基于IC测试系统数据采集的软硬件设计
摘要
晶圆片测试是指对于晶圆片上的每一个芯片进行逐个测试。这种测试是在晶圆经过复杂的涂胶、光刻、参杂等过程生产出成品的芯片后的首次测试。晶圆片测试是通过使用测试机和探针台所组成的测试系统完成的。测试机和探针台这些测试设备的发展是随着芯片生产工艺的发展而来的。随着芯片制造技术的发展,晶圆片的尺寸越来越大,芯片的越来越小,用于晶圆测试的测试仪器也随着更新换代。现阶段我国测试行业发展迅速,但是大多数测试公司使用的都是低端或者是老旧的测试设备。在实际的生产过程中产生了很多问题和麻烦。本文是结合我国测试产业现状,以使用在生产第一线的晶圆测试设备为基础,以解决生产过程中的实际问题为目的的。
本文通过分析相关型号的测试机和探针台,确定了在测试机和探针台之间增加中转PC的解决方案。通过在Visual Studio 2008开发平台使用C++语言开发软件程序,使得在中转PC上能够实现复原测试系统的原始通信,生成统一格式Wafermap文件并且能够统一管理,实现定点回测功能以及脱机打点功能。
本文是对于老旧测试设备升级的一种尝试,对于我国现阶段的测试产业的发展有着积极的意义。通过我们的努力,本文所介绍的软硬件系统已经通过了实际生产的测试。这个对于测试系统的进一步改造和发展也打下了良好的基础。
Wafer test is tested every die on the wafer for one by one.This test is the first test after the wafer was coated, photolithographied, dopped finishing chip output.Wafer test is completed by using of test system making use of tester and prober. Chip production process led to the development of the tester and the development of prober. As chip manufacturing technology, wafer size increases, less and less extreme chip, test equipment for wafer testing also with the replacement. The rapid development of the industry at this stage of testing, but most tests are used by the company or the old low-end test equipment. In the actual production process produces a lot of problems and troubles. This paper is a combination of status of the test industry to use in the production of the first line of testing equipment based on the production process to solve practical problems for the purpose.
This paper identified solution that increase a transit PC between the prober and the tester, by analyzing the related types of tester and related prober. By using the C + + language and Visual Studio 2008 software development platform, making the transfer can be achieved on a PC recovery of the original communication test system to generate a unified file format and can Wafermap unified management, and point back to the test functions and features offline RBI.
This paper is an attempt to upgrade performance of the old test equipment, for the present stage of the testing industry has the positive meaning. Through our efforts, this paper describes the hardware and software system has been tested by the actual production. The test system for the further reconstruction and development laid a good foundation
本文通过分析相关型号的测试机和探针台,确定了在测试机和探针台之间增加中转PC的解决方案。通过在Visual Studio 2008开发平台使用C++语言开发软件程序,使得在中转PC上能够实现复原测试系统的原始通信,生成统一格式Wafermap文件并且能够统一管理,实现定点回测功能以及脱机打点功能。
本文是对于老旧测试设备升级的一种尝试,对于我国现阶段的测试产业的发展有着积极的意义。通过我们的努力,本文所介绍的软硬件系统已经通过了实际生产的测试。这个对于测试系统的进一步改造和发展也打下了良好的基础。
Wafer test is tested every die on the wafer for one by one.This test is the first test after the wafer was coated, photolithographied, dopped finishing chip output.Wafer test is completed by using of test system making use of tester and prober. Chip production process led to the development of the tester and the development of prober. As chip manufacturing technology, wafer size increases, less and less extreme chip, test equipment for wafer testing also with the replacement. The rapid development of the industry at this stage of testing, but most tests are used by the company or the old low-end test equipment. In the actual production process produces a lot of problems and troubles. This paper is a combination of status of the test industry to use in the production of the first line of testing equipment based on the production process to solve practical problems for the purpose.
This paper identified solution that increase a transit PC between the prober and the tester, by analyzing the related types of tester and related prober. By using the C + + language and Visual Studio 2008 software development platform, making the transfer can be achieved on a PC recovery of the original communication test system to generate a unified file format and can Wafermap unified management, and point back to the test functions and features offline RBI.
This paper is an attempt to upgrade performance of the old test equipment, for the present stage of the testing industry has the positive meaning. Through our efforts, this paper describes the hardware and software system has been tested by the actual production. The test system for the further reconstruction and development laid a good foundation
引文
[1]赵树武,朱践知译.芯片制造[M].北京:电子工业出版社, 2003, 47-49
[2] R.Kopp,Kopp Semiconductor Engineering, September 1996.
[3]机电在线网.http://www.jdol.com.cn/jdnews/33927.html
[4]罗士凯.晶圆测针技术之异常问题分析与研究: [硕士学位论文],上海:上海交通大学, 2007
[5]日本VTT公司生产V777测试机产品手册.VTT公司
[6]中国台湾德律公司生产TR6010测试机产品手册.台湾德律公司
[7]串口通信通信协议.美国电子工业协会(EIA).1969.
[8]龚运新,胡长胜主编.单片机实用技术教程(修订版).北京.北京师范大学出版社
[9]李朝青编著.单片机原理及接口技术(建明修订版).北京.北京航空航天大学出版社.
[10]佟云峰著.单片机原理及应用.北京.机械工业出版社
[11]龚运新,罗惠敏,彭建军编著.单片机接口C语言开发技术.北京.清华大学出版社.2009
[12]张亚峰. Keil C51软件使用方法. TOOLS AND SKILLS(制作工具).2011.
[13] Richard Wilton, Microsoft Windows 3 Developer's Workshop, Microsoft Press,
[14]张红军. C++Builder API函数在计算机与日普变频器(RS232)串行通信控制中的应用.自动化技术与应用,2010 ,29 ( 6 ).
[15]范逸之,江文贤,陈立元.C++Builder与RS-232串行通信控制[M].北京:清华大学出版社.2002,6.
[16]郑明,郑世伟.C++Builder与Windows API经典范例[M].北京:清华大学出版社.2002,8.
[17]吕凤翥著. C++语言简明教程.北京.清华大学出版社.2007
[18] IEEE Std 488.2.IEEE standard digital interface for programmable instrumentation -part2:codes,formats,protocols,and common commands for use with IEEE Std 488.1-1987[S].1992.
[19]信息产业部电子第四十一研究所. AV1486系列微波信号发生器用户手册[ Z]. 2002.
[20]赵大伟,康尔良. AX5488 GPIB通信卡在电机测试中的应用[ J] .电机技术.2001. ( 3) .
[21]黄崧,储飞黄.GPIB总线及接口设计.国外电子测量技术2004年增刊.2004
[22]马丁,马浩歌,耿东华. GPIB接口及应用实例.开封大学学报.2009.(3).
[23] MSDN中关于System.Windows.Forms类的介绍.http://msdn.microsoft.com/zh-cn/library/k50ex0x9(v=VS.90).aspx
[24]黄维通编著.Visual C++面向对象与可视化程序设计(第2版).北京:清华大学出版社,2006,
[25]胡兆华,王厚军.圆片级IC测试中脱机打点的一种实现方法.仪器仪表学报,2005
[2] R.Kopp,Kopp Semiconductor Engineering, September 1996.
[3]机电在线网.http://www.jdol.com.cn/jdnews/33927.html
[4]罗士凯.晶圆测针技术之异常问题分析与研究: [硕士学位论文],上海:上海交通大学, 2007
[5]日本VTT公司生产V777测试机产品手册.VTT公司
[6]中国台湾德律公司生产TR6010测试机产品手册.台湾德律公司
[7]串口通信通信协议.美国电子工业协会(EIA).1969.
[8]龚运新,胡长胜主编.单片机实用技术教程(修订版).北京.北京师范大学出版社
[9]李朝青编著.单片机原理及接口技术(建明修订版).北京.北京航空航天大学出版社.
[10]佟云峰著.单片机原理及应用.北京.机械工业出版社
[11]龚运新,罗惠敏,彭建军编著.单片机接口C语言开发技术.北京.清华大学出版社.2009
[12]张亚峰. Keil C51软件使用方法. TOOLS AND SKILLS(制作工具).2011.
[13] Richard Wilton, Microsoft Windows 3 Developer's Workshop, Microsoft Press,
[14]张红军. C++Builder API函数在计算机与日普变频器(RS232)串行通信控制中的应用.自动化技术与应用,2010 ,29 ( 6 ).
[15]范逸之,江文贤,陈立元.C++Builder与RS-232串行通信控制[M].北京:清华大学出版社.2002,6.
[16]郑明,郑世伟.C++Builder与Windows API经典范例[M].北京:清华大学出版社.2002,8.
[17]吕凤翥著. C++语言简明教程.北京.清华大学出版社.2007
[18] IEEE Std 488.2.IEEE standard digital interface for programmable instrumentation -part2:codes,formats,protocols,and common commands for use with IEEE Std 488.1-1987[S].1992.
[19]信息产业部电子第四十一研究所. AV1486系列微波信号发生器用户手册[ Z]. 2002.
[20]赵大伟,康尔良. AX5488 GPIB通信卡在电机测试中的应用[ J] .电机技术.2001. ( 3) .
[21]黄崧,储飞黄.GPIB总线及接口设计.国外电子测量技术2004年增刊.2004
[22]马丁,马浩歌,耿东华. GPIB接口及应用实例.开封大学学报.2009.(3).
[23] MSDN中关于System.Windows.Forms类的介绍.http://msdn.microsoft.com/zh-cn/library/k50ex0x9(v=VS.90).aspx
[24]黄维通编著.Visual C++面向对象与可视化程序设计(第2版).北京:清华大学出版社,2006,
[25]胡兆华,王厚军.圆片级IC测试中脱机打点的一种实现方法.仪器仪表学报,2005