this method, VP rotors'processing and assemble time is decreased effectively.
Finally, the Pro/Engineer Software and ADMAS Software is used to simulate. the designed parameter is verified to be viable. It provides a design basis for this VP products.
引文
[1]杨乃恒.干式真空泵的原理、特征及其应用.真空.2000(3)：1-9.
[2]达道安.真空设计手册(第二版).1991,260-261
[3]邱海 动平衡中的信息原理[学位论文],陕西省西安市,西安交通大学,1999
[4]杨乃恒.真空获得设备.北京：冶金工业出版社.2001.
[5]安胜利 杨黎明.转子现场动平衡技术.北京：国防工业出版社.2007.
[6]胡兵方之楚.转子系统主动平衡的研究及发展.上海： 《2005年上海市国际工业博览会第三届上海市“工程与振动”科技论坛论文集》.2005.
[7]Cunningham R.E. Steady-State Unbalance Response ofa Three-Disk Flexible Rotor on Flexible, Damped Supports. Journal of Mechanical Design,1978,100:563=573.
[8]Nikalajsen J L,and Holmes R. Investigation of Squeeze-Film Isolators for the Vibration Control of a Flexible RotorJournal of Mechanical Engineering Science,1979,21:247=252
[9]刘迎澍,黄天.磁悬浮轴承研究综述.机械工程学报,2000,36(11)：5-9
[10]Palazzolo A B. Piezoelectric Pushers for Active Vibration Control of Rotating Machinery. ASME Transaction,Journal of Vibration,Acoustics,Stress,Reliability in Design,1989,111:298-305
[11]李勇,王靖等.高速转子自动平衡头的研究现状及发展趋势展望.振动测试与诊断,1998,18(4)：273-276
[12]欧阳红兵,汪希萱.两种新型电磁式在线自动平衡头.工艺装备,2002
[13]Dyer S W,Hackett B K,and Kerlin J. for the Baladyne Corporation, Electro-Magnetically Actuated Rotating Uabalance Compensator. U.S.Patent No.5,757,662,1998
[14]A.GParkinson:Balancing of Rotating Machinery, ImechE, Part C, Vol.205, p53-66,1991
[15]Gnielka P.:Modal Balancing of Flexible Shafts Without Test Runs-an Experimental Investigation, Journal of Sound and Vibration, Vol.90,p157-172,1983
[16]Palazzlo, A. B., Gunter, E. J.:Model Balancing of a Multi-mass Flexible Rotor without Trial Weights, ASME paper 82-GT-267
[17]Zhu Xiao-dong, Wang Xi-xuan:A Method of Balancing Large-scale Flexible Rotors without Test Runs, ASME paper 95-GT-363
[18]Y. Kang,C.P.Liu, G.. J. Sheen:A Modified Influence Coefficient Method for Balancing Unsymmetrical Rotor-Bearing Systems, Journal of Sound and Vibration, Vol.194,No.2,199-218,1996
[19]三轮修三：下村玄(日)著.旋转机械的平衡.机械工业出版社,1992
[20]王志 巴德纯.爪泵转子理论型线计算机模拟研究.沈阳航空工业学院学报,2001年3月,19卷(1期)：17-18
[21]陈木译.旋转机械振动学.徐氏基金会出版,1985
[22]钟一谔等.转子动力学.清华大学出版社,1987
[23]安胜利 杨黎明.转子现场动平衡技术.北京：国防工业出版社.2007.12
[24]Everett L J. Two-plane balancing of Rotor System without Phase Response Measurements. ASME Journal of Vibration, Acoustics Stress,and Reliability in Design,1987;109:162-167
[25]姚民生.爪型泵型线的研究.真空.1987(3)
[26]Goodman T P. Least-Square Method of Computing Balance Corrections. ASME Journalof Engineering for Industry,1964,8:273-277
[27]Pilkey W D, Bailey J T, and Smith P D. A Computational Technique for Optimizing Correction Weights and Axial Location of Balance Planes of Rotating Shaftes.ASME Transactions, Journal of Vibration. Acoustics,Stress,and Reliability in Design,1983,105:90-93
[28]欧珠光.工程振动.武汉：武汉大学出版社.2003
[29]郑凯 胡仁喜 陈鹿民等.ADAMS 2005机械设计高级应用实例.北京：机械工业出版社.2006
[30]文熙.Pro/Engineer野火版3.0宝典.北京：电子工业出版社.2007
[31]万启超魏田和.Pro/Engineer wildfire 3.0结构、热、运动分析基础与典型范例.北京：电子工业出版社.2008.3
[32]哈尔滨工业大学理论力学教研室.理论力学.北京：高等教育出版社.2002.
[33]吴瑞祥 王之栎 郭卫东等.机械设计基础.北京：北京航空航天大学出版社.2005.
[34]于溥.我国真空设备行业概况与思考.真空.2000(3)：1-4.
[35]姚民生.爪型泵型线的研究.真空.1989(3)：9-14.
[36]杨乃恒.真空获得设备.北京：冶金工业出版社.2001.
[37]杨乃恒.干式真空泵的现状与发展.北京：冶金工业出版社.2003.
[38]姚民生.爪型泵的抽速计算及其平衡的研究.真空.1989(6)：1419.
[39]张策.机械动力学.北京：高等教育出版社.2000.
[40]刘扬娟.共轭型线的数值计算.压缩机技术.1988(1)：3-6.
[41]姜燮昌.21世纪真空获得设备的展望.通用机械2002(3)：15-17.
[42]杨可桢 程光蕴 李仲生.机械设计基础.北京：高等教育出版社.2006.
[43]Kim Y D, Lee C W. Determination of the Optimal Balancing Head Location on Flexible Rotors Using a Structural Dynamics Modification Algorithm. Proceedings of the Institution of Mechanical Engineers, Part C:Mechanical Engineering Science,199(1):19-25
[44]Gu K Q, Niculescu S L. Survey on Recent Results in the Stability and Control of Time-Delay System. ASME Transaction, Journal of Dynamic Systems, Measurement,and Control,2003,125:158-165
[2]达道安.真空设计手册(第二版).1991,260-261
[3]邱海 动平衡中的信息原理[学位论文],陕西省西安市,西安交通大学,1999
[4]杨乃恒.真空获得设备.北京：冶金工业出版社.2001.
[5]安胜利 杨黎明.转子现场动平衡技术.北京：国防工业出版社.2007.
[6]胡兵方之楚.转子系统主动平衡的研究及发展.上海： 《2005年上海市国际工业博览会第三届上海市“工程与振动”科技论坛论文集》.2005.
[7]Cunningham R.E. Steady-State Unbalance Response ofa Three-Disk Flexible Rotor on Flexible, Damped Supports. Journal of Mechanical Design,1978,100:563=573.
[8]Nikalajsen J L,and Holmes R. Investigation of Squeeze-Film Isolators for the Vibration Control of a Flexible RotorJournal of Mechanical Engineering Science,1979,21:247=252
[9]刘迎澍,黄天.磁悬浮轴承研究综述.机械工程学报,2000,36(11)：5-9
[10]Palazzolo A B. Piezoelectric Pushers for Active Vibration Control of Rotating Machinery. ASME Transaction,Journal of Vibration,Acoustics,Stress,Reliability in Design,1989,111:298-305
[11]李勇,王靖等.高速转子自动平衡头的研究现状及发展趋势展望.振动测试与诊断,1998,18(4)：273-276
[12]欧阳红兵,汪希萱.两种新型电磁式在线自动平衡头.工艺装备,2002
[13]Dyer S W,Hackett B K,and Kerlin J. for the Baladyne Corporation, Electro-Magnetically Actuated Rotating Uabalance Compensator. U.S.Patent No.5,757,662,1998
[14]A.GParkinson:Balancing of Rotating Machinery, ImechE, Part C, Vol.205, p53-66,1991
[15]Gnielka P.:Modal Balancing of Flexible Shafts Without Test Runs-an Experimental Investigation, Journal of Sound and Vibration, Vol.90,p157-172,1983
[16]Palazzlo, A. B., Gunter, E. J.:Model Balancing of a Multi-mass Flexible Rotor without Trial Weights, ASME paper 82-GT-267
[17]Zhu Xiao-dong, Wang Xi-xuan:A Method of Balancing Large-scale Flexible Rotors without Test Runs, ASME paper 95-GT-363
[18]Y. Kang,C.P.Liu, G.. J. Sheen:A Modified Influence Coefficient Method for Balancing Unsymmetrical Rotor-Bearing Systems, Journal of Sound and Vibration, Vol.194,No.2,199-218,1996
[19]三轮修三：下村玄(日)著.旋转机械的平衡.机械工业出版社,1992
[20]王志 巴德纯.爪泵转子理论型线计算机模拟研究.沈阳航空工业学院学报,2001年3月,19卷(1期)：17-18
[21]陈木译.旋转机械振动学.徐氏基金会出版,1985
[22]钟一谔等.转子动力学.清华大学出版社,1987
[23]安胜利 杨黎明.转子现场动平衡技术.北京：国防工业出版社.2007.12
[24]Everett L J. Two-plane balancing of Rotor System without Phase Response Measurements. ASME Journal of Vibration, Acoustics Stress,and Reliability in Design,1987;109:162-167
[25]姚民生.爪型泵型线的研究.真空.1987(3)
[26]Goodman T P. Least-Square Method of Computing Balance Corrections. ASME Journalof Engineering for Industry,1964,8:273-277
[27]Pilkey W D, Bailey J T, and Smith P D. A Computational Technique for Optimizing Correction Weights and Axial Location of Balance Planes of Rotating Shaftes.ASME Transactions, Journal of Vibration. Acoustics,Stress,and Reliability in Design,1983,105:90-93
[28]欧珠光.工程振动.武汉：武汉大学出版社.2003
[29]郑凯 胡仁喜 陈鹿民等.ADAMS 2005机械设计高级应用实例.北京：机械工业出版社.2006
[30]文熙.Pro/Engineer野火版3.0宝典.北京：电子工业出版社.2007
[31]万启超魏田和.Pro/Engineer wildfire 3.0结构、热、运动分析基础与典型范例.北京：电子工业出版社.2008.3
[32]哈尔滨工业大学理论力学教研室.理论力学.北京：高等教育出版社.2002.
[33]吴瑞祥 王之栎 郭卫东等.机械设计基础.北京：北京航空航天大学出版社.2005.
[34]于溥.我国真空设备行业概况与思考.真空.2000(3)：1-4.
[35]姚民生.爪型泵型线的研究.真空.1989(3)：9-14.
[36]杨乃恒.真空获得设备.北京：冶金工业出版社.2001.
[37]杨乃恒.干式真空泵的现状与发展.北京：冶金工业出版社.2003.
[38]姚民生.爪型泵的抽速计算及其平衡的研究.真空.1989(6)：1419.
[39]张策.机械动力学.北京：高等教育出版社.2000.
[40]刘扬娟.共轭型线的数值计算.压缩机技术.1988(1)：3-6.
[41]姜燮昌.21世纪真空获得设备的展望.通用机械2002(3)：15-17.
[42]杨可桢 程光蕴 李仲生.机械设计基础.北京：高等教育出版社.2006.
[43]Kim Y D, Lee C W. Determination of the Optimal Balancing Head Location on Flexible Rotors Using a Structural Dynamics Modification Algorithm. Proceedings of the Institution of Mechanical Engineers, Part C:Mechanical Engineering Science,199(1):19-25
[44]Gu K Q, Niculescu S L. Survey on Recent Results in the Stability and Control of Time-Delay System. ASME Transaction, Journal of Dynamic Systems, Measurement,and Control,2003,125:158-165