新型压电尺蠖精密驱动器柔性机构分析与实验研究
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摘要
压电尺蠖精密驱动器是基于尺蠖原理实现双向、大行程、高精度直线运动的精密驱动器。针对压电尺蠖驱动器存在的主要问题,本文重点针对尺蠖驱动器关键元件柔性铰链机构进行了系统而深入的研究,提出了一种新型行走型尺蠖驱动器。本文主要研究内容包括以下几个方面:
对各类尺蠖驱动器的工作原理、运动方式等进行了系统地分析和研究,针对传统行走型尺蠖驱动器加工要求高、调整配合困难的缺点,提出了利用两根平行轴作为导向机构的新型行走型尺蠖驱动器。该构型的特点便于采用调整机构对压电叠堆预紧及箝位摩擦面间隙进行调整,降低了加工要求,提高了系统可靠性。对该尺蠖驱动器的结构原理方案进行了详细的分析,同时对驱动器的导向轴、铜套和预紧机构进行了具体设计与分析,本文还分析了压电叠堆与柔性机构的耦合特性。
对尺蠖驱动器的关键元件柔性铰链机构进行分析研究,探讨了柔性铰链的精度特性。基于有限元方法建立了单切口柔性铰链旋转刚度模型。提出利用桥式柔性机构作为尺蠖驱动器中间驱动机构与箝位机构的耦合柔性机构,对桥式耦合柔性机构进行了相应的理论分析,研究了柔性铰链寄生刚度及旋转刚度精度对该类柔性机构静力学模型的影响,并建立了高精度的刚度和应力模型,采用能量法建立其固有频率模型。通过定义的误差贡献率评价指标,方便地分析了柔性铰链寄生刚度对平面柔性铰链机构刚度模型精度的影响。利用有限元方法给出根据性能要求确定柔性机构几何参数的简单有效的优化方法,并使用有限元软件ANSYS及实验方法进行了验证。建立了平行板柔性机构精确的刚度模型,对其尺寸参数进行了设计分析,并使用有限元分析方法进行了验证计算。
针对尺蠖驱动器柔性机构三维有限元模型建模复杂、计算效率低的问题,对等效梁模型进行了分析比较研究,对其建模的基础柔性铰链的三维有限元模型与实验结果进行对比分析,并对其承受剪切力的情况进行了对比分析,结果表明该模型具有较好的精度。以桥式柔性机构为例,对椭圆柔性铰链等效梁模型进行了分析比较,结果表明该模型具有广泛的适用性。论文还利用等效梁模型对桥式柔性机构进行优化仿真分析,结果表明该模型具有精度好、效率高的特点,适用于尺蠖驱动器柔性机构的参数优化设计。
为了验证上述模型,研制了尺蠖驱动器专用的驱动控制器,构建了尺蠖驱动器的实验测试系统,对尺蠖驱动器样机进行了实验研究,测试并分析了尺蠖驱动器的各项性能参数。实验证明,该尺蠖驱动器的结构方案是可行的,达到了预期的设计目标,进一步优化后可具有良好的性能,为其进一步的研究提供了依据。
本文研究的新型行走型尺蠖驱动器克服了传统行走型尺蠖驱动器的不足,在确保行程、输出力、速度及精度的同时具有易装可调、成本低廉的特点,对于推动尺蠖驱动器的实用化及产业化具有一定的积极意义。对尺蠖驱动器耦合柔性机构的理论分析方法,可用于平面柔性机构的分析研究,具有一定的通用性。
Piezoelectric inchworm precision linear actuator based on the inchworm principle achieves a bidirectional large-travel and high-precision linear motion. According to existing main problems of inchworm actuators, flexure-based compliant mechanisms as the key components of inchworm actuator are systematically and deeply studied and a new walker type inchworm actuator is proposed. The main contents of this dissertation are considered of the following parts.
Working principle and movement characteristics of various inchworm actuators are systematically analyzed and studied. According to the shortcomings of high processing requirements and adjustment difficulties of traditional walker type inchworm actuators, a new type inchworm actuator with a pair of parallel orientation axis as the orientation is proposed. This configuration facilitates the piezoelectric stack preload and the adjustment of the gap between friction surfaces, which reduces the processing requirements and improves system reliability. Structure scheme of this inchworm actuator is detailedly analyzed. Detailed design and analysis of the guiding shaft, copper sleeve and preload devices are conducted and the coupling characteristics between piezoelectric stack and complian mechanism are analyzed.
Flexure-based compliant mechanisms as the key components of inchworm actuator are systematically and deeply studied. The accuracy characteristics of flexure hinge are studied. A rotational stiffness model for single-notch circular flexure hinge is established based on finite element method. Bridge-type compliant mechanism is proposed to be as the direct coupling mechanism of piezoelectric stack in intermediate drive mechanism and clamp mechanism. The effect of parasitic stiffness equations and the accuracy of rotational stiffness equations of flexure hinges on the overall performance are comprehensive studied. Accurate stiffness and stress model and natural frequency model based on energy method are established. The index of the error contribution rate is proposed, which facilitates the study of the effect of parasitic stiffness of flexure hinge on planar compliant mechanism. A simple optimum design procedure based on finite element method is proposed which achieves optimize static and dynamic performance of the compliant mechanism by changing geometrical dimensions according to performance requirements. The optimum results are verfied by finite element software ANSYS and the test. Accurate stiffness model of parallel-plate shifting pair is derived and the design parameters are presented, which are verfied by finite element method.
According to the complex modeling and low efficiency of three-dimensional finite element model for inchworm actuator’s compliant mechanism, analysis and comparison research on the euivalent beam model is carried out. Three-dimensional finite element model for circular flexure hinge as the basis of equivalent beam model is verified by comparison with experimental results. The accuracy of Timoshenko short-beam due to shear force is verified based on finite element method. The results show that the equivalent beam model has good accuracy. The equivalent beam model for a planar compliant mechanism with elliptical flexure hinges is presented and verified, which shows that the equivalent beam model can be applied to other types of flexure hinges. The equivalent beam model is also applied for the simulation optimal design of a bridge-type compliant mechanism and the results show that this modle has good accuracy and high efficiency and is suitable for the optimal design of inchworm actuator’s complinat mechanisms.
In order to verify the above mentioned model, special drive controller for piezoelectric inchworm actuator is designed, which is used to build the test system of inchworm actuator. Experimental tests are carried out in order to test and analysis the performance parameters of the actuator. Experiments results show that the proposed actuator is feasible and has good performance after further optimized, which provides the basis for further research.
The new walker type inchworm actuator is a low-cost easy-assembly adjustable precision actuator while ensuring the travel, output force, speed and accuracy requirements and has certain positive significance for promoting the practical development and industrialization, which overcomes the shortcomings of traditional walker type inchworm actuators. The theoretical analysis method used in inchworm actuator compliant mechanism with direct coupling can also be used in planar compliant mechanism, so it has good generality
对各类尺蠖驱动器的工作原理、运动方式等进行了系统地分析和研究,针对传统行走型尺蠖驱动器加工要求高、调整配合困难的缺点,提出了利用两根平行轴作为导向机构的新型行走型尺蠖驱动器。该构型的特点便于采用调整机构对压电叠堆预紧及箝位摩擦面间隙进行调整,降低了加工要求,提高了系统可靠性。对该尺蠖驱动器的结构原理方案进行了详细的分析,同时对驱动器的导向轴、铜套和预紧机构进行了具体设计与分析,本文还分析了压电叠堆与柔性机构的耦合特性。
对尺蠖驱动器的关键元件柔性铰链机构进行分析研究,探讨了柔性铰链的精度特性。基于有限元方法建立了单切口柔性铰链旋转刚度模型。提出利用桥式柔性机构作为尺蠖驱动器中间驱动机构与箝位机构的耦合柔性机构,对桥式耦合柔性机构进行了相应的理论分析,研究了柔性铰链寄生刚度及旋转刚度精度对该类柔性机构静力学模型的影响,并建立了高精度的刚度和应力模型,采用能量法建立其固有频率模型。通过定义的误差贡献率评价指标,方便地分析了柔性铰链寄生刚度对平面柔性铰链机构刚度模型精度的影响。利用有限元方法给出根据性能要求确定柔性机构几何参数的简单有效的优化方法,并使用有限元软件ANSYS及实验方法进行了验证。建立了平行板柔性机构精确的刚度模型,对其尺寸参数进行了设计分析,并使用有限元分析方法进行了验证计算。
针对尺蠖驱动器柔性机构三维有限元模型建模复杂、计算效率低的问题,对等效梁模型进行了分析比较研究,对其建模的基础柔性铰链的三维有限元模型与实验结果进行对比分析,并对其承受剪切力的情况进行了对比分析,结果表明该模型具有较好的精度。以桥式柔性机构为例,对椭圆柔性铰链等效梁模型进行了分析比较,结果表明该模型具有广泛的适用性。论文还利用等效梁模型对桥式柔性机构进行优化仿真分析,结果表明该模型具有精度好、效率高的特点,适用于尺蠖驱动器柔性机构的参数优化设计。
为了验证上述模型,研制了尺蠖驱动器专用的驱动控制器,构建了尺蠖驱动器的实验测试系统,对尺蠖驱动器样机进行了实验研究,测试并分析了尺蠖驱动器的各项性能参数。实验证明,该尺蠖驱动器的结构方案是可行的,达到了预期的设计目标,进一步优化后可具有良好的性能,为其进一步的研究提供了依据。
本文研究的新型行走型尺蠖驱动器克服了传统行走型尺蠖驱动器的不足,在确保行程、输出力、速度及精度的同时具有易装可调、成本低廉的特点,对于推动尺蠖驱动器的实用化及产业化具有一定的积极意义。对尺蠖驱动器耦合柔性机构的理论分析方法,可用于平面柔性机构的分析研究,具有一定的通用性。
Piezoelectric inchworm precision linear actuator based on the inchworm principle achieves a bidirectional large-travel and high-precision linear motion. According to existing main problems of inchworm actuators, flexure-based compliant mechanisms as the key components of inchworm actuator are systematically and deeply studied and a new walker type inchworm actuator is proposed. The main contents of this dissertation are considered of the following parts.
Working principle and movement characteristics of various inchworm actuators are systematically analyzed and studied. According to the shortcomings of high processing requirements and adjustment difficulties of traditional walker type inchworm actuators, a new type inchworm actuator with a pair of parallel orientation axis as the orientation is proposed. This configuration facilitates the piezoelectric stack preload and the adjustment of the gap between friction surfaces, which reduces the processing requirements and improves system reliability. Structure scheme of this inchworm actuator is detailedly analyzed. Detailed design and analysis of the guiding shaft, copper sleeve and preload devices are conducted and the coupling characteristics between piezoelectric stack and complian mechanism are analyzed.
Flexure-based compliant mechanisms as the key components of inchworm actuator are systematically and deeply studied. The accuracy characteristics of flexure hinge are studied. A rotational stiffness model for single-notch circular flexure hinge is established based on finite element method. Bridge-type compliant mechanism is proposed to be as the direct coupling mechanism of piezoelectric stack in intermediate drive mechanism and clamp mechanism. The effect of parasitic stiffness equations and the accuracy of rotational stiffness equations of flexure hinges on the overall performance are comprehensive studied. Accurate stiffness and stress model and natural frequency model based on energy method are established. The index of the error contribution rate is proposed, which facilitates the study of the effect of parasitic stiffness of flexure hinge on planar compliant mechanism. A simple optimum design procedure based on finite element method is proposed which achieves optimize static and dynamic performance of the compliant mechanism by changing geometrical dimensions according to performance requirements. The optimum results are verfied by finite element software ANSYS and the test. Accurate stiffness model of parallel-plate shifting pair is derived and the design parameters are presented, which are verfied by finite element method.
According to the complex modeling and low efficiency of three-dimensional finite element model for inchworm actuator’s compliant mechanism, analysis and comparison research on the euivalent beam model is carried out. Three-dimensional finite element model for circular flexure hinge as the basis of equivalent beam model is verified by comparison with experimental results. The accuracy of Timoshenko short-beam due to shear force is verified based on finite element method. The results show that the equivalent beam model has good accuracy. The equivalent beam model for a planar compliant mechanism with elliptical flexure hinges is presented and verified, which shows that the equivalent beam model can be applied to other types of flexure hinges. The equivalent beam model is also applied for the simulation optimal design of a bridge-type compliant mechanism and the results show that this modle has good accuracy and high efficiency and is suitable for the optimal design of inchworm actuator’s complinat mechanisms.
In order to verify the above mentioned model, special drive controller for piezoelectric inchworm actuator is designed, which is used to build the test system of inchworm actuator. Experimental tests are carried out in order to test and analysis the performance parameters of the actuator. Experiments results show that the proposed actuator is feasible and has good performance after further optimized, which provides the basis for further research.
The new walker type inchworm actuator is a low-cost easy-assembly adjustable precision actuator while ensuring the travel, output force, speed and accuracy requirements and has certain positive significance for promoting the practical development and industrialization, which overcomes the shortcomings of traditional walker type inchworm actuators. The theoretical analysis method used in inchworm actuator compliant mechanism with direct coupling can also be used in planar compliant mechanism, so it has good generality
引文
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