微型F-P腔阵列光谱探测器的集成化技术研究
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摘要
光谱分析仪器是对物质的化学组成及含量进行分析的重要仪器。随着微型光谱仪的研究成功和应用,芯片式集成光谱分析系统又成为人们探索的重点。本论文在国家自然科学基金的资助下,提出采用MEMS和微电子等技术进行微型F-P腔式阵列光谱探测器集成化关键技术的研究,以期构成一种小体积、高光通量、高灵敏、高可靠性的集成F-P腔阵列光谱探测器。论文的主要研究工作如下:
①通过查阅国内外文献资料,在本中心前期研究微型光谱分析仪器成果的基础上,提出了基于微型F-P腔阵列的光谱探测器集成化技术研究的思想;
②研究了微型F-P腔阵列光谱探测器的结构和工作原理,进行了相关理论和结构的分析,确定了系统方案;
③提出采用N阱P衬底结构光电二极管为探测器,获得了光电二极管的SPICE模型和参数;
④根据系统工作原理,设计了该光谱探测器的读出电路,该电路采用一种包含动态源随器和采样保持电容的采样电路,同时使用移位寄存器来实现信号逐位扫描输出,该电路具有结构简单、功耗低、去噪效果好等特点;完成了系统级模拟;
⑤在对整体工艺进行研究的基础上,从集成化角度出发,给出该微型F-P腔阵列光谱探测器的加工工艺流程和要求,基于MOSIS/ORBIT 2.0U SCNA工艺,采用tanner软件完成了8个单元探测器和读出电路的版图设计,进行了DRC、版图提取以及版图后仿真,验证了所设计的版图的正确性。
The optical spectrometer is an important instrument for analyzing the chemistry constitute and content of the material. The chip type integrated spectral analysis system becomes the key point which the people explore. This thesis is subsidized by the national natural science fund, which makes a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by adopting MEMS and IC technology, and hope to constitute a integrated F-P-type cavity Array Spectral Detector with small size, high-Luminous flux, high-sensitivity, high reliability. It’s major research contents as follows:
①. This thesis putted forward make a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by consulting a number of literature at home and abroad and the achievement about microspectrometer in our lab.
②. Ihis thesis made a study on structure and principle of the Micromation F-P cavity Array Spectral Detector, analyzed the related theory and determined the system program.
③. It adopted N+/P photodiode as the detector, and got the SPICE model and parameter of the photodiode.
④. Based on the principle of the system, we designed the readout circuit which contained dynamic source follower and sampling maintain capacitance, and used the shift register to scan the signal and bit by bit transfer. This circuit had simple structure, low power consumption and effective denoising. Besides we had completed the Pspice System-level simulation.
⑤. Researched on the overall process, the thesis gave the process chart and request of the Micromation F-P cavity Array Spectral Detector, then used tanner to design layout of 8 cells detector and readout circuit by adopting MOSIS/ORBIT 2.0U SCNA. We carried out DRC, extraction, post layout simulation, and proved validity of the layout.
①通过查阅国内外文献资料,在本中心前期研究微型光谱分析仪器成果的基础上,提出了基于微型F-P腔阵列的光谱探测器集成化技术研究的思想;
②研究了微型F-P腔阵列光谱探测器的结构和工作原理,进行了相关理论和结构的分析,确定了系统方案;
③提出采用N阱P衬底结构光电二极管为探测器,获得了光电二极管的SPICE模型和参数;
④根据系统工作原理,设计了该光谱探测器的读出电路,该电路采用一种包含动态源随器和采样保持电容的采样电路,同时使用移位寄存器来实现信号逐位扫描输出,该电路具有结构简单、功耗低、去噪效果好等特点;完成了系统级模拟;
⑤在对整体工艺进行研究的基础上,从集成化角度出发,给出该微型F-P腔阵列光谱探测器的加工工艺流程和要求,基于MOSIS/ORBIT 2.0U SCNA工艺,采用tanner软件完成了8个单元探测器和读出电路的版图设计,进行了DRC、版图提取以及版图后仿真,验证了所设计的版图的正确性。
The optical spectrometer is an important instrument for analyzing the chemistry constitute and content of the material. The chip type integrated spectral analysis system becomes the key point which the people explore. This thesis is subsidized by the national natural science fund, which makes a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by adopting MEMS and IC technology, and hope to constitute a integrated F-P-type cavity Array Spectral Detector with small size, high-Luminous flux, high-sensitivity, high reliability. It’s major research contents as follows:
①. This thesis putted forward make a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by consulting a number of literature at home and abroad and the achievement about microspectrometer in our lab.
②. Ihis thesis made a study on structure and principle of the Micromation F-P cavity Array Spectral Detector, analyzed the related theory and determined the system program.
③. It adopted N+/P photodiode as the detector, and got the SPICE model and parameter of the photodiode.
④. Based on the principle of the system, we designed the readout circuit which contained dynamic source follower and sampling maintain capacitance, and used the shift register to scan the signal and bit by bit transfer. This circuit had simple structure, low power consumption and effective denoising. Besides we had completed the Pspice System-level simulation.
⑤. Researched on the overall process, the thesis gave the process chart and request of the Micromation F-P cavity Array Spectral Detector, then used tanner to design layout of 8 cells detector and readout circuit by adopting MOSIS/ORBIT 2.0U SCNA. We carried out DRC, extraction, post layout simulation, and proved validity of the layout.
引文
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[2]龙文华.基于MEMS技术的Fabry Perot腔长可调滤波器研究[D]. 2006.
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[5] J. H. Jerman,D.J. Clift.S.R. Mallinson. A Miniature Fabry-Perot Interferometer with a Corrugated Silicon Diaphragm Support[J]. IEEE, 1990,140-144.
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[7] A Fabry-Perot Spectrometer Microspectrometer Fabricated Using Surface Micromachining Technology[Z]. http://www.ece.neu.edu/edsnu/zavracky/mfl/programs/spec/microspe.html
[8] T. Dohi,K. Matsupnoto and I. Shimoyama. The Micro Fabry-Perot Interferometer For The Spectral Endoscope[J]. IEEE, 2005,830-833.
[9] Chin Piao Chang.Ruey-Shing Huang.A 16-Channel Array-Type Microspectrometer Using Integrated Fabry-Perot Etalons and Lateral PIN Photodetectors[J].IEEE,2003,675-678.
[10]王建国.微型F-P腔阵列光谱探测器研究[D]. 2007.
[11]张华斌,张庆中.红外焦平面阵列技术现状和发展趋势[J].传感器世界,2005.5:6-10.
[12] F-P干涉仪[Z]. http://baike.baidu.com/view/132260.htm
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[14]唐天同,王兆宏,陈时.集成光电子学[M].西安交通大学出版社, 2005.
[15]曾光宇,张志伟,张存林.光电检测技术[M].清华大学出版社,2005.
[16]林聚承.新型CMOS图像传感器的研究[D]. 2006.
[17]袁祥辉.固体图象传感器及其应用[M].重庆大学出版社, 1996.
[18]论微弱光信号前置放大电路设计[Z]. http://www.ic37.com/htm_tech/2008-1/12016_21720.htm
[19]李金平.模拟集成电路基础[M].清华大学出版社, 2003.
[20] I. Brouk, and Y. Nemirovsky. Dimensional effects in CMOS photodiodes[J]. Solid-State Electronics, Vol.46, No. 1, pp.19-28 Jan.2002.
[21] JoséHigino Correia, Ger de Graaf, Marian Bartek, and Reinoud F. Wolffenbutte. A Single-Chip CMOS Optical Microspectrometer With Light-to-Frequency Converter and Bus Interface[J]. JOURNAL OF SOLID-STATE CIRCUITS. IEEE, VOL. 37, NO. 10,OCTOBER 2002.
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[24]鞠挥,吴一辉.微型光谱仪的发展现状[J].光学精密工程. 2001,9(4),372.
[25] Behzad Razavi,陈贵灿,程军,张瑞智等译.模拟CMOS集成电路设计[M].西安交通大学出版社, 2003.
[26]金湘亮,陈杰,仇玉林.一种新型低功耗准动态移位寄存器的模拟[J].固体电子学研究与进展, 2004,24(1).
[27] Kaneko Toshiki, Hosokaw a Yoshikazu, TadauchiMasaharu, et al. 400 dpi integrated contacttype linear image sensors with poly-Si TFT’s analog readout circuit and dynamic shift registers[J].Trans on Electron Devices, IEEE, 1991,38(5):1086-1093
[28]张智,袁祥辉,黄友恕,吕果林.一种用于大面积CMOS FPA的相关双采样保持电路[J].半导体光电, 2003.24(4).
[29] Dan Clein.邓红辉,王晓蕾,耿罗锋. CMOS集成电路版图概念、方法与工具[M].北京.电子工业出版社. 2006.
[30] Christopher Saint,Judy Saint.集成电路版图基础[M].清华大学出版社, 2006.
[31]王志功主编.集成电路设计与九天EDA工具应用[M].东南大学出版社, 2004.
[32]廖裕评,陆瑞强. Tanner Pro集成电路设计与布局实战指导[M].科学出版社, 2007.
[33]孙润. Tanner集成电路设计教程(第二册)[M].北京希望电子出版社, 2002.
[34]刘恩科,朱秉升,罗晋生等.半导体物理学[M].北京.电子工业出版社, 2003.
[35]黄德修.半导体光电子学[M].成都.电子科技大学出版社, 1989.
[36]谢嘉奎.电子线路(线性部分)[M].高等教育出版社, 1999.
[37]缪家鼎,徐文娟,牟同升.光电技术[M].浙江.浙江大学出版社, 2002.
[38]林聚承,袁祥辉.一种新型650nm的光电探测器[J].仪器仪表学报, 2004.25(4).
[39] A. Moini, Vision chips or seeing silicon, Center for High Performance Integrated Technologies and Systems[J], University of Adelaide, Adelaide, Australia, Technical Report, March 1997.
[40] A.EI Gamal, Introduction to Image Sensor an Digital Cameras[J], Stanford University, Stanford,USA,EE-329B Lecture Notes, April 2001.
[41] R. Hornsey, Design and fabrcation of integrated image sensors, Institute for ComputerResearch[J],University of Waterloo, Waterloo, Canada, Short-course Notes, May 1998.
[42] M. Loose, A self-calibrating CMOS image sensor with logarithmic response[J], ph.D. Dissertation, University of Heidelberg, Heidelberg, Germany, Oct. 1999.
[43] Fraunhofer-Gesellschaft website, Analog IC-Design, Photosensors on Standard CMOS Processes[Z]. http://www.fraunhofer.de/,2000.
[44] M.Schanz, Linear CMOS Image Sensors with Integrated Signal Processing[J], PHD dissertation, University of Duisburg, Duisburg, Germany, June 1998.
[45] I. Brouk, and Y. Nemirovsky, Dimensional effects in CMOS photodiodes[J], Solid-State Electronics, Vol.46, No. 1 , pp.19-28 Jan.2002.
[46] Sunetra K, Mendis, Sabrina E, Kemeny, Tussell C, Gee, et al CMOS Active Pixel Image Sensor for Highly Integrated Imaging Systems [J]. IEEE Journal of Solid-State Circuits, 1997, 32(2):187-197.
[47]童诗白,华成英.模拟电子技术基础[M].高等教育出版社, 2001.
[48]郝永平,刘凤丽,刘世明. MEMS设计模拟与仿真系统应用[M].国防工业出版社, 2007.
[49]李薇薇,王胜利,刘玉岭.微电子工艺基础[M].化学工业出版社, 2007.
[50]金玉丰,王志平,陈兢.微系统封装技术概论[M].科学出版社, 2006.
[2]龙文华.基于MEMS技术的Fabry Perot腔长可调滤波器研究[D]. 2006.
[3] J.H.Jerman.A Miniature Fabry-Perot Interferometer Fabricated Using SiliconMicromachining Techniques[J].IEEE, 1988,16-18.
[4] J. H. Jerman,D.J. Clift.Miniature Fabry-Perot Interferometers Micromachined in Silicon for use in OpticalFiber WDM Systems[J].IEEE, 1991,372-375.
[5] J. H. Jerman,D.J. Clift.S.R. Mallinson. A Miniature Fabry-Perot Interferometer with a Corrugated Silicon Diaphragm Support[J]. IEEE, 1990,140-144.
[6] N.F.Raley,D.R.Ciarlo,ect.A Fabry-Perot Microinterferometer For Visible Wavelengths[J]. IEEE , 1992 ,170-173.
[7] A Fabry-Perot Spectrometer Microspectrometer Fabricated Using Surface Micromachining Technology[Z]. http://www.ece.neu.edu/edsnu/zavracky/mfl/programs/spec/microspe.html
[8] T. Dohi,K. Matsupnoto and I. Shimoyama. The Micro Fabry-Perot Interferometer For The Spectral Endoscope[J]. IEEE, 2005,830-833.
[9] Chin Piao Chang.Ruey-Shing Huang.A 16-Channel Array-Type Microspectrometer Using Integrated Fabry-Perot Etalons and Lateral PIN Photodetectors[J].IEEE,2003,675-678.
[10]王建国.微型F-P腔阵列光谱探测器研究[D]. 2007.
[11]张华斌,张庆中.红外焦平面阵列技术现状和发展趋势[J].传感器世界,2005.5:6-10.
[12] F-P干涉仪[Z]. http://baike.baidu.com/view/132260.htm
[13]郭培源,付扬.光电检测技术和应用[M].北京航空航天大学出版社, 2006.3.
[14]唐天同,王兆宏,陈时.集成光电子学[M].西安交通大学出版社, 2005.
[15]曾光宇,张志伟,张存林.光电检测技术[M].清华大学出版社,2005.
[16]林聚承.新型CMOS图像传感器的研究[D]. 2006.
[17]袁祥辉.固体图象传感器及其应用[M].重庆大学出版社, 1996.
[18]论微弱光信号前置放大电路设计[Z]. http://www.ic37.com/htm_tech/2008-1/12016_21720.htm
[19]李金平.模拟集成电路基础[M].清华大学出版社, 2003.
[20] I. Brouk, and Y. Nemirovsky. Dimensional effects in CMOS photodiodes[J]. Solid-State Electronics, Vol.46, No. 1, pp.19-28 Jan.2002.
[21] JoséHigino Correia, Ger de Graaf, Marian Bartek, and Reinoud F. Wolffenbutte. A Single-Chip CMOS Optical Microspectrometer With Light-to-Frequency Converter and Bus Interface[J]. JOURNAL OF SOLID-STATE CIRCUITS. IEEE, VOL. 37, NO. 10,OCTOBER 2002.
[22] Jose Higino Correia, Ger de Graaf Marian Bartek, andReinoud F,Wolffenbuttel.A CMOS Optical Microspectrometer With Light-to-Frequency Converter, Bus Interface, and Stray-Light Compensation[J]. TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, IEEE, VOL.50, 2001.
[23] Jianguo Wang, Zhiyu Wen, Gang Chen.A New-Style Compositive Miniature Spectrum Instrument[J]. The First Annual IEEE International Conference,January 18-21, 2006.
[24]鞠挥,吴一辉.微型光谱仪的发展现状[J].光学精密工程. 2001,9(4),372.
[25] Behzad Razavi,陈贵灿,程军,张瑞智等译.模拟CMOS集成电路设计[M].西安交通大学出版社, 2003.
[26]金湘亮,陈杰,仇玉林.一种新型低功耗准动态移位寄存器的模拟[J].固体电子学研究与进展, 2004,24(1).
[27] Kaneko Toshiki, Hosokaw a Yoshikazu, TadauchiMasaharu, et al. 400 dpi integrated contacttype linear image sensors with poly-Si TFT’s analog readout circuit and dynamic shift registers[J].Trans on Electron Devices, IEEE, 1991,38(5):1086-1093
[28]张智,袁祥辉,黄友恕,吕果林.一种用于大面积CMOS FPA的相关双采样保持电路[J].半导体光电, 2003.24(4).
[29] Dan Clein.邓红辉,王晓蕾,耿罗锋. CMOS集成电路版图概念、方法与工具[M].北京.电子工业出版社. 2006.
[30] Christopher Saint,Judy Saint.集成电路版图基础[M].清华大学出版社, 2006.
[31]王志功主编.集成电路设计与九天EDA工具应用[M].东南大学出版社, 2004.
[32]廖裕评,陆瑞强. Tanner Pro集成电路设计与布局实战指导[M].科学出版社, 2007.
[33]孙润. Tanner集成电路设计教程(第二册)[M].北京希望电子出版社, 2002.
[34]刘恩科,朱秉升,罗晋生等.半导体物理学[M].北京.电子工业出版社, 2003.
[35]黄德修.半导体光电子学[M].成都.电子科技大学出版社, 1989.
[36]谢嘉奎.电子线路(线性部分)[M].高等教育出版社, 1999.
[37]缪家鼎,徐文娟,牟同升.光电技术[M].浙江.浙江大学出版社, 2002.
[38]林聚承,袁祥辉.一种新型650nm的光电探测器[J].仪器仪表学报, 2004.25(4).
[39] A. Moini, Vision chips or seeing silicon, Center for High Performance Integrated Technologies and Systems[J], University of Adelaide, Adelaide, Australia, Technical Report, March 1997.
[40] A.EI Gamal, Introduction to Image Sensor an Digital Cameras[J], Stanford University, Stanford,USA,EE-329B Lecture Notes, April 2001.
[41] R. Hornsey, Design and fabrcation of integrated image sensors, Institute for ComputerResearch[J],University of Waterloo, Waterloo, Canada, Short-course Notes, May 1998.
[42] M. Loose, A self-calibrating CMOS image sensor with logarithmic response[J], ph.D. Dissertation, University of Heidelberg, Heidelberg, Germany, Oct. 1999.
[43] Fraunhofer-Gesellschaft website, Analog IC-Design, Photosensors on Standard CMOS Processes[Z]. http://www.fraunhofer.de/,2000.
[44] M.Schanz, Linear CMOS Image Sensors with Integrated Signal Processing[J], PHD dissertation, University of Duisburg, Duisburg, Germany, June 1998.
[45] I. Brouk, and Y. Nemirovsky, Dimensional effects in CMOS photodiodes[J], Solid-State Electronics, Vol.46, No. 1 , pp.19-28 Jan.2002.
[46] Sunetra K, Mendis, Sabrina E, Kemeny, Tussell C, Gee, et al CMOS Active Pixel Image Sensor for Highly Integrated Imaging Systems [J]. IEEE Journal of Solid-State Circuits, 1997, 32(2):187-197.
[47]童诗白,华成英.模拟电子技术基础[M].高等教育出版社, 2001.
[48]郝永平,刘凤丽,刘世明. MEMS设计模拟与仿真系统应用[M].国防工业出版社, 2007.
[49]李薇薇,王胜利,刘玉岭.微电子工艺基础[M].化学工业出版社, 2007.
[50]金玉丰,王志平,陈兢.微系统封装技术概论[M].科学出版社, 2006.