大功率全固态Nd:YVO_4/LBO绿光激光器研究
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摘要
本文第一章介绍了全固态绿光激光器的主要特性、优点、应用领域及国内外发展现状。
第二章分析了固体激光器的工作原理，以四能级系统为模型，应用速率方程理论研究了激光场与激光晶体之间相互作用理论，导出了固体激光器的阈值功率、输出功率和斜效率等特性。本章还分析了固体激光领域普遍采用的频率变换技术：建立在耦合波理论上的二次谐波理论，重点分析了相位匹配对转换效率的影响。
第三章分析了激光晶体的热透镜效应，研究了热透镜理论模型和各种测量方法，对这些方法总结、归类并指出了各自的优缺点。
第四章研究了作为泵浦源的光纤耦合输出大功率半导体激光器与激光晶体间的耦合系统。利用矩阵光学的方法，计算了高斯光束经耦合系统聚焦后的像距和束腰宽度，以此为指导设计加工了一套双平凸镜耦合系统，耦合效率达92％；在以上基础上研究了泵浦光与振荡光在激光晶体中的匹配，计算出了泵浦光经耦合系统后的最佳焦点位置。
第五章分析了Nd：YVO_4和LBO晶体的光学特性，深入分析了在引入热透镜效应的情况下谐振腔的像散问题，设计了四镜Z型折叠腔，应用ABCD定律计算优化选择了一组腔参数。LBO晶体Ⅰ类角度相位匹配，Nd：YVO_4和LBO晶体温度分别控制在20℃和18℃，双端总的抽运功率为26W的情况下，获得4.2W的连续绿光输出，光-光转换率为17.6％；LBO晶体Ⅰ类非临界相位匹配(NCPM)，Nd：YVO_4和LBO晶体温度分别控制在20℃和148℃，双端总的抽运功率为28.9W的情况下，获得8W的连续绿光输出，光-光转换率为27.7％。进行了总体设计加工，研制出一台样机并通过有关部门鉴定。
最后一章为本论文的总结和建议。
In the first chapter of this paper, all-solid-state green laser's main features and advantages, its field of application as well as the present development at home and abroad are introduced.
In the second chapter, the operating principle of solid-state laser is analyzed. Based on the model of four-level system, the interacting theory between laser field and laser crystal is studied by the rate equation theory, then the characters, such as threshold power, output power, slope efficiency etc., of solid-state laser are deduced. The frequency conversion technique applied universally in the field of solid-state laser is studied: the second harmonic wave theory on the base of the coupled wave theory. The effect of phase-matching upon conversion efficiency is mainly analyzed.
In the third chapter, the thermal lens effect of laser crystal is studied. The model of thermal lens theory and some measuring methods are explored. These methods are generalized and classified and the advantages and disadvantages of which are pointed out.
In the fourth chapter, the coupling system between the fiber-coupled-output high power semiconductor laser acting as the pumping source and laser crystal is studied. By the method of matrix optics, the waist width and imaging distance of Gaussian beams through the coupling system are calculated. By the result of the calculation, a set of double planoconvex lens coupling system are designed and manufactured. The coupling efficiency is up to 92%. On the base of the coupling system, the mode matching between pumping laser and oscillating laser in the laser crystal is researched. The optimum position of focal spot of pumping laser through coupling system is calculated.
In the fifth chapter, the optical characteristics of Nd:YVO4 and LBO are studied. The astigmatism problem of resonant cavity is explored thoroughly under the condition of thermal lens effect. Four-lens Z-folded cavity is designed and a set of perfect resonator parameters is screened out by the ABCD theory. With I type angle
phase-match of LBO, Nd:YVO4 and LBO are controlled under the temperature of 20 ℃ and 18℃ respectively, and the total double-end pumping power is 26W, a maximum of 4.2W continuous wave green laser can be obtained and the optical-optical conversion efficiency is 17.6%; with I type noncritical-phase-match, Nd:YVO4 and LBO are controlled under the temperature of 20℃ and 148℃ respectively, the total double-end pumping power is 28.9W, a maximum of 8W continuous wave green laser can be obtained and the optical-optical conversion efficiency is 27.7%. We have designed the whole laser system and developed a prototype instrument which was checked and accepted by the department concerned. The final chapter is the summarization and suggestion of the paper.
第二章分析了固体激光器的工作原理，以四能级系统为模型，应用速率方程理论研究了激光场与激光晶体之间相互作用理论，导出了固体激光器的阈值功率、输出功率和斜效率等特性。本章还分析了固体激光领域普遍采用的频率变换技术：建立在耦合波理论上的二次谐波理论，重点分析了相位匹配对转换效率的影响。
第三章分析了激光晶体的热透镜效应，研究了热透镜理论模型和各种测量方法，对这些方法总结、归类并指出了各自的优缺点。
第四章研究了作为泵浦源的光纤耦合输出大功率半导体激光器与激光晶体间的耦合系统。利用矩阵光学的方法，计算了高斯光束经耦合系统聚焦后的像距和束腰宽度，以此为指导设计加工了一套双平凸镜耦合系统，耦合效率达92％；在以上基础上研究了泵浦光与振荡光在激光晶体中的匹配，计算出了泵浦光经耦合系统后的最佳焦点位置。
第五章分析了Nd：YVO_4和LBO晶体的光学特性，深入分析了在引入热透镜效应的情况下谐振腔的像散问题，设计了四镜Z型折叠腔，应用ABCD定律计算优化选择了一组腔参数。LBO晶体Ⅰ类角度相位匹配，Nd：YVO_4和LBO晶体温度分别控制在20℃和18℃，双端总的抽运功率为26W的情况下，获得4.2W的连续绿光输出，光-光转换率为17.6％；LBO晶体Ⅰ类非临界相位匹配(NCPM)，Nd：YVO_4和LBO晶体温度分别控制在20℃和148℃，双端总的抽运功率为28.9W的情况下，获得8W的连续绿光输出，光-光转换率为27.7％。进行了总体设计加工，研制出一台样机并通过有关部门鉴定。
最后一章为本论文的总结和建议。
In the first chapter of this paper, all-solid-state green laser's main features and advantages, its field of application as well as the present development at home and abroad are introduced.
In the second chapter, the operating principle of solid-state laser is analyzed. Based on the model of four-level system, the interacting theory between laser field and laser crystal is studied by the rate equation theory, then the characters, such as threshold power, output power, slope efficiency etc., of solid-state laser are deduced. The frequency conversion technique applied universally in the field of solid-state laser is studied: the second harmonic wave theory on the base of the coupled wave theory. The effect of phase-matching upon conversion efficiency is mainly analyzed.
In the third chapter, the thermal lens effect of laser crystal is studied. The model of thermal lens theory and some measuring methods are explored. These methods are generalized and classified and the advantages and disadvantages of which are pointed out.
In the fourth chapter, the coupling system between the fiber-coupled-output high power semiconductor laser acting as the pumping source and laser crystal is studied. By the method of matrix optics, the waist width and imaging distance of Gaussian beams through the coupling system are calculated. By the result of the calculation, a set of double planoconvex lens coupling system are designed and manufactured. The coupling efficiency is up to 92%. On the base of the coupling system, the mode matching between pumping laser and oscillating laser in the laser crystal is researched. The optimum position of focal spot of pumping laser through coupling system is calculated.
In the fifth chapter, the optical characteristics of Nd:YVO4 and LBO are studied. The astigmatism problem of resonant cavity is explored thoroughly under the condition of thermal lens effect. Four-lens Z-folded cavity is designed and a set of perfect resonator parameters is screened out by the ABCD theory. With I type angle
phase-match of LBO, Nd:YVO4 and LBO are controlled under the temperature of 20 ℃ and 18℃ respectively, and the total double-end pumping power is 26W, a maximum of 4.2W continuous wave green laser can be obtained and the optical-optical conversion efficiency is 17.6%; with I type noncritical-phase-match, Nd:YVO4 and LBO are controlled under the temperature of 20℃ and 148℃ respectively, the total double-end pumping power is 28.9W, a maximum of 8W continuous wave green laser can be obtained and the optical-optical conversion efficiency is 27.7%. We have designed the whole laser system and developed a prototype instrument which was checked and accepted by the department concerned. The final chapter is the summarization and suggestion of the paper.
引文
1 裴博，杨钧，周寿桓等．固体蓝绿激光器技术发展综述．激光与红外．1998， 28(3) ：142～144
2 周静，周艳春编译．绿色激光．光机电信息．2000，4：31～33
3 Jeff Squier, Francois Salin, Gerard A. Mourou et al. 100-fs pulse generation and amplification mTi:Al2O3． Opt. Lett., 1991, 16(5) : 321
4 W. E. White, J. R. Hunter, L. Van Woerkom et al. 120-fs terawatte Ti:Al2O3/Cr:LiSrAlF6 laser system. Opt. Lett, 1992, 17(15) : 1067
5 Tetsuo Kojima, Sasuma Konno, Shuichi Fujikawa. 20-W ultraviolet beam generation by fourth-harmonic generation of an all-solid state laser. Opt. Lett., 2000,25(1) :58-60
6 Yasuhiro Uchigama, Masahiro Tsuchiya. Generation of ultraviolet 355-nm light by intracavity frequency doubling formative mode-locking action of an external cavity AlGalnP diode laser. Opt. Lett., 1999, 24(16) : 1148-1150
7 Kent C. Burr, C. L. Tang, Mark A. Arbore et al. Broadly tunable mid-infrared femtosecond optical parametric oscillator using all-solid-state-pumped
periodically poled lithiumniobatr. Opt. Lett., 1997, 22(19): 1458
8 U. Stressner, A. Peters, J. Mlynek et al. Single-frequency continuous-wave radiation from 0.77 to 1.73mm generation by a green-pumped optic parametric oscillator with periodically poled LiTaCO_3. Opt. Lett., 1999, 24(22): 1602
9 叶志生，朱宝忠，高惠敏等．激光在皮肤病学应用中的最新进展．光电子·激光．2000，11(6)：677～680
10 赵福运．实用激光治疗学．北京医科大学中国协和医科大学联合出版社．1997
11 余建华，李景镇，黄建军等．激光艺术演示．激光与红外．1998，28(3)：145～148
12 I. Drywe. Laser color display and entertainment applicant. Laser Focus World. 1991, 9
13 刘世贵．激光打标技术在汽车工业中的应用．激光集锦．1997，7(5)：59～60
14 谢兴华，刘春泰．激光加工技术在汽车工业生产中的应用．激光集锦．1997，7(3)：1～5
15 杨逸民．脉冲Nd：YAG激光在精密加工中的应用．激光与红外．1997，27(6)：333～336
16 梅遂生．激光加工在电子工业中的应用．激光与红外．24(1)：5～8
17 蒋鸿旺．水下光点探测系统现状与发展．激光与红外．1999，29(3)：136～138
18 徐端颐．数字视频光盘存储技术的现状及发展．激光与红外．1997，27(1)：11～14
19 徐端颐．面向21世纪的光盘技术．激光与红外．1998，28(6)：325～327
20 相干公司中文网站
21 T. Baer, J. Opt. Soc. Am. B, 3, (1986)1175
22 何京良，侯玮，张恒利等．LD抽运Nd：YVO_4腔内倍频连续波8．8W 绿光激光器．中国激光，2000，27(6)：481-484
23 Liu Junhai, Wang Changqing, LuJunhua et al., Diode-Laser-array single end-pumped 5W Nd:YVO_4/KTP CW solid-state green Laser. Chin. Phys. Lett., 1999,16(7):508-509
24 林岳明，何慧娟．二极管激光泵浦固体激光器和稳频研究．光学学报，1996，12
25 邢岐荣，张宁，韩秀芹等．自调Q自锁模固体激光器．光学学报，2001，11
26 宋峰，丁欣，张潮波等．LD抽运Nd：YVO_4平行平面腔激光器中的激光输出功率凹陷．中国激光，2001，11
27 陈津燕，唐淳，杨森林等．二极管端泵浦Nd：YAG连续激光器．激光杂志，1996，03
28 周寿桓，姜东升．二极管泵浦的高重频脉冲固体激光器研究．中国工程科学，2000，1
29 郑权，赵岭，檀慧明等．LD泵浦全固体单频Nd：YVO_4/KTP绿光激光器研究．激光与红外，2001，31(4)：208-209
30 杜戈果，朱鹤元，朱九皋等．用于准相位匹配的LD泵浦Nd：YAG 946nm连续激光光源．光子学报，2001，08
31 霍玉晶，何淑芳，段玉生等．LD抽运的高性能微型绿光激光器．中国激光，2000，27(7)：586-588
32 王海波，马艳，翟泽辉等．LD端面抽运1.5W 单频稳频绿光激光器．中国激光，2002，29(2)：119-122
33 Jintao Bai,Guofu Chen. Continuous-wave diode-laser end-pumped Nd:YVO_4/KTP high-power solid-state green laser. Optics & Laser Technology, 2002.34 333
34 潘涌、沈冠群，应用激光，10，(1990)193
35 霍玉晶等，激光与红外，23，(1993)33
36 王长青等，光学学报，16，(1996)
37 LIU J-hai et.al., CHIN.PHYS.LETT, 7, (1999)508
38 He Jingliang et al., Chin. Phys. Lett., 15,(1998)48
39 杜戈果等，光子学报，7，(1998)
40 白晋涛等，光子学报，11，(2000)1053
41 白晋涛，赵致民，李隆．8W高功率全固态LD双端抽运连续波绿光激光器．中国激光，2002，30(1)：40
2 周静，周艳春编译．绿色激光．光机电信息．2000，4：31～33
3 Jeff Squier, Francois Salin, Gerard A. Mourou et al. 100-fs pulse generation and amplification mTi:Al2O3． Opt. Lett., 1991, 16(5) : 321
4 W. E. White, J. R. Hunter, L. Van Woerkom et al. 120-fs terawatte Ti:Al2O3/Cr:LiSrAlF6 laser system. Opt. Lett, 1992, 17(15) : 1067
5 Tetsuo Kojima, Sasuma Konno, Shuichi Fujikawa. 20-W ultraviolet beam generation by fourth-harmonic generation of an all-solid state laser. Opt. Lett., 2000,25(1) :58-60
6 Yasuhiro Uchigama, Masahiro Tsuchiya. Generation of ultraviolet 355-nm light by intracavity frequency doubling formative mode-locking action of an external cavity AlGalnP diode laser. Opt. Lett., 1999, 24(16) : 1148-1150
7 Kent C. Burr, C. L. Tang, Mark A. Arbore et al. Broadly tunable mid-infrared femtosecond optical parametric oscillator using all-solid-state-pumped
periodically poled lithiumniobatr. Opt. Lett., 1997, 22(19): 1458
8 U. Stressner, A. Peters, J. Mlynek et al. Single-frequency continuous-wave radiation from 0.77 to 1.73mm generation by a green-pumped optic parametric oscillator with periodically poled LiTaCO_3. Opt. Lett., 1999, 24(22): 1602
9 叶志生，朱宝忠，高惠敏等．激光在皮肤病学应用中的最新进展．光电子·激光．2000，11(6)：677～680
10 赵福运．实用激光治疗学．北京医科大学中国协和医科大学联合出版社．1997
11 余建华，李景镇，黄建军等．激光艺术演示．激光与红外．1998，28(3)：145～148
12 I. Drywe. Laser color display and entertainment applicant. Laser Focus World. 1991, 9
13 刘世贵．激光打标技术在汽车工业中的应用．激光集锦．1997，7(5)：59～60
14 谢兴华，刘春泰．激光加工技术在汽车工业生产中的应用．激光集锦．1997，7(3)：1～5
15 杨逸民．脉冲Nd：YAG激光在精密加工中的应用．激光与红外．1997，27(6)：333～336
16 梅遂生．激光加工在电子工业中的应用．激光与红外．24(1)：5～8
17 蒋鸿旺．水下光点探测系统现状与发展．激光与红外．1999，29(3)：136～138
18 徐端颐．数字视频光盘存储技术的现状及发展．激光与红外．1997，27(1)：11～14
19 徐端颐．面向21世纪的光盘技术．激光与红外．1998，28(6)：325～327
20 相干公司中文网站
21 T. Baer, J. Opt. Soc. Am. B, 3, (1986)1175
22 何京良，侯玮，张恒利等．LD抽运Nd：YVO_4腔内倍频连续波8．8W 绿光激光器．中国激光，2000，27(6)：481-484
23 Liu Junhai, Wang Changqing, LuJunhua et al., Diode-Laser-array single end-pumped 5W Nd:YVO_4/KTP CW solid-state green Laser. Chin. Phys. Lett., 1999,16(7):508-509
24 林岳明，何慧娟．二极管激光泵浦固体激光器和稳频研究．光学学报，1996，12
25 邢岐荣，张宁，韩秀芹等．自调Q自锁模固体激光器．光学学报，2001，11
26 宋峰，丁欣，张潮波等．LD抽运Nd：YVO_4平行平面腔激光器中的激光输出功率凹陷．中国激光，2001，11
27 陈津燕，唐淳，杨森林等．二极管端泵浦Nd：YAG连续激光器．激光杂志，1996，03
28 周寿桓，姜东升．二极管泵浦的高重频脉冲固体激光器研究．中国工程科学，2000，1
29 郑权，赵岭，檀慧明等．LD泵浦全固体单频Nd：YVO_4/KTP绿光激光器研究．激光与红外，2001，31(4)：208-209
30 杜戈果，朱鹤元，朱九皋等．用于准相位匹配的LD泵浦Nd：YAG 946nm连续激光光源．光子学报，2001，08
31 霍玉晶，何淑芳，段玉生等．LD抽运的高性能微型绿光激光器．中国激光，2000，27(7)：586-588
32 王海波，马艳，翟泽辉等．LD端面抽运1.5W 单频稳频绿光激光器．中国激光，2002，29(2)：119-122
33 Jintao Bai,Guofu Chen. Continuous-wave diode-laser end-pumped Nd:YVO_4/KTP high-power solid-state green laser. Optics & Laser Technology, 2002.34 333
34 潘涌、沈冠群，应用激光，10，(1990)193
35 霍玉晶等，激光与红外，23，(1993)33
36 王长青等，光学学报，16，(1996)
37 LIU J-hai et.al., CHIN.PHYS.LETT, 7, (1999)508
38 He Jingliang et al., Chin. Phys. Lett., 15,(1998)48
39 杜戈果等，光子学报，7，(1998)
40 白晋涛等，光子学报，11，(2000)1053
41 白晋涛，赵致民，李隆．8W高功率全固态LD双端抽运连续波绿光激光器．中国激光，2002，30(1)：40