脉冲激光在硅表面制备微纳结构的研究
摘要
在自然界中,很多生物体表的有序微纳结构使其具有独特的性能,如结构色、超疏水和超黏附等,引起了人们很大的兴趣。硅是一种重要的半导体材料,表面具有微纳结构的硅材料在红外探测器、太阳能电池以及平板显示器等领域都有着重要的应用前景,因此硅表面微纳结构制备及性质的研究具有重要的意义。激光在材料表面直接诱导有序微纳结构是该领域具有潜力的制备方法之一。在本文中我们研究了纳秒与飞秒激光在硅表面微纳结构的制备和性质。
在特定的气氛环境下,用Nd:YAG纳秒脉冲激光(波长1064 nm、532 nm和355nm)与钛宝石飞秒脉冲激光(波长800 nm)对硅表面累积脉冲辐照,硅表面产生了周期性波纹和锥形等不同的微纳结构。研究了激光参数、气氛条件和硅片晶向等因素对表面微结构的影响,并对其形成机理给出了定性的理论解释。
采用飞秒激光对硅表面进行扫描,首次发现了辐照过的硅表面会呈现不同的颜色。研究表明:在空气、氮气和真空条件下形成的彩色硅表面均出现了亚波长周期性结构,真空中的结果要更明显,且波纹间距依次增加。反射谱的研究表明:在500-1500 nm波段范围内的彩色硅表面的光辐射反射率不高于30%。
首次采用频率较低(10Hz),而且更便宜、更容易维护的纳秒激光实现了黑硅的高效率制备。不同气氛条件下制备的微构造硅表面浸润性有很大的差异,空气中为强亲水,真空中为超疏水,而SF_6中则表现为亲水性。500-2400 nm的吸收率光谱曲线的结果表明:SF_6下制备的具有微结构的硅表面呈现很强的红外吸收特性,其原因可能与表面的多次反射和硫杂质掺杂有关。
In nature, biological surfaces with orderly micro-nano structures make it show unique properties, such as structural color, hydrophobic membranes, super adhesion and so on, which cause people having great interest on it. As an important semi-conductor material, silicon with micro-nano structured surface has broad applications in infrared detectors, solar cells, flat panel displays and so on. It has a great interest to explore the micro-nano structures on the silicon surface. Laser direct-inducing micro-nano surface structure has been demonstrated to be a promising method. In this thesis, the silicon surfaces with micro-nano structure are formed by using femtosecond and nanosecond laser under certain conditions and the properties are researched.
Different micro-nano structures such as periodic ripple structures and conical spikes are prepared on silicon surfaces by the cumulative Nd:YAG nanosecond laser pulses (wavelength 1064 nm, 532 nm and 355 nm) and Ti:Sapphire femtosecond laser pulses (wavelength 800 nm). The effects of laser parameters, atmosphere conditions and crystal orientation to the forming of the micro-structures have been studied. Qualitative theoretical explanations to the formation of microstructure have been given.
We discovered that silicon surface will appear different colors after scanning with femtosecond laser. The results show that sub-wavelength periodic structures appear on the colored silicon surfaces under air, nitrogen and vacuum atmosphere. The color for the silicons prepared under vacuum is much clearer. The periods of the ripple structures on colored silicon surfaces produced on vacuum have the maximum value, and the ones prepared on air are the smallest. The study of reflection spectrum shows that the reflectivity of colored silicon’s surfaces is not higher than 30% in the wavelength range 500-1500 nm.
Black silicon is firstly achieved efficiently by using the nanosecond laser with low frequency (10Hz), which is much cheaper and easier to maintain than the femtosecond laser. The wettability of micro-structure silicon surface formed under different atmosphere has different performances: super-hydrophilic under air, superhydrophobic under vacuum and hydrophilic under SF6. The study of absorption spectrum in the wavelength 500-2400 nm indicates that the silicon surface with the microstructure fabricated under SF6 atmosphere has strong infrared absorption characteristics which are due to the multiple reflections within surface microstructures and the doped sulfur in silcon.
在特定的气氛环境下,用Nd:YAG纳秒脉冲激光(波长1064 nm、532 nm和355nm)与钛宝石飞秒脉冲激光(波长800 nm)对硅表面累积脉冲辐照,硅表面产生了周期性波纹和锥形等不同的微纳结构。研究了激光参数、气氛条件和硅片晶向等因素对表面微结构的影响,并对其形成机理给出了定性的理论解释。
采用飞秒激光对硅表面进行扫描,首次发现了辐照过的硅表面会呈现不同的颜色。研究表明:在空气、氮气和真空条件下形成的彩色硅表面均出现了亚波长周期性结构,真空中的结果要更明显,且波纹间距依次增加。反射谱的研究表明:在500-1500 nm波段范围内的彩色硅表面的光辐射反射率不高于30%。
首次采用频率较低(10Hz),而且更便宜、更容易维护的纳秒激光实现了黑硅的高效率制备。不同气氛条件下制备的微构造硅表面浸润性有很大的差异,空气中为强亲水,真空中为超疏水,而SF_6中则表现为亲水性。500-2400 nm的吸收率光谱曲线的结果表明:SF_6下制备的具有微结构的硅表面呈现很强的红外吸收特性,其原因可能与表面的多次反射和硫杂质掺杂有关。
In nature, biological surfaces with orderly micro-nano structures make it show unique properties, such as structural color, hydrophobic membranes, super adhesion and so on, which cause people having great interest on it. As an important semi-conductor material, silicon with micro-nano structured surface has broad applications in infrared detectors, solar cells, flat panel displays and so on. It has a great interest to explore the micro-nano structures on the silicon surface. Laser direct-inducing micro-nano surface structure has been demonstrated to be a promising method. In this thesis, the silicon surfaces with micro-nano structure are formed by using femtosecond and nanosecond laser under certain conditions and the properties are researched.
Different micro-nano structures such as periodic ripple structures and conical spikes are prepared on silicon surfaces by the cumulative Nd:YAG nanosecond laser pulses (wavelength 1064 nm, 532 nm and 355 nm) and Ti:Sapphire femtosecond laser pulses (wavelength 800 nm). The effects of laser parameters, atmosphere conditions and crystal orientation to the forming of the micro-structures have been studied. Qualitative theoretical explanations to the formation of microstructure have been given.
We discovered that silicon surface will appear different colors after scanning with femtosecond laser. The results show that sub-wavelength periodic structures appear on the colored silicon surfaces under air, nitrogen and vacuum atmosphere. The color for the silicons prepared under vacuum is much clearer. The periods of the ripple structures on colored silicon surfaces produced on vacuum have the maximum value, and the ones prepared on air are the smallest. The study of reflection spectrum shows that the reflectivity of colored silicon’s surfaces is not higher than 30% in the wavelength range 500-1500 nm.
Black silicon is firstly achieved efficiently by using the nanosecond laser with low frequency (10Hz), which is much cheaper and easier to maintain than the femtosecond laser. The wettability of micro-structure silicon surface formed under different atmosphere has different performances: super-hydrophilic under air, superhydrophobic under vacuum and hydrophilic under SF6. The study of absorption spectrum in the wavelength 500-2400 nm indicates that the silicon surface with the microstructure fabricated under SF6 atmosphere has strong infrared absorption characteristics which are due to the multiple reflections within surface microstructures and the doped sulfur in silcon.
引文
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