0.18微米高压器件生产周期改善与工艺优化研究
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摘要
半导体晶圆生产线是世界上公认的最为复杂的生产线之一,产品更新换代快,市场竞争激烈,设备繁多且昂贵。只有使产品做到又好又快的交付,才能赢得客户。当今如何提升自身生产能力以满足客户日益苛刻的需求,将是晶圆芯片代工厂必须解决的问题。本文以基于客户需求的生产周期研究为核心,将代工厂各种生产指标管理结合在一起,摸索出一个整体解决方案,系统地提升了日常生产效率并改善了生产周期。同时本文结合0.18微米高压器件产品工艺流程的优化,将生产和工艺有效的结合起来,为业界提供一套完整的高水平生产周期管理参考方案。
The semiconductor foundry is the mostly complicated operation system in the word. If we delivery high quality products on time, we can gain credit from the customers. However, it is a big problem that how to improve production capability to meet customer's rigorous requirements. This thesis is aimed to study the cycle time based on the customers' requirements, and find solutions to improve daily operation efficiency and reduce cycle time. Together with the optimization of 0.18 micron high voltage process, the thesis also provides an example in which it shows how to improve the management of cycle time.
The semiconductor foundry is the mostly complicated operation system in the word. If we delivery high quality products on time, we can gain credit from the customers. However, it is a big problem that how to improve production capability to meet customer's rigorous requirements. This thesis is aimed to study the cycle time based on the customers' requirements, and find solutions to improve daily operation efficiency and reduce cycle time. Together with the optimization of 0.18 micron high voltage process, the thesis also provides an example in which it shows how to improve the management of cycle time.
引文
[1]张群,生产与运作管理,北京：机械工业出版社,2004
[2]张怀,江志斌,郭乘涛面向瓶颈的半导体晶圆制造系统派工策略及参数优化上海交通大学学报2007.08第41卷第8期
[3]J LOZINSKI C, GLASSEY G R. Bottleneck starvation indicators for shop floor control[J]. IEEE Trans on Semicondoctor
[4]Lozinski, C, and C. R. Glassey(1988). Bottleneck starvation indicators for shopfloor controllEEE Transactions Oil Semiconductor Manufacturing
[5]俞静,钱省三,“半导体晶圆车间的成本控制方法”,《半导体技术》,2003,28(8)
[6]期刊论文基于模糊理论的半导体制造系统时变多目标生产调度研究-高技术通讯-2008,18(7)
[7]潘峰,钱省三,半导体晶圆制造中产量与生产周期的优化方法[J];半导体技术;2004年02期
[8]江志斌.张怀.刘惠然基于自治与协调的半导体晶圆制造系统实时派工方法
[期刊论文]-工业工程与管理2006(6)
[9]L. M. Wien, "Scheduling semiconductor wafer fabrication," IEEE transactions on semiconductor manufacturing, vol.1, pp.115-130,1998
[10]SEMI E10-Standard for Definition and Measurementof Equipment Reliability, Availability, andMaintainability[S].
[11]周书贤,开放型工厂派工法则之模拟研究,台中：朝阳科技大学工业工程与管理研究所,2001
[12]张盛鸿,张立贤,李荣贵晶圆制造厂之整合式生产控制方法[J],ournal ofthe Chinese Institute of Industrial Engineers,2001,8(4):59-72.
[13]姚世清.江志斌.郭乘涛.胡鸿韬晶圆制造系统中Lot加工序列优化的蚁群算法[期刊论文]-上海交通大学学报2008(10)
[14]李衍飞,江志斌“半导体晶圆制造系统的时变多目标生产调度优化研究”中国科技论文在线,2006,12
[15]Liu H R, Jiang Z B, Fung R Y K, Modeling of the large-scale complex re-entrant manufacturing systems by extended object-oriented Petri nets [J]. international journal of advanced manufacturing technology.2005, 27(1-2);190-204
[16]李莉,乔非,吴启迪,半导体生产线群体智能调度模型,中国机械工程,2004,15(22)：2006—2009
[2]张怀,江志斌,郭乘涛面向瓶颈的半导体晶圆制造系统派工策略及参数优化上海交通大学学报2007.08第41卷第8期
[3]J LOZINSKI C, GLASSEY G R. Bottleneck starvation indicators for shop floor control[J]. IEEE Trans on Semicondoctor
[4]Lozinski, C, and C. R. Glassey(1988). Bottleneck starvation indicators for shopfloor controllEEE Transactions Oil Semiconductor Manufacturing
[5]俞静,钱省三,“半导体晶圆车间的成本控制方法”,《半导体技术》,2003,28(8)
[6]期刊论文基于模糊理论的半导体制造系统时变多目标生产调度研究-高技术通讯-2008,18(7)
[7]潘峰,钱省三,半导体晶圆制造中产量与生产周期的优化方法[J];半导体技术;2004年02期
[8]江志斌.张怀.刘惠然基于自治与协调的半导体晶圆制造系统实时派工方法
[期刊论文]-工业工程与管理2006(6)
[9]L. M. Wien, "Scheduling semiconductor wafer fabrication," IEEE transactions on semiconductor manufacturing, vol.1, pp.115-130,1998
[10]SEMI E10-Standard for Definition and Measurementof Equipment Reliability, Availability, andMaintainability[S].
[11]周书贤,开放型工厂派工法则之模拟研究,台中：朝阳科技大学工业工程与管理研究所,2001
[12]张盛鸿,张立贤,李荣贵晶圆制造厂之整合式生产控制方法[J],ournal ofthe Chinese Institute of Industrial Engineers,2001,8(4):59-72.
[13]姚世清.江志斌.郭乘涛.胡鸿韬晶圆制造系统中Lot加工序列优化的蚁群算法[期刊论文]-上海交通大学学报2008(10)
[14]李衍飞,江志斌“半导体晶圆制造系统的时变多目标生产调度优化研究”中国科技论文在线,2006,12
[15]Liu H R, Jiang Z B, Fung R Y K, Modeling of the large-scale complex re-entrant manufacturing systems by extended object-oriented Petri nets [J]. international journal of advanced manufacturing technology.2005, 27(1-2);190-204
[16]李莉,乔非,吴启迪,半导体生产线群体智能调度模型,中国机械工程,2004,15(22)：2006—2009