激光扫描显示MEMS微镜研究
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摘要
激光扫描微显示技术作为一项新兴的显示技术,适用于便携式微型投影系统(Pico-Projector)、嵌入式显示系统(Embedded Projector)、近眼显示系统(Near-to-eye)、机车显示系统(Automotive Displays)等,具有巨大的市场潜力和重要的研究意义。然而,其核心器件MEMS微镜的研究虽然已经广泛开展,但是仍然存在扫描频率低,扭转角度小等问题,致使激光扫描微显示技术仍无法广泛投入使用。本文针对以上问题,对MEMS微镜展开了以下研究工作：
依据激光扫描微显示技术和压电理论,设计了一种由水平扫描微镜和竖直扫描微镜组成的二维激光扫描系统。针对MEMS微扫描镜存在的扫描频率低、扫描角度小的缺点,设计了一种T形梁结构的水平扫描微镜。同时,设计了一种采用双扭转梁结构的竖直扫描微镜,其镜面尺寸为3mm×8mm。并且使用ANSYS软件分别对两种扫描微镜的结构进行了模拟仿真设计。
对扫描微镜的制作进行了研究,设计出微镜的工艺制作流程。综合采用体硅微加工技术和装配粘结技术,制备出水平扫描微镜和竖直扫描微镜样品器件。
设计搭建了激光扫描测试系统,分别对水平扫描微镜和竖直扫描微镜的性能进行了测试。单层压电陶瓷驱动水平扫描微镜的扫描频率可达21.9kHz,在±200V的交流电压驱动下,得到21.8°的光学扫描角,Q值为1096.6。竖直扫描微镜的扫描频率为1131Hz,在±4V的交流电压下,得到29°的光学扫描角,Q值为337。最后,通过两种扫描微镜的组合实现激光二维扫描。
The laser scanning micro display, as a new display technology, is suitable to pico-projector, embedded projector, near-to-eye system, automotive display and so on. It has strong potencial in the market and important research significance. The MEMS scanning micro mirror, as the core of the laser scanning micro display, has been investigated widely. But there are still some problems, such as lower scanning frequency and smaller torsion angle. These problems make the laser scanning display can not to be used widely. Aiming at the above problems, this article launched the following researches for MEMS scanning micro mirror.
Based on the laser scanning micro display technology and piezoelectric theory, we designed a2D laser scanning system. This system is composed of a horizontal scanning mirror and a vertical scanning mirror. At present, the horizontal scanning mirror has some shortages, such as lower scanning frequency and smaller torsion angle. Aiming at these shortages, a horizontal scanning mirror with T shape beam was designed. At the same time, a vertical scanning mirror with double torsional beam was proposed too. Its mirror size is3mm×8mm. Optimization design has been conducted by using ANSYS.
Study on fabrication of micro scanner, the process flow of the scanner was designed. Using bulk silicon processing and assemble technologies, the horizontal scamiing mirror and the vertical scanning mirror was fabricated.
Laser scanning test system was designed and built. The resonant frequency, scanning angle of the micro mirror were tested. Results show the resonant frequency of the horizontal scanning mirror is21.9kHz. When the driving voltage is±200Vac, the scanning angle of the mirror achieves±21.8°. Q is1096.6. The resonant frequency of the vertical scanning mirror is1131Hz. When the driving voltage is±4Vac, the scanning angle of the mirror achieves±29°. Q is337. Finally,2D laser scanning was realized through combination of two kinds of micro scanner.
依据激光扫描微显示技术和压电理论,设计了一种由水平扫描微镜和竖直扫描微镜组成的二维激光扫描系统。针对MEMS微扫描镜存在的扫描频率低、扫描角度小的缺点,设计了一种T形梁结构的水平扫描微镜。同时,设计了一种采用双扭转梁结构的竖直扫描微镜,其镜面尺寸为3mm×8mm。并且使用ANSYS软件分别对两种扫描微镜的结构进行了模拟仿真设计。
对扫描微镜的制作进行了研究,设计出微镜的工艺制作流程。综合采用体硅微加工技术和装配粘结技术,制备出水平扫描微镜和竖直扫描微镜样品器件。
设计搭建了激光扫描测试系统,分别对水平扫描微镜和竖直扫描微镜的性能进行了测试。单层压电陶瓷驱动水平扫描微镜的扫描频率可达21.9kHz,在±200V的交流电压驱动下,得到21.8°的光学扫描角,Q值为1096.6。竖直扫描微镜的扫描频率为1131Hz,在±4V的交流电压下,得到29°的光学扫描角,Q值为337。最后,通过两种扫描微镜的组合实现激光二维扫描。
The laser scanning micro display, as a new display technology, is suitable to pico-projector, embedded projector, near-to-eye system, automotive display and so on. It has strong potencial in the market and important research significance. The MEMS scanning micro mirror, as the core of the laser scanning micro display, has been investigated widely. But there are still some problems, such as lower scanning frequency and smaller torsion angle. These problems make the laser scanning display can not to be used widely. Aiming at the above problems, this article launched the following researches for MEMS scanning micro mirror.
Based on the laser scanning micro display technology and piezoelectric theory, we designed a2D laser scanning system. This system is composed of a horizontal scanning mirror and a vertical scanning mirror. At present, the horizontal scanning mirror has some shortages, such as lower scanning frequency and smaller torsion angle. Aiming at these shortages, a horizontal scanning mirror with T shape beam was designed. At the same time, a vertical scanning mirror with double torsional beam was proposed too. Its mirror size is3mm×8mm. Optimization design has been conducted by using ANSYS.
Study on fabrication of micro scanner, the process flow of the scanner was designed. Using bulk silicon processing and assemble technologies, the horizontal scamiing mirror and the vertical scanning mirror was fabricated.
Laser scanning test system was designed and built. The resonant frequency, scanning angle of the micro mirror were tested. Results show the resonant frequency of the horizontal scanning mirror is21.9kHz. When the driving voltage is±200Vac, the scanning angle of the mirror achieves±21.8°. Q is1096.6. The resonant frequency of the vertical scanning mirror is1131Hz. When the driving voltage is±4Vac, the scanning angle of the mirror achieves±29°. Q is337. Finally,2D laser scanning was realized through combination of two kinds of micro scanner.
引文
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[37]Huikai Xie, et al.3D Endoscopic Optical Coherence Tomography Based on Rapid-Scanning MEMS Mirrors[C]. Proc. of SPIE-OSA-IEEE Asia Communications and Photonics, SPIE Vol. 7634,76340X (2009).
[38]Ankur Jain, et al. A thermal bimorph micromirror with large bi-directional and vertical actuation[J]. Sensors and Actuators A 122 (2005) 9-15.
[39]Hiroshi Miyajima, et al. A Durable, Shock-Resistant Electromagnetic Optical Scanner With Polyimide-Based Hinges[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL.10, NO.3, SEPTEMBER 2001.
[40]Randy Sprague, et al. Bi-axial magnetic drive for Scanned Beam Display mirrors[C]. Proc. of SPIE Vol.5721.
[41]Y. Yasuda, et al. PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS[J]. Integrated Ferroelectrics,76:1,81-91.
[42]Wyatt O. Davis, et al. High-performance silicon scanning mirror for laser printing[C]. Proc. of SPIE Vol.6466,64660D, (2007).
[43]Johannes G Smits, et al. Microelectromechanical flexure PZT actuated optical scanner: static and resonance behavior[J]. J. Micromech. Microeng.15 (2005) 1285-1293.
[44]Chengkuo Lee, et al. A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators[J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL.15, NO.5, SEPTEMBER/OCTOBER 2009.
[45]K. Yamada and T. Kuriyama. A novel asymmetric silicon micro-mirror for optical beam scanning display[C]. IEEE Proc. MEMS'98, pp.110-115, Heidelberg, Germany,1998.
[46]栗大超,吴文刚,闫桂珍等.硅微机械扭转微镜的研究进展[J].中国机械工程,2005,16(z1)：27-32.
[47]互动百科,压电效应.[EB/OL].http://www.hudong.com/wiki/%E5%8E%8B%E7%94%B5%E6%95%88%E5%BA%94.
[48]张福学,王丽坤.现代压电学(上册)[M].科学技术出版社,2002,84-91.
[49]孙慷,张福学.压电学[M].北京：国防工业出版社,1984.
[50]Tutorial:Piezoelectrics in Nanopositioning, Designing wiih Piezoelectric Actuators [EB/OL]. http://www.physikinstrumente.com/en/products/piezo_tutorial.php.
[51]MinhangBao. Analysis and Design Princ iples of MEMS Devices[M]. First edition. Elsevier B. V.2005.
[52]Feixia Pany, Joel Kubbyy,et al. Squeeze film damping effect on the dynamic response of a MEMS torsion mirror [J]. J. Micromech. Microeng.8(1998)200-208.
[53]Hakan Urey. Torsional MEMS scanner design for high-resolution display systems[C]. Optical Scanning II, Proc. SPIE Vol.4773, pp.27-37 Seattle, Washington, July 2002.
[54]Alexander Wolter, et al. Applications and requirements for MEMS scanner mirrors[C]. Proceedings of SPIE Vol.5719.
[55]E. Gaumont et al. Mechanical and electrical failures and reliability of micro scanning mirrors[C]. Proceedings of 9th IPFA 2002, Singapre, pp212-217.
[56]J. C. Brazas and M. W. Kowarz. High-resolution laser-projection display system using a grating electromechanical system (GEMS) [C]. MOEMS Display and Imaging Systems II, January 2004, San Jose, Proc. of SPIE vol.5348, p65-74 (2004).
[57]KURT E. PETERSEN. Silicon as a Mechanical Material[C]. PROCEEDINGS OF THE IEEE, VOL. 70, NO.5, MAY 1982.
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[61]黄庆安.硅微机械加工技术[M].北京：科学出版社,1995.
[2]M. E. Motamedi. MOEMS Micro-Opto-Electro-Mechanical Systems[M]. Bell ingham:SPIE Press, 2005.
[3]Lan Underwood. A review of microdisplay technologies. SID@EID, Electronic Information Displays[C]. London,2000.
[4]Shimizu, J. A. Single Panel Reflective LCD Projector[J]. Proceedings SPIE, Vol.3634, pp.197-206,1999.
[5]Shimizu, J.A. Single Panel Reflective LCD Optics[C]. Proceedings IDW'99, pp.989-992, 1999.
[6]Shimizu, J.A. Scrolling Color LCOS for HDTV Rear Projection[J]. SID 2001 Digest, 1072-1075.
[7]Tracy V.Wilson. How lcos Works[EB/OL]. http://electronics.howstuffworks.com/lcos3.htm.
[8]Smooth Screen Technology for deep, movie-like images-No screen door effect[EB/OL]. http://www.panasonic.com/business/projectors/learning_center/lc_ss.asp.
[9]Screen-door effect[EB/OL]. http://en.wikipedia.org/wiki/Screen-door_effect.
[10]LCOS Microdisplay Technology[EB/OL]. http://www.holoeye.com/download_daten/LCOS_Microdisplays.pdf.
[11]Younse J M. Mirrors on a chip[J]. IEEE Spectrum,1993,30:27-31.
[12]Van Kessel P F, et al. A MEMS-based projection display[J]. Proc IEEE,1998,86:1687-1704.
[13]Hornbeck L J. Deformable-mirror spatial light modulators[J]. SPIE,1989,1150:86-102.
[14]Hornbeck L J. Digital light processing for high-brightness, high-resolution applications[EB/OL]. http://www.ti.com/dlp.
[15]Maarten Niesten, et al. Scanning Laser Beam Di splays[J]. Proc. of SPIE Vol.7001,70010E, 2008.
[16]liakan Urey, David W. Wine, Thor D. Osborn. Optical performance requirements for MEMS-scanner based microdisplays [C]. Conf. on MOEMS and Miniaturized Systems, Systems, SPIE Vol.4178, pp.176-185, Santa Clara, California(2000).
[17]Yong-Hwa Park, et al. Perspective of MEMS Based Raster Scanning Display and Its Requirements for Success[C]. Proceedings of SPIE Vol.6114,611403, (2006).
[18]Kranert J, Deter C, Gessner T, Dotzel W. Laser display technology[C]. The Eleventh Annual International Workshop Proceedings, pages 99-104,1998. Micro Electro Mechanical Systems,1998. MEMS 98.
[19]M. Scholles, et al. Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images[C]. Proc. of SPIE Vol.6288, 628807, (2006).
[20]Kai-Uwe Roscher, et al. Low cost projection device with a 2-dimensional resonant micro scanning mirror[C]. Proceedings of SPIE Vol.5348 (SPIE, Bellingham, WA,2004).
[21]Heinrich Gruger, et al. New Approach for MEMS Scanning Mirror for Laser Projection Systems[C]. Proc. of SPIE Vol.6887,68870L, (2008).
[22]Our Technology. How it works[EB/OL]. http://www.btendo.com/tech_works.html.
[23]Rene Sanders, et al. Design and fabrication of a MEMS mirror for Miniature Laser Projection[C]. Proceedings of the SPIE, Volume 7208 (2009). pp.72080R-72080R-13 (2009).
[24]Yong-Hwa Park, et al. Perspective of MEMS Based Raster Scanning Display and Its Requirements for Success[C]. Proceedings of SPIE Vol.6114,611403, (2006).
[25]Mark Freeman. Scanned Laser Pico projectors:Seeing the Big Picture (with a Small Device)[J]. Optics and Photonics News, Vol.20, Issue 5, pp.28-34 (2009).
[26]Roel Beernaert, et al. Novel micromirror design with variable pull-in voltage [J]. Microelectronic Engineering 87 (2010) 1248-1252.
[27]Sunghoon Kwon, et al. A High Aspect Ratio 2D Gimbaled Microscanner with Large Static Rotation[J]. IEEE/LEOS Optical MEMS 2002, Lugano, Switzerland, Aug.2002.
[28]Jin-Ho Lee, et al. Bonding technologies for silicon scanning mirror having vertical comb fingers[C]. Proceeding of SPIE Vol.4592(2001).
[29]Hoang Manh Chu, et al. Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal Can[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 19, NO.4, AUGUST 2010.
[30]Jin-Woo Choa, et al. Electrostatic 1D Micro Scanner with Vertical Combs for HD Resolution Display[C]. Proc. of SPIE Vol.6466,64660B, (2007).
[31]Robert A. Conant, et al. A raster-scanning full-motion video display using polysi licon micromachined mirrors [J]. Sensors and Actuators 83 2000 291-296.
[32]Meng-Hsiung Kiang, et al. Actuated Polysilicon Micromirrors for Raster-Scanning Displays[C]. Proceedings of International Solid State Sensors and Actuators Conference (Tranducers'97), Chicago,IL, USA, June 16-19,1997, P.323-326.
[33]Harald Schenk, et al. A resonantly excited 2D-micro-scanning-mirror with large deflection[J]. Sensors and Actuators A 89 (2001) 104-111.
[34]R. A. Brookhuis, et al. A MICROMIRROR FOR OPTICAL PROJECTION DISPLAYS [J]. MME 2010, September 26-29,2010, Enschede, The Netherlands.
[35]Kemiao Jia. An Electrothermal Tip-Tilt-Piston Micromirror[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. VOL.18, NO.5, OCTOBER 2009.
[36]Yingshun Xu, et al. Two-Axis Gimba]-Less Electrothermal Micromirror for Large-Angle Circumferential Scanning[J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL.15, NO.5, SEPTEMBER/OCTOBER 2009.
[37]Huikai Xie, et al.3D Endoscopic Optical Coherence Tomography Based on Rapid-Scanning MEMS Mirrors[C]. Proc. of SPIE-OSA-IEEE Asia Communications and Photonics, SPIE Vol. 7634,76340X (2009).
[38]Ankur Jain, et al. A thermal bimorph micromirror with large bi-directional and vertical actuation[J]. Sensors and Actuators A 122 (2005) 9-15.
[39]Hiroshi Miyajima, et al. A Durable, Shock-Resistant Electromagnetic Optical Scanner With Polyimide-Based Hinges[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL.10, NO.3, SEPTEMBER 2001.
[40]Randy Sprague, et al. Bi-axial magnetic drive for Scanned Beam Display mirrors[C]. Proc. of SPIE Vol.5721.
[41]Y. Yasuda, et al. PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS[J]. Integrated Ferroelectrics,76:1,81-91.
[42]Wyatt O. Davis, et al. High-performance silicon scanning mirror for laser printing[C]. Proc. of SPIE Vol.6466,64660D, (2007).
[43]Johannes G Smits, et al. Microelectromechanical flexure PZT actuated optical scanner: static and resonance behavior[J]. J. Micromech. Microeng.15 (2005) 1285-1293.
[44]Chengkuo Lee, et al. A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators[J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL.15, NO.5, SEPTEMBER/OCTOBER 2009.
[45]K. Yamada and T. Kuriyama. A novel asymmetric silicon micro-mirror for optical beam scanning display[C]. IEEE Proc. MEMS'98, pp.110-115, Heidelberg, Germany,1998.
[46]栗大超,吴文刚,闫桂珍等.硅微机械扭转微镜的研究进展[J].中国机械工程,2005,16(z1)：27-32.
[47]互动百科,压电效应.[EB/OL].http://www.hudong.com/wiki/%E5%8E%8B%E7%94%B5%E6%95%88%E5%BA%94.
[48]张福学,王丽坤.现代压电学(上册)[M].科学技术出版社,2002,84-91.
[49]孙慷,张福学.压电学[M].北京：国防工业出版社,1984.
[50]Tutorial:Piezoelectrics in Nanopositioning, Designing wiih Piezoelectric Actuators [EB/OL]. http://www.physikinstrumente.com/en/products/piezo_tutorial.php.
[51]MinhangBao. Analysis and Design Princ iples of MEMS Devices[M]. First edition. Elsevier B. V.2005.
[52]Feixia Pany, Joel Kubbyy,et al. Squeeze film damping effect on the dynamic response of a MEMS torsion mirror [J]. J. Micromech. Microeng.8(1998)200-208.
[53]Hakan Urey. Torsional MEMS scanner design for high-resolution display systems[C]. Optical Scanning II, Proc. SPIE Vol.4773, pp.27-37 Seattle, Washington, July 2002.
[54]Alexander Wolter, et al. Applications and requirements for MEMS scanner mirrors[C]. Proceedings of SPIE Vol.5719.
[55]E. Gaumont et al. Mechanical and electrical failures and reliability of micro scanning mirrors[C]. Proceedings of 9th IPFA 2002, Singapre, pp212-217.
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