压电加速度传感器测量电路的研制
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摘要
压电加速度传感器是振动与冲击测量的核心部件，在现代工业和自动化生产过程中具有非常重要的作用，特别是在精度、长时间稳定性等方面具有独到之处。压电加速度传感器可以看作是能产生电荷的高内阻发电元件，其产生的电荷量很小，而一般的测量电路的输入阻抗较小，压电片上的电荷通过测量电路时会被输入电阻迅速泄漏而引入测量误差。因此压电加速度传感器要有与之配套的测量电路一起使用，否则其使用就要受到很大的限制。
电荷放大器是目前最常用的压电加速度传感器的测量电路，它能得到与输入电荷成比例的电压输出，其特点之一就是传感器的灵敏度与电缆长度无关。本文提出了一种用集成芯片来取代大量分离元件的电荷放大器的设计方法，所设计的电荷放大器由电荷转换级、归一化放大级、高低通滤波级、输出级、稳压电源和过载指示级等六个部分组成。并在电荷转换部分的灵敏电容的切换和输出放大级的增益切换电路中提出一种程控方法解决的方案，并进行了详细的理论分析，从而解决了手动调节容易给系统带来误差和干扰的问题。同时本文对电路系统中存在的干扰信号及引入的误差作了细致的理论分析，并采取了相关的办法进行解决。最后，和标准的电荷放大器的性能进行对比，验证了本设计的可行性。
作者完成的主要工作包括：(1)通过对压电加速度传感器的测量电路的各种实现方案的深入调研，提出了一种用集成芯片取代大量分离元件的电荷放大器的实现方案；(2)制作了完整的电路板；(3)在电荷转换部分的灵敏电容的切换和输出放大级的增益切换电路的实现上提出了程控的方案；(4)进行了实验验证，给出了实验结果；(5)在实验结果的基础上，结合电荷放大器原理对系统作了误差分析。
Piezoelectric accelerometer is at the very core of the measurement in the vibration and strike, and it is very important in modern industry and automatic production. Especially in precision, long-time stability it has very fine quality. Piezoelectric accelerometer can be regarded as the component that can produce charge with the high impedance. But this charge amount is very small, and the input impedance of general measurement circuit is always small, the charge of the piezoelectricity slice would be leaked easily through this measurement circuit, and it can bring in inaccuracy of the measurement. So the piezoelectric accelerometer has been matched with its related measurement circuit, or else the wide application has been greatly restricted.
At present, most popular measurement circuit used for piezoelectric accelerometer is charge amplifier. It can get a kind of voltage output which is proportional to the input charge. One of its characteristics is to make the sensitivity of the sensor have nothing to do with the length of the cable. A design of charge amplifier which used integrated chip replace a large number of leave components has been developed in the paper. It contains six parts of charge convert, normalization magnify, high and low pass filter, output amplifier stage, stabilized voltage power supply and overload indicator. In order to solve the problem of error and interfere to the system by manual regulation, a programme-controlled scheme in sensitivity throw-over of charge convert and gain throw-over of output amplifier has been proposed in this paper. The principle analysis of error and undesired signal has been done at great length, and relevant way to solve it has been adopted in the paper, too. Finally the system is contrasted with the standard charge amplifier, the experimental result indicated that it is feasible to original design.
Main works of the author:(1) Has developed a design of charge amplifier which using a kind of integrated chip replace a large number of leave components, though all the realized proposal of measurement circuit for the piezoelectric accelerometer;(2) Has made the circuit board;(3) Has proposed a programme-controlled scheme in the sensitivity throw-over of charge convert and gain throw-over of output amplifier;(4) Has done the experiment, give the experimental result;(5) Has done the error analysis based on the experimental result and the principle of the charge amplifier.
电荷放大器是目前最常用的压电加速度传感器的测量电路，它能得到与输入电荷成比例的电压输出，其特点之一就是传感器的灵敏度与电缆长度无关。本文提出了一种用集成芯片来取代大量分离元件的电荷放大器的设计方法，所设计的电荷放大器由电荷转换级、归一化放大级、高低通滤波级、输出级、稳压电源和过载指示级等六个部分组成。并在电荷转换部分的灵敏电容的切换和输出放大级的增益切换电路中提出一种程控方法解决的方案，并进行了详细的理论分析，从而解决了手动调节容易给系统带来误差和干扰的问题。同时本文对电路系统中存在的干扰信号及引入的误差作了细致的理论分析，并采取了相关的办法进行解决。最后，和标准的电荷放大器的性能进行对比，验证了本设计的可行性。
作者完成的主要工作包括：(1)通过对压电加速度传感器的测量电路的各种实现方案的深入调研，提出了一种用集成芯片取代大量分离元件的电荷放大器的实现方案；(2)制作了完整的电路板；(3)在电荷转换部分的灵敏电容的切换和输出放大级的增益切换电路的实现上提出了程控的方案；(4)进行了实验验证，给出了实验结果；(5)在实验结果的基础上，结合电荷放大器原理对系统作了误差分析。
Piezoelectric accelerometer is at the very core of the measurement in the vibration and strike, and it is very important in modern industry and automatic production. Especially in precision, long-time stability it has very fine quality. Piezoelectric accelerometer can be regarded as the component that can produce charge with the high impedance. But this charge amount is very small, and the input impedance of general measurement circuit is always small, the charge of the piezoelectricity slice would be leaked easily through this measurement circuit, and it can bring in inaccuracy of the measurement. So the piezoelectric accelerometer has been matched with its related measurement circuit, or else the wide application has been greatly restricted.
At present, most popular measurement circuit used for piezoelectric accelerometer is charge amplifier. It can get a kind of voltage output which is proportional to the input charge. One of its characteristics is to make the sensitivity of the sensor have nothing to do with the length of the cable. A design of charge amplifier which used integrated chip replace a large number of leave components has been developed in the paper. It contains six parts of charge convert, normalization magnify, high and low pass filter, output amplifier stage, stabilized voltage power supply and overload indicator. In order to solve the problem of error and interfere to the system by manual regulation, a programme-controlled scheme in sensitivity throw-over of charge convert and gain throw-over of output amplifier has been proposed in this paper. The principle analysis of error and undesired signal has been done at great length, and relevant way to solve it has been adopted in the paper, too. Finally the system is contrasted with the standard charge amplifier, the experimental result indicated that it is feasible to original design.
Main works of the author:(1) Has developed a design of charge amplifier which using a kind of integrated chip replace a large number of leave components, though all the realized proposal of measurement circuit for the piezoelectric accelerometer;(2) Has made the circuit board;(3) Has proposed a programme-controlled scheme in the sensitivity throw-over of charge convert and gain throw-over of output amplifier;(4) Has done the experiment, give the experimental result;(5) Has done the error analysis based on the experimental result and the principle of the charge amplifier.
引文
[1]李科杰，现代传感技术[M]．电子工业出版社，2005
[2]孟立凡，郑宾．传感器原理及技术[M]．国防工业出版社2005
[3]吴道悌．非电量电测技术[M]．西安：西安交通大学出版社，1990
[4]栾桂东．传感器及其应用[M]．西安：西安电子科技大学出版社，2002
[5]李道华，李玲．传感器电路分析与设计[M]．武汉：武汉大学出版社，2000
[6]张世箕，杨安禄，陈长龄．自动测试系统[M]．成都：电子科技大学出版社，1994
[7]周继明，江世明．传感器技术与应用[M]．中南大学出版社，2005
[8]杨乐平．测试技术[M]．北京：国防工业出版社，2002
[9]张令弥．动态测试技术的的发展讲座[J]．上海：振动与冲击，1998
[10]吕俊芳．传感器接口与检测仪器电路[M]．北京：北京航空航天大学出版社，1994
[11]查万纪．压电加速度传感器测量电路的研究与设计[D]．安徽大学，2005
[12]刘树堂、朱茂林、荣玫等译．基于运算放大器和模拟集成电路的电路设计[M]．西安：西安交通大学出版社，2004
[13]康华光，陈大钦．电子技术基础[M]．高等教育出版社，2002
[14]谢嘉奎，电子线路[M]．北京：高等教育出版社，1988
[15]王世一，数字信号处理[M]．北京：北京理工大学出版社，1997
[16]李瀚荪，电路分析基础[M]．北京：高等教育出版社，1999
[17]TL081数据手册
[18]刘宏，protel电路设计实用指南[M]．西安：西安电子科技大学出版社，2000
[19]应怀樵．振动测试和分析[M]．北京：中国铁道出版社，1987
[20]赵家贵．电子电路设计[M]．中国计量出版社，2005
[21]侯振德，高瑞亭．消除电荷放大器零点漂移的方法[J]．四川：压电与声光，1991
[22]杨新尧．电荷放大器[J]．北京：应用电声技术，1994
[23]张中．集成运算放大器应用手册[M]．北京：世界图书出版社，1990
[24]辛友顺，胡永生，薛小铃．单片机应用系统设计与实现[M]．福建科学技术出版社，2005
[25]曲学基，王增福，曲敬铠．稳压电源基本原理与工艺设计[M]．电子工业出版社，2004
[26]何希才，张明莉．新型稳压电源及应用实例[M]．电子工业出版社，2004
[27]王增福，魏永明．新编常用稳压电源[M]．电子工业出版社，2005
[28]樊春玲等．一种新型电荷放大器的设计与研究[J]．传感器技术学报，2000
[29]张捷贤，高峰，王艳．程控技术在仪表中的应用[J]．仪表技术与传感器，1997
[30]JJG123-88，直流电位差计检定规程
[31]175℃ Silicon-Based Hybrid Charge Amplifier for 175℃ and 100-mV/G Miniature piezoelectric Acceleromerer. Felix A.Levinzon,Member, IEEE SENSORS JOURNAL, VOL.6,NO.5,OCTOBER 2006
[2]孟立凡，郑宾．传感器原理及技术[M]．国防工业出版社2005
[3]吴道悌．非电量电测技术[M]．西安：西安交通大学出版社，1990
[4]栾桂东．传感器及其应用[M]．西安：西安电子科技大学出版社，2002
[5]李道华，李玲．传感器电路分析与设计[M]．武汉：武汉大学出版社，2000
[6]张世箕，杨安禄，陈长龄．自动测试系统[M]．成都：电子科技大学出版社，1994
[7]周继明，江世明．传感器技术与应用[M]．中南大学出版社，2005
[8]杨乐平．测试技术[M]．北京：国防工业出版社，2002
[9]张令弥．动态测试技术的的发展讲座[J]．上海：振动与冲击，1998
[10]吕俊芳．传感器接口与检测仪器电路[M]．北京：北京航空航天大学出版社，1994
[11]查万纪．压电加速度传感器测量电路的研究与设计[D]．安徽大学，2005
[12]刘树堂、朱茂林、荣玫等译．基于运算放大器和模拟集成电路的电路设计[M]．西安：西安交通大学出版社，2004
[13]康华光，陈大钦．电子技术基础[M]．高等教育出版社，2002
[14]谢嘉奎，电子线路[M]．北京：高等教育出版社，1988
[15]王世一，数字信号处理[M]．北京：北京理工大学出版社，1997
[16]李瀚荪，电路分析基础[M]．北京：高等教育出版社，1999
[17]TL081数据手册
[18]刘宏，protel电路设计实用指南[M]．西安：西安电子科技大学出版社，2000
[19]应怀樵．振动测试和分析[M]．北京：中国铁道出版社，1987
[20]赵家贵．电子电路设计[M]．中国计量出版社，2005
[21]侯振德，高瑞亭．消除电荷放大器零点漂移的方法[J]．四川：压电与声光，1991
[22]杨新尧．电荷放大器[J]．北京：应用电声技术，1994
[23]张中．集成运算放大器应用手册[M]．北京：世界图书出版社，1990
[24]辛友顺，胡永生，薛小铃．单片机应用系统设计与实现[M]．福建科学技术出版社，2005
[25]曲学基，王增福，曲敬铠．稳压电源基本原理与工艺设计[M]．电子工业出版社，2004
[26]何希才，张明莉．新型稳压电源及应用实例[M]．电子工业出版社，2004
[27]王增福，魏永明．新编常用稳压电源[M]．电子工业出版社，2005
[28]樊春玲等．一种新型电荷放大器的设计与研究[J]．传感器技术学报，2000
[29]张捷贤，高峰，王艳．程控技术在仪表中的应用[J]．仪表技术与传感器，1997
[30]JJG123-88，直流电位差计检定规程
[31]175℃ Silicon-Based Hybrid Charge Amplifier for 175℃ and 100-mV/G Miniature piezoelectric Acceleromerer. Felix A.Levinzon,Member, IEEE SENSORS JOURNAL, VOL.6,NO.5,OCTOBER 2006