激光测振在振动计量中的若干技术问题的研究
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摘要
本论文根据实际研制的激光测振仪系统，从提高激光测振仪精度的角度出发介绍了激光测振仪的原理，并详细地剖析了光路对测振仪干涉条纹对比度的影响、光电转换对测量精度的影响、光电信号的滤波放大以及外界振动对测振仪系统的影响等技术问题。
第一章对激光测振发展历史及现状作了介绍，阐释了激光测振在振动计量中的作用，提出了提高测量精度的关键问题，并确定了本文研究的目的及主要内容。
第二章阐释了激光干涉测振原理，进而介绍了实现激光干涉测振的两种方法——频比计数法和贝塞尔函数法，并对两种方法的精度进行了分析。
第三章分析了光路设计中的等光程问题的重要性，以及影响干涉条纹对比度的相关因素；并从提高测量精度的角度分析了调相多周期平均法和系统的隔振。
第四章介绍了系统的光电转换，根据系统的要求设计了相关的滤波放大电路。运用Pspice电路仿真软件对电路进行了仿真设计，并通过试验对结果进行了验证。
第五章介绍了振动校准系统对测振仪的技术要求，实现了相关光路和电路的设计；对系统进行测试，并对实测结果进行分析；最后对系统的误差进行了分析。
第六章概括本课题的主要工作，对研究成果进行了评价，并提出展望。
On the basis of practically achieved Low-Frequency Laser-Vibration Measuring-System, this thesis analyses the principle of Laser-Vibration Measuring-System, the optical factors which have effect on contrast degree of interference fringe, the optical-electric transformation factors which have effect on measuring accuracy, the important of filter for improving the accuracy in the absolute calibration and the outward vibration which has effect on system accuracy, etc.
In chapter one, the background of laser measuring vibration, and then followed by its current status, is introduced and analyzed. The importance of laser measuring vibration in metrology is presented. The problems about how to improve the measuring accuracy of system are analyzed, and thus the aim and task about the thesis are determined.
In chapter two, the principle of absolutely calibrating is presented. Two kinds of interference measurement methods are introduced: counting of frequency ratio method and Bessel function method, and the accuracy of the two methods are analyzed.
In chapter three, the importance of maintaining the equal optical path between measuring beam and reference beam in measuring horizontal and vertical vibration table are analyzed, and the factors having effect on contrast degree of interference fringe are introduced. For improving the accuracy of Laser-Vibration-Measuring-System, the phase-modulation-multi-period-average method and the vibration isolated of
system are analyzed.
In chapter four, the principle of the optical-electric transformation is presented. Based on the demands of the system, the filter circuit are designed. Using the simulation of Pspice software, the working efficiency and quality of active filter circuit design is improved. Using the simulation of Pspice software, the working efficiency and quality of active filter circuit design is improved. The results of experiment verified the simulation of Pspice software.
In chapter five, the technology requirements of vibration calibration system are introduced, and thus the optical and electric design are realized. The Laser-Vibration-Measuring-System is tested and the results are analyzed. At last, the error of the Laser-Vibration-Measuring-System is analyzed. The results of experiment verified the simulation of Pspice software.
In chapter six, the important research work of this thesis are systematically summarized, and the whole research results and some problems under to study in future are put forward.
第一章对激光测振发展历史及现状作了介绍，阐释了激光测振在振动计量中的作用，提出了提高测量精度的关键问题，并确定了本文研究的目的及主要内容。
第二章阐释了激光干涉测振原理，进而介绍了实现激光干涉测振的两种方法——频比计数法和贝塞尔函数法，并对两种方法的精度进行了分析。
第三章分析了光路设计中的等光程问题的重要性，以及影响干涉条纹对比度的相关因素；并从提高测量精度的角度分析了调相多周期平均法和系统的隔振。
第四章介绍了系统的光电转换，根据系统的要求设计了相关的滤波放大电路。运用Pspice电路仿真软件对电路进行了仿真设计，并通过试验对结果进行了验证。
第五章介绍了振动校准系统对测振仪的技术要求，实现了相关光路和电路的设计；对系统进行测试，并对实测结果进行分析；最后对系统的误差进行了分析。
第六章概括本课题的主要工作，对研究成果进行了评价，并提出展望。
On the basis of practically achieved Low-Frequency Laser-Vibration Measuring-System, this thesis analyses the principle of Laser-Vibration Measuring-System, the optical factors which have effect on contrast degree of interference fringe, the optical-electric transformation factors which have effect on measuring accuracy, the important of filter for improving the accuracy in the absolute calibration and the outward vibration which has effect on system accuracy, etc.
In chapter one, the background of laser measuring vibration, and then followed by its current status, is introduced and analyzed. The importance of laser measuring vibration in metrology is presented. The problems about how to improve the measuring accuracy of system are analyzed, and thus the aim and task about the thesis are determined.
In chapter two, the principle of absolutely calibrating is presented. Two kinds of interference measurement methods are introduced: counting of frequency ratio method and Bessel function method, and the accuracy of the two methods are analyzed.
In chapter three, the importance of maintaining the equal optical path between measuring beam and reference beam in measuring horizontal and vertical vibration table are analyzed, and the factors having effect on contrast degree of interference fringe are introduced. For improving the accuracy of Laser-Vibration-Measuring-System, the phase-modulation-multi-period-average method and the vibration isolated of
system are analyzed.
In chapter four, the principle of the optical-electric transformation is presented. Based on the demands of the system, the filter circuit are designed. Using the simulation of Pspice software, the working efficiency and quality of active filter circuit design is improved. Using the simulation of Pspice software, the working efficiency and quality of active filter circuit design is improved. The results of experiment verified the simulation of Pspice software.
In chapter five, the technology requirements of vibration calibration system are introduced, and thus the optical and electric design are realized. The Laser-Vibration-Measuring-System is tested and the results are analyzed. At last, the error of the Laser-Vibration-Measuring-System is analyzed. The results of experiment verified the simulation of Pspice software.
In chapter six, the important research work of this thesis are systematically summarized, and the whole research results and some problems under to study in future are put forward.
引文
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[21] 陈长缨．一种新型激光多普勒振动传感器．光电工程[J]．1997．24(02)：11-16
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