方形孔径平面微透镜阵列的球差分析及改进
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摘要
光学器件的微型化、阵列化,集成化成为当代光学发展的重要方向,微透镜阵列的成功研制,无疑对光学器件的微型化和阵列化起了重要作用,它使微光学器件在光通信、光存储、光学互联、光开关、光信息加工和微光学传感器等方面具有广泛的应用。2008年国内采用光刻离子交换法首次成功研制了方形孔径平面微透镜阵列,这一成果极大的提高了透镜阵列的填充系数,使填充率在理论上达到100%,实验上也取得了非常大的提高。但是该阵列存在两个重大问题：一方面,采用光刻离子交换工艺制作方形孔径平面微透镜阵列,制作出的样品的焦距和数值孔径不易控制,即焦距和数值孔径的大小与离子交换时间之间没有定量的关系,这使制作对应参数的方形孔径平面微透镜阵列难度加大。另一方面,由于平面微透镜阵列系统常被用作轴上点成像,其球差大大影响了成像品质,不容忽视。为了解决焦距和数值孔径不易控制的难题,本文在离子交换理论的基础上,选取合适的模板参数、设定不同的离子交换时间,进行了大量的分时段实验,并将实验结果与理论值对比,实验结果可为制作一定范围内的焦距和数值孔径的方形孔径微透镜阵列提供一定参考依据。针对球差大大影响成像效果的问题,首先采用平行光入射法和光瞳出射法测量了方形孔径平面微透镜阵列的纵向球差,并结合几何光学和数学方法计算出横向球差。同时本文从制作方形孔径的玻璃材料的内部结构特征出发,采用退火处理改善透镜阵列内部的折射率分布,使折射率分布接近理想分布,从而改善透镜阵列的球差。本文还依据平面微透镜阵列焦斑连续可调原理,在理论上提出了方形孔径平面微透镜阵列系统的焦距连续可调的方案。具有高填充率、合适的数值孔径和焦距,且焦距连续可调的平面微透镜阵列将在均匀辐照系统、高质量成像系统及长焦距测量系统等方面取得广泛的应用。本文未涉及综合成像和其他一些重要的测量将在后期的工作中进一步研究。
Microlens array has become a hot topic in microoptics recently, and noncircular aperture microlens array has been proposed as a new subject. Photo etching technology, ion-exchanging technology and especial removing Ti film process were applied to fabricate square-aperture planar microlens array (PMLA). The filling factor of array was approximate100%and its imaging resolution ratio was improved greatly. With those high performances, square-aperture PMLA plays an important role in optical fields, such as optical information processing, optical interconnects, information storage, optical communication, optical switch and imaging of laser sensors and so on.However, numerical aperture (N.A.) and focal length (F) of square-aperture PMLA were difficult to design and the aberration, especially spherical aberration, can not be ignored. To solve these two problems, experiments and theory analysis have been done in this paper.Firstly, thermal diffusion theory of ion was used to analyze the influence on N.A and F of PMLA with ion-exchanging time; meanwhile, N.A and F were investigated with different ion-exchanging time but the same size of mask aperture experimentally. Experimental results are comparable with theory analysis. These results can be used as a reference for designing square-aperture PMLA with appropriate N.A and F by setting optimal ion-exchanging time and also as a reference to obtain the best ion-exchanging time as the same time to obtain the big N.A and F.Secondly, we dealt with square-aperture PMLA by annealing treatmen, and the longitudinal and transverse spherical aberration by the method of parallel light incidence and emergent light pupil. These experimental results showed that the refractive index distribution was closer to ideal distribution and the spherical aberration was decreased obviously after annealing technology. Meanwhile, imaging resolution ratios are also improved more greatly.Thirdly, the optical system with controllable focus spot was proposed with two pieces of the square-aperture PMLA which has continuously adjustable F and an aspherical lens. F can be adjusted continuously just by precisely adjusting the distance between the two pieces of square aperture PMLA. According to the high filling factor, fitting N.A and F, continuously adjustable F and small spherical aberration, this square-aperture PMLA has a prospect application in more optical systems, such as, uniform irradiation systems, higher quality imaging systems, long focal length measuring systems and so on. The study of comprehensive imaging and some important measuring will be done in the future.
Microlens array has become a hot topic in microoptics recently, and noncircular aperture microlens array has been proposed as a new subject. Photo etching technology, ion-exchanging technology and especial removing Ti film process were applied to fabricate square-aperture planar microlens array (PMLA). The filling factor of array was approximate100%and its imaging resolution ratio was improved greatly. With those high performances, square-aperture PMLA plays an important role in optical fields, such as optical information processing, optical interconnects, information storage, optical communication, optical switch and imaging of laser sensors and so on.However, numerical aperture (N.A.) and focal length (F) of square-aperture PMLA were difficult to design and the aberration, especially spherical aberration, can not be ignored. To solve these two problems, experiments and theory analysis have been done in this paper.Firstly, thermal diffusion theory of ion was used to analyze the influence on N.A and F of PMLA with ion-exchanging time; meanwhile, N.A and F were investigated with different ion-exchanging time but the same size of mask aperture experimentally. Experimental results are comparable with theory analysis. These results can be used as a reference for designing square-aperture PMLA with appropriate N.A and F by setting optimal ion-exchanging time and also as a reference to obtain the best ion-exchanging time as the same time to obtain the big N.A and F.Secondly, we dealt with square-aperture PMLA by annealing treatmen, and the longitudinal and transverse spherical aberration by the method of parallel light incidence and emergent light pupil. These experimental results showed that the refractive index distribution was closer to ideal distribution and the spherical aberration was decreased obviously after annealing technology. Meanwhile, imaging resolution ratios are also improved more greatly.Thirdly, the optical system with controllable focus spot was proposed with two pieces of the square-aperture PMLA which has continuously adjustable F and an aspherical lens. F can be adjusted continuously just by precisely adjusting the distance between the two pieces of square aperture PMLA. According to the high filling factor, fitting N.A and F, continuously adjustable F and small spherical aberration, this square-aperture PMLA has a prospect application in more optical systems, such as, uniform irradiation systems, higher quality imaging systems, long focal length measuring systems and so on. The study of comprehensive imaging and some important measuring will be done in the future.
引文
[1]刘德森.微小光学的研究现状[J],物理.1994,23(6)：321-328.
[2]杨国光,沈亦兵,候西云.微光学技术及其发展[J],红外与激光工程,2001,30(4)：157-162.
[3]刘德森.变折射率介质理论及其技术实践[M],西南大学出版社.2005：362-364.
[4]刘兴占.LIGA工艺技术[J],中国仪器仪表杂志编辑部出版.1997(2).
[5] Fengjun Zhang, Sumei Zhou, "Fabrication of Planar Square Aperture microlens Array," Acta Photonic Sinica. Papers 37,202-203 (2008).
[6]张玉,刘德森.六角形孔径平面微透镜阵列的制作及基本特性研究[J],光子学报.2008,37(8)1639-1642.
[7]中华人民共和国国家标准.光学系统像质测试方法[GB],国家技术监督局发布.1989-05-01实施：GB11168-89.
[8]刘德森,郎贤礼,蒋小平,周素梅.改善变折射率透镜像差特性的方法[J],光子学报.
[9]郎贤礼,刘德森,吕涛,蒋小平,朱少丽.二次离子交换法改进自聚焦透镜折射率分布[J],光子学报.2005,34(8)：1141-1144.
[10]刘德森.改善便折射率透镜像差特性的方法[J],光子学报.
[11]郎贤礼.自聚焦透镜制造技术与性能优化研究,硕士毕业论文.
[12]刘冬梅,王文生.光学设计参考书[M],长春理工大学,光学工程学院出版.2005：36.
[13]赵宝银,杨党校,吕百达.激光聚焦系统中球差对光束参数的影响[J],强激光与粒子束.2007,19(5)：713-717.
[14]季小玲,吕百达.高斯光束通过环状球差透镜后的光束质量[J],激光技术.2002,26(2)：132-134.
[15]敖明武,杨平.ICF系统全光路像差测量与校正方法[J],强激光与粒子束.2008,20(1)：91-95.
[16]杰姆金娜.光学玻璃产生的物理化学原理[M],北京,科学出版社.1983：499-524.
[17]王安科,徐宏斌,杨建峰,李婷,阮萍.变焦距光学系统在电视制导中的应用[J],弹箭与制导学报.2010,30(3)：41-43.
[18]黄玲.两种变焦距光学系统,国家光学技术研究中心,硕士学位论文.
[19]郑建洲,于清旭,卢永军等.焦斑可调的透镜阵列均匀辐照光学系统[J],中国激光.2007,34(3)：331-336.
[1]周崇喜,乔立杰,邓启凌,吴海鹰等.大数值孔径微透镜阵列激光扫描[J],光电工程.2001,28(4)：1-3.
[2]刘德森,高应俊等.大数值孔径自聚焦平面微透镜列阵研究[J],高速摄影与光子学.1990,19(3)：209-216.
[3]刘德森.变折射率介质理论及其技术实践[M],西南大学出版社.2005：377-396.
[4]郎贤礼.自聚焦透镜制造技术与性能优化研究,硕士毕业论文.2005.
[5]作花济夫等,玻璃手册[M],中国建筑工业出版社.1985.
[6]杰姆金娜.光学玻璃产生的物理化学原理[M],北京,科学出版社.1983：499-524.
[7]张凤军.方形平面微透镜阵列的实验研究及理论初探,硕士毕业论文.2011.
[8]周崇喜,乔立杰,邓启凌,吴海鹰,谢伟民.大数值孔径微透镜阵列激光扫描[J],光电工程.2001,28(2)：1-3.
[9]张玉,刘德森.六角形孔径平面微透镜阵列的制作及基本特性研究[J],光子学报.2008,37(8)1639-1642.
[1] Fengjun Zhang, Sumei Zhou, "Fabrication of Planar Square Aperture microlens Array," Acta Photonic Sinica. Papers 37,202-203 (2008).
[2]刘德森.便折射率介质理论及其技术实践[M],西南师范大学出版社.2005.
[3]李晓彤.几何光学.像差和光学设计(第二版)[M],浙江大学出版社.2007：95-104.
[4]王文军.光学(普通高等教育十二五规划教材)[M],科学出版社出版,2011.
[5]田芊.工程光学(普通高等教育“十五”国家级规划教材)[M],清华大学出版社.2007.
[6]卿与三,吕百达.超高斯光束经光阑球差透镜后的光束质量评价[J],激光技术.2002,26(2)：108-110.
[7]季小玲,吕百达.高斯光束通过环状球差透镜后的光束质量[J],激光技术.2002,26(2)：132-134.
[8]陈恭源.浮法玻璃的退火原理和退火设备[J], 玻璃.1983,(05)：39-42.
[9]中华人民共和国国家标准.光学系统像质测试方法[GB],国家技术监督局发布.1989-05-01实施：GB11168-89.
[10]刘冬梅,王文生.光学设计参考书[M],长春理工大学,光学工程学院出版.2005：36.
[11]郎贤礼,刘德森,吕涛,蒋小平,朱少丽.二次离子交换法改进自聚焦透镜折射率分布[J],光子学报.2005,34(8)：1141-1144.
[12]刘德森.改善变折射率透镜像差特性的方法[J],光子学报.
[13]杰姆金娜.光学玻璃产生的物理化学原理[M],北京,科学出版社.1983：499-524.
[14]刘德森,郎贤礼,蒋小平,周素梅.改善变折射率透镜像差的方法[J],光子学报.
[15]郎贤礼.自聚焦透镜制造技术与性能优化研究,硕士毕业论文.
[1]王安科,徐宏斌,杨建峰,李婷,阮萍.变焦距光学系统在电视制导中的应用[J],弹箭与制导学报.2010,30(3)：41-43.
[2]郑建洲,于清旭,卢永军等.焦斑可调的透镜阵列均匀辐照光学系统[J],中国激光.2007,34(3)：331-336.
[3]黄玲.两种变焦距光学系统,国家光学技术研究中心,硕士学位论文.
[2]杨国光,沈亦兵,候西云.微光学技术及其发展[J],红外与激光工程,2001,30(4)：157-162.
[3]刘德森.变折射率介质理论及其技术实践[M],西南大学出版社.2005：362-364.
[4]刘兴占.LIGA工艺技术[J],中国仪器仪表杂志编辑部出版.1997(2).
[5] Fengjun Zhang, Sumei Zhou, "Fabrication of Planar Square Aperture microlens Array," Acta Photonic Sinica. Papers 37,202-203 (2008).
[6]张玉,刘德森.六角形孔径平面微透镜阵列的制作及基本特性研究[J],光子学报.2008,37(8)1639-1642.
[7]中华人民共和国国家标准.光学系统像质测试方法[GB],国家技术监督局发布.1989-05-01实施：GB11168-89.
[8]刘德森,郎贤礼,蒋小平,周素梅.改善变折射率透镜像差特性的方法[J],光子学报.
[9]郎贤礼,刘德森,吕涛,蒋小平,朱少丽.二次离子交换法改进自聚焦透镜折射率分布[J],光子学报.2005,34(8)：1141-1144.
[10]刘德森.改善便折射率透镜像差特性的方法[J],光子学报.
[11]郎贤礼.自聚焦透镜制造技术与性能优化研究,硕士毕业论文.
[12]刘冬梅,王文生.光学设计参考书[M],长春理工大学,光学工程学院出版.2005：36.
[13]赵宝银,杨党校,吕百达.激光聚焦系统中球差对光束参数的影响[J],强激光与粒子束.2007,19(5)：713-717.
[14]季小玲,吕百达.高斯光束通过环状球差透镜后的光束质量[J],激光技术.2002,26(2)：132-134.
[15]敖明武,杨平.ICF系统全光路像差测量与校正方法[J],强激光与粒子束.2008,20(1)：91-95.
[16]杰姆金娜.光学玻璃产生的物理化学原理[M],北京,科学出版社.1983：499-524.
[17]王安科,徐宏斌,杨建峰,李婷,阮萍.变焦距光学系统在电视制导中的应用[J],弹箭与制导学报.2010,30(3)：41-43.
[18]黄玲.两种变焦距光学系统,国家光学技术研究中心,硕士学位论文.
[19]郑建洲,于清旭,卢永军等.焦斑可调的透镜阵列均匀辐照光学系统[J],中国激光.2007,34(3)：331-336.
[1]周崇喜,乔立杰,邓启凌,吴海鹰等.大数值孔径微透镜阵列激光扫描[J],光电工程.2001,28(4)：1-3.
[2]刘德森,高应俊等.大数值孔径自聚焦平面微透镜列阵研究[J],高速摄影与光子学.1990,19(3)：209-216.
[3]刘德森.变折射率介质理论及其技术实践[M],西南大学出版社.2005：377-396.
[4]郎贤礼.自聚焦透镜制造技术与性能优化研究,硕士毕业论文.2005.
[5]作花济夫等,玻璃手册[M],中国建筑工业出版社.1985.
[6]杰姆金娜.光学玻璃产生的物理化学原理[M],北京,科学出版社.1983：499-524.
[7]张凤军.方形平面微透镜阵列的实验研究及理论初探,硕士毕业论文.2011.
[8]周崇喜,乔立杰,邓启凌,吴海鹰,谢伟民.大数值孔径微透镜阵列激光扫描[J],光电工程.2001,28(2)：1-3.
[9]张玉,刘德森.六角形孔径平面微透镜阵列的制作及基本特性研究[J],光子学报.2008,37(8)1639-1642.
[1] Fengjun Zhang, Sumei Zhou, "Fabrication of Planar Square Aperture microlens Array," Acta Photonic Sinica. Papers 37,202-203 (2008).
[2]刘德森.便折射率介质理论及其技术实践[M],西南师范大学出版社.2005.
[3]李晓彤.几何光学.像差和光学设计(第二版)[M],浙江大学出版社.2007：95-104.
[4]王文军.光学(普通高等教育十二五规划教材)[M],科学出版社出版,2011.
[5]田芊.工程光学(普通高等教育“十五”国家级规划教材)[M],清华大学出版社.2007.
[6]卿与三,吕百达.超高斯光束经光阑球差透镜后的光束质量评价[J],激光技术.2002,26(2)：108-110.
[7]季小玲,吕百达.高斯光束通过环状球差透镜后的光束质量[J],激光技术.2002,26(2)：132-134.
[8]陈恭源.浮法玻璃的退火原理和退火设备[J], 玻璃.1983,(05)：39-42.
[9]中华人民共和国国家标准.光学系统像质测试方法[GB],国家技术监督局发布.1989-05-01实施：GB11168-89.
[10]刘冬梅,王文生.光学设计参考书[M],长春理工大学,光学工程学院出版.2005：36.
[11]郎贤礼,刘德森,吕涛,蒋小平,朱少丽.二次离子交换法改进自聚焦透镜折射率分布[J],光子学报.2005,34(8)：1141-1144.
[12]刘德森.改善变折射率透镜像差特性的方法[J],光子学报.
[13]杰姆金娜.光学玻璃产生的物理化学原理[M],北京,科学出版社.1983：499-524.
[14]刘德森,郎贤礼,蒋小平,周素梅.改善变折射率透镜像差的方法[J],光子学报.
[15]郎贤礼.自聚焦透镜制造技术与性能优化研究,硕士毕业论文.
[1]王安科,徐宏斌,杨建峰,李婷,阮萍.变焦距光学系统在电视制导中的应用[J],弹箭与制导学报.2010,30(3)：41-43.
[2]郑建洲,于清旭,卢永军等.焦斑可调的透镜阵列均匀辐照光学系统[J],中国激光.2007,34(3)：331-336.
[3]黄玲.两种变焦距光学系统,国家光学技术研究中心,硕士学位论文.