变包含角平面光栅单色器关键技术与性能检测方法研究
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摘要
同步辐射光源是一种极为理想的软X射线、真空紫外光源，在众多基础研究和应用研究中发挥着越来越重要的作用，研究并发展相关光束线及分光技术是同步辐射应用的重要前提。同步辐射光具有连续光谱分布，而采用同步光进行的科学实验，大部分需要选取一定波段范围内的单色光，同时对光束的光子通量、光谱分辨、光谱纯度、成像束斑等有着严格要求，这些工作是由束线单色器来完成。束线单色器是一项相当复杂的光学工程，它对光学设计、光学元件加工、检测及评价等一系列理论和技术问题提出了许多新挑战。
上海光源的建设，极大提升了我国软X射线在固体物理、生物、材料等多个领域的应用研究水平，同时对软X射线光束线的性能提出了更高的要求。设计、研制高性能的软X射线束线单色器成为研究人员获得高水平实验结果的前提和追求的新目标。在多种类型的单色器中，变包含角平面光栅单色器凭借其宽光谱、高通量、高分辨、应用灵活等优异性能获得广泛认可，但其束线单色器技术实现难度很大。
本文以提高变包含角平面光栅单色器整体性能为目标，着重介绍及研究了以下几个方面的内容：
1.阐述上海光源软X谱学显微光束线站的物理设计，着重介绍了该束线的核心装置-变包含角平面光栅单色器的总体设计，包括光学设计和机械结构设计；
2.结合应用，重点分析单色器分辨能力与机械运动精度等关键因素的相互关系；为保证光束线站整体性能，分析了单色器在波长扫描过程中，影响谱学显微光束线出射光斑水平漂移的各个因素，推导出各因素与光斑水平漂移的传递关系，并结合具体要求进行误差分配；
3.采用有限元分析技术结合上海光源特点，深入研究单色器高热载条件下光学元件的恒温冷却技术及其对光学系统的影响，并对单色器光学元件冷却进行了数值模拟。
4.提出变包含角光栅单色器离线和在线检测方法及测试手段。标定单色器波长扫描机构，并对相关的机械精度进行现场检测，给出具体检测结果。
本文研究内容将为第三代同步辐射光源中建造同类高性能变包含角单色器提供了理论基础。
Synchrotron radiation is an extremely ideal soft X ray, vacuum ultraviolet lightsource, and it plays a more and more important role in many basic and appliedresearches. Research and development of relevant beamline and Spectrum-DividingTechnologies is the important premise for the application of synchrotron radiation.Most scientific experiments just need to use monochromatic light in a certain bandwhen using synchrotron radiation with a continuous spectrum distribution, and thereare strict requirements for the photon flux, spectral resolution, spectral purity, imagingbeam spot of the beamline. These jobs are completed by the monochromators ofbeamline. The technologies of monochromator is a quite complex optical engineering,and it presents many new challenges on the optical design, optical componentsprocessing, testing and evaluation and some other theoretical and technical problems.
The construction of the Shanghai Synchrotron Radiation Facility, which greatlyenhance the applied research level of soft X-ray of our country in the solid statephysics, biology, materials, and other fields, at the same time, higher requirements forthe soft X-ray beamline have been proposed. The design of high performance softX-ray monochromator has become a new target for gaining a high level ofexperimental results. In many types of monochromator, the variable-included-angleplane grating monochromator is widely recognized due to its wide spectrum, highthroughput, high resolution, application flexibility and other superior performance,but the key technology of monochromator is very difficult to achieve.
The main research work in this paper is as follows:
1. The physical design of the soft-X spectromicroscopy beamline station in theShanghai Synchrotron Radiation Facility are described, and main focuses on thecore device of the beamline–the design of optical and mechanical structure of thevariable-included-angle plane grating monochromator;
2. The relationship between the resolution and the mechanical movement precisionare analyzed combined with the application. The various factors that result in thelight spot transversal transfer of spectromicroscopy beamline during wavelengthscanning are analyzed, and the relationship between various factors and the lightspot transversal transfer are deduced, and the error distribution are solved, in orderto ensure performance of the beamline.
3. Study on the fast constant temperature cooling technology of the optical elementswith high heat load and its effect for the optical system using the finite elementanalysis techniques combine with the characteristics of Shanghai SynchrotronRadiation Facility, and the optical element cooling are simulated..
4. Present the testing methods of the off-line and on-line of the variable-included-angle grating monochromator. The monochromator wavelength scanningmechanisms are calibrated. The mechanical precisions are measured, and the resultsare given.
The content of this paper will laid the theoretical and methodological foundationsfor designing the high performance monochromator in the third generationsynchrotron radiation.
上海光源的建设，极大提升了我国软X射线在固体物理、生物、材料等多个领域的应用研究水平，同时对软X射线光束线的性能提出了更高的要求。设计、研制高性能的软X射线束线单色器成为研究人员获得高水平实验结果的前提和追求的新目标。在多种类型的单色器中，变包含角平面光栅单色器凭借其宽光谱、高通量、高分辨、应用灵活等优异性能获得广泛认可，但其束线单色器技术实现难度很大。
本文以提高变包含角平面光栅单色器整体性能为目标，着重介绍及研究了以下几个方面的内容：
1.阐述上海光源软X谱学显微光束线站的物理设计，着重介绍了该束线的核心装置-变包含角平面光栅单色器的总体设计，包括光学设计和机械结构设计；
2.结合应用，重点分析单色器分辨能力与机械运动精度等关键因素的相互关系；为保证光束线站整体性能，分析了单色器在波长扫描过程中，影响谱学显微光束线出射光斑水平漂移的各个因素，推导出各因素与光斑水平漂移的传递关系，并结合具体要求进行误差分配；
3.采用有限元分析技术结合上海光源特点，深入研究单色器高热载条件下光学元件的恒温冷却技术及其对光学系统的影响，并对单色器光学元件冷却进行了数值模拟。
4.提出变包含角光栅单色器离线和在线检测方法及测试手段。标定单色器波长扫描机构，并对相关的机械精度进行现场检测，给出具体检测结果。
本文研究内容将为第三代同步辐射光源中建造同类高性能变包含角单色器提供了理论基础。
Synchrotron radiation is an extremely ideal soft X ray, vacuum ultraviolet lightsource, and it plays a more and more important role in many basic and appliedresearches. Research and development of relevant beamline and Spectrum-DividingTechnologies is the important premise for the application of synchrotron radiation.Most scientific experiments just need to use monochromatic light in a certain bandwhen using synchrotron radiation with a continuous spectrum distribution, and thereare strict requirements for the photon flux, spectral resolution, spectral purity, imagingbeam spot of the beamline. These jobs are completed by the monochromators ofbeamline. The technologies of monochromator is a quite complex optical engineering,and it presents many new challenges on the optical design, optical componentsprocessing, testing and evaluation and some other theoretical and technical problems.
The construction of the Shanghai Synchrotron Radiation Facility, which greatlyenhance the applied research level of soft X-ray of our country in the solid statephysics, biology, materials, and other fields, at the same time, higher requirements forthe soft X-ray beamline have been proposed. The design of high performance softX-ray monochromator has become a new target for gaining a high level ofexperimental results. In many types of monochromator, the variable-included-angleplane grating monochromator is widely recognized due to its wide spectrum, highthroughput, high resolution, application flexibility and other superior performance,but the key technology of monochromator is very difficult to achieve.
The main research work in this paper is as follows:
1. The physical design of the soft-X spectromicroscopy beamline station in theShanghai Synchrotron Radiation Facility are described, and main focuses on thecore device of the beamline–the design of optical and mechanical structure of thevariable-included-angle plane grating monochromator;
2. The relationship between the resolution and the mechanical movement precisionare analyzed combined with the application. The various factors that result in thelight spot transversal transfer of spectromicroscopy beamline during wavelengthscanning are analyzed, and the relationship between various factors and the lightspot transversal transfer are deduced, and the error distribution are solved, in orderto ensure performance of the beamline.
3. Study on the fast constant temperature cooling technology of the optical elementswith high heat load and its effect for the optical system using the finite elementanalysis techniques combine with the characteristics of Shanghai SynchrotronRadiation Facility, and the optical element cooling are simulated..
4. Present the testing methods of the off-line and on-line of the variable-included-angle grating monochromator. The monochromator wavelength scanningmechanisms are calibrated. The mechanical precisions are measured, and the resultsare given.
The content of this paper will laid the theoretical and methodological foundationsfor designing the high performance monochromator in the third generationsynchrotron radiation.
引文
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