光纤微位移传感器研究
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摘要
随着光纤制造技术的迅速发展和光纤材料的深入研究,光纤传感技术也得到了快速发展。光纤传感器与传统的各类传感器相比,具有灵敏度高、抗电磁干扰能力强、耐腐蚀、防爆、结构简单、体积小,重量轻等一系列独特的优点。因此其在微型仪器及装置等领域有极好的应用前景。
本文主要研制了基于两种光强度调制原理——微弯式和反射式——光纤位移传感特性研究实验装置。首先,根据传感器的基本原理,建立了传感器的数学模型,对影响传感器性能的各个结构参数进行了分析,进行了传感器结构参数的优化设计。其次,设计了两种机械结构并制作了光强信号探测电路。在微弯式传感器中,设计了一种新型的微弯器代替了传统的齿板结构,简化了系统结构,极大地降低了微弯器的加工难度;在反射式传感器中设计的杠杆式结构,有效地增大了传感器的量程,同时对反射壁材料进行了深入研究,提高了传感器的抗干扰能力。最后,还对微弯式传感器和反射式传感器进行了静态特性标定实验。
本论文为光纤微型位移传感器的研究奠定了基础。
Modern optical fiber sensors owe their rapid development to the achievements of technologies in fiber fabrication. They have many advantages over traditional sensors, such as high sensitivity, insensitivity to influence of electromagnetic field, good solution, small volume, low price, etc, so it has a great future in micro-machine system.
In this paper, two kinds of optical fiber sensor which are based on light intensity modulation are studied, the micro-bent fiber-optic displacement sensor and the reflective fiber-optic displacement sensor. At first, according the theory of the sensor, the mathematics model was built, and the key parameters were analyzed, then the reasonable parameters could be chosen. The second, two kinds of mechanic structure were designed and the detective circuit was made. In micro-bent sensor, a new kind of micro-bent mechanism was designed which replaced the traditional construction. That simplified the whole system structure, and declined the difficulty of manufacture deeply. In order to increase the range, the lever structure was introduced into reflective sensor. The reflective board was chosen strictly, enhancing the capability of against disturb. At last, the light given out from the sensor was measured and analyzed; a relation between displacement and light intensity was obtained.
This paper is instrumental in study of miniaturization fiber optical displacement sensor.
本文主要研制了基于两种光强度调制原理——微弯式和反射式——光纤位移传感特性研究实验装置。首先,根据传感器的基本原理,建立了传感器的数学模型,对影响传感器性能的各个结构参数进行了分析,进行了传感器结构参数的优化设计。其次,设计了两种机械结构并制作了光强信号探测电路。在微弯式传感器中,设计了一种新型的微弯器代替了传统的齿板结构,简化了系统结构,极大地降低了微弯器的加工难度;在反射式传感器中设计的杠杆式结构,有效地增大了传感器的量程,同时对反射壁材料进行了深入研究,提高了传感器的抗干扰能力。最后,还对微弯式传感器和反射式传感器进行了静态特性标定实验。
本论文为光纤微型位移传感器的研究奠定了基础。
Modern optical fiber sensors owe their rapid development to the achievements of technologies in fiber fabrication. They have many advantages over traditional sensors, such as high sensitivity, insensitivity to influence of electromagnetic field, good solution, small volume, low price, etc, so it has a great future in micro-machine system.
In this paper, two kinds of optical fiber sensor which are based on light intensity modulation are studied, the micro-bent fiber-optic displacement sensor and the reflective fiber-optic displacement sensor. At first, according the theory of the sensor, the mathematics model was built, and the key parameters were analyzed, then the reasonable parameters could be chosen. The second, two kinds of mechanic structure were designed and the detective circuit was made. In micro-bent sensor, a new kind of micro-bent mechanism was designed which replaced the traditional construction. That simplified the whole system structure, and declined the difficulty of manufacture deeply. In order to increase the range, the lever structure was introduced into reflective sensor. The reflective board was chosen strictly, enhancing the capability of against disturb. At last, the light given out from the sensor was measured and analyzed; a relation between displacement and light intensity was obtained.
This paper is instrumental in study of miniaturization fiber optical displacement sensor.
引文
[1]马天兵,杜菲.光纤传感器的应用和发展,煤矿机械,2004,(8):9-10.
[2]廖延彪.我国光纤传感现状与展望,光电子技术与信息,2003,16(5):1-6.
[3]廖延彪,黎敏.光纤传感器的今日与发展,传感器世界,2004,10(2):6-12。
[4]张志鹏,Gambling w A.光纤传感原理[M],北京:中国计量出版社.1991.
[5]靳伟,阮双琛等著.光纤传感技术新进展[M].北京:科学出版社.2005.
[6]饶云江.光纤技术[M].北京:科学出版社.2006.
[7]王慧文.光纤传感技术与应用[M].北京:国防工业出版社.2001.
[8]孙雨南,王茜倩,伍剑,杨爱英.光纤技术-理论基础与应用[M],北京:北京理工大学出版社,2006年7月.
[9]孙圣和,王廷云,徐颖.光纤测量与传感技术[M],哈尔滨,哈尔滨工业大学出版社,2000,101-103.
[10]蒋焕文,冯锡生.放大电路的噪声分析[M],第一版,北京,高等教育出版社,1987年4月,P34-50.
[11]张国雄,金篆芷.测控电路[M],北京,机械工业出版社,2000年9月.
[12]许开君,李忠波.模拟电子技术[M],北京,机械工业出版社,1994年6月.
[13]张欲敏.通信电路[M],第一版,北京,北京航空航天大学,1990年9月,P285-288.
[14]JAMES B.FREAL,CLARENCE J.ZAROBILA,AND CHARLES M.DAVIS.A Microbend Horizontal Accelerometer for Borehole Deployment.JOURNAL OF LIGHTWAVE TECHNLOGY,VOL.LT-5.NO.7,JULY 1987.
[15]S.Thomas Lee,B.Aneeshkumar,P.Radhakrishnan,C.P.G.Vallabhan,V.P.N.Nammpoori.A microbent fiber optic pH sensor.Optics Communications 2005(2002)253-256.
[16]Arun Kumar,Ravi K.Varshney,Rakesh Kumar.SMS fiber optic microbend sensor structure:effect of the modal interference.Optics Communications 232(2004)239-244.
[17]NICHOLAS LAGAKOS,W.J.TROTT,T.R.HICKMAN,JAMES H.COLE,AND JOSEPH A.BUCARO.Microbend Fiber-optic Sensor as Extended Hydrophone.IEEE JOURNAL OF QUANTUM ELECTRONICS,VOL,QE-18,NO.10,OCTOBER 1982.
[18]Luo Fei,Liu Jingyuan,AND Ma Naibing.Fiber optic microbend sensor fordistributed sensing application in the structural strain monitoring.Sensorsand Actuators A.1999,75(1):41-44.
[19]Ma Naibing.Novel fiber optic microbend pressure sensor.SPIE.1999,3860:516-523.
[20]Vivek Arya,Kent A.Murpy,Anbo Wang,Richard O.Claus.Microbend losses in singlemode Optical fibers:theoretical and experimental investigation[J].Journal of Lightwave Techno1ogy,1995,10.VOL.13,NO.10.
[21]刘复瑞,史锦珊.光纤传感器及其应用[M].北京,机械工业出版社,2003.110-112。
[22]Cutis D.Kissinger,Gloversville,N.Y.,United states Patent Office,3327584,Patent June 27,1967.
[23]Kao,K.C.,Hockham,G.A.,Dielectric fibre surface waveguide for optical frequencies,Proc.IEEE,1966,113(7):1151-1158.
[24]张海明.光线光缆的应用及展望,广东通信技术,2004,(5);44-45.
[25]廖延彪.光纤光学[M],北京:清华大学出版社,2000:11-49.
[26]Culshaw,B.Fiber optics in sensing and measurement(Selected Topics),IEEE Journal of Quantum Electronics,2000,6(6):1014-1021.
[27]朱燕杰,苏立国,付松年,董小鹏.新型光纤的技术发展及应用,光电子技术.2001,21(1):49-55.
[28]范栽云.光传送网中的新光纤.光纤通信,2002,24(4):14-21.
[29]Knight J.C.,Birks T.A.,Russell P St.J.,Atkin D.M.All-silica single-mode optical fiber with photonic crystal cladding.Optics Letters.1996,21(19):1547-1549.
[30]Eggleton B.J.,Kerbage C.,Westbrook P S.,Windeler R.S.,Hale A.Microstructured optical fiber devices.Optics Express.2001,9(13):698713.
[31]ohashi M.,Shiraki K,Tajima K.,Optical loss property of silica-based single-mode fibers,Joumal of Lightwave Technology,1992,10(5):539-543.
[32]J.N.Fields,Attenuation of a parabolic-index fiber with periodic bends,Appl.Phys.Lett,,1980,36:799-801.
[33]John,W.Berthold,Ⅲ.;Historical review of microbend fiber-optic sensors,Journal of Lightwave Technology,1995,13(7):1193-1199.
[34]Chuan Li,Yi-Mo Zhang,Hui Liu,Sheng Wu and Cai-Wen Huang,Distributed fiber-optic bi-directional strain-displacement sensor modulated by fiber bending loss,Sensors and Actuators A:Physical,2004,111(2-3):236-239.
[35]Davis C M.光纤传感器技术手册[M],北京:电子工业出版社,1987.
[36]Grattan K.T.V.,Sun T.,Fiber Optic Sensor Technology:An Overview,Sensors and Actuators,2000,82(1-3):40-61.
[37]Gialorenzi,T,Bucaro.J.,Dandridge.A.,Sigel.G.Cole.J.,Rashieigh.S.,Priest. R.,Optical fiber sensor technology,IEEE Joumal of Quantum Electronics,1982,18(4):626-665.
[38]Kersey.A.D.,Dandridge.A.,Applications of fiber-optic sensors,Proceedings of 39th Electronic Components Conference,1989,Houston:472-478.
[39]Morshed,A.H.;Senior projects in optical fiber sensing,Workshop on Teaching Photonics at Egyptian Engineering Faculties&Institutes,1999:671-678.
[40]Kent A.MURPHY,Brain R.Fogg,Ashish M.Vengsarkar,Spatially weighted Vibration sensor using tapered two-mode optical fiber,Joumal of Lightwave Technology,1992,10(11):1680-1687.
[41]郑宏军.两种典型的光纤传感器研究现状和发展趋势,传感技术学报,2001,(4):281-284.
[42]Jae 11 Jeon C,heol Woo Jung,Won Zoo Park,Kwang Sik Lee,Jung Bae Kim.Optical current sensor using magneto-optic effects,Plasma Science,2003.ICOPS 2003.IEEE Conference Record The 30th International Coilference on,2003,Jeju,Korea:350.
[43]Domanski,A.W.,Application of optical fiber sensors in mechanical measurements,IMTC/97.Proceedings.'Sensing,Processing,Networking'.,Instrumentation and Measurement Technology Conference,1997,1:700-702.
[44]Chardon,D.;Huard,S.;A new interferometric and polarimetric temperature optical fiber sensor,Journal of Lightwave Technology,1986,4(7):720-725.
[45]Kobayashi,T;Kasashima,M.;Iwashima,H.;Jian Cao;Microbend optical fiber sensor for high-spatial resolution measurement of strain distribution,SICE 2003 Annual Conference,2003,2:2068-2071.
[46]Morante,M.A.;Cobo,A;Lopez-Higuera,J.M.;A biaXW Optical fiber sensor for measuring acceleration in harsh environments,Lasers and Electro-Optics Society Annual Meeting,1996.LEOS 96,IEEE,1:240-241.
[47]Jose Brandao Faria,Senior Member,IEEE,A Theoretical Analysis of the Bifurcated Fiber Bundle Displcement Sensor,IEEE Transactions on Instrumentation and Measurement,Vol.47,NO.3,June 1998.
[48]R.O.Cook,C.W.Hamm,Fiber optic lever displacement transducer,Applied Optics,Vol.18,NO.19,1979.
[49]赵梓森.光纤通信工程(修订本),第2版,北京,人民邮电出版社,1994年5月,P49-P60.
[50]薛实福,李庆祥主编.精密仪器设计[M],北京,清华大学出版社,2002.
[51]Paros J M.,Weisberg L.How to design flexure hinge.Machine design.1965,Vol37,NO.27.page:151-157.
[2]廖延彪.我国光纤传感现状与展望,光电子技术与信息,2003,16(5):1-6.
[3]廖延彪,黎敏.光纤传感器的今日与发展,传感器世界,2004,10(2):6-12。
[4]张志鹏,Gambling w A.光纤传感原理[M],北京:中国计量出版社.1991.
[5]靳伟,阮双琛等著.光纤传感技术新进展[M].北京:科学出版社.2005.
[6]饶云江.光纤技术[M].北京:科学出版社.2006.
[7]王慧文.光纤传感技术与应用[M].北京:国防工业出版社.2001.
[8]孙雨南,王茜倩,伍剑,杨爱英.光纤技术-理论基础与应用[M],北京:北京理工大学出版社,2006年7月.
[9]孙圣和,王廷云,徐颖.光纤测量与传感技术[M],哈尔滨,哈尔滨工业大学出版社,2000,101-103.
[10]蒋焕文,冯锡生.放大电路的噪声分析[M],第一版,北京,高等教育出版社,1987年4月,P34-50.
[11]张国雄,金篆芷.测控电路[M],北京,机械工业出版社,2000年9月.
[12]许开君,李忠波.模拟电子技术[M],北京,机械工业出版社,1994年6月.
[13]张欲敏.通信电路[M],第一版,北京,北京航空航天大学,1990年9月,P285-288.
[14]JAMES B.FREAL,CLARENCE J.ZAROBILA,AND CHARLES M.DAVIS.A Microbend Horizontal Accelerometer for Borehole Deployment.JOURNAL OF LIGHTWAVE TECHNLOGY,VOL.LT-5.NO.7,JULY 1987.
[15]S.Thomas Lee,B.Aneeshkumar,P.Radhakrishnan,C.P.G.Vallabhan,V.P.N.Nammpoori.A microbent fiber optic pH sensor.Optics Communications 2005(2002)253-256.
[16]Arun Kumar,Ravi K.Varshney,Rakesh Kumar.SMS fiber optic microbend sensor structure:effect of the modal interference.Optics Communications 232(2004)239-244.
[17]NICHOLAS LAGAKOS,W.J.TROTT,T.R.HICKMAN,JAMES H.COLE,AND JOSEPH A.BUCARO.Microbend Fiber-optic Sensor as Extended Hydrophone.IEEE JOURNAL OF QUANTUM ELECTRONICS,VOL,QE-18,NO.10,OCTOBER 1982.
[18]Luo Fei,Liu Jingyuan,AND Ma Naibing.Fiber optic microbend sensor fordistributed sensing application in the structural strain monitoring.Sensorsand Actuators A.1999,75(1):41-44.
[19]Ma Naibing.Novel fiber optic microbend pressure sensor.SPIE.1999,3860:516-523.
[20]Vivek Arya,Kent A.Murpy,Anbo Wang,Richard O.Claus.Microbend losses in singlemode Optical fibers:theoretical and experimental investigation[J].Journal of Lightwave Techno1ogy,1995,10.VOL.13,NO.10.
[21]刘复瑞,史锦珊.光纤传感器及其应用[M].北京,机械工业出版社,2003.110-112。
[22]Cutis D.Kissinger,Gloversville,N.Y.,United states Patent Office,3327584,Patent June 27,1967.
[23]Kao,K.C.,Hockham,G.A.,Dielectric fibre surface waveguide for optical frequencies,Proc.IEEE,1966,113(7):1151-1158.
[24]张海明.光线光缆的应用及展望,广东通信技术,2004,(5);44-45.
[25]廖延彪.光纤光学[M],北京:清华大学出版社,2000:11-49.
[26]Culshaw,B.Fiber optics in sensing and measurement(Selected Topics),IEEE Journal of Quantum Electronics,2000,6(6):1014-1021.
[27]朱燕杰,苏立国,付松年,董小鹏.新型光纤的技术发展及应用,光电子技术.2001,21(1):49-55.
[28]范栽云.光传送网中的新光纤.光纤通信,2002,24(4):14-21.
[29]Knight J.C.,Birks T.A.,Russell P St.J.,Atkin D.M.All-silica single-mode optical fiber with photonic crystal cladding.Optics Letters.1996,21(19):1547-1549.
[30]Eggleton B.J.,Kerbage C.,Westbrook P S.,Windeler R.S.,Hale A.Microstructured optical fiber devices.Optics Express.2001,9(13):698713.
[31]ohashi M.,Shiraki K,Tajima K.,Optical loss property of silica-based single-mode fibers,Joumal of Lightwave Technology,1992,10(5):539-543.
[32]J.N.Fields,Attenuation of a parabolic-index fiber with periodic bends,Appl.Phys.Lett,,1980,36:799-801.
[33]John,W.Berthold,Ⅲ.;Historical review of microbend fiber-optic sensors,Journal of Lightwave Technology,1995,13(7):1193-1199.
[34]Chuan Li,Yi-Mo Zhang,Hui Liu,Sheng Wu and Cai-Wen Huang,Distributed fiber-optic bi-directional strain-displacement sensor modulated by fiber bending loss,Sensors and Actuators A:Physical,2004,111(2-3):236-239.
[35]Davis C M.光纤传感器技术手册[M],北京:电子工业出版社,1987.
[36]Grattan K.T.V.,Sun T.,Fiber Optic Sensor Technology:An Overview,Sensors and Actuators,2000,82(1-3):40-61.
[37]Gialorenzi,T,Bucaro.J.,Dandridge.A.,Sigel.G.Cole.J.,Rashieigh.S.,Priest. R.,Optical fiber sensor technology,IEEE Joumal of Quantum Electronics,1982,18(4):626-665.
[38]Kersey.A.D.,Dandridge.A.,Applications of fiber-optic sensors,Proceedings of 39th Electronic Components Conference,1989,Houston:472-478.
[39]Morshed,A.H.;Senior projects in optical fiber sensing,Workshop on Teaching Photonics at Egyptian Engineering Faculties&Institutes,1999:671-678.
[40]Kent A.MURPHY,Brain R.Fogg,Ashish M.Vengsarkar,Spatially weighted Vibration sensor using tapered two-mode optical fiber,Joumal of Lightwave Technology,1992,10(11):1680-1687.
[41]郑宏军.两种典型的光纤传感器研究现状和发展趋势,传感技术学报,2001,(4):281-284.
[42]Jae 11 Jeon C,heol Woo Jung,Won Zoo Park,Kwang Sik Lee,Jung Bae Kim.Optical current sensor using magneto-optic effects,Plasma Science,2003.ICOPS 2003.IEEE Conference Record The 30th International Coilference on,2003,Jeju,Korea:350.
[43]Domanski,A.W.,Application of optical fiber sensors in mechanical measurements,IMTC/97.Proceedings.'Sensing,Processing,Networking'.,Instrumentation and Measurement Technology Conference,1997,1:700-702.
[44]Chardon,D.;Huard,S.;A new interferometric and polarimetric temperature optical fiber sensor,Journal of Lightwave Technology,1986,4(7):720-725.
[45]Kobayashi,T;Kasashima,M.;Iwashima,H.;Jian Cao;Microbend optical fiber sensor for high-spatial resolution measurement of strain distribution,SICE 2003 Annual Conference,2003,2:2068-2071.
[46]Morante,M.A.;Cobo,A;Lopez-Higuera,J.M.;A biaXW Optical fiber sensor for measuring acceleration in harsh environments,Lasers and Electro-Optics Society Annual Meeting,1996.LEOS 96,IEEE,1:240-241.
[47]Jose Brandao Faria,Senior Member,IEEE,A Theoretical Analysis of the Bifurcated Fiber Bundle Displcement Sensor,IEEE Transactions on Instrumentation and Measurement,Vol.47,NO.3,June 1998.
[48]R.O.Cook,C.W.Hamm,Fiber optic lever displacement transducer,Applied Optics,Vol.18,NO.19,1979.
[49]赵梓森.光纤通信工程(修订本),第2版,北京,人民邮电出版社,1994年5月,P49-P60.
[50]薛实福,李庆祥主编.精密仪器设计[M],北京,清华大学出版社,2002.
[51]Paros J M.,Weisberg L.How to design flexure hinge.Machine design.1965,Vol37,NO.27.page:151-157.