超还原硅基有机发光微显示器研究
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摘要
微显示器是一种特殊形态的显示器，它自身物理尺寸很小，但却可以通过光学系统产生大屏幕显示效果，主要应用于投影机和近眼显示系统。随着有机发光技术的兴起，近年来基于OLED（有机发光二极管）的微显示器也开始逐渐发展，与目前主要的微显示器如数字微镜器件和液晶微显示器相比，OLED微显示器具有主动发光、固态显示、超轻超薄、色彩丰富、驱动电压低、响应速度快、温度适应范围广、功耗低等优点。本论文对硅基OLED微显示器的实现工艺、扫描算法、驱动电路、系统设计等方面展开深入研究，主要研究内容包括：
一、讨论了硅基OLED微显示器的原理和工艺流程，对传统的像素阳极二次图案化工艺提出改进，研究了利用半导体工艺制作像素阳极的一次图案化工艺，使硅基OLED微显示器的工艺流程得到精简。设计了表面金属分别为Al和TiN的测试芯片，并在芯片表面制作有机发光器件形成硅基OLED微显示器。测试结果表明，当像素阳极材料为Al、驱动电压为4.8V时，电流密度可达0.11mA/mm2，亮度可达1472cd/m2，发光效率为13.4cd/A；当像素阳极为TiN时，电流密度和亮度更高。该结果为OLED微显示器的设计提供了物理器件基础。
二、分析了人眼结构与视觉形成过程，讨论了人眼对亮度和颜色的视觉特性，进而提出超还原图像显示概念。由于传统的灰度产生策略难以满足超还原显示要求，本文在平板显示数字扫描时空映射拓扑架构的基础上，提出了适用于超还原OLED微显示器的最优扫描策略，并建立其分形模型，消除了传统数字驱动方式在图像扫描过程中的时间冗余，极大提高了扫描效率，使显示器的灰度等级提升至4096级以上。着重分析了最优扫描策略的非线性校正、伽玛校正和硬件需求等实际问题，为开发超还原OLED微显示器提出了新的思路和解决方案。
三、分析了传统的基于非晶硅和多晶硅TFT（薄膜晶体管）的OLED像素驱动电路以及基于单晶硅MOSFET（金属氧化物半导体场效应晶体管）的OLED像素驱动电路，提出一种适用于最优扫描策略的电流源型PWM（脉宽调制）像素驱动电路，该电路一方面可以产生精确的电流PWM信号，以数字方式驱动OLED，另一方面具有较好的OLED衰退补偿特性，可补偿OLED在发光过程中的衰退不一致。仿真结果表明，该驱动电路的静态特性和动态特性可以满足超还原显示的要求。
四、对硅基OLED微显示器的系统设计展开研究，将其划分为硅基芯片和最优扫描控制器两大部分。讨论了硅基芯片的像素驱动电路、行驱动电路、列驱动电路、数字电路及全芯片的数模混合ASIC（专用集成电路）设计方法，给出了像素分辨率为1280(×3)×1024的硅基芯片的设计和流片实例，测试结果表明该芯片在100MHz的像素时钟下可形成4096级灰度。详细讨论了最优扫描控制器的设计方法，基于最优扫描策略的时空拓扑序列，对最优扫描控制器的各子模块进行详细设计，并且给出了其FPGA（现场可编程门阵列）实现过程和结果。
本论文建立了较完整的硅基OLED微显示器的开发流程，论述了超还原硅基OLED微显示器的设计方法学，并通过开发实例证明了所述方法的正确性和有效性，为设计和开发超还原硅基OLED微显示器提供了新的解决方案。论文最后还展示了硅基OLED微显示器的开发平台，展现了其优秀的显示性能，并展望了微显示器的应用前景。
The microdisplay is a special type of display. Its physical size is rather small, butit may create large view size through the optical system. It can be used in the projectorsand the NTE (Near-To-Eye) systems. With the technical progressing of the organiclight emitting, the microdisplays based on the OLED (Organic Light Emitting Diode)begin to grow these years. Compared with the currently dominating microdisplays likeDMD (Digital Mirror Device) and LCD (Liquid Crystal Display) microdisplay, theOLED microdisplay has its special feature, such as self light emitting, solid statedisplay, light weight and thin, full color gamut, low driving voltage, fast response,wide temperature adaptation, low power, etc. This dissertation will give research on themanufacture process, the scan algorithm, the driving circuit and the system design forthe OLED-on-silicon microdisplay. The content includes:
1. Discuss the principle and the manufacture process flow of the OLED-on-siliconmicrodisplay. Propose the one-time process flow for the pixel anode patterning of thebackplane silicon chip based on the semiconductor process instead of the traditionaltwo-time process flow. Design a test chip with the pixel anode metal using Al and TiN,and fabricate the OLED on the surface of the chip to obtain a test OLED-on-siliconmicrodisplay. The test result shows, when the pixel anode metal is Al and the drivingvoltage is4.8V, the current density will reach0.11mA/mm2and the luminance reach1472cd/m2and so the light efficiency is13cd/A. The current density and the luminancewill be higher when the pixel anode metal is TiN. These results provide the physicaldevice basis for designing the OLED microdisplay.
2. Analyze the structure of the human eyes and the vision generating process.Discuss the luminance and chrominance response of the eyes. Propose the conceptionof the super restoring display. Propose the optimal scan strategy for the super restoingdisplay and build its fractal model based on the time-space mapping topology structurefor the digital scan of the flat panel display. Discuss the advantage of the optimal scan strategy on eliminating the time redundancy to improve the scan efficiency and reducethe hardware requirement. Also discuss the advantage of the optimal scan strategy onincreasing the display resolution to higher than HD (1920×1080) and increasing thegrayscale level to higher than4096. Give stress on the nonlinearity correction, thegamma correction and the hardware requirement of the optimal scan strategy whichwill provide a new solution to the super restoring OLED microdisplay.
3. Analyze the traditional amorphous silicon and the poly silicon based TFT(ThinFilm Transistor)-OLED pixel driving circuits and the single crystal silicon basedMOSFET(Metal Oxide Semiconductor Field Effect Transistor)-OLED pixel drivingcircuit. Propose the current source PWM (Pulse Width Modulation) pixel drivingcircuit particularly for the optimal scan strategy. This circuit will create the accuratecurrent PWM signal to drive the OLED pixel with the digital PWM driving method.On the other hand, this circuit will also provide the current compensations for theOLED pixel degradation non-uniformity. The simulation results show that the staticcharacteristics and the dynamic characteristics of the current source PWM pixel drivigcircuit can meet the timing requirement of the super restoring OLED microdisplay.
4. Research on the system design of the OLED-on-silicon microdisplay which isdivided into two parts: the silicon backplane chip and the optimal scan controller.Discuss the design methodology on the pixel driving circuit array, the row driver, thecolumn driver and the digital circuit, and also discuss the design methodology on theanalog-digital mixed circuit deisgn of the full chip. Show the silicon backplane chipdesign and tape out sample. The display resolution supports1280(×3)×1024. The testresults show the chip will create4096grayscale levels when the pixel clock is about100MHz. Also discuss the design methodology of the optimal scan controller based onthe time-space topology sequence. Give the design examples of all the sub-modules ofthe optimal scan controller. Show the result of the FPGA (Field Programmable GateArray) implementation of the optimal scan controller
This dissertation researches on the full development flow of the OLED-on-siliconmicrodisplay, discusses the design methodology of the super restoring display andgives the develop examples to prove the design method. It provides a new solution for researching and developing the super restoring OLED-on-silicon microdisplay. Finally,it shows the development platform of the OLED microdisplay, exhibit its excellentdisplay feature and look forward to its application in the near future.
一、讨论了硅基OLED微显示器的原理和工艺流程，对传统的像素阳极二次图案化工艺提出改进，研究了利用半导体工艺制作像素阳极的一次图案化工艺，使硅基OLED微显示器的工艺流程得到精简。设计了表面金属分别为Al和TiN的测试芯片，并在芯片表面制作有机发光器件形成硅基OLED微显示器。测试结果表明，当像素阳极材料为Al、驱动电压为4.8V时，电流密度可达0.11mA/mm2，亮度可达1472cd/m2，发光效率为13.4cd/A；当像素阳极为TiN时，电流密度和亮度更高。该结果为OLED微显示器的设计提供了物理器件基础。
二、分析了人眼结构与视觉形成过程，讨论了人眼对亮度和颜色的视觉特性，进而提出超还原图像显示概念。由于传统的灰度产生策略难以满足超还原显示要求，本文在平板显示数字扫描时空映射拓扑架构的基础上，提出了适用于超还原OLED微显示器的最优扫描策略，并建立其分形模型，消除了传统数字驱动方式在图像扫描过程中的时间冗余，极大提高了扫描效率，使显示器的灰度等级提升至4096级以上。着重分析了最优扫描策略的非线性校正、伽玛校正和硬件需求等实际问题，为开发超还原OLED微显示器提出了新的思路和解决方案。
三、分析了传统的基于非晶硅和多晶硅TFT（薄膜晶体管）的OLED像素驱动电路以及基于单晶硅MOSFET（金属氧化物半导体场效应晶体管）的OLED像素驱动电路，提出一种适用于最优扫描策略的电流源型PWM（脉宽调制）像素驱动电路，该电路一方面可以产生精确的电流PWM信号，以数字方式驱动OLED，另一方面具有较好的OLED衰退补偿特性，可补偿OLED在发光过程中的衰退不一致。仿真结果表明，该驱动电路的静态特性和动态特性可以满足超还原显示的要求。
四、对硅基OLED微显示器的系统设计展开研究，将其划分为硅基芯片和最优扫描控制器两大部分。讨论了硅基芯片的像素驱动电路、行驱动电路、列驱动电路、数字电路及全芯片的数模混合ASIC（专用集成电路）设计方法，给出了像素分辨率为1280(×3)×1024的硅基芯片的设计和流片实例，测试结果表明该芯片在100MHz的像素时钟下可形成4096级灰度。详细讨论了最优扫描控制器的设计方法，基于最优扫描策略的时空拓扑序列，对最优扫描控制器的各子模块进行详细设计，并且给出了其FPGA（现场可编程门阵列）实现过程和结果。
本论文建立了较完整的硅基OLED微显示器的开发流程，论述了超还原硅基OLED微显示器的设计方法学，并通过开发实例证明了所述方法的正确性和有效性，为设计和开发超还原硅基OLED微显示器提供了新的解决方案。论文最后还展示了硅基OLED微显示器的开发平台，展现了其优秀的显示性能，并展望了微显示器的应用前景。
The microdisplay is a special type of display. Its physical size is rather small, butit may create large view size through the optical system. It can be used in the projectorsand the NTE (Near-To-Eye) systems. With the technical progressing of the organiclight emitting, the microdisplays based on the OLED (Organic Light Emitting Diode)begin to grow these years. Compared with the currently dominating microdisplays likeDMD (Digital Mirror Device) and LCD (Liquid Crystal Display) microdisplay, theOLED microdisplay has its special feature, such as self light emitting, solid statedisplay, light weight and thin, full color gamut, low driving voltage, fast response,wide temperature adaptation, low power, etc. This dissertation will give research on themanufacture process, the scan algorithm, the driving circuit and the system design forthe OLED-on-silicon microdisplay. The content includes:
1. Discuss the principle and the manufacture process flow of the OLED-on-siliconmicrodisplay. Propose the one-time process flow for the pixel anode patterning of thebackplane silicon chip based on the semiconductor process instead of the traditionaltwo-time process flow. Design a test chip with the pixel anode metal using Al and TiN,and fabricate the OLED on the surface of the chip to obtain a test OLED-on-siliconmicrodisplay. The test result shows, when the pixel anode metal is Al and the drivingvoltage is4.8V, the current density will reach0.11mA/mm2and the luminance reach1472cd/m2and so the light efficiency is13cd/A. The current density and the luminancewill be higher when the pixel anode metal is TiN. These results provide the physicaldevice basis for designing the OLED microdisplay.
2. Analyze the structure of the human eyes and the vision generating process.Discuss the luminance and chrominance response of the eyes. Propose the conceptionof the super restoring display. Propose the optimal scan strategy for the super restoingdisplay and build its fractal model based on the time-space mapping topology structurefor the digital scan of the flat panel display. Discuss the advantage of the optimal scan strategy on eliminating the time redundancy to improve the scan efficiency and reducethe hardware requirement. Also discuss the advantage of the optimal scan strategy onincreasing the display resolution to higher than HD (1920×1080) and increasing thegrayscale level to higher than4096. Give stress on the nonlinearity correction, thegamma correction and the hardware requirement of the optimal scan strategy whichwill provide a new solution to the super restoring OLED microdisplay.
3. Analyze the traditional amorphous silicon and the poly silicon based TFT(ThinFilm Transistor)-OLED pixel driving circuits and the single crystal silicon basedMOSFET(Metal Oxide Semiconductor Field Effect Transistor)-OLED pixel drivingcircuit. Propose the current source PWM (Pulse Width Modulation) pixel drivingcircuit particularly for the optimal scan strategy. This circuit will create the accuratecurrent PWM signal to drive the OLED pixel with the digital PWM driving method.On the other hand, this circuit will also provide the current compensations for theOLED pixel degradation non-uniformity. The simulation results show that the staticcharacteristics and the dynamic characteristics of the current source PWM pixel drivigcircuit can meet the timing requirement of the super restoring OLED microdisplay.
4. Research on the system design of the OLED-on-silicon microdisplay which isdivided into two parts: the silicon backplane chip and the optimal scan controller.Discuss the design methodology on the pixel driving circuit array, the row driver, thecolumn driver and the digital circuit, and also discuss the design methodology on theanalog-digital mixed circuit deisgn of the full chip. Show the silicon backplane chipdesign and tape out sample. The display resolution supports1280(×3)×1024. The testresults show the chip will create4096grayscale levels when the pixel clock is about100MHz. Also discuss the design methodology of the optimal scan controller based onthe time-space topology sequence. Give the design examples of all the sub-modules ofthe optimal scan controller. Show the result of the FPGA (Field Programmable GateArray) implementation of the optimal scan controller
This dissertation researches on the full development flow of the OLED-on-siliconmicrodisplay, discusses the design methodology of the super restoring display andgives the develop examples to prove the design method. It provides a new solution for researching and developing the super restoring OLED-on-silicon microdisplay. Finally,it shows the development platform of the OLED microdisplay, exhibit its excellentdisplay feature and look forward to its application in the near future.
引文
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