激光共聚焦信号处理及控制技术的研究
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摘要
产品的小型化和精密化,使得人们对表面轮廓形貌测量的要求日益迫切。共聚焦显微技术有效地解决了高分辨率、非接触式测量的问题,能够实现光学层析,并通过计算机合成三维立体图像,从而成为医学、生物学以及工业等领域的重要工具和研究手段。
课题“激光共聚焦信号采集及控制技术的研究”是黑龙江省科技攻关项目“多光针表面形貌测量系统”中的一个子课题,主要目标是实现该系统的信号采集和控制技术,并进行了深入的研究。
首先对差动激光共聚焦测量系统的原理进行了详细的介绍。设计了差动共焦光电信号探测系统、精密位移测量系统、显微视觉测量模块的信号采集及控制系统。
其次对系统进行软件的整体设计,整个软件分为:共焦测量模块、精密视觉位移测量模块、显微视觉模块。共焦测量模块主要用于采集聚焦误差信号的输出值,利用输出值判定驱动物镜移动,进行大小两种量程的选择测量;精密视觉位移测量模块主要是将物镜的移动在线阵CCD上造成的像素位置变动转化为物镜实际的位移量;显微视觉模块主要是对显微视觉系统拍摄序列图像并进行处理。
最后通过实验,对光电转换电路进行了调试,对信号进行了数据采集,对精密位移测量系统和显微系统进行了标定。结果表明该系统工作性能良好。
The analysis of optical tomography and reconstructing three-dimensional Image by computers makes confocal technique an important research method or instrument in medicine, biology, semiconductor industry, etc.
The project "Research on Laser Confocal Signal Acquisition and Control Technology" is a sub-topic of key scientific and technological project of Heilongjiang Province, titled "Multi-optical Probe surface topography Measurement System ". This paper made research and design on signal acquisition and control technology of the confocal optical probe, precision vision displacement measurement and the micro-vision detection module.
Firstly, this paper explains the measurement principle of differential confocal optical probe measurement system particularly, provides the general design of laser confocal measurement system and focus on carrying out circuit and mechanical structure design of two sensor systems: photoelectric conversion processing systems, precision visual displacement measuring system.
Secondly,Then carries on software's overall design to the system,the software is divided into:confocal measurement module, precise visual displacement measurement module, microscopic visual module. The confocal measurement module mainly uses in acquisit the value of the focusing error signal, then, using the value to decide whether to move the lens, to chose from the two kinds of measuring ranges ;The precise visual displacement measurement module is mainly the pixel position change which created by the lens' displacement value as on linear array CCD, transforms to the reality high value; Micro-vision module is mainly to do the sequence image processing taken by the micro-vision system, and to make three-dimensional reconstruction combined with the height information of the image.
Finally, Calibration Test and Ratin Test are carried out on Micro-Visual System and Precision Displacement Measurement System through the final simulation experiments, along with the data collection experiment .The results show that the system has a good performance.
课题“激光共聚焦信号采集及控制技术的研究”是黑龙江省科技攻关项目“多光针表面形貌测量系统”中的一个子课题,主要目标是实现该系统的信号采集和控制技术,并进行了深入的研究。
首先对差动激光共聚焦测量系统的原理进行了详细的介绍。设计了差动共焦光电信号探测系统、精密位移测量系统、显微视觉测量模块的信号采集及控制系统。
其次对系统进行软件的整体设计,整个软件分为:共焦测量模块、精密视觉位移测量模块、显微视觉模块。共焦测量模块主要用于采集聚焦误差信号的输出值,利用输出值判定驱动物镜移动,进行大小两种量程的选择测量;精密视觉位移测量模块主要是将物镜的移动在线阵CCD上造成的像素位置变动转化为物镜实际的位移量;显微视觉模块主要是对显微视觉系统拍摄序列图像并进行处理。
最后通过实验,对光电转换电路进行了调试,对信号进行了数据采集,对精密位移测量系统和显微系统进行了标定。结果表明该系统工作性能良好。
The analysis of optical tomography and reconstructing three-dimensional Image by computers makes confocal technique an important research method or instrument in medicine, biology, semiconductor industry, etc.
The project "Research on Laser Confocal Signal Acquisition and Control Technology" is a sub-topic of key scientific and technological project of Heilongjiang Province, titled "Multi-optical Probe surface topography Measurement System ". This paper made research and design on signal acquisition and control technology of the confocal optical probe, precision vision displacement measurement and the micro-vision detection module.
Firstly, this paper explains the measurement principle of differential confocal optical probe measurement system particularly, provides the general design of laser confocal measurement system and focus on carrying out circuit and mechanical structure design of two sensor systems: photoelectric conversion processing systems, precision visual displacement measuring system.
Secondly,Then carries on software's overall design to the system,the software is divided into:confocal measurement module, precise visual displacement measurement module, microscopic visual module. The confocal measurement module mainly uses in acquisit the value of the focusing error signal, then, using the value to decide whether to move the lens, to chose from the two kinds of measuring ranges ;The precise visual displacement measurement module is mainly the pixel position change which created by the lens' displacement value as on linear array CCD, transforms to the reality high value; Micro-vision module is mainly to do the sequence image processing taken by the micro-vision system, and to make three-dimensional reconstruction combined with the height information of the image.
Finally, Calibration Test and Ratin Test are carried out on Micro-Visual System and Precision Displacement Measurement System through the final simulation experiments, along with the data collection experiment .The results show that the system has a good performance.
引文
1蒋剑峰,何永辉,赵万生.表面三维微观形貌检测及其发展.中国机械工程. 1999,10(12):1418~1420
2惠梅.表面微观形貌测量中相移干涉术的算法与实验研究.中国科学院西安光学精密机械研究所博士学位论文. 2001: 3-13
3 T.Wilson and C.R.J.Shepperd. Theory and Practice of Scanning Optical Microscopy. Academic in Press.London.1984:12~36
4 C.J.R.Sheppard and T.Wilson. Depth of Field in the Scanning Microscopy. Opt.Lett.1978,3(3):115~117
5 T.Wilson and C.J.R.Sheppard. Imaging and Super-resolution in the Harmonic Microscope.Opt.Acta.1979,(26):761~770
6周明宝,林大键等.微结构表面形貌的测量.光学精密工程.1999, 7(3):8-9
7 Minsky M, Microscopy apparatus, US Patent:3013467, 1961
8高兴宇.线结构光共焦扫描显微系统的研究.桂林电子科技大学硕士论文.2006
9王富生,谭久彬.表面微观轮廓的高分辨率光学测量方法.光学精密工程. 2000,8(4):309~314
10 Lisong Yang, Guiying Wang, et al. Surface Profilometry with a Fibre OpticalConfocal Scanning Microscope. Meas. Sci. Technol.2000,11:1786-1791
11葛华勇,任秋实等.内窥式共焦显微术.激光生物学报.2008,17(4):535-538
12 C.J.R.Sheppard, M.Gu. Optical Transfer Function Analysis for Two-photon4Pi Confocal Fluorescence Microscopy. Optics Communications,1995, 114 (1): 45-49
13柳忠尧.用于掩模板表面形貌测量的外差干涉显微系统的研究.清华大学博士论文. 2004, 6
14 H-J.Jordan, M.Wegner, H.Tiziani. Highly Accurate Non-contact Characteri- zation of Engineering Surfaces Using Confocal Microscopy. Meas.Sci.Techn. 1998, 9:1142-1151
15 M.顾.共焦显微术的三维成像原理(王桂英,等).北京:新时代出版社.2000, l-13
16 Paul C. Lin, Pang-Chen Sun, Lijun Zhu et.al.. Single-shot Depth-sectionImaging Through Chromatic Slit-scan Confocal Microscopy. Applied Optics, 1998, 37(10):6764-6770
17 H. J. Tiziani, R. Achi, R. N. Krmen et al. Theoretical analysis of confocal microscopy with microlenses. Appl.Opt.1996, 35(1):120-125
18孔兵,王昭,谭玉山.利用共焦成像原理实现微米级的三维轮廓仪.西安交通大学学报. 2001, 35(11):1151~1154
19王永红,余晓芬,黄其圣等.基于差动共焦的并行三维形貌检测系统的研究.中国科学技术大学学报, 2003, 33(4):415~420
20田维坚,陈波,郭履容等.并行共焦检测方法的理论分析.光学学报. 1999, 19(10):1381~1385
21 M. Neil, R. Juskaitis, et. al. Optimized Pupil-plane Filters for Confocal Microscope Point-spread Function Engineering. Opt.Lett.2000,25:245-47
22 Zhao Weiqian, Tan Jiubin, Qiu Lirong. SABCMS, A New Approach to HigherLateral Resolution of Laser Probe Measurement. Sensors and Actors A .2005,120 (1):17-25
23邱丽荣.超分辨光瞳滤波理论及其共焦传感技术研究.哈尔滨工业大学博士论文. 2005: 89-116
24 Lee.C.H, Wang.J. Optical Measurement of Viscoelastic and Biochemical Responses of Living Cells to Mechanical Perturbation. Opt. Lett.. 1998,23:307-309.
25 Tony Wilson, A.R.Carlini. Effect of Detector Displacement in Confocal Imaging Systems. Appl. Opt.. 1988,27(18):3791-3799.
26 M.Gu.共焦显微术的三维成像原理.新时代出版社,2000:112-123.
27王永红.基于全场并行共焦的检测技术与系统研究.合肥工业大学博士生学位论文.2004:79-81.
28王富生.基于差动共焦显微探测原理的三维测量技术研究.哈尔滨工业大学博士生学位论文.2001:66-74.
29李海燕.共焦显微扫描探测技术的发展.光学技术. 2008(34):94-97.(EI: 081011137266)
30李远明,陈文涛.微弱光信号前置放大电路设计.2007,9(8):51-53.
31 Behzad Razavi. Design of Integrated Circuits for Optical Communications. Mc Graw-Hill Higher Education, 2003:109-121.
32何晓昀.磨粒表面形貌分析与三维重构.武汉理工大学硕士论文.2005
33黄琳.激光共焦扫描显微镜系统中显微图像处理的研究.南京理工大学博士论文.2007,7
34章毓晋.图像工程:图像处理和分析.北京:清华大学出版社.2000
35 X. Y. Xu, E. L. Miller. Adaptive Two-pass Median Filter to Remove Impulsive Noise Image Processing. Proceedings of the First International Conference on Machine Learning and Cybernetics, Beijing, 2002:808~811
36胡涛.机器视觉中的自动调焦及形貌恢复技术研究.哈尔滨工业大学博士论文.2007:21-29
37 Bao Getang, Zhao Hui, Tao Wei. Algorithm’s Study on Automatic Focusing for Image Measurement Technology. Journal of Shang Hai Jiao Tong University. Vol. 39, No. 1 Jan, 2004:120-124
38 Kang Zong Ming ,Zhang Li ,Xie Pan. Implementation of an Automatic Focusing Algorithm Based on Spatial High Frequency Energy and Entropy ACTA ELECTRONICA SINICA, 2003, 31(4): 552-555
39 Xiaoyin Xu, Miller.E.L. Adaptive two-pass median filter to remove impulsive noise Image Processing. Proceedings of The First International Conference on Machine Learning and Cybernetics, Beijing, 2002:808-811
40陈国波.基于散焦显微图像的三维重构方法研究.浙江工业大学硕士论文. 2007,5:13-45
41浦昭邦,王宝光主编.测控仪器设计.北京:机械工业出版社.第二版2007,4:50-54
42 G. Kim, S. Kim. White Light Scanning Interferometry for Thickness Measurement of Thin Film Layers. SPIE, 1993,783:239~246
43 P. Pavlicek. Height Profile Measurement by Means of White Light Interfero-metry. SPIE, 2003, 5259:139~144
2惠梅.表面微观形貌测量中相移干涉术的算法与实验研究.中国科学院西安光学精密机械研究所博士学位论文. 2001: 3-13
3 T.Wilson and C.R.J.Shepperd. Theory and Practice of Scanning Optical Microscopy. Academic in Press.London.1984:12~36
4 C.J.R.Sheppard and T.Wilson. Depth of Field in the Scanning Microscopy. Opt.Lett.1978,3(3):115~117
5 T.Wilson and C.J.R.Sheppard. Imaging and Super-resolution in the Harmonic Microscope.Opt.Acta.1979,(26):761~770
6周明宝,林大键等.微结构表面形貌的测量.光学精密工程.1999, 7(3):8-9
7 Minsky M, Microscopy apparatus, US Patent:3013467, 1961
8高兴宇.线结构光共焦扫描显微系统的研究.桂林电子科技大学硕士论文.2006
9王富生,谭久彬.表面微观轮廓的高分辨率光学测量方法.光学精密工程. 2000,8(4):309~314
10 Lisong Yang, Guiying Wang, et al. Surface Profilometry with a Fibre OpticalConfocal Scanning Microscope. Meas. Sci. Technol.2000,11:1786-1791
11葛华勇,任秋实等.内窥式共焦显微术.激光生物学报.2008,17(4):535-538
12 C.J.R.Sheppard, M.Gu. Optical Transfer Function Analysis for Two-photon4Pi Confocal Fluorescence Microscopy. Optics Communications,1995, 114 (1): 45-49
13柳忠尧.用于掩模板表面形貌测量的外差干涉显微系统的研究.清华大学博士论文. 2004, 6
14 H-J.Jordan, M.Wegner, H.Tiziani. Highly Accurate Non-contact Characteri- zation of Engineering Surfaces Using Confocal Microscopy. Meas.Sci.Techn. 1998, 9:1142-1151
15 M.顾.共焦显微术的三维成像原理(王桂英,等).北京:新时代出版社.2000, l-13
16 Paul C. Lin, Pang-Chen Sun, Lijun Zhu et.al.. Single-shot Depth-sectionImaging Through Chromatic Slit-scan Confocal Microscopy. Applied Optics, 1998, 37(10):6764-6770
17 H. J. Tiziani, R. Achi, R. N. Krmen et al. Theoretical analysis of confocal microscopy with microlenses. Appl.Opt.1996, 35(1):120-125
18孔兵,王昭,谭玉山.利用共焦成像原理实现微米级的三维轮廓仪.西安交通大学学报. 2001, 35(11):1151~1154
19王永红,余晓芬,黄其圣等.基于差动共焦的并行三维形貌检测系统的研究.中国科学技术大学学报, 2003, 33(4):415~420
20田维坚,陈波,郭履容等.并行共焦检测方法的理论分析.光学学报. 1999, 19(10):1381~1385
21 M. Neil, R. Juskaitis, et. al. Optimized Pupil-plane Filters for Confocal Microscope Point-spread Function Engineering. Opt.Lett.2000,25:245-47
22 Zhao Weiqian, Tan Jiubin, Qiu Lirong. SABCMS, A New Approach to HigherLateral Resolution of Laser Probe Measurement. Sensors and Actors A .2005,120 (1):17-25
23邱丽荣.超分辨光瞳滤波理论及其共焦传感技术研究.哈尔滨工业大学博士论文. 2005: 89-116
24 Lee.C.H, Wang.J. Optical Measurement of Viscoelastic and Biochemical Responses of Living Cells to Mechanical Perturbation. Opt. Lett.. 1998,23:307-309.
25 Tony Wilson, A.R.Carlini. Effect of Detector Displacement in Confocal Imaging Systems. Appl. Opt.. 1988,27(18):3791-3799.
26 M.Gu.共焦显微术的三维成像原理.新时代出版社,2000:112-123.
27王永红.基于全场并行共焦的检测技术与系统研究.合肥工业大学博士生学位论文.2004:79-81.
28王富生.基于差动共焦显微探测原理的三维测量技术研究.哈尔滨工业大学博士生学位论文.2001:66-74.
29李海燕.共焦显微扫描探测技术的发展.光学技术. 2008(34):94-97.(EI: 081011137266)
30李远明,陈文涛.微弱光信号前置放大电路设计.2007,9(8):51-53.
31 Behzad Razavi. Design of Integrated Circuits for Optical Communications. Mc Graw-Hill Higher Education, 2003:109-121.
32何晓昀.磨粒表面形貌分析与三维重构.武汉理工大学硕士论文.2005
33黄琳.激光共焦扫描显微镜系统中显微图像处理的研究.南京理工大学博士论文.2007,7
34章毓晋.图像工程:图像处理和分析.北京:清华大学出版社.2000
35 X. Y. Xu, E. L. Miller. Adaptive Two-pass Median Filter to Remove Impulsive Noise Image Processing. Proceedings of the First International Conference on Machine Learning and Cybernetics, Beijing, 2002:808~811
36胡涛.机器视觉中的自动调焦及形貌恢复技术研究.哈尔滨工业大学博士论文.2007:21-29
37 Bao Getang, Zhao Hui, Tao Wei. Algorithm’s Study on Automatic Focusing for Image Measurement Technology. Journal of Shang Hai Jiao Tong University. Vol. 39, No. 1 Jan, 2004:120-124
38 Kang Zong Ming ,Zhang Li ,Xie Pan. Implementation of an Automatic Focusing Algorithm Based on Spatial High Frequency Energy and Entropy ACTA ELECTRONICA SINICA, 2003, 31(4): 552-555
39 Xiaoyin Xu, Miller.E.L. Adaptive two-pass median filter to remove impulsive noise Image Processing. Proceedings of The First International Conference on Machine Learning and Cybernetics, Beijing, 2002:808-811
40陈国波.基于散焦显微图像的三维重构方法研究.浙江工业大学硕士论文. 2007,5:13-45
41浦昭邦,王宝光主编.测控仪器设计.北京:机械工业出版社.第二版2007,4:50-54
42 G. Kim, S. Kim. White Light Scanning Interferometry for Thickness Measurement of Thin Film Layers. SPIE, 1993,783:239~246
43 P. Pavlicek. Height Profile Measurement by Means of White Light Interfero-metry. SPIE, 2003, 5259:139~144