基于DSP的行波型超声波电机驱动控制系统的研究
摘要
超声波电机(Ultrasonic Motor)是近二十年来发展起来的一种新原理电机，其原理不同于传统的电磁型电机，它是利用压电陶瓷的逆压电效应使定子的表面质点产生椭圆运动，通过定子和转子之间的摩擦力驱动转子运动。这种新型的电机与传统电磁电机相比，具有响应快、不受电磁干扰、结构紧凑、低速、大扭矩、断电自锁等优点，因而在微型机械、机器人、精密仪器、家用电器、航天器、汽车等方面显示出广泛的应用前景。
超声波电机结构确定以后，其性能往往不仅取决于电机本身，而且取决于驱动控制系统设计的好坏。本文针对行波型超声波电机的特点，以及行波型超声波电机驱动的特点和要求，在对行波型超声波电机的驱动控制系统进行了深入研究的基础上，设计了一套基于DSP的简单可行的驱动控制系统。
本论文主要工作和研究内容如下：
(1)分析行波型超声波电机的驱动控制系统。在阐述行波型超声波电机驱动控制原理的基础上，对几种典型的行波型超声波电机的驱动控制系统进行了分析，对它们的优势和存在的问题进行了分析。
(2)论述了方波驱动的原理和其作为行波型超声波电机驱动信号的可行性，并进行仿真分析。在对行波型超声波电机等效电路分析的基础上，讨论了方波作为驱动信号的优势，并对其进行了仿真计算。
(3)设计了一套行波型超声波电机驱动控制系统电路。采用DSP作为驱动控制的主要器件，方波作为驱动信号，简单的LC谐振驱动方式。实验结果表明，这套驱动控制系统基本满足了设计的要求，结构简单，调速系统响应速度比较快，调节连续平滑。
Being a sort of new principle micromotor in the fronitier of science.the Ultrosonic Motor(USM) is developed at recently twenty years.Utilizing the stator surface particle elliptical motion excited by piezoceeramics,the USM is drived by friction force between the stator and rotor.Compared with the conventional electromagnetic motor,the ultrasonic motor has the following features:high speed,high holding torque when power is off and so on.Because of it's characteristics,the ultrasonic motor has obtained some widespread application in robots, precise instrument, house electronical appliance, sapceecraft automobile and micromechanism.
When the Travelling Wave Ultrosonic Motor(TUSM)'s structure is determinated,it's peoformance will be lie on drive and control strategy. According to TUSM's characteristic and it's driving theory, a kind of USM's driver and control strategy is designed in this paper, which is based on Digital Singal Processor(DSP).
The main work accomplished is summarized as follows.
(1) Analyze different TUSM's drive and control sysytem.The different performance of the TUSM's drive and control system are compared in this paper..It analyzes every system good qualities and shortage.
(2) Discuss the square wave as drive signal and give simulation result.Based on the analysis of the TUSM's equivalent circuit, it's advantageis is proved and confirmed by simulate.
(3) Design a TUSM's drive and control experimental device.It use DSP as the main element and squaresignal and syntonic drive mode.Form the experiment,the system meet the TUSM's drive and control.Speed has fast response.
超声波电机结构确定以后，其性能往往不仅取决于电机本身，而且取决于驱动控制系统设计的好坏。本文针对行波型超声波电机的特点，以及行波型超声波电机驱动的特点和要求，在对行波型超声波电机的驱动控制系统进行了深入研究的基础上，设计了一套基于DSP的简单可行的驱动控制系统。
本论文主要工作和研究内容如下：
(1)分析行波型超声波电机的驱动控制系统。在阐述行波型超声波电机驱动控制原理的基础上，对几种典型的行波型超声波电机的驱动控制系统进行了分析，对它们的优势和存在的问题进行了分析。
(2)论述了方波驱动的原理和其作为行波型超声波电机驱动信号的可行性，并进行仿真分析。在对行波型超声波电机等效电路分析的基础上，讨论了方波作为驱动信号的优势，并对其进行了仿真计算。
(3)设计了一套行波型超声波电机驱动控制系统电路。采用DSP作为驱动控制的主要器件，方波作为驱动信号，简单的LC谐振驱动方式。实验结果表明，这套驱动控制系统基本满足了设计的要求，结构简单，调速系统响应速度比较快，调节连续平滑。
Being a sort of new principle micromotor in the fronitier of science.the Ultrosonic Motor(USM) is developed at recently twenty years.Utilizing the stator surface particle elliptical motion excited by piezoceeramics,the USM is drived by friction force between the stator and rotor.Compared with the conventional electromagnetic motor,the ultrasonic motor has the following features:high speed,high holding torque when power is off and so on.Because of it's characteristics,the ultrasonic motor has obtained some widespread application in robots, precise instrument, house electronical appliance, sapceecraft automobile and micromechanism.
When the Travelling Wave Ultrosonic Motor(TUSM)'s structure is determinated,it's peoformance will be lie on drive and control strategy. According to TUSM's characteristic and it's driving theory, a kind of USM's driver and control strategy is designed in this paper, which is based on Digital Singal Processor(DSP).
The main work accomplished is summarized as follows.
(1) Analyze different TUSM's drive and control sysytem.The different performance of the TUSM's drive and control system are compared in this paper..It analyzes every system good qualities and shortage.
(2) Discuss the square wave as drive signal and give simulation result.Based on the analysis of the TUSM's equivalent circuit, it's advantageis is proved and confirmed by simulate.
(3) Design a TUSM's drive and control experimental device.It use DSP as the main element and squaresignal and syntonic drive mode.Form the experiment,the system meet the TUSM's drive and control.Speed has fast response.
引文
1．陈永校，郭吉丰编著．超声波是电动机．浙江大学出版社，1994．
2．杨志刚，郑学伦译．超声波马达理论与应用．上海科学技术出版社，1998．
3. V. Snitka, V. Mizariene, D. Zukauskas. The Status of Ultrasonic Motors in the Former Soviet Union. Ultrasonics. 1996, 34: 247-257.
4. M. Fleischer, D. Stein, H. Meixner. Novel Ultrasonic Motors with Mono and Bimodal Drives. Sensor and Actuator. 1990, A21-A23: 357-361.
5. Maxomilian Fleischer, Dieter Stein, Hans Meixner. New Type of Piezoeletric Ultrasonic Motor. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 1989, 36(6): 614-619.
6．刘锦波．超声波电机的数学模型及其驱动系统的研究．浙江大学博士学位论文，1998．
7．西崛贤司，大熊繁，小幡洋久．超音波指驱动特性．日本机械学会论文集．1994，60：154-159．
8．黑泽実，上羽贞行．进行波型超音波效率．日本音响志学会44卷1号．1989，40-45
9. T. Kamano, T. Suzuki, T. Kuzuhara. Adaptive Feedforward Control for Positioning System with Progressive Wave Type Ultrasonic Motor. Electric Machines and Power System. 1995, 23: 583-595.
10．加藤秀雄，计金娜，花岡忠昭，山口致男．超音波用自动调合整装置．精密工学会志．1993，59(11)：1877-1880．
11. D. J. Harrison, C. Skinner, S.B. Cheng, et al. Transducers'99, the International Conference on Solid—state Sensors and Actuators. Sendai Japan: 1999.12.
12．刘维东，曹光宇，赵万生．超声马达模糊控制系统的理论研究．压电与声光．1998，20(4)：272-275．
13．泉野有司，中岡睦雄．进行波型超音波回転低減考虑速度制御．电子情报通信学会论文志．1997，J80A(10)：1728-1735．
14. F. J. Lin, W. J. Hwang, R. J. Wai. Ultrasonic Motor Servo-Drive with Online Trained Neural-Network Model-Following Controller. IEE Proceedings of Electronic Power Application. 1998, 145(2): 105-110.
15. Tomonobu Senjyu, Hiroshi Miyazato, Satoru Yokoda, Katsumi Uezato. Speed Control of Ultrasonic Motors Using Neural Network. IEEE Transactions on Power Electronics. 1998, 13(3): 381-387.
16. Yuji Izuno, Ryuzo Takeda, Mutsuo Nakaoka. New Fuzzy Reasoning-Based High-Performance Speed/Position Servo Control Schemes Incorporating Ultrasonic Motor. IEEE Transactions on Industry Applications. 1992, 28(3): 613-618;
17. Tomonubu Senjyu, Katsumi Uezato, Hiroshi Miyazato. Adjustable Speed Control of Ultrasonic Motors by Adaptive Control. IEEE Transactions on Power Electronics. 1995, 10(5): 532-538.
18. Tomonubu Senjyu, Katsumi Uezato, Hiroshi Miyazato. Adjustable Speed Control of Ultrasonic Motors by Adaptive Control. IEEE Transactions on Power Electronics. 1995,10(5): 532-538
19. Hagood N. W., McFarland A.J. Modeling of a Piezoelectric Rotary Ultrasonic Motor. IEEE Transactrions on Ultrasonics, Ferroelectrics and Frequency Control. 1995, 42(2):
210-231.
20. Hagood N. W., McFarland A.J. Modeling of a Piezoelectric Rotary Ultrasonic Motor. SPIE Proc. Smart Structures and Integrated Systems. 1994, 2190: 814-828.
21. McFarland A.J. Development of a Rotary Ultrasonic Motor for Spacecraft Applications. Department of Aeronautics and Astronautics (S. M. Thesis) M. I.T., 1995.
22．褚祥诚，陈维山，陈在礼．超声波马达在美国的发展．压电与声光．1999，21(1)：37-40．
23．褚祥诚，贺思源，陈维山，陈在礼．一种新型固态摩擦驱动器．压电与声光．1998，20(1)：45-49．
24. Hirose S. Asmall Non-Contact Ultrasonic Motor. 1993 IEEE Ultrasonics Symposium. 1993: 50-54.
25. Yamayoshi Y, Hirose S. Ultrasonic Motor Not Using Mechanical Friction Force. International Journal of Applied Electromagnetics in Materials. 1992, (3): 179-182.
26. Yamazaki T. Trial Construction of a Non-Contact Ultrasonic Motor with an Ultrasonically Levitated Rotor. Jpn. J. Appl. Phys. 1996, 35(5B): 3286-3288.
27. Junhui Hu, Tohgo Yamazaki, Kentaro Nakamura, Sadauki Ueha. Analyses of an Ultrasonic Motor Driving Fluid Directly. Jpn. J. Appl. Phys. 1995, 34(5B): 2702-2706.
28．上羽贞行．回转型超音波日本音响会志。Vol．44．No．7．pp．519-522，1988．
29．上羽贞行，超音波技术基础。压电特集，NO．10．pp13-19，1991
30. S. Ueha. Present Status of ultrasonic motors IEEE Ultrasonic Symposium, pp. 749-753,1989
31. Nalamura K. A Trial construction of an Ultrasonic Motor with Fluid Coupling. Jpn. J. Appl. Phys. 1990, 29(1): 160-161.
32. Jiromaru Tsujino, Rye Suzuki, Hideyuki Yasojima. Load Characteristics of Ultrasonic Motor Using a Longitudinal-Torsional Vibration Converter. 1996 IEEE Ultrasonics Symposium. 1, 1996: 377-382.
33．李华峰，辜承林，“超声波电动机控制技术进展” 微特电机，VOL 2，pp42—44
34. Tomonobu Senju "Adjustable Speed Control of Ultrasonic Motors by Adaptive Control" Ieee Transactions On Power Electronic, VOL10, NO. 5, pp532-538, SEP, 1995
35. Tomonobu Senju "Speed Control of Ultrasonic Motors Using Neural Networ" Ieee Transactions On Power Electronic, VOL13, NO. 3, MAY 1995
36. P. VANHEEGHE" Control of an Ultrasonic Motor with a Digital Signal Processor" 0-7803-4053-1/97,1997, IEEE
37. Tomonobu Senju "Adjustable Speed Control of Ultrasonic Motors by Adaptive Control" Ieee Transactions On Power Electronic, VOL 10, NO. 5, pp532-538, SEP,1995.
38. Hiroshi Miyazato "Precise Speed Control of Ultrasonic Motors With Repetitive Control" Ieee Transactions On Power Electronic, pp165-169.
39. Tomonobu Senju" Speed Control of Ultrasonic Motors Using Neural Network" Ieee Transactions On Power Electronic, VOL13, NO.3, MAY 1995
40．刘锦波，陈永校，胡建宗；“行波型超声波电机驱动系统的设计与计算”，微特电机，VOL6，1998
41．褚祥诚，陈维山，陈在礼，“行波型超声波电机及其速度控制特性的研究”，微特电机，1998
42. Jurgen mass "High Performance Speed Control for Ultrasonic Motors" Proceeding of the 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics September 19-23 1999 Atlanta USA
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2．杨志刚，郑学伦译．超声波马达理论与应用．上海科学技术出版社，1998．
3. V. Snitka, V. Mizariene, D. Zukauskas. The Status of Ultrasonic Motors in the Former Soviet Union. Ultrasonics. 1996, 34: 247-257.
4. M. Fleischer, D. Stein, H. Meixner. Novel Ultrasonic Motors with Mono and Bimodal Drives. Sensor and Actuator. 1990, A21-A23: 357-361.
5. Maxomilian Fleischer, Dieter Stein, Hans Meixner. New Type of Piezoeletric Ultrasonic Motor. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 1989, 36(6): 614-619.
6．刘锦波．超声波电机的数学模型及其驱动系统的研究．浙江大学博士学位论文，1998．
7．西崛贤司，大熊繁，小幡洋久．超音波指驱动特性．日本机械学会论文集．1994，60：154-159．
8．黑泽実，上羽贞行．进行波型超音波效率．日本音响志学会44卷1号．1989，40-45
9. T. Kamano, T. Suzuki, T. Kuzuhara. Adaptive Feedforward Control for Positioning System with Progressive Wave Type Ultrasonic Motor. Electric Machines and Power System. 1995, 23: 583-595.
10．加藤秀雄，计金娜，花岡忠昭，山口致男．超音波用自动调合整装置．精密工学会志．1993，59(11)：1877-1880．
11. D. J. Harrison, C. Skinner, S.B. Cheng, et al. Transducers'99, the International Conference on Solid—state Sensors and Actuators. Sendai Japan: 1999.12.
12．刘维东，曹光宇，赵万生．超声马达模糊控制系统的理论研究．压电与声光．1998，20(4)：272-275．
13．泉野有司，中岡睦雄．进行波型超音波回転低減考虑速度制御．电子情报通信学会论文志．1997，J80A(10)：1728-1735．
14. F. J. Lin, W. J. Hwang, R. J. Wai. Ultrasonic Motor Servo-Drive with Online Trained Neural-Network Model-Following Controller. IEE Proceedings of Electronic Power Application. 1998, 145(2): 105-110.
15. Tomonobu Senjyu, Hiroshi Miyazato, Satoru Yokoda, Katsumi Uezato. Speed Control of Ultrasonic Motors Using Neural Network. IEEE Transactions on Power Electronics. 1998, 13(3): 381-387.
16. Yuji Izuno, Ryuzo Takeda, Mutsuo Nakaoka. New Fuzzy Reasoning-Based High-Performance Speed/Position Servo Control Schemes Incorporating Ultrasonic Motor. IEEE Transactions on Industry Applications. 1992, 28(3): 613-618;
17. Tomonubu Senjyu, Katsumi Uezato, Hiroshi Miyazato. Adjustable Speed Control of Ultrasonic Motors by Adaptive Control. IEEE Transactions on Power Electronics. 1995, 10(5): 532-538.
18. Tomonubu Senjyu, Katsumi Uezato, Hiroshi Miyazato. Adjustable Speed Control of Ultrasonic Motors by Adaptive Control. IEEE Transactions on Power Electronics. 1995,10(5): 532-538
19. Hagood N. W., McFarland A.J. Modeling of a Piezoelectric Rotary Ultrasonic Motor. IEEE Transactrions on Ultrasonics, Ferroelectrics and Frequency Control. 1995, 42(2):
210-231.
20. Hagood N. W., McFarland A.J. Modeling of a Piezoelectric Rotary Ultrasonic Motor. SPIE Proc. Smart Structures and Integrated Systems. 1994, 2190: 814-828.
21. McFarland A.J. Development of a Rotary Ultrasonic Motor for Spacecraft Applications. Department of Aeronautics and Astronautics (S. M. Thesis) M. I.T., 1995.
22．褚祥诚，陈维山，陈在礼．超声波马达在美国的发展．压电与声光．1999，21(1)：37-40．
23．褚祥诚，贺思源，陈维山，陈在礼．一种新型固态摩擦驱动器．压电与声光．1998，20(1)：45-49．
24. Hirose S. Asmall Non-Contact Ultrasonic Motor. 1993 IEEE Ultrasonics Symposium. 1993: 50-54.
25. Yamayoshi Y, Hirose S. Ultrasonic Motor Not Using Mechanical Friction Force. International Journal of Applied Electromagnetics in Materials. 1992, (3): 179-182.
26. Yamazaki T. Trial Construction of a Non-Contact Ultrasonic Motor with an Ultrasonically Levitated Rotor. Jpn. J. Appl. Phys. 1996, 35(5B): 3286-3288.
27. Junhui Hu, Tohgo Yamazaki, Kentaro Nakamura, Sadauki Ueha. Analyses of an Ultrasonic Motor Driving Fluid Directly. Jpn. J. Appl. Phys. 1995, 34(5B): 2702-2706.
28．上羽贞行．回转型超音波日本音响会志。Vol．44．No．7．pp．519-522，1988．
29．上羽贞行，超音波技术基础。压电特集，NO．10．pp13-19，1991
30. S. Ueha. Present Status of ultrasonic motors IEEE Ultrasonic Symposium, pp. 749-753,1989
31. Nalamura K. A Trial construction of an Ultrasonic Motor with Fluid Coupling. Jpn. J. Appl. Phys. 1990, 29(1): 160-161.
32. Jiromaru Tsujino, Rye Suzuki, Hideyuki Yasojima. Load Characteristics of Ultrasonic Motor Using a Longitudinal-Torsional Vibration Converter. 1996 IEEE Ultrasonics Symposium. 1, 1996: 377-382.
33．李华峰，辜承林，“超声波电动机控制技术进展” 微特电机，VOL 2，pp42—44
34. Tomonobu Senju "Adjustable Speed Control of Ultrasonic Motors by Adaptive Control" Ieee Transactions On Power Electronic, VOL10, NO. 5, pp532-538, SEP, 1995
35. Tomonobu Senju "Speed Control of Ultrasonic Motors Using Neural Networ" Ieee Transactions On Power Electronic, VOL13, NO. 3, MAY 1995
36. P. VANHEEGHE" Control of an Ultrasonic Motor with a Digital Signal Processor" 0-7803-4053-1/97,1997, IEEE
37. Tomonobu Senju "Adjustable Speed Control of Ultrasonic Motors by Adaptive Control" Ieee Transactions On Power Electronic, VOL 10, NO. 5, pp532-538, SEP,1995.
38. Hiroshi Miyazato "Precise Speed Control of Ultrasonic Motors With Repetitive Control" Ieee Transactions On Power Electronic, pp165-169.
39. Tomonobu Senju" Speed Control of Ultrasonic Motors Using Neural Network" Ieee Transactions On Power Electronic, VOL13, NO.3, MAY 1995
40．刘锦波，陈永校，胡建宗；“行波型超声波电机驱动系统的设计与计算”，微特电机，VOL6，1998
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