表面等离子体增强型T密度近场光存储纳孔光探针阵列研究
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摘要
近场光存储正迅速发展成为下一代光信息存储器的主流技术,而现在将表面等离子体激元在近场光学中的一些特性应用于超高密度光信息储存也是国际上的一个研究热点。
本文以应用于超高密度近场光存储的表面等离子体增强型纳孔光探针为研究重点,对表面等离子体激元的物理机理进行了分析,模拟设计了单个纳米孔,纳米孔阵列及纳米孔外加光栅结构的纳米器件,在此基础上对器件制备工艺进行了深入的研究,通过对器件的测试与分析,发现表面等离子激元对纳米孔的透过光波长和透过光强度有一定的选择和增强作用,为实现T密度光存储奠定了基础。
Near-field optical storage technology is a principal solution for the next generation optical information storage, some extraordinary properties of surface plasmons in near-field optical domain has received tremendous attention for its potential application in ultra-high density optical storage.
This thesis emphasis on surface plasmons enhanced near-field optical probe for ultra-high density storage. The physical mechanism of surface plasmons is discussed, we simulated and designed single nano-hole, nano-hole array and nano-hole plus grating structure nanodevices, then researched the preparation process, tested and analyzed the optical properties for devices. The result denominate surface plasmons could affect the wavelength and intensity of transmission lights in some degree. That has significant foundation for achieving T-density optical storage in the future.
本文以应用于超高密度近场光存储的表面等离子体增强型纳孔光探针为研究重点,对表面等离子体激元的物理机理进行了分析,模拟设计了单个纳米孔,纳米孔阵列及纳米孔外加光栅结构的纳米器件,在此基础上对器件制备工艺进行了深入的研究,通过对器件的测试与分析,发现表面等离子激元对纳米孔的透过光波长和透过光强度有一定的选择和增强作用,为实现T密度光存储奠定了基础。
Near-field optical storage technology is a principal solution for the next generation optical information storage, some extraordinary properties of surface plasmons in near-field optical domain has received tremendous attention for its potential application in ultra-high density optical storage.
This thesis emphasis on surface plasmons enhanced near-field optical probe for ultra-high density storage. The physical mechanism of surface plasmons is discussed, we simulated and designed single nano-hole, nano-hole array and nano-hole plus grating structure nanodevices, then researched the preparation process, tested and analyzed the optical properties for devices. The result denominate surface plasmons could affect the wavelength and intensity of transmission lights in some degree. That has significant foundation for achieving T-density optical storage in the future.
引文
[1]魏劲松,张约品,阮昊等.近场光存储及其研究进展.物理.2002,22(2):188-196
[2]董怡,金伟其.超高密度光存储技术.激光与红外.2005,35(8):543-547
[3]Eric Betzig,Jay K.Trautman.Near-Field Optics:Microscopy,Spectroscopy,and Surface Modification Beyond the Diffraction Limit.Science,1992,257(5067):189-195
[4]SNOM应用于光电材料和器件的光学特性的探测和表征.2002,28(5):342-344
[5]T.W.Ebbesen,B.J.ezec,H.F.Ghaemi,et al.Extraodinary optical transmission through sub-wavelength hole arrays.Nature,1998,391(12);667-669
[6]Tineke Thio,K,M.Pellerin,R.A.Linke,H.J.Lezec and T.W.Ebbesen.Enhanced light transmission through a single subwavelength aperture.OPTICS LETTERS,2001,26(24):1972-1974
[7]B.J.Lezec,A.Degiron,E.Devaux,et al.Beaming Light from a Subwavelength Aperture.Science,2002,297(2):820-822
[8]STEFAN A.MAIER.PLASMONICS:FUNDAMENTALS AND APPLICATIONS.Springer.2007
[9]L.Bartin-Moreno,F.J.Garcia-Vidal,H.J.Lezec,et al.Theory of extraodinary optical transmission through subwavelength hole arrays.Phys.Rev.Lett,2001,86(6):1114-1117
[10]J.B.Pendry,L.Martin-Moreno,F.J.Garcia-Vidal.Mimicking Surface Plasmons with Structured Surfaces.SCIENCE,2004,305(6):847-848
[11]Fumio Koyama,Satoshi Shinada,Kenya Goto,et al.Surface Emitting Lasers for Optical Near-field Data Storage.SPIE,1999,3899:344-350
[12]Satoshi MITSUGI,Yong-Joo KIM and Kenya GOTO.Finite-Difference-Time-Domain Analysis for Electro-Magnetic Field Distribution on Near-Field Optical Recording Probe Head.OPTICAL REVIEW,2001,8(2):120-125
[13]Kenya Goto,Satoshi Mitsugi,Shu-Ying Ye,et al.Near-field probe array with higher throughput for ultrahigh data rate of tera byte optical disk.Advanced Optical Storage Technology,2002,4930:25-31
[14]Jiro Hashizume,Fumio Koyama.Plasmon Enhanced Optical Near-field Probing of Metal Nanoaperture Surface Emitting Laser.Optics Express,2004,12,6391-6396
[15]Kenya Goto,Takahito Ono,Yong-Joo Kim.Evanescent Light Enhancement in a Nanometer Aperture Surrounded by Corrugated Metal Thin Film for a Terabyte Optical Disk Head.TRANSACTIONS ON MAGNETICS,2005,41(2):1037-1041
[16]Zhilong Rao,Joseph A.Matteo,Lambertus Hesselink,et al.High transmission through ridge nano-apertures on Vertical-Cavity Surface-Emitting Lasers.Optics Express,2007,90(19):1-3
[7]E.X.Jin,X.Xu.Obtaining Subwavelength Optical Spots Using Nanoscale Ridge Apertures.Journal of Heat Transfer,207,129(37):37-43
[18]Xiaolei Shi,Lambertus Hesselink,Robert L.Thornton.Ultrahigh light transmission through a C-shaped nanoaperture.OPTICS LETTERS,2003,28(15):1320-1322
[19]J.A.Matteo,D.P.Fromm,Y.Yuen,et al.Spectral analysis of strongly enhanced visible light transmission through single C-shaped nanoapertures.APPLIED PHYSICS LEITERS,2004,85(4):648-650
[20]Eric X.Jin,Xianfan Xu.Enhanced optical near field from a bowtie aperture.APPLIED PHYSICS LETTERS,2006,88(15):1-3
[21]William L.Barnes,Alain Dereux,Thomas W.Ebbesen.Surface Plasmon subwavelength optics.NATURE,2003,424(14):824-830
[22]J.BRAVO-ABAD,A.DEGIRON,F.PRZYBILLA.How light emerges from an illuminated array of subwavelength holes.NATURE,2006,2:120-123
[23]顾本源.表面等离子体亚波长光学原理和新颖效应.物理.2007,36(4):280-287
[24]C.Genet,T.W.Ebbesen.Light in tiny holes.NATURE,2007,445(4):39-46
[25]焦小瑾,闵长俊,王沛,明海.亚波长金属周期结构中表面等离子体相关机理和应用.激光与光电子进展.2006,44(2):17
[26]A Degiron,T.W.Ebbesen.The role of localized surface Plasmon modes in the enhanced transmission of periodic subwavelength apertures.J.Opt.A:Pure Appl.Opt,2005,7:90-96
[27]J.A.Matteo,L.Hesselink.Fractal extensions of near-field aperture shapes for enhanced transmission and resolution.OPTICS EXPRESS,2005,13(2):636-647
[28]A.Degiron,T.W.Ebbesen.Analysis of the transmission process through single apertures surrounded by periodic corrugation.OPTICS EXPESS,2004,12(16):3694-3700
[29]P.Lalanne,J.P.Hugonin,J.C.Rodier.Theory of Surface Plasmon Generation at Nanoslit Apertures.PHYSICAL REVIEW LETTERS,2005,95(26):1-4
[30]Michael Quirk,Julian Serda.半导体制造技术.北京:电子工业出版社,2004:125-128
[31]张继成,吴卫东,许华等.磁控溅射技术新进展及应用.材料导报.2004,18(4):56-59
[32]于翔,刘阳,王成彪等.新型等离子体磁控溅射技术.金属热处理.2007,32(2):30-34
[33]龚建华,柳俊文,张永胜.大平面玻璃基片磁控溅射真空镀膜简介(一).真空.2006,43(2):1-4
[34]龚建华,张永胜,柳俊文.大平面玻璃基片磁控溅射真空镀膜简介(二).真空.2006.43(3):1-4
[35]顾文琪.电子束曝光微纳加工技术.北京:北京工业大学出版社,2004:11-15
[36]Kenya Goto.Nanofabrication and Evanescent Light Enhancement by Surface Plasmon.TRANSACTIONS ON MAGNETICS,2007,43(2):851-855
[37]高建霞,宋国峰,甘巧强等.纳米孔径垂直腔面发射激光器的制备及特性.半导体学报,2007,56(10):265-268
[40]赵丽华,同名辉,王书明等.离子束刻蚀.半导体技术.1999,24(1):39-42
[41]刘颖,徐德权,徐向东等.几种常用光学材料的离子束刻蚀特性研究.中国科学技术大学学报.2007,37(4- 5):536-538
[42]崔芳,孙雨南.离子束刻蚀技术研究.光学技术.1993,(5):18-20
[43]曹召良,陆广,王吉增等.亚微米尺寸元件的离子束刻蚀制作.光子学报.2003,32(6):653-656
[44]金红涛,马万云.远场光学探测和近场光学探测.传感器技术.2001,20(8):10-12
[45]Hiroyuki Miyazoe.Ivo Utke.Johann Michler,et al.Controlled focused electron beam-induced etching for the fabrication of sub beam-size nanoholes.APPLIED PHYSICS LETTERS,2008,92(4):1-35
[46]Fu Min Huang,Nikolay Zheludev,Yifang Chen,et al.Focusing of light by a nanohole array.Appl Phys Lett,2007,90(9):1-3
[2]董怡,金伟其.超高密度光存储技术.激光与红外.2005,35(8):543-547
[3]Eric Betzig,Jay K.Trautman.Near-Field Optics:Microscopy,Spectroscopy,and Surface Modification Beyond the Diffraction Limit.Science,1992,257(5067):189-195
[4]SNOM应用于光电材料和器件的光学特性的探测和表征.2002,28(5):342-344
[5]T.W.Ebbesen,B.J.ezec,H.F.Ghaemi,et al.Extraodinary optical transmission through sub-wavelength hole arrays.Nature,1998,391(12);667-669
[6]Tineke Thio,K,M.Pellerin,R.A.Linke,H.J.Lezec and T.W.Ebbesen.Enhanced light transmission through a single subwavelength aperture.OPTICS LETTERS,2001,26(24):1972-1974
[7]B.J.Lezec,A.Degiron,E.Devaux,et al.Beaming Light from a Subwavelength Aperture.Science,2002,297(2):820-822
[8]STEFAN A.MAIER.PLASMONICS:FUNDAMENTALS AND APPLICATIONS.Springer.2007
[9]L.Bartin-Moreno,F.J.Garcia-Vidal,H.J.Lezec,et al.Theory of extraodinary optical transmission through subwavelength hole arrays.Phys.Rev.Lett,2001,86(6):1114-1117
[10]J.B.Pendry,L.Martin-Moreno,F.J.Garcia-Vidal.Mimicking Surface Plasmons with Structured Surfaces.SCIENCE,2004,305(6):847-848
[11]Fumio Koyama,Satoshi Shinada,Kenya Goto,et al.Surface Emitting Lasers for Optical Near-field Data Storage.SPIE,1999,3899:344-350
[12]Satoshi MITSUGI,Yong-Joo KIM and Kenya GOTO.Finite-Difference-Time-Domain Analysis for Electro-Magnetic Field Distribution on Near-Field Optical Recording Probe Head.OPTICAL REVIEW,2001,8(2):120-125
[13]Kenya Goto,Satoshi Mitsugi,Shu-Ying Ye,et al.Near-field probe array with higher throughput for ultrahigh data rate of tera byte optical disk.Advanced Optical Storage Technology,2002,4930:25-31
[14]Jiro Hashizume,Fumio Koyama.Plasmon Enhanced Optical Near-field Probing of Metal Nanoaperture Surface Emitting Laser.Optics Express,2004,12,6391-6396
[15]Kenya Goto,Takahito Ono,Yong-Joo Kim.Evanescent Light Enhancement in a Nanometer Aperture Surrounded by Corrugated Metal Thin Film for a Terabyte Optical Disk Head.TRANSACTIONS ON MAGNETICS,2005,41(2):1037-1041
[16]Zhilong Rao,Joseph A.Matteo,Lambertus Hesselink,et al.High transmission through ridge nano-apertures on Vertical-Cavity Surface-Emitting Lasers.Optics Express,2007,90(19):1-3
[7]E.X.Jin,X.Xu.Obtaining Subwavelength Optical Spots Using Nanoscale Ridge Apertures.Journal of Heat Transfer,207,129(37):37-43
[18]Xiaolei Shi,Lambertus Hesselink,Robert L.Thornton.Ultrahigh light transmission through a C-shaped nanoaperture.OPTICS LETTERS,2003,28(15):1320-1322
[19]J.A.Matteo,D.P.Fromm,Y.Yuen,et al.Spectral analysis of strongly enhanced visible light transmission through single C-shaped nanoapertures.APPLIED PHYSICS LEITERS,2004,85(4):648-650
[20]Eric X.Jin,Xianfan Xu.Enhanced optical near field from a bowtie aperture.APPLIED PHYSICS LETTERS,2006,88(15):1-3
[21]William L.Barnes,Alain Dereux,Thomas W.Ebbesen.Surface Plasmon subwavelength optics.NATURE,2003,424(14):824-830
[22]J.BRAVO-ABAD,A.DEGIRON,F.PRZYBILLA.How light emerges from an illuminated array of subwavelength holes.NATURE,2006,2:120-123
[23]顾本源.表面等离子体亚波长光学原理和新颖效应.物理.2007,36(4):280-287
[24]C.Genet,T.W.Ebbesen.Light in tiny holes.NATURE,2007,445(4):39-46
[25]焦小瑾,闵长俊,王沛,明海.亚波长金属周期结构中表面等离子体相关机理和应用.激光与光电子进展.2006,44(2):17
[26]A Degiron,T.W.Ebbesen.The role of localized surface Plasmon modes in the enhanced transmission of periodic subwavelength apertures.J.Opt.A:Pure Appl.Opt,2005,7:90-96
[27]J.A.Matteo,L.Hesselink.Fractal extensions of near-field aperture shapes for enhanced transmission and resolution.OPTICS EXPRESS,2005,13(2):636-647
[28]A.Degiron,T.W.Ebbesen.Analysis of the transmission process through single apertures surrounded by periodic corrugation.OPTICS EXPESS,2004,12(16):3694-3700
[29]P.Lalanne,J.P.Hugonin,J.C.Rodier.Theory of Surface Plasmon Generation at Nanoslit Apertures.PHYSICAL REVIEW LETTERS,2005,95(26):1-4
[30]Michael Quirk,Julian Serda.半导体制造技术.北京:电子工业出版社,2004:125-128
[31]张继成,吴卫东,许华等.磁控溅射技术新进展及应用.材料导报.2004,18(4):56-59
[32]于翔,刘阳,王成彪等.新型等离子体磁控溅射技术.金属热处理.2007,32(2):30-34
[33]龚建华,柳俊文,张永胜.大平面玻璃基片磁控溅射真空镀膜简介(一).真空.2006,43(2):1-4
[34]龚建华,张永胜,柳俊文.大平面玻璃基片磁控溅射真空镀膜简介(二).真空.2006.43(3):1-4
[35]顾文琪.电子束曝光微纳加工技术.北京:北京工业大学出版社,2004:11-15
[36]Kenya Goto.Nanofabrication and Evanescent Light Enhancement by Surface Plasmon.TRANSACTIONS ON MAGNETICS,2007,43(2):851-855
[37]高建霞,宋国峰,甘巧强等.纳米孔径垂直腔面发射激光器的制备及特性.半导体学报,2007,56(10):265-268
[40]赵丽华,同名辉,王书明等.离子束刻蚀.半导体技术.1999,24(1):39-42
[41]刘颖,徐德权,徐向东等.几种常用光学材料的离子束刻蚀特性研究.中国科学技术大学学报.2007,37(4- 5):536-538
[42]崔芳,孙雨南.离子束刻蚀技术研究.光学技术.1993,(5):18-20
[43]曹召良,陆广,王吉增等.亚微米尺寸元件的离子束刻蚀制作.光子学报.2003,32(6):653-656
[44]金红涛,马万云.远场光学探测和近场光学探测.传感器技术.2001,20(8):10-12
[45]Hiroyuki Miyazoe.Ivo Utke.Johann Michler,et al.Controlled focused electron beam-induced etching for the fabrication of sub beam-size nanoholes.APPLIED PHYSICS LETTERS,2008,92(4):1-35
[46]Fu Min Huang,Nikolay Zheludev,Yifang Chen,et al.Focusing of light by a nanohole array.Appl Phys Lett,2007,90(9):1-3