高温超导滤波器的研制
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摘要
自高温超导体被发现以来,超导材料的优良性能引起了世界各国的重视。用高温超导材料制备的微波器件具有优越的性能和巨大的商业应用价值,其中对高温超导滤波器的研究已经成为近些年来国内外超导应用的一个热点。相对于普通的金属滤波器,高温超导滤波器具有带内插损小、带边陡峭、带外抑制好等优点。移动通信基站接收机前端通过应用高温超导滤波器,可以节约频率资源、增加基站覆盖面积和通话容量、增加抗干扰能力、提高通话质量和降低功率辐射等优点,在医疗仪器、卫星通信、军事通讯、航天等领域也有着广泛的应用前景。
高温超导滤波器的制备首先对高温超导薄膜的物理及微波性能有很高的要求,本课题研究了超导滤波器制备过程中各环节对YBCO超导薄膜性能的影响,并进行了测试和分析,系统地研究了氩离子束刻蚀对YBCO超导薄膜的物理特性的影响,制备出了高性能的超导滤波器。本论文对光刻工艺步骤及制备过程中常出现的问题和解决的方法做了详细的分析讨论,通过大量实验的对比和分析,总结出一套制备超导滤波器的实验参数。针对所使用的高温超导薄膜材料,分别设计出了两种刻蚀方法——湿刻和干刻的制作流程,对超导滤波器馈线的金电极制备也通过光刻来实现。
高温超导滤波器的封装也是影响超导滤波器性能的重要环节之一。本文详细讨论了封装盒设计应该注意的细节,避免影响超导滤波器性能的因素出现。成功地应用超声点焊的方法解决了PIN接头和高温超导滤波器电极的连接,达到较小的接触电阻和较好的机械强度。
按照本课题要求,成功制备出了移动通信用12节高温超导滤波器,利用网络分析仪对超导滤波器的性能进行了测试,并给出了测试和分析结果。通过与设计值和考核指标的对比,所做的高温超导滤波器具有优良的性能,不但达到了实际应用的要求,而且各项指标均达到国内先进水平。在高温超导滤波器的制备方面本课题的研制成果取得了前所未有的突破。
Since High Temperature Superconductor (HTS) was discovered, the good performance of the superconducting material has caused attention paid by the world. The microwave devices made from the superconducting material have excellent performance and great commercial applied value. Among them, scientists in this field have been focused their research on the HTS filter which has such advantages as less insert loss, more steep edge and good out-of-band rejection etc compared with the common metal filters . While been applied in the front-ends of mobile communication base station, it also has the following advantages, such as, saving frequency resources, increasing the coverage of the base station, improving anti-jamming ability, raising the capacity and quality of communication and reducing power radiation. In addition, there are wide broad application in those fields such as medical instruments, satellite, military communication and aerospace etc.
Because of the high request to the HTS films, in this thesis we researched the effects of physical characteristics on YBCO HTS thin film by photolithography process and have done the measurement and analysis. At the same time, we also systematically researched the effects of physical characteristics on YBCO HTS thin film by argon ion beam etching. Finally, we fabricated high performance HTS filter. In this thesis we have focused on the problems in photolithography and fabrication processes of the HTS filter, and further detailed discuss the solution. After an amount of experimental contrast and analysis, we summarized a set of experiment parameters. Two kinds of etching methods--wet method and dry method for the HTS thin film have been designed and some new fabrication methods have been applied. The gold electric pole has been patterned by photolithography.
Additionally, packaging is one of an important issue to the performance of the HTS filter. In this thesis we discuss the details in the designing of shielding box, to avoid the influence on the filter’s performance. The conjunction has been successful settled between PIN and gold electric pole by supersonic spot welding. Smaller contact resistance and better mechanical intensity can be attained.
高温超导滤波器的制备首先对高温超导薄膜的物理及微波性能有很高的要求,本课题研究了超导滤波器制备过程中各环节对YBCO超导薄膜性能的影响,并进行了测试和分析,系统地研究了氩离子束刻蚀对YBCO超导薄膜的物理特性的影响,制备出了高性能的超导滤波器。本论文对光刻工艺步骤及制备过程中常出现的问题和解决的方法做了详细的分析讨论,通过大量实验的对比和分析,总结出一套制备超导滤波器的实验参数。针对所使用的高温超导薄膜材料,分别设计出了两种刻蚀方法——湿刻和干刻的制作流程,对超导滤波器馈线的金电极制备也通过光刻来实现。
高温超导滤波器的封装也是影响超导滤波器性能的重要环节之一。本文详细讨论了封装盒设计应该注意的细节,避免影响超导滤波器性能的因素出现。成功地应用超声点焊的方法解决了PIN接头和高温超导滤波器电极的连接,达到较小的接触电阻和较好的机械强度。
按照本课题要求,成功制备出了移动通信用12节高温超导滤波器,利用网络分析仪对超导滤波器的性能进行了测试,并给出了测试和分析结果。通过与设计值和考核指标的对比,所做的高温超导滤波器具有优良的性能,不但达到了实际应用的要求,而且各项指标均达到国内先进水平。在高温超导滤波器的制备方面本课题的研制成果取得了前所未有的突破。
Since High Temperature Superconductor (HTS) was discovered, the good performance of the superconducting material has caused attention paid by the world. The microwave devices made from the superconducting material have excellent performance and great commercial applied value. Among them, scientists in this field have been focused their research on the HTS filter which has such advantages as less insert loss, more steep edge and good out-of-band rejection etc compared with the common metal filters . While been applied in the front-ends of mobile communication base station, it also has the following advantages, such as, saving frequency resources, increasing the coverage of the base station, improving anti-jamming ability, raising the capacity and quality of communication and reducing power radiation. In addition, there are wide broad application in those fields such as medical instruments, satellite, military communication and aerospace etc.
Because of the high request to the HTS films, in this thesis we researched the effects of physical characteristics on YBCO HTS thin film by photolithography process and have done the measurement and analysis. At the same time, we also systematically researched the effects of physical characteristics on YBCO HTS thin film by argon ion beam etching. Finally, we fabricated high performance HTS filter. In this thesis we have focused on the problems in photolithography and fabrication processes of the HTS filter, and further detailed discuss the solution. After an amount of experimental contrast and analysis, we summarized a set of experiment parameters. Two kinds of etching methods--wet method and dry method for the HTS thin film have been designed and some new fabrication methods have been applied. The gold electric pole has been patterned by photolithography.
Additionally, packaging is one of an important issue to the performance of the HTS filter. In this thesis we discuss the details in the designing of shielding box, to avoid the influence on the filter’s performance. The conjunction has been successful settled between PIN and gold electric pole by supersonic spot welding. Smaller contact resistance and better mechanical intensity can be attained.
引文
1 伍勇,韩汝珊. 超导物理基础. 北京大学出版社. 1997
2 张裕恒.超导物理. 中国科技大学出版社. 1997
3 林良真,张金龙,李传义,夏平畴,杨乾生. 超导电性及其应用. 北京工业大学出版社.1998
4 张其瑞. 高温超导电性. 浙江大学出版社. 1992
5 沈致远[美]. 高温超导微波电路. 国防工业出版社. 2000
6 Balam A.Willemsen. HTS Filter Subsystems for Wireless Telecommunications. IEEE transactions on applied superconductivity. 2001, 11(1):60-67
7 Guo-chun Liang,Dawei zhang,Chien-Fu Shih,Marie E.Johansson,Richard S.Wither, et al. High-Power HTS Microstrip Filters for Wireless Communication. IEEE Transactions on microwave theory and techniques. 1995, 43(12):3020-3029
8 I.B.Vendik,V.V.kholodniak,D.V.Kholodniak,S.A.Galchenko,A.N.Deleniy,M.N.GoubinaA.A.Svishchev,S.Leppavuori,J.Hagberg. High temperature superconductor filter: modeling and experimental investigations. IEEE transactions on applied superconductivity. 1999, 9(2):3577-3580
9 Hong Teuk Kim,Byoung-Chul Min,Young Hwan Choi,Seung-Hyun Moon,Seung-Min Lee,and Byungdu Oh. A Compact Narrowband HTS Microstrip Filter for PCS Appllications. IEEE transactions on applied superconductivity. 1999, 9(2):3909-3912
10 Jia-Sheng Hong,J.Lancaster,Robert B.Greed,and Jean-Claude Mage. On The Performance of HTS Microstrip Quasi-Elliptic Funcyion Filters for Mobile Communications Application. IEEE transactions on microwave theory and techniques. 2000, 48(7):1240-1246
11 Michael Reppel and Jean-Claude Mage. Supperconducting Microstrip Bandpass Filter on LaAlO3 with High Out-of-Band Rejection. IEEE microwave and guided wave letters. 2000,10(5):180-182
12 A.E.Barinov, S.A.Zhgoon, V.A.Sukhov. Planar superconducting lumped element bandpass filter with spiral inductors. Physica C. 2001, 355:257-259
13 A.J.Bubendorfer,J.Joubert,T.Kemmitt,L.J.Campbell,N.J.Long. High temperature superconductor films and devices for the microwave communication industry. Current Applied Physics. 2004, 4:284-287
14 Shigetoshi Ohshima. Recent status of microwave application in Japan and Asia. Physica C. 2004, 412-414:1506-1512
15 Jia-Sheng Hong. A High-Temperature Superconducting Filter for Future Mobile Telecommunication Systems. IEEE transactions on microwave theory and techniques. 2005, 53(6):1976-1981
16 Srikanta Pal,Christopher J.Stevens,and David J.Edwards. Compact Parallel Coupled HTS Microstrip Bandpass Filters for Wireless Communications. IEEE transactions on microwave theory and techniques. 2006,54(2):768-775
17 李大年. 微波原理技术. 北京师范大学出版社. 1994
18 吴群,宋朝晖. 微波技术. 哈尔滨工业大学出版社. 2004
19 梁联倬. 微波网络及其应用. 电子工业出版社. 1985
20 封吉平,曾瑞,梁玉英. 微波工程基础. 军械工程学院出版社. 2002
21 郝崇骏,韩永宁,袁乃昌,何建国. 微波电路. 国防科技大学出版社. 1999
22 尚洪臣. 微波网络. 东南大学出版社. 1996
23 Campbell 坎贝尔.微电子制造科学原理与工程技术:第二版. 电子工业出版社. 2003
24 R.L.Barns and R.A.Laudise. Stability of superconducting YBCO in the presence of water. Appl.Phys.Lett. 1987, 51(17):1373-1375
25 M.F.Yan,R.L.Sarns,H.M.Bryan,Jr.P.K.Gallagher,R.C.Sherwood,and S.Jin. Water interaction with the superconducting YBCO phase. Appl.Phys.Lett. 1987, 51(7):532-534
26 Q.Y.Ma,E.S.Yang,and G.V.Treyz,Chin-An Chang. Novel method of patterning YBCO superconducting thin films. Appl.Phys.Lett. 1989, 55(9):896-898
27 J.JKingston,F.C.Wellstood,Du Quan and John Clarke. Photolithographically Patterned Thin Film Multilayer Devices of YBCO. IEEE transactions on magnetics. 1991, 27(2):974-977
28 Shih and C.X.Qiu. Chemical etching of YBCO thin films. Appl.Phys.Lett. 1988, 52(18):1523-1524
29 F.K.Shokoohi,L.M.Schiavone,C.T.Rogers,A.Inam,X.D.Wu,L.Nazar,and T.Venkatesan. Wet chemical etching of HTS YBCO films in EDTA. Appl.Phys.Lett. 1989, 55(25):2661-2663
30 Carol.H.Ashby,Jon Marten,Thomas A.Plut,and David S.Ginley,Julia M.Philips. Improved aqueous etchant for high Tc superconductor materials. Appl.Phys.Lett. 1992, 60(17):2147-2149
31 M.Hangyo,S.Nashima,M.Kawanura,S.Shikii,and M.Tonouchi. Ion-Beam Milling of YBCO thin films and Their Characterization by Tine-Resolved Pump-Probe Method. IEEE transactions on applied superconductivity. 1999, 9(2):1952-1955
32 Zs.Oszi,S.Benacka,V.Strbik,S.Chromik,M.Spankova,I.Kostic,P.Kleja. Properties of YBCO and BiSrCaCuO thin film microstrips patterned by argon ion beam. Thin Solid Films. 2003, 433:359-362
33 S.S.Tinchev. Application of ion beam techniques in superconducting electronics. Vacuum. 2003, 69:17-25
34 H.Schneidewind, F.Schmidl, S.Linzen, P.Seidel. The possibilities and limitations of ion-beam etching of YBCO thin films and microbridges. Physica C. 1995, 250:191-201
35 刘让蛟,曾祥辉,王世光,戴远东. 氩离子束刻蚀 YBCO 薄膜. 低温物理学报. 1991, 13(5):338-342
36 关旭东. 硅集成电路工艺基础. 北京大学出版社. 2003
37 Y.A.Jee, M.Li, B.Ma, V.A.Maroni, B.L.Fisher, U.Balachandran. Comparison of texture development and superconducting properties of YBCO thin films prepared by TFA and PLD processes. Physica C, 2001, 356:297-303
38 李林,郭莉萍,刘军政. 高温超导 YBCO 薄膜的颗粒、杂相生长机制研究. 电子显微学报. 1997,16(3):245-249
39 B.Schey,W.Biegel,M.Kuhn and B.Stritzker. Large Area Pulsed Laser Deposition of YBCO Thin Films. IEEE transactions on applied superconductivity. 1999, 9(2):2359-2362
40 M.Tonouch,H.Shimakage,Z.Wang,S.Tomozawa,M.Hangyo,and Y.Murakami. Atomic scale flattening and characterization of a YBCO film surface. Supercond.Sci.Technol. 1996, 9:A161-A165
2 张裕恒.超导物理. 中国科技大学出版社. 1997
3 林良真,张金龙,李传义,夏平畴,杨乾生. 超导电性及其应用. 北京工业大学出版社.1998
4 张其瑞. 高温超导电性. 浙江大学出版社. 1992
5 沈致远[美]. 高温超导微波电路. 国防工业出版社. 2000
6 Balam A.Willemsen. HTS Filter Subsystems for Wireless Telecommunications. IEEE transactions on applied superconductivity. 2001, 11(1):60-67
7 Guo-chun Liang,Dawei zhang,Chien-Fu Shih,Marie E.Johansson,Richard S.Wither, et al. High-Power HTS Microstrip Filters for Wireless Communication. IEEE Transactions on microwave theory and techniques. 1995, 43(12):3020-3029
8 I.B.Vendik,V.V.kholodniak,D.V.Kholodniak,S.A.Galchenko,A.N.Deleniy,M.N.GoubinaA.A.Svishchev,S.Leppavuori,J.Hagberg. High temperature superconductor filter: modeling and experimental investigations. IEEE transactions on applied superconductivity. 1999, 9(2):3577-3580
9 Hong Teuk Kim,Byoung-Chul Min,Young Hwan Choi,Seung-Hyun Moon,Seung-Min Lee,and Byungdu Oh. A Compact Narrowband HTS Microstrip Filter for PCS Appllications. IEEE transactions on applied superconductivity. 1999, 9(2):3909-3912
10 Jia-Sheng Hong,J.Lancaster,Robert B.Greed,and Jean-Claude Mage. On The Performance of HTS Microstrip Quasi-Elliptic Funcyion Filters for Mobile Communications Application. IEEE transactions on microwave theory and techniques. 2000, 48(7):1240-1246
11 Michael Reppel and Jean-Claude Mage. Supperconducting Microstrip Bandpass Filter on LaAlO3 with High Out-of-Band Rejection. IEEE microwave and guided wave letters. 2000,10(5):180-182
12 A.E.Barinov, S.A.Zhgoon, V.A.Sukhov. Planar superconducting lumped element bandpass filter with spiral inductors. Physica C. 2001, 355:257-259
13 A.J.Bubendorfer,J.Joubert,T.Kemmitt,L.J.Campbell,N.J.Long. High temperature superconductor films and devices for the microwave communication industry. Current Applied Physics. 2004, 4:284-287
14 Shigetoshi Ohshima. Recent status of microwave application in Japan and Asia. Physica C. 2004, 412-414:1506-1512
15 Jia-Sheng Hong. A High-Temperature Superconducting Filter for Future Mobile Telecommunication Systems. IEEE transactions on microwave theory and techniques. 2005, 53(6):1976-1981
16 Srikanta Pal,Christopher J.Stevens,and David J.Edwards. Compact Parallel Coupled HTS Microstrip Bandpass Filters for Wireless Communications. IEEE transactions on microwave theory and techniques. 2006,54(2):768-775
17 李大年. 微波原理技术. 北京师范大学出版社. 1994
18 吴群,宋朝晖. 微波技术. 哈尔滨工业大学出版社. 2004
19 梁联倬. 微波网络及其应用. 电子工业出版社. 1985
20 封吉平,曾瑞,梁玉英. 微波工程基础. 军械工程学院出版社. 2002
21 郝崇骏,韩永宁,袁乃昌,何建国. 微波电路. 国防科技大学出版社. 1999
22 尚洪臣. 微波网络. 东南大学出版社. 1996
23 Campbell 坎贝尔.微电子制造科学原理与工程技术:第二版. 电子工业出版社. 2003
24 R.L.Barns and R.A.Laudise. Stability of superconducting YBCO in the presence of water. Appl.Phys.Lett. 1987, 51(17):1373-1375
25 M.F.Yan,R.L.Sarns,H.M.Bryan,Jr.P.K.Gallagher,R.C.Sherwood,and S.Jin. Water interaction with the superconducting YBCO phase. Appl.Phys.Lett. 1987, 51(7):532-534
26 Q.Y.Ma,E.S.Yang,and G.V.Treyz,Chin-An Chang. Novel method of patterning YBCO superconducting thin films. Appl.Phys.Lett. 1989, 55(9):896-898
27 J.JKingston,F.C.Wellstood,Du Quan and John Clarke. Photolithographically Patterned Thin Film Multilayer Devices of YBCO. IEEE transactions on magnetics. 1991, 27(2):974-977
28 Shih and C.X.Qiu. Chemical etching of YBCO thin films. Appl.Phys.Lett. 1988, 52(18):1523-1524
29 F.K.Shokoohi,L.M.Schiavone,C.T.Rogers,A.Inam,X.D.Wu,L.Nazar,and T.Venkatesan. Wet chemical etching of HTS YBCO films in EDTA. Appl.Phys.Lett. 1989, 55(25):2661-2663
30 Carol.H.Ashby,Jon Marten,Thomas A.Plut,and David S.Ginley,Julia M.Philips. Improved aqueous etchant for high Tc superconductor materials. Appl.Phys.Lett. 1992, 60(17):2147-2149
31 M.Hangyo,S.Nashima,M.Kawanura,S.Shikii,and M.Tonouchi. Ion-Beam Milling of YBCO thin films and Their Characterization by Tine-Resolved Pump-Probe Method. IEEE transactions on applied superconductivity. 1999, 9(2):1952-1955
32 Zs.Oszi,S.Benacka,V.Strbik,S.Chromik,M.Spankova,I.Kostic,P.Kleja. Properties of YBCO and BiSrCaCuO thin film microstrips patterned by argon ion beam. Thin Solid Films. 2003, 433:359-362
33 S.S.Tinchev. Application of ion beam techniques in superconducting electronics. Vacuum. 2003, 69:17-25
34 H.Schneidewind, F.Schmidl, S.Linzen, P.Seidel. The possibilities and limitations of ion-beam etching of YBCO thin films and microbridges. Physica C. 1995, 250:191-201
35 刘让蛟,曾祥辉,王世光,戴远东. 氩离子束刻蚀 YBCO 薄膜. 低温物理学报. 1991, 13(5):338-342
36 关旭东. 硅集成电路工艺基础. 北京大学出版社. 2003
37 Y.A.Jee, M.Li, B.Ma, V.A.Maroni, B.L.Fisher, U.Balachandran. Comparison of texture development and superconducting properties of YBCO thin films prepared by TFA and PLD processes. Physica C, 2001, 356:297-303
38 李林,郭莉萍,刘军政. 高温超导 YBCO 薄膜的颗粒、杂相生长机制研究. 电子显微学报. 1997,16(3):245-249
39 B.Schey,W.Biegel,M.Kuhn and B.Stritzker. Large Area Pulsed Laser Deposition of YBCO Thin Films. IEEE transactions on applied superconductivity. 1999, 9(2):2359-2362
40 M.Tonouch,H.Shimakage,Z.Wang,S.Tomozawa,M.Hangyo,and Y.Murakami. Atomic scale flattening and characterization of a YBCO film surface. Supercond.Sci.Technol. 1996, 9:A161-A165