半导体激光单端泵浦的大功率全固态Nd:YVO_4/LBO连续绿光激光器研究
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摘要
本文第一章介绍了半导体激光(LD)泵浦全固态绿光激光器的主要特性、优点、应用领域及国内外发展现状。
第二章分析了固体激光器的工作原理，以四能级系统为模型，从与空间相关的速率方程出发，研究了泵浦激光和振荡激光的空间分布、阈值功率、输出功率与斜效率、LD端面泵浦固体激光器的输入输出特性及各空间变量对输出特性的影响，并讨论了腔内二次谐波产生理论。
第三章从分析激光晶体的热透镜效应出发，对单端泵浦激光晶体进行了分析，建立了符合工作条件下激光系统的热温场模型，通过热传导方程及晶体的边界条件，利用半解析热分析方法得出了晶体内部温度场的半解析解，并对实例进行了计算，分析了各种参量对温度场分布的影响。
第四章研究了大功率半导体激光与激光晶体之间的耦合系统。利用矩阵光学方法，分别推导了高斯光束经双平凸镜耦合简和自聚焦微透镜两种耦合系统聚焦后的束腰宽度和像距的计算公式。
第五章分析了Nd：YVO_4和LBO晶体的光学特性。立足于激光器的产品化，基于谐振腔的像散补偿和热稳定性的设计思想，采用大功率LD单端泵浦Nd：YVO_4晶体，具有高光损伤阈值的Ⅰ类非临界相位匹配LBO晶体腔内倍频方案，应用ABCD定律和腔结构模拟软件CDA设计并优化了一组腔参数。利用AutoCAD和UG产品机械设计软件实现了对激光器的外型和腔结构及元件的机械部分图纸设计，最后完成了最大功率9.9W的水冷532nm连续绿光激光器和最大功率6.4W的半导体冷却532nm连续绿光激光器产品的研制与开发。
第六章为本论文的总结和展望。
In the first chapter of this paper, diode-end-pumped all-solid-state laser's main features and advantages, its field of application as well as the present development as home and abroad is introduced.
In the second chapter, the operating principle of solid-state laser is analyzed. Based on the model of four-level system and with the space-related rate equations, the space distribution of laser beam and pump beam, the threshold pump power, the output power, the slope efficiency, the input-output characteristic and the effect of space variables on the output character are studied. Also, the introcavity second harmonic generation (SHG) theory is discussed.
In the third chapter, by the analysis of the thermal lens effect of laser crystal, single-end-pumped laser crystal is analyzed and a thermal model suited for particular operating circumstance is founded. By the use of equation of heat conduction and with the boundary conditions, the half analytic solution of thermal field in the laser crystal is obtained through half-analytic thermal analysis, and a practical example is calculated together with analysis of the effect of some parameters on the distribution of thermal field.
In the fourth chapter, the coupling system between the fiber-coupled-output high power semiconductor laser acting as the pumping source and laser crystal is studied. By the method of matrix optics, the waist width and imaging distance of Gauss beam through the self-focusing micro lens system and the double plan convex lens coupling system are deduced.
In the fifth chapter, the optical characteristics of Nd:YVO4 and LBO are studied. Grounding on the purpose of industrialization of laser, based on the thought of astigmatism compensation and thermal stability of the cavity, we employed high power LD to pump Nd:YVO4 crystal and used the introcavity frequency doubling with type 1 noncritical phase-match LBO crystal, which has high damage threshold. The cavity parameters are optimized by the use of ABCD theory and the resonator
structure CAD software. The external form of laser, the cavity structure and the mechanical components are designed by mechanism drawing software AutoCAD and UG. There is a water-cooled CW 532nm green laser with the maximum output power of 9.9 W, along with a semiconductor-cooled CW 532nm green laser with the maximum output power of 6.4 W are developed.
The sixth chapter is the summarization and prospect of the paper.
第二章分析了固体激光器的工作原理，以四能级系统为模型，从与空间相关的速率方程出发，研究了泵浦激光和振荡激光的空间分布、阈值功率、输出功率与斜效率、LD端面泵浦固体激光器的输入输出特性及各空间变量对输出特性的影响，并讨论了腔内二次谐波产生理论。
第三章从分析激光晶体的热透镜效应出发，对单端泵浦激光晶体进行了分析，建立了符合工作条件下激光系统的热温场模型，通过热传导方程及晶体的边界条件，利用半解析热分析方法得出了晶体内部温度场的半解析解，并对实例进行了计算，分析了各种参量对温度场分布的影响。
第四章研究了大功率半导体激光与激光晶体之间的耦合系统。利用矩阵光学方法，分别推导了高斯光束经双平凸镜耦合简和自聚焦微透镜两种耦合系统聚焦后的束腰宽度和像距的计算公式。
第五章分析了Nd：YVO_4和LBO晶体的光学特性。立足于激光器的产品化，基于谐振腔的像散补偿和热稳定性的设计思想，采用大功率LD单端泵浦Nd：YVO_4晶体，具有高光损伤阈值的Ⅰ类非临界相位匹配LBO晶体腔内倍频方案，应用ABCD定律和腔结构模拟软件CDA设计并优化了一组腔参数。利用AutoCAD和UG产品机械设计软件实现了对激光器的外型和腔结构及元件的机械部分图纸设计，最后完成了最大功率9.9W的水冷532nm连续绿光激光器和最大功率6.4W的半导体冷却532nm连续绿光激光器产品的研制与开发。
第六章为本论文的总结和展望。
In the first chapter of this paper, diode-end-pumped all-solid-state laser's main features and advantages, its field of application as well as the present development as home and abroad is introduced.
In the second chapter, the operating principle of solid-state laser is analyzed. Based on the model of four-level system and with the space-related rate equations, the space distribution of laser beam and pump beam, the threshold pump power, the output power, the slope efficiency, the input-output characteristic and the effect of space variables on the output character are studied. Also, the introcavity second harmonic generation (SHG) theory is discussed.
In the third chapter, by the analysis of the thermal lens effect of laser crystal, single-end-pumped laser crystal is analyzed and a thermal model suited for particular operating circumstance is founded. By the use of equation of heat conduction and with the boundary conditions, the half analytic solution of thermal field in the laser crystal is obtained through half-analytic thermal analysis, and a practical example is calculated together with analysis of the effect of some parameters on the distribution of thermal field.
In the fourth chapter, the coupling system between the fiber-coupled-output high power semiconductor laser acting as the pumping source and laser crystal is studied. By the method of matrix optics, the waist width and imaging distance of Gauss beam through the self-focusing micro lens system and the double plan convex lens coupling system are deduced.
In the fifth chapter, the optical characteristics of Nd:YVO4 and LBO are studied. Grounding on the purpose of industrialization of laser, based on the thought of astigmatism compensation and thermal stability of the cavity, we employed high power LD to pump Nd:YVO4 crystal and used the introcavity frequency doubling with type 1 noncritical phase-match LBO crystal, which has high damage threshold. The cavity parameters are optimized by the use of ABCD theory and the resonator
structure CAD software. The external form of laser, the cavity structure and the mechanical components are designed by mechanism drawing software AutoCAD and UG. There is a water-cooled CW 532nm green laser with the maximum output power of 9.9 W, along with a semiconductor-cooled CW 532nm green laser with the maximum output power of 6.4 W are developed.
The sixth chapter is the summarization and prospect of the paper.
引文
1.1 裴博，杨钧，周寿桓等．固体蓝绿激光器技术发展综述．激光与红外．1998，28(3)：142～144
1.2 周静，周艳春编译．绿色激光．光机电信息．2000，4：31～33
1.3 Jeff Squier, Francois Salin, Gerard A. Mourou et al. 100-fs pulse generation and amplification in Ti:AI_2O_3. Opt. Lett., 1991, 16(5): 321
1.4 W. E. White, J. R. Hunter, L. Van Woerkom et al. 120-fs terawatte Ti:Al_2O_3/Cr:LiSrAIF_6 laser system. Opt. Lett., 1992, 17(15):1067
1.5 Yetsuo Kojima, Sasuma Konno, Shuichi Fujikawa. 20-W ultraviolet beam generation by fourth-harmonic generation of an all-solid state laser. Opt. Lett., 2000, 25(1):58～60
1.6 Yasuhiro Uchigama, Masahiro Tsuchiya. Generation of ultraviolet 355-nm light by intracavity frequency doubling formative mode-locking action of an external cavity AIGaInP diode laser. Opt. Lett., 1999, 24(16): 1148～1150
1.7 Kent C. Burr, C. L. Tang, Mark A. Arbore et al. Broadly tunable mid-infrared femtosecond optical parametric oscillator using all-solid-state-pumped periodically poled lithiumniobatr. Opt. Lett., 1997, 22(19):1458
1.8 U. Stressner, A. Peters, J. Mlynek et al. Single-frequency continuous-wave radiation from 0.77 to 1.73mm generation by a green-pumped optic parametric
oscillator with periodically poled LiTaCO_3. Opt. Lett., 1999, 24(22):1602
1．9 叶志生，朱宝忠，高惠敏等．激光在皮肤病学应用中的最新进展．光电子·激光．2000，11(6)：677～680
1．10 赵福运．实用激光治疗学．北京医科大学中国协和医科大学联合出版社．1997
1．11 刘世贵．激光打标技术在汽车工业中的应用．激光集锦．1997，7(5)：59～60
1．12 谢兴华，刘春泰．激光加工技术在汽车工业生产中的应用．激光集锦．1997， 7(3)：1～5
1．13 杨逸民．脉冲Nd：YAG激光在精密加工中的应用．激光与红外．1997，27(6)：333～336
1．14 梅遂生．激光加工在电子工业中的应用．激光与红外．24(1)：5～8
1．15 蒋鸿旺．水下光点探测系统现状与发展．激光与红外．1999，29(3)：136～138
1．16 徐端颐．数字视频光盘存储技术的现状及发展．激光与红外．1997，27(1)：11～14
1．17 徐端颐．面向21世纪的光盘技术．激光与红外．1998，28(6)：325～327
1．18 相干公司中文网站
1．19 T.Baer,J.Opt.Soc.Am.B,3,(1986)1175
1.20 He J L,Hou W,Zhang H L et al 2000 Chin.J Lasen A 20 481
1．21 周复正，陈有明等．半导体激光泵浦固体激光器的新进展和应用前景．中国激光．1994，21(1)：354～360．
1．22 林岳明，何慧娟二极管激光泵浦固体激光器和稳频研究．光学学报，1996，12
1．23 霍玉晶等，激光与红外，23，(1993)33
1．24 王长青等，光学学报，16，(1996)
1．25 侯玮，张恒利等．激光二极管抽运Nd：YVO_4／LBO腔内倍频5.3W连续波激光器．光学学报，2001，21(4)：437～439
1．26 何京良．LD抽运Nd：YVO_4腔内倍频连续波8.8W绿光激光器．中国激光．2000，27(6)：481～484．
1.2 周静，周艳春编译．绿色激光．光机电信息．2000，4：31～33
1.3 Jeff Squier, Francois Salin, Gerard A. Mourou et al. 100-fs pulse generation and amplification in Ti:AI_2O_3. Opt. Lett., 1991, 16(5): 321
1.4 W. E. White, J. R. Hunter, L. Van Woerkom et al. 120-fs terawatte Ti:Al_2O_3/Cr:LiSrAIF_6 laser system. Opt. Lett., 1992, 17(15):1067
1.5 Yetsuo Kojima, Sasuma Konno, Shuichi Fujikawa. 20-W ultraviolet beam generation by fourth-harmonic generation of an all-solid state laser. Opt. Lett., 2000, 25(1):58～60
1.6 Yasuhiro Uchigama, Masahiro Tsuchiya. Generation of ultraviolet 355-nm light by intracavity frequency doubling formative mode-locking action of an external cavity AIGaInP diode laser. Opt. Lett., 1999, 24(16): 1148～1150
1.7 Kent C. Burr, C. L. Tang, Mark A. Arbore et al. Broadly tunable mid-infrared femtosecond optical parametric oscillator using all-solid-state-pumped periodically poled lithiumniobatr. Opt. Lett., 1997, 22(19):1458
1.8 U. Stressner, A. Peters, J. Mlynek et al. Single-frequency continuous-wave radiation from 0.77 to 1.73mm generation by a green-pumped optic parametric
oscillator with periodically poled LiTaCO_3. Opt. Lett., 1999, 24(22):1602
1．9 叶志生，朱宝忠，高惠敏等．激光在皮肤病学应用中的最新进展．光电子·激光．2000，11(6)：677～680
1．10 赵福运．实用激光治疗学．北京医科大学中国协和医科大学联合出版社．1997
1．11 刘世贵．激光打标技术在汽车工业中的应用．激光集锦．1997，7(5)：59～60
1．12 谢兴华，刘春泰．激光加工技术在汽车工业生产中的应用．激光集锦．1997， 7(3)：1～5
1．13 杨逸民．脉冲Nd：YAG激光在精密加工中的应用．激光与红外．1997，27(6)：333～336
1．14 梅遂生．激光加工在电子工业中的应用．激光与红外．24(1)：5～8
1．15 蒋鸿旺．水下光点探测系统现状与发展．激光与红外．1999，29(3)：136～138
1．16 徐端颐．数字视频光盘存储技术的现状及发展．激光与红外．1997，27(1)：11～14
1．17 徐端颐．面向21世纪的光盘技术．激光与红外．1998，28(6)：325～327
1．18 相干公司中文网站
1．19 T.Baer,J.Opt.Soc.Am.B,3,(1986)1175
1.20 He J L,Hou W,Zhang H L et al 2000 Chin.J Lasen A 20 481
1．21 周复正，陈有明等．半导体激光泵浦固体激光器的新进展和应用前景．中国激光．1994，21(1)：354～360．
1．22 林岳明，何慧娟二极管激光泵浦固体激光器和稳频研究．光学学报，1996，12
1．23 霍玉晶等，激光与红外，23，(1993)33
1．24 王长青等，光学学报，16，(1996)
1．25 侯玮，张恒利等．激光二极管抽运Nd：YVO_4／LBO腔内倍频5.3W连续波激光器．光学学报，2001，21(4)：437～439
1．26 何京良．LD抽运Nd：YVO_4腔内倍频连续波8.8W绿光激光器．中国激光．2000，27(6)：481～484．