基于白光干涉超精密表面形貌测量方法与系统研究
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摘要
随着超精密加工技术、半导体工业、MEMS和NEMS技术的发展,在纳米尺度内进行超精密表面形貌测量的需求越来越迫切。超精密表面形貌测量仪器必须具备垂直、水平方向上的高分辨率和较大的测量范围。文中系统论述了纵、横向分辨率均可达到纳米量级、测量范围可达到毫米量级的超精密表面形貌测量系统的创新设计和关键技术。主要研究内容和创新如下：
提出了基于白光显微干涉的原子力探针扫描测量方法,该方法利用白光干涉零级条纹的特点,采用白光干涉零级条纹的移动量测量探针微悬臂的变形量。研究了白光干涉零级条纹中心线的提取算法以及白光干涉零级条纹中心线移动量算法,推导了探针微悬臂变形量与条纹移动量的关系,提出了微悬臂变形量检测非线性误差修正方法。
研究了原子力探针扫描测量的基本理论,根据本测量系统的特点,提出了一种融合垂直扫描系统的位移量和微悬臂变形量得到被测表面形貌的原子力探针接触式工作方法,实现了原子力探针的可溯源跟踪测量。
提出了基于同一显微镜基体实现非接触光学测量与原子力探针扫描测量两种功能的超精密表面形貌测量方法。该方法可以针对超精密表面不同的测量要求采用不同的测量方法,并可以对同一表面进行互补测量。
基于上述超精密表面形貌测量方法和测量原理,研制了具有显微干涉测量与原子力探针测量两种功能的超精密表面形貌测量系统。研制了包括大量程计量型纳米级垂直扫描系统和大量程计量型纳米级共运动平面二维精密工作台的纳米驱动系统。研制了激光干涉位移计量系统,分析了采用四象限光电管接收激光干涉条纹时两路正弦信号满足正交的条件、在测量过程中干涉务的宽度与方向发生变化时引起的非正交误差以及影响激光干涉测量精度的因素,采用硬、软件结合法对由干涉信号误差引起的测量误差进行实时补偿。开发了超精密表面新貌测量系统软件,该软件可以实现原子力探针扫描测量,白光干涉垂直扫描测量,相移干涉扫描测量。
本论文所提出的测量方法和研制的测量系统可用于超精密加工工程表面,光学表面以及微纳几何结构的测量。文中给出了精度实验结果及测量实例。
With the development of ultra-precision processing technology, the semiconductor industry, MEMS and NEMS technology, the need for ultra-precision surface topography measurement at the nanoscale is urgent. Instruments for measuring ultra-precision surface topography should have high lateral resolution, high vertical resolution and large measurement range. The innovative design and key technologies of the ultra-precision surface topography measurement system are discussed. Both lateral resolution and vertical resolution of the measurement system can achieve nano-scale with measuring range of millimeters. The main research contents, results and new ideas are as follows:
Using the characteristics of white light interference fringes, a novel atomic force probe scanning measurement method based on white light interference is proposed, in which the deflection of atomic force probe cantilever is obtained by measuring the movement of white light interference central fringe. The extraction algorithms of the centerline of zero-order fringe and the calculation method of the centerline movement amount are analyzed. The relationship between the deflection of the atomic force probe cantilever and the movement amount of the central fringe is analyzed, and nonlinearity error correction of probe cantilever deflection measurement is proposed.
The basic theory of atomic force probe scanning measurement is investigated. To overcome the shortcomings of the contact mode of atomic force microscopy, a new contact operation mode which combines the displacement of vertical scanning system and the deformation of the cantilever is proposed according to the characteristics of the measurement system. Traceable tracking measurement of atomic force probe scanning was realized.
A measurement method for measuring ultra-precision surface topography, based on one interference microscope substrate, which combined non-contact optical measurement with atomic force scanning probe measurement, is proposed. According to different measurement requirements of ultra-precision surface, different measurement methods can be used. In addition, complementary quantitative measurement can be implemented for same surface.
An ultra-precision surface topography measuring system, which combined atomic force probe scanning measurement with non-contact optical measurement, based on the measurement methods and measurement principles for ultra-precision surface topography measuring is developed successfully. Nano driving system, which including metrological vertical scanning system and coplanar 2D precision stage with large-stroke and nanopositioning resolution, is developed. A laser interference displacement measuring system is developed and four-quadrant optoelectronic detectors are used to detect laser interference fringes. The conditions to get a couple of quadrature signals, the non-orthogonal error caused by changes of the width of fringe period and/or the offset angle in the measurement process and the causes of measurement errors in detecting laser interference fringes are analyzed. A method combining hardware circuits and software is used to compensate measurement errors caused by the signal errors. The software for ultra-precision surface measurement is developed and atomic force probe scanning measurement, white light interference vertical scanning measurement, phase shifting interferometry measurement were realized.
The measurement method proposed and measurement system developed in this paper can be used to measure ultra-precision machining engineering surface, optical surface, geometry of micro-nano, is developed successfully. The results of accuracy testing and measurement examples are given.
提出了基于白光显微干涉的原子力探针扫描测量方法,该方法利用白光干涉零级条纹的特点,采用白光干涉零级条纹的移动量测量探针微悬臂的变形量。研究了白光干涉零级条纹中心线的提取算法以及白光干涉零级条纹中心线移动量算法,推导了探针微悬臂变形量与条纹移动量的关系,提出了微悬臂变形量检测非线性误差修正方法。
研究了原子力探针扫描测量的基本理论,根据本测量系统的特点,提出了一种融合垂直扫描系统的位移量和微悬臂变形量得到被测表面形貌的原子力探针接触式工作方法,实现了原子力探针的可溯源跟踪测量。
提出了基于同一显微镜基体实现非接触光学测量与原子力探针扫描测量两种功能的超精密表面形貌测量方法。该方法可以针对超精密表面不同的测量要求采用不同的测量方法,并可以对同一表面进行互补测量。
基于上述超精密表面形貌测量方法和测量原理,研制了具有显微干涉测量与原子力探针测量两种功能的超精密表面形貌测量系统。研制了包括大量程计量型纳米级垂直扫描系统和大量程计量型纳米级共运动平面二维精密工作台的纳米驱动系统。研制了激光干涉位移计量系统,分析了采用四象限光电管接收激光干涉条纹时两路正弦信号满足正交的条件、在测量过程中干涉务的宽度与方向发生变化时引起的非正交误差以及影响激光干涉测量精度的因素,采用硬、软件结合法对由干涉信号误差引起的测量误差进行实时补偿。开发了超精密表面新貌测量系统软件,该软件可以实现原子力探针扫描测量,白光干涉垂直扫描测量,相移干涉扫描测量。
本论文所提出的测量方法和研制的测量系统可用于超精密加工工程表面,光学表面以及微纳几何结构的测量。文中给出了精度实验结果及测量实例。
With the development of ultra-precision processing technology, the semiconductor industry, MEMS and NEMS technology, the need for ultra-precision surface topography measurement at the nanoscale is urgent. Instruments for measuring ultra-precision surface topography should have high lateral resolution, high vertical resolution and large measurement range. The innovative design and key technologies of the ultra-precision surface topography measurement system are discussed. Both lateral resolution and vertical resolution of the measurement system can achieve nano-scale with measuring range of millimeters. The main research contents, results and new ideas are as follows:
Using the characteristics of white light interference fringes, a novel atomic force probe scanning measurement method based on white light interference is proposed, in which the deflection of atomic force probe cantilever is obtained by measuring the movement of white light interference central fringe. The extraction algorithms of the centerline of zero-order fringe and the calculation method of the centerline movement amount are analyzed. The relationship between the deflection of the atomic force probe cantilever and the movement amount of the central fringe is analyzed, and nonlinearity error correction of probe cantilever deflection measurement is proposed.
The basic theory of atomic force probe scanning measurement is investigated. To overcome the shortcomings of the contact mode of atomic force microscopy, a new contact operation mode which combines the displacement of vertical scanning system and the deformation of the cantilever is proposed according to the characteristics of the measurement system. Traceable tracking measurement of atomic force probe scanning was realized.
A measurement method for measuring ultra-precision surface topography, based on one interference microscope substrate, which combined non-contact optical measurement with atomic force scanning probe measurement, is proposed. According to different measurement requirements of ultra-precision surface, different measurement methods can be used. In addition, complementary quantitative measurement can be implemented for same surface.
An ultra-precision surface topography measuring system, which combined atomic force probe scanning measurement with non-contact optical measurement, based on the measurement methods and measurement principles for ultra-precision surface topography measuring is developed successfully. Nano driving system, which including metrological vertical scanning system and coplanar 2D precision stage with large-stroke and nanopositioning resolution, is developed. A laser interference displacement measuring system is developed and four-quadrant optoelectronic detectors are used to detect laser interference fringes. The conditions to get a couple of quadrature signals, the non-orthogonal error caused by changes of the width of fringe period and/or the offset angle in the measurement process and the causes of measurement errors in detecting laser interference fringes are analyzed. A method combining hardware circuits and software is used to compensate measurement errors caused by the signal errors. The software for ultra-precision surface measurement is developed and atomic force probe scanning measurement, white light interference vertical scanning measurement, phase shifting interferometry measurement were realized.
The measurement method proposed and measurement system developed in this paper can be used to measure ultra-precision machining engineering surface, optical surface, geometry of micro-nano, is developed successfully. The results of accuracy testing and measurement examples are given.
引文
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