无线单片式微位移电容传感器的研究
摘要
电容位移传感器属于非接触方式的测量装置,比普通位移测量仪器具备更简单的结构,更高的分辨率和灵敏度。现有的微位移电容传感器,由于其电容值较小,不易被准确检测,且传统有线测量方式也限制了其使用范围。为了解决上述问题并进一步提高微位移电容传感器的实用性,研制了一款无线单片式微位移电容传感器。
本文介绍了常见的位移传感器种类、特点和适用范围,分析电容式位移传感器探头的基本原理,选取性能较高的单片式双叉指电极作为微位移电容传感器的探头。为了能够准确测量微位移电容传感器探头的电容值,比较现有的电容检测方法,确定了以AD7745电容检测芯片为核心的电容测量电路。
利用ZIGBEE芯片内嵌8051核,同时含有一个IEEE802.15.4兼容无线收发器,且可靠性高、价格便宜等特点,开发无线数据传输系统,完成电容位移传感器探头电容采集、发送和接收。
使用VC++的MFC工具开发上位机软件。该上位机软件通过串口接收电容数据,完成数据处理,绘制一维坐标系统,指示金属被测物的当前位移。
搭建实验平台,采集了金属板与传感器探头25mm距离范围内传感器的电容值。分析了传感器在这25mm范围内的灵敏度分布。为了标定位移测量系统,对其中灵敏度较高的6mm位移-电容数据段进行线性化处理。当采用不分段的方式处理数据时,数据线性度(R平方值)为0.8989。采用分段的方式处理数据时,三段数据的线性度分别为0.9951、0.9900、0.9895。
通过位移测量实验结果表明,本文开发的无线微位移电容传感器具备6mm的测量范围,0.1mm的分辨率,测量相对误差小于1.2%,通信距离大于50m。
Capacitive displacement transducer is a kind of non-contact measurement instrument. Compares to The general displacement measuring instrument,it has simple structure and high resolution and measurement range. Now, micro displacement capacitance sensor is not easy to be detected accurately, Because of its smaller capacitance value. And the traditional wired measurement method has also limited the scope of its application. For solving the above problems,The paper introduces the development of a wireless chip micro displacement capacitance sensor. And to further improve the practicality of micro displacement capacitance sensor.
This paper introduces the common types of displacement sensor, its characteristics and applicable scope.,studying the basic principle of capacitive displacement sensor probe, high performance monolithic double interdigitated electrode is choose to be the Probe micro displacement capacitance sensor. In order to measure micro displacement capacitance sensor values accurately, Comparative study of all the capacitance detection method.The research has identified AD7745detection chip as the capacitance measurement circuit core.
ZIGBEE has the characteristics of chip embedded with8051nuclei, Also contains a IEEE802.15.4compatible wireless transceiver, high reliability, low price etc.Using ZIGBEE's characteristics to develop a wireless data transmission system. The system can complete the Acquisition, transmission, reception function of the capacitive displacement sensor capacitance.
Using the VC++MFC tool develop the PC software.it adopts serial port to receive the capacitance data, perform data processing, draw a one-dimensional coordinate system, Display the current displacement of the metal.
Building the experimental platform, acquire capacitance between the metal plate and the sensor range of25mm sensor. The sensitivity of the sensor in the25mm range were analyzed, In order to calibrate displacement measuring system, To linearize the data segment in the6mm displacement sensitivity higher capacitance. When using the Unsegmented for data processing, Data linearity is0.8989. When using the segmented, Linearity of three segments of data are respectively0.9951,0.9900,0.9895.
Finally, the experimental results show, Wireless micro displacement capacitance sensor is developed in this paper has the measurement range of6mm,0.1mm resolution, measuring relative error is less than1.2%, the communication distance is more than50m.
本文介绍了常见的位移传感器种类、特点和适用范围,分析电容式位移传感器探头的基本原理,选取性能较高的单片式双叉指电极作为微位移电容传感器的探头。为了能够准确测量微位移电容传感器探头的电容值,比较现有的电容检测方法,确定了以AD7745电容检测芯片为核心的电容测量电路。
利用ZIGBEE芯片内嵌8051核,同时含有一个IEEE802.15.4兼容无线收发器,且可靠性高、价格便宜等特点,开发无线数据传输系统,完成电容位移传感器探头电容采集、发送和接收。
使用VC++的MFC工具开发上位机软件。该上位机软件通过串口接收电容数据,完成数据处理,绘制一维坐标系统,指示金属被测物的当前位移。
搭建实验平台,采集了金属板与传感器探头25mm距离范围内传感器的电容值。分析了传感器在这25mm范围内的灵敏度分布。为了标定位移测量系统,对其中灵敏度较高的6mm位移-电容数据段进行线性化处理。当采用不分段的方式处理数据时,数据线性度(R平方值)为0.8989。采用分段的方式处理数据时,三段数据的线性度分别为0.9951、0.9900、0.9895。
通过位移测量实验结果表明,本文开发的无线微位移电容传感器具备6mm的测量范围,0.1mm的分辨率,测量相对误差小于1.2%,通信距离大于50m。
Capacitive displacement transducer is a kind of non-contact measurement instrument. Compares to The general displacement measuring instrument,it has simple structure and high resolution and measurement range. Now, micro displacement capacitance sensor is not easy to be detected accurately, Because of its smaller capacitance value. And the traditional wired measurement method has also limited the scope of its application. For solving the above problems,The paper introduces the development of a wireless chip micro displacement capacitance sensor. And to further improve the practicality of micro displacement capacitance sensor.
This paper introduces the common types of displacement sensor, its characteristics and applicable scope.,studying the basic principle of capacitive displacement sensor probe, high performance monolithic double interdigitated electrode is choose to be the Probe micro displacement capacitance sensor. In order to measure micro displacement capacitance sensor values accurately, Comparative study of all the capacitance detection method.The research has identified AD7745detection chip as the capacitance measurement circuit core.
ZIGBEE has the characteristics of chip embedded with8051nuclei, Also contains a IEEE802.15.4compatible wireless transceiver, high reliability, low price etc.Using ZIGBEE's characteristics to develop a wireless data transmission system. The system can complete the Acquisition, transmission, reception function of the capacitive displacement sensor capacitance.
Using the VC++MFC tool develop the PC software.it adopts serial port to receive the capacitance data, perform data processing, draw a one-dimensional coordinate system, Display the current displacement of the metal.
Building the experimental platform, acquire capacitance between the metal plate and the sensor range of25mm sensor. The sensitivity of the sensor in the25mm range were analyzed, In order to calibrate displacement measuring system, To linearize the data segment in the6mm displacement sensitivity higher capacitance. When using the Unsegmented for data processing, Data linearity is0.8989. When using the segmented, Linearity of three segments of data are respectively0.9951,0.9900,0.9895.
Finally, the experimental results show, Wireless micro displacement capacitance sensor is developed in this paper has the measurement range of6mm,0.1mm resolution, measuring relative error is less than1.2%, the communication distance is more than50m.
引文
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[12]任伟德.超声波位移传感器的性能探讨.教学仪器与实验,2009,25(11)：58-60.
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[14]D.Ehlert, H.J.Hora, R. Adamek. Potential of Laser Distance Sensor for Measuring Crop Parameters. Journal of Applied Sciences,2006,6(4):898-899.
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[18]李平.精密石英谐振式位移传感器.传感器技术,1995,3：37-38.
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[20]昌学年.位移传感器的发展及研究.计量与测试技术,2009,36(9)：42-43.
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[25]马冬丽,赵辉.用于调频式电涡流传感器的高稳定性LC振荡电路.计算机测量与控制,2004,12(3)：298-300.
[26]姜寅啸,汤继强.一种电涡流位移传感器动态特性的应用分析.航空精密制造技术,2011,47(4)：30.
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[28]Steele, J.J., Fitzpatrick, G.A., Brett, M.J. Capacitive Humidity Sensors With High Sensitivity and Subsecond Response Times. Sensors Journal, IEEE, June 2007, vol. 7:955-956.
[29]Moojin Kim, Wonkyu Moon, Euisung Yoon, et al. A new capacitive displacement sensor with high accuracy and long-range[J]. Sensors and Actuators A,2006,130-131: 135-141.
[30]Fulmek. P. L., Wandling. F.,Zdiarsky. W., Brasseur G, Cermak. S.P.. Capacitive sensor for relative angle measurement. Instrumentation and Measurement. IEEE Transactions,2002,51(12):1145-1149.
[31]赵晋云.智能电容测微仪系统关键技术的研究.天津大学工学硕士论文,2005：1-3.
[32]Jae-Weon Jeong,Feasibility of wireless measurements for semi-empirical multizone airflow model tuning,Building and Environment,2008,43(9):1509-1510.
[33]Xiao Chen, Chenliang Wu, Ultrasonic Measurement System with Infrared Communication Technology, Journal of Computers,2011,6:2468-2469.
[34]WEIDehua, LIU Pan, LUBob, GUO Zengc. Water Quality Automatic Monitoring System Based on GPRS.Procedia Engineering,2012,28:841.
[35]周怡颋等ZigBee无线通信技术及其应用探讨.自动化仪表,2005：1.
[36]贺庆之.贺静.单一平面电容传感器原理与应用.工业仪表与自动化装置,2001,5：62-63.
[37]王庆敏MEMS微电容式传感器的传感特性研究.传感技术学报,2009,22(10)：1397.
[38]宋文绪.传感器与检测技术.高等教育出版社,2004：109-110.
[39]蒙文舜,杨运经,刘云鹏.电容传感器的原理及应用.现代电子技术,2003, 150(7)：79.
[40]刘强,刘东明等.电容液滴传感器.仪表技术与传感器,2007,11：3.
[41]曾育锋.利用自制电容测量微小位移.实验技术与管理,2006,26(7)：49.
[42]贺庆之等.极板放在同一平面上的电容敏感器件的研制.仪表技术与传感器,2001：2.
[43]李晓钰.复杂电极结构的单片式电容微位移传感器.西南交通大学工学硕士论文,2010：40-45.
[44]孙立宁,晏祖根,陈立国等.电容式微位移传感器检测电路的设计.机械与电子,2005,1：33-35.
[45]V. Josselin.Capacitive detection scheme for space accelerometers applications. Sensors and Actuators,1999,78:95-96.
[46]Puers.Robert. Capacitive sensors:when and how to use them. Sensors and Actuators, 1993:93-105.
[47]邱桂苹等.微小电容测量电路.黑龙江电力,2006：5.
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[2]仇亚萍.位移传感器专家设计系统.西安电子科技大学工学硕士论文,2008：1-2.
[3]焦志强.涡流传感器位移测量关键技术研究.大连理工大学工学硕士论文,2012：2.
[4]朱伟宾.电容式引张线仪和垂线坐标仪在大坝监测应用中的讨论.水电能源学科,2010,28(1)：60.
[5]吕刚.垂线、引张线自动化监测系统的发展趋势.大坝观测与土工测试,1989,13(3)：3-9.
[6]吕刚.电容式引张线仪、垂线坐标仪性能特点及改进.水电自动化与大坝检测,2011,35(1)：44-45.
[7]吕刚.中意法三国感应式遥测垂线坐标仪的原理及性能分析.大坝观测与土工测试,1989,13(5)：6-14.
[8]张振环.基于蓝牙的无线测量系统研究与实现.北京邮电大学工学硕士论文,2008：2-3.
[9]曾庆勇.微弱信号检测.浙江大学出版社,2001：23-41.
[10]宋文绪.传感器与检测技术.高等教育出版社,2004：2-3.
[11]毛伙南.机械式位移传感器在幕墙钢索(预)张力测试中的应用.机电工程技术,2006,35(12)：91-93.
[12]任伟德.超声波位移传感器的性能探讨.教学仪器与实验,2009,25(11)：58-60.
[13]Tsung-Min Tsai, Pei-Hwa Yen. Improvement in stage measuring technique of the ultrasonic sensor gauge, Measurement,2012,45:1375-1376.
[14]D.Ehlert, H.J.Hora, R. Adamek. Potential of Laser Distance Sensor for Measuring Crop Parameters. Journal of Applied Sciences,2006,6(4):898-899.
[15]王晓嘉.激光三角法综述.仪器仪表学报,2004,25(4)：601-603.
[16]王金娜.激光位移传感器研究.西安电子科技大学工程硕士学位论文,2010：6-8.
[17]马自军.激光位移传感器测量原理及应用研究展望.甘肃科技,2012,28(2)：77-78.
[18]李平.精密石英谐振式位移传感器.传感器技术,1995,3：37-38.
[19]雷晗.用于微位移测量的石英晶体电容传感.西南交通大学工学硕士论文,2012：7-9.
[20]昌学年.位移传感器的发展及研究.计量与测试技术,2009,36(9)：42-43.
[21]张敏菊.电阻应变式传感器原理浅析.新课程研究,2006,1：68.
[22]E.M. ALcala. A pressure and distance sensor based on magnetic circuits. Journal of Magnetism and Magnetic Materials,1996,157:436.
[23]王家立.电感式位移传感器及其信号线性化处理的研究.中国计量科学研究院工学硕士论文,2010：4-5.
[24]郝双晖.一种新颖的绝对式磁栅位移传感器.电机与控制学报,2008,12(4)：452.
[25]马冬丽,赵辉.用于调频式电涡流传感器的高稳定性LC振荡电路.计算机测量与控制,2004,12(3)：298-300.
[26]姜寅啸,汤继强.一种电涡流位移传感器动态特性的应用分析.航空精密制造技术,2011,47(4)：30.
[27]王晓立.电容式位移传感器研究.湘潭大学工学硕士论文,2010：4-8.
[28]Steele, J.J., Fitzpatrick, G.A., Brett, M.J. Capacitive Humidity Sensors With High Sensitivity and Subsecond Response Times. Sensors Journal, IEEE, June 2007, vol. 7:955-956.
[29]Moojin Kim, Wonkyu Moon, Euisung Yoon, et al. A new capacitive displacement sensor with high accuracy and long-range[J]. Sensors and Actuators A,2006,130-131: 135-141.
[30]Fulmek. P. L., Wandling. F.,Zdiarsky. W., Brasseur G, Cermak. S.P.. Capacitive sensor for relative angle measurement. Instrumentation and Measurement. IEEE Transactions,2002,51(12):1145-1149.
[31]赵晋云.智能电容测微仪系统关键技术的研究.天津大学工学硕士论文,2005：1-3.
[32]Jae-Weon Jeong,Feasibility of wireless measurements for semi-empirical multizone airflow model tuning,Building and Environment,2008,43(9):1509-1510.
[33]Xiao Chen, Chenliang Wu, Ultrasonic Measurement System with Infrared Communication Technology, Journal of Computers,2011,6:2468-2469.
[34]WEIDehua, LIU Pan, LUBob, GUO Zengc. Water Quality Automatic Monitoring System Based on GPRS.Procedia Engineering,2012,28:841.
[35]周怡颋等ZigBee无线通信技术及其应用探讨.自动化仪表,2005：1.
[36]贺庆之.贺静.单一平面电容传感器原理与应用.工业仪表与自动化装置,2001,5：62-63.
[37]王庆敏MEMS微电容式传感器的传感特性研究.传感技术学报,2009,22(10)：1397.
[38]宋文绪.传感器与检测技术.高等教育出版社,2004：109-110.
[39]蒙文舜,杨运经,刘云鹏.电容传感器的原理及应用.现代电子技术,2003, 150(7)：79.
[40]刘强,刘东明等.电容液滴传感器.仪表技术与传感器,2007,11：3.
[41]曾育锋.利用自制电容测量微小位移.实验技术与管理,2006,26(7)：49.
[42]贺庆之等.极板放在同一平面上的电容敏感器件的研制.仪表技术与传感器,2001：2.
[43]李晓钰.复杂电极结构的单片式电容微位移传感器.西南交通大学工学硕士论文,2010：40-45.
[44]孙立宁,晏祖根,陈立国等.电容式微位移传感器检测电路的设计.机械与电子,2005,1：33-35.
[45]V. Josselin.Capacitive detection scheme for space accelerometers applications. Sensors and Actuators,1999,78:95-96.
[46]Puers.Robert. Capacitive sensors:when and how to use them. Sensors and Actuators, 1993:93-105.
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