基于迈克尔逊干涉仪的全息曝光稳定性监控系统
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摘要
半个世纪以来,全息技术得到了长足的发展。全息技术以其不同于传统照相的成像原理和独特的成像特点,在工业检测、医学疾病的诊断与分析、电影、电视、展览、信息存储和军事武器等方面都获得了广泛的应用。而作为全息技术核心的全息元件,在其生产过程中对周围环境的要求十分苛刻,及其细微的振动都会导致全息照相的失败。因此,需要寻找一种方法,对全息元件的生产环境进行检测。
为了检测全息元件的生产环境是否符合要求,本课题提出了一种基于迈克尔逊干涉仪的全息元件曝光稳定性监控系统,并通过阐述迈克尔逊干涉条纹的成因及特点,解释该系统监测全息元件生产环境稳定性的原理。
通过数字图像处理技术,可以对系统采集到的环形干涉条纹的抖动和漂移情况做出分析。文中分析了干涉条纹图像的噪声,并用滤波法对其进行预处理。利用重心法和二元线性回归判定干涉条纹的圆心,在此基础上利用线扫描法对干涉条纹的半径变化情况进行跟踪。由于图像噪声对线扫描法的计算结果有较大的影响,文中又提出了利用圆参数降维霍夫变换来完成对干涉条纹半径的跟踪。在对干涉条纹半径计算结果的基础上,利用一阶差分计算其变化的周期数。
针对全息元件曝光稳定检测的要求,本文设计了全息元件曝光稳定性监测系统软件,并对关键技术的实现给予了详细的介绍。通过基于MIL的图像采集和IJL JPEG压缩,完成了对干涉条纹的采集和压缩存储,并利用视频采集卡同步记录了全息元件曝光过程。此外,为了日后能够对全息元件生产的记录进行分析,还开发了专门的记录播放器,配合数据库技术,完成对监控记录的回放分析。
最后,在计算了干涉条纹圆心的基础上,对系统进行标定,并测试了全息稳定性监控系统的工作情况。实验证明,该系统能够完成对全息元件曝光生产过程进行稳定性监测任务。
Over a half century, holography has been considerable developed. Holographic technology differs from traditional photography and has unique imaging features, have been widely used in industrial inspection, medical diagnosis analysis, film, television, exhibitions, information storage and military weapons and so on. Holographic components, which is core technology of holographic, has a very stringent stability requirements in its production surrounding environment, and any subtle vibration may lead to the failure of holography. Therefore, the way to test stability of the holographic element production environment has been considered.
To detect whether the production environment of the holographic element is meet the requirement or not, this paper present a detecting system based on Michelson holographic interferometer. By describing the causes and characteristics of Michelson fringes,the paper describe the principle of Stability Detection System of Holographic Element in exposure process.
The jitter and drift conditions of ring interference fringes, which collected by the system, can be analyzed by digital image processing technology. This paper analyzes the noise of interference fringe, and pretreatment them with the filtering method. Also, this paper caculate the center of a circle interference fringes by the way of Foucus and Binary linear regression. And base on the confirm of center, Scanning Line method can be used to track the change of interference radius. As the image noise has a great impact on the accuracy of Scanning Line method, the paper propose a new method, which is called Parameters Dimension Reduction Hough Transform, to complete the task of tracking fringe radius. Base on the caculation result of radius, this paper use First Difference to determine the periods change of interference fringes.
Considering stability requirements for holographic element in exposure process, this paper design the software for Stability Detection System of Holographic Element in exposure process, and descrip implementation of key technologies. Also,the paper use MIL-based image acquisition and IJL JPEG compression to complete the acquisition and the compression storage of interference fringes. Besides, the paper use video capture card to record holographic element exposure process simultaneously. In addition, we develop a special player for future review task, which can playback the records with the help of database technology.
Finally, the paper demarcate the system and test its effectiveness based on the confirm of interference fringes center. Experiments shows that the system can competent to the detection task of exposure production process for holographic.
为了检测全息元件的生产环境是否符合要求,本课题提出了一种基于迈克尔逊干涉仪的全息元件曝光稳定性监控系统,并通过阐述迈克尔逊干涉条纹的成因及特点,解释该系统监测全息元件生产环境稳定性的原理。
通过数字图像处理技术,可以对系统采集到的环形干涉条纹的抖动和漂移情况做出分析。文中分析了干涉条纹图像的噪声,并用滤波法对其进行预处理。利用重心法和二元线性回归判定干涉条纹的圆心,在此基础上利用线扫描法对干涉条纹的半径变化情况进行跟踪。由于图像噪声对线扫描法的计算结果有较大的影响,文中又提出了利用圆参数降维霍夫变换来完成对干涉条纹半径的跟踪。在对干涉条纹半径计算结果的基础上,利用一阶差分计算其变化的周期数。
针对全息元件曝光稳定检测的要求,本文设计了全息元件曝光稳定性监测系统软件,并对关键技术的实现给予了详细的介绍。通过基于MIL的图像采集和IJL JPEG压缩,完成了对干涉条纹的采集和压缩存储,并利用视频采集卡同步记录了全息元件曝光过程。此外,为了日后能够对全息元件生产的记录进行分析,还开发了专门的记录播放器,配合数据库技术,完成对监控记录的回放分析。
最后,在计算了干涉条纹圆心的基础上,对系统进行标定,并测试了全息稳定性监控系统的工作情况。实验证明,该系统能够完成对全息元件曝光生产过程进行稳定性监测任务。
Over a half century, holography has been considerable developed. Holographic technology differs from traditional photography and has unique imaging features, have been widely used in industrial inspection, medical diagnosis analysis, film, television, exhibitions, information storage and military weapons and so on. Holographic components, which is core technology of holographic, has a very stringent stability requirements in its production surrounding environment, and any subtle vibration may lead to the failure of holography. Therefore, the way to test stability of the holographic element production environment has been considered.
To detect whether the production environment of the holographic element is meet the requirement or not, this paper present a detecting system based on Michelson holographic interferometer. By describing the causes and characteristics of Michelson fringes,the paper describe the principle of Stability Detection System of Holographic Element in exposure process.
The jitter and drift conditions of ring interference fringes, which collected by the system, can be analyzed by digital image processing technology. This paper analyzes the noise of interference fringe, and pretreatment them with the filtering method. Also, this paper caculate the center of a circle interference fringes by the way of Foucus and Binary linear regression. And base on the confirm of center, Scanning Line method can be used to track the change of interference radius. As the image noise has a great impact on the accuracy of Scanning Line method, the paper propose a new method, which is called Parameters Dimension Reduction Hough Transform, to complete the task of tracking fringe radius. Base on the caculation result of radius, this paper use First Difference to determine the periods change of interference fringes.
Considering stability requirements for holographic element in exposure process, this paper design the software for Stability Detection System of Holographic Element in exposure process, and descrip implementation of key technologies. Also,the paper use MIL-based image acquisition and IJL JPEG compression to complete the acquisition and the compression storage of interference fringes. Besides, the paper use video capture card to record holographic element exposure process simultaneously. In addition, we develop a special player for future review task, which can playback the records with the help of database technology.
Finally, the paper demarcate the system and test its effectiveness based on the confirm of interference fringes center. Experiments shows that the system can competent to the detection task of exposure production process for holographic.
引文
[1]朱家健.浅谈全息术及其应用[J].中国科技信息,2008,(21)
[2]丰善,王淑岩.瞬态激光全息干涉计量与测试设备的研制与开发[J].红外与激光工程,2001,30(5)：366-37
[3]崔莹.全息术在军用装备上的应用.国防技术基础[J],2009,(4)
[4]全息照相实验的抗振研究.重庆职业技术学院学报,2007,(3)
[5]高光金.对提高激光全息照片质量的研究[J].潍坊学院学报,2003,5(4)：34
[6]李爱云.全息平台稳定性的检测[J].西安工业学院学报,2005
[7]张恩杰.提高高楼层全息照相实验成功率的研究[J].大学物理实验,2005,12(3)：23
[8]王玉,赵建光.微小振动对全息照相的影响及改进方法[J].现代物理知识,2006,(5)
[9]IO.B考洛米佐夫.干涉仪的理论基础及应用[M].技术标准出版社,1982
[10]于起峰.基于图像的运动测量和精密测量[M].北京：科学技术出版社,2002
[11]陈本永,李达成,朱若谷.基于干涉条纹跟踪实现纳米级位移测量的方法研究[J].光学技术,2001,(3)
[12]Joo W J, Cha S S. Automated interferogram analysis based on an integrated expert system[J].Applied optics,1995,34 (32):7486—7496.
[13]姜坤,朱若谷.用迈克尔逊干涉仪测微定位工作台的位移[J].中国计量学院学报,2006,(4)
[14]王云龙.”牛眼”麦克尔逊干涉型激光检测技术研究[D].武汉：华中科技大学,2005
[15]于起峰.基于图像的运动测量和精密测量[M].北京：科学出版社,2002
[16]高国伟.图像去噪中若干问题的研究[D].开封：河南大学,2008
[17]邵中波.公路裂缝检测的数字图像处理系统[D].西安：长安大学,2005
[18]谢凤英,赵丹培VisualC++数字图像处理[M].北京：电子工业出版社,2008
[19]朱秀昌,刘峰,胡栋.数字图像处理与图像通讯[M].北京：北京邮电大学出版社,2008
[20]蓝章礼,杨小帆.激光光斑中心定位算法的实用性改进[J].计算机工程,2008,34(6)
[21]陈秀鹏赵晓红.多元线性回归用于牛顿环CCD成像法测量[R].第四届全国高等院校物理实验教学研讨会论文
[22]汪荣鑫.数理统计[M].西安：西安交通大学出版社.1986：185-187
[23]杨治明.基于霍夫变换理论的图形识别[J]重庆工业高等专科学校学报.2002,(11)4
[24]Prittcen J, Ilhngworth J. Kitder J. A formal definition of the Hough Wr～tnsform properties and re]ationships J Mathematical Imaging and Vision,1992,1:153—148
[25]Bergen J R, Shvayster H. A probabilistic algorithm for computing Hough Transform. J Algorithm.1991,12:639—656
[26]Hu Z Y. Ma S D. Three condkioas of good liae parameterization. Pattern Recognition Letters,1995,16:385388
[27]孙即祥.图像分析[M].北京：科学出版社,2005：100
[28]陈燕新.基于随机Hough变换的快速圆检测方法[J],上海交通大学学报,1998,(10)32
[29]王强.一种用于员检测的快速HOUGH算法[J].小型微型计算机系统2009,(9)21
[30]楼越焕.基于Hough变换算法的激光牛顿环中心提取方法[J].光电子技术,2009,(3)24
[31]李崇.使用MIL库实现动态视频采集与三原色提取.工业控制计算机[J].2007,20(11)：56-57
[32]Matrox图像采集卡参考手册[M/CD].MIL referance. Matrox Electronic Systems Ltd.2005
[33]MIL帮助与支持文档[DB/OL].http://www.matrox.com/imaging/en/
[34]S260采集压缩卡使用说明书[M/CD].
[35]http://liucsoft.blog.163.com/blog/static/162294322008429565625/tEB/OL].
[36]http://blog.csdn.net/lptl9832003/archive/2007/07/28/1713718.aspx[EB/OL].
[37]Intel(?) JPEG Library v1.51 Reference Manual[DB/OL].www.intel.com
[38]http://tech.163.com/[DB/OL].2005-8-18.
[39]陆其明,DirectShow开发指南[M],北京：清华大学出版社,2003.
[40]张睿萍.基于DirectShow的数字视频监控系统的研究与实现[D].武汉：武汉理工大学.2008
[41]微软帮助和支持文档[DB/OL]. http://support.microsoft.com/kb/q172338/
[42]Intel技术支持和文档[DB/OL].http://software.intel.com/zh-cn/articles/measure-code-sections-using-the-enhanced-t imer/
[2]丰善,王淑岩.瞬态激光全息干涉计量与测试设备的研制与开发[J].红外与激光工程,2001,30(5)：366-37
[3]崔莹.全息术在军用装备上的应用.国防技术基础[J],2009,(4)
[4]全息照相实验的抗振研究.重庆职业技术学院学报,2007,(3)
[5]高光金.对提高激光全息照片质量的研究[J].潍坊学院学报,2003,5(4)：34
[6]李爱云.全息平台稳定性的检测[J].西安工业学院学报,2005
[7]张恩杰.提高高楼层全息照相实验成功率的研究[J].大学物理实验,2005,12(3)：23
[8]王玉,赵建光.微小振动对全息照相的影响及改进方法[J].现代物理知识,2006,(5)
[9]IO.B考洛米佐夫.干涉仪的理论基础及应用[M].技术标准出版社,1982
[10]于起峰.基于图像的运动测量和精密测量[M].北京：科学技术出版社,2002
[11]陈本永,李达成,朱若谷.基于干涉条纹跟踪实现纳米级位移测量的方法研究[J].光学技术,2001,(3)
[12]Joo W J, Cha S S. Automated interferogram analysis based on an integrated expert system[J].Applied optics,1995,34 (32):7486—7496.
[13]姜坤,朱若谷.用迈克尔逊干涉仪测微定位工作台的位移[J].中国计量学院学报,2006,(4)
[14]王云龙.”牛眼”麦克尔逊干涉型激光检测技术研究[D].武汉：华中科技大学,2005
[15]于起峰.基于图像的运动测量和精密测量[M].北京：科学出版社,2002
[16]高国伟.图像去噪中若干问题的研究[D].开封：河南大学,2008
[17]邵中波.公路裂缝检测的数字图像处理系统[D].西安：长安大学,2005
[18]谢凤英,赵丹培VisualC++数字图像处理[M].北京：电子工业出版社,2008
[19]朱秀昌,刘峰,胡栋.数字图像处理与图像通讯[M].北京：北京邮电大学出版社,2008
[20]蓝章礼,杨小帆.激光光斑中心定位算法的实用性改进[J].计算机工程,2008,34(6)
[21]陈秀鹏赵晓红.多元线性回归用于牛顿环CCD成像法测量[R].第四届全国高等院校物理实验教学研讨会论文
[22]汪荣鑫.数理统计[M].西安：西安交通大学出版社.1986：185-187
[23]杨治明.基于霍夫变换理论的图形识别[J]重庆工业高等专科学校学报.2002,(11)4
[24]Prittcen J, Ilhngworth J. Kitder J. A formal definition of the Hough Wr～tnsform properties and re]ationships J Mathematical Imaging and Vision,1992,1:153—148
[25]Bergen J R, Shvayster H. A probabilistic algorithm for computing Hough Transform. J Algorithm.1991,12:639—656
[26]Hu Z Y. Ma S D. Three condkioas of good liae parameterization. Pattern Recognition Letters,1995,16:385388
[27]孙即祥.图像分析[M].北京：科学出版社,2005：100
[28]陈燕新.基于随机Hough变换的快速圆检测方法[J],上海交通大学学报,1998,(10)32
[29]王强.一种用于员检测的快速HOUGH算法[J].小型微型计算机系统2009,(9)21
[30]楼越焕.基于Hough变换算法的激光牛顿环中心提取方法[J].光电子技术,2009,(3)24
[31]李崇.使用MIL库实现动态视频采集与三原色提取.工业控制计算机[J].2007,20(11)：56-57
[32]Matrox图像采集卡参考手册[M/CD].MIL referance. Matrox Electronic Systems Ltd.2005
[33]MIL帮助与支持文档[DB/OL].http://www.matrox.com/imaging/en/
[34]S260采集压缩卡使用说明书[M/CD].
[35]http://liucsoft.blog.163.com/blog/static/162294322008429565625/tEB/OL].
[36]http://blog.csdn.net/lptl9832003/archive/2007/07/28/1713718.aspx[EB/OL].
[37]Intel(?) JPEG Library v1.51 Reference Manual[DB/OL].www.intel.com
[38]http://tech.163.com/[DB/OL].2005-8-18.
[39]陆其明,DirectShow开发指南[M],北京：清华大学出版社,2003.
[40]张睿萍.基于DirectShow的数字视频监控系统的研究与实现[D].武汉：武汉理工大学.2008
[41]微软帮助和支持文档[DB/OL]. http://support.microsoft.com/kb/q172338/
[42]Intel技术支持和文档[DB/OL].http://software.intel.com/zh-cn/articles/measure-code-sections-using-the-enhanced-t imer/