飞秒脉冲激光光刻波导技术
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摘要
光波导是集成光学的基本元件,在光通讯领域有着广泛地应用。传统的波导制作技术有离子交换、离子注入、刻蚀等,近年来,飞秒激光在透明材料中写入光波导技术越来越受到人们的关注。本文主要研究了应用飞秒激光在熔融石英材料中写入光波导技术,并讨论了圆形横截面波导的实现、波导类型特征以及超快激光在波导阵列中传输非线性效应等问题。论文完成的主要工作如下:
1)通过对比波导写入的纵向写入和横向写入两种方式及其优缺点,针对大面积PLC制作要求,研究了用光束整形的方式来补偿横向写入方式导致的波导截面不对称性问题,在实验上采用狭缝光束整形技术制作出具有圆形横截面的波导,并通过旋转狭缝,使飞秒激光经过动态旋转狭缝在熔融石英中实现了二维弧线圆形横截面波导的制作,为实现复杂的PLC奠定了重要的基础。
2)激光辐照条件的不同使得波导分为Ⅰ类波导和Ⅱ类波导,不同的激光参数都有不同类型的波导写入窗口,分析讨论了波导类型与脉冲宽度、聚焦情况与激光偏振态的相关性。阐述了波导特征参数:近场模式、远场模式、折射率分布、波导损耗等的获取方式。
3)研究了飞秒光刻波导阵列中的非线性问题,飞秒激光脉冲在波导阵列中传输产生的非线性折射率导致的功率局域化和反局域化过程由波导阵列初始折射率差(△n_0),非线性折射率差(△n_(non))和最大耦合常数对应的饱和折射率差(△n_s)之间的关系决定,实验上用高重复频率飞秒激光光刻波导技术制作了波导阵列,注入低重复频率的飞秒激光,引入非线性折射率,观察到局域化和反局域化过程。
Optical waveguide is the basic element of integrated optics,and it plays an important role in the applications of optical communications.In compared with some traditional waveguide fabrication techniques,such as ion exchange,ion implanting and etching,femtosecond laser optical waveguide writing in transparent material has attracted a lot of attention in recent years.Femtosecond laser inscription waveguide in fused silica has been discussed,in special,I focused on the issue of realization of circular cross-section waveguide in two dimensions,properties of femtosecond laser inscription waveguide,and nonlinear propagation in the waveguide arrays.The main work has been achieved as follows:
1) The two schemes of femtosecond laser inscription waveguide,as called longitudinal and transverse writing geometries,and the resulting advantage and disadvantage has been discussed.To meet the requirement of large area of planar light-wave circuit(PLC),it is investigated that the use of beam shaping techniques compensate asymmetry in the waveguide cross-section of transverse writing geometries.The waveguide with circular cross-section has been fabricated with beam shaping by silt in the experiment,and realize fabrication of circular cross-section arc waveguide in two dimensions by rotating the silt.It provides important base to realization of complex planer light-wave circuit.
2) Femtosecond laser inscription waveguide contributes typeⅠand typeⅡwaveguide which distinguish with the writing conditions.The dependence of waveguide type on pulse width,focusing optics and polarization of laser has been investigated.Also it is depicted how to obtain characteristic parameters of waveguide such as near field mode,far field mode,refractive index distribution,and waveguide loss,repsectively.
3) Nonlinear effect of waveguide arrays prepared by femtosecond laser photoinscription has been studied.Nonlinear refractive index of ultrashort pulse laser propagating in the waveguide array leads to nonlinear localization and delocalization, which are decided by the relationship between initiate refractive index change of waveguide array(Δn_0),nonlinear refractive index change(Δn_(non)),and optimum refractive index change(Δn_s) which corresponds to optimal coupling constant.Also nonlinear localization and delocalization are observed in experiment with help of high repetition-rate femtosecond laser inscription waveguide array injected by low repetition rate femtosecond laser.
1)通过对比波导写入的纵向写入和横向写入两种方式及其优缺点,针对大面积PLC制作要求,研究了用光束整形的方式来补偿横向写入方式导致的波导截面不对称性问题,在实验上采用狭缝光束整形技术制作出具有圆形横截面的波导,并通过旋转狭缝,使飞秒激光经过动态旋转狭缝在熔融石英中实现了二维弧线圆形横截面波导的制作,为实现复杂的PLC奠定了重要的基础。
2)激光辐照条件的不同使得波导分为Ⅰ类波导和Ⅱ类波导,不同的激光参数都有不同类型的波导写入窗口,分析讨论了波导类型与脉冲宽度、聚焦情况与激光偏振态的相关性。阐述了波导特征参数:近场模式、远场模式、折射率分布、波导损耗等的获取方式。
3)研究了飞秒光刻波导阵列中的非线性问题,飞秒激光脉冲在波导阵列中传输产生的非线性折射率导致的功率局域化和反局域化过程由波导阵列初始折射率差(△n_0),非线性折射率差(△n_(non))和最大耦合常数对应的饱和折射率差(△n_s)之间的关系决定,实验上用高重复频率飞秒激光光刻波导技术制作了波导阵列,注入低重复频率的飞秒激光,引入非线性折射率,观察到局域化和反局域化过程。
Optical waveguide is the basic element of integrated optics,and it plays an important role in the applications of optical communications.In compared with some traditional waveguide fabrication techniques,such as ion exchange,ion implanting and etching,femtosecond laser optical waveguide writing in transparent material has attracted a lot of attention in recent years.Femtosecond laser inscription waveguide in fused silica has been discussed,in special,I focused on the issue of realization of circular cross-section waveguide in two dimensions,properties of femtosecond laser inscription waveguide,and nonlinear propagation in the waveguide arrays.The main work has been achieved as follows:
1) The two schemes of femtosecond laser inscription waveguide,as called longitudinal and transverse writing geometries,and the resulting advantage and disadvantage has been discussed.To meet the requirement of large area of planar light-wave circuit(PLC),it is investigated that the use of beam shaping techniques compensate asymmetry in the waveguide cross-section of transverse writing geometries.The waveguide with circular cross-section has been fabricated with beam shaping by silt in the experiment,and realize fabrication of circular cross-section arc waveguide in two dimensions by rotating the silt.It provides important base to realization of complex planer light-wave circuit.
2) Femtosecond laser inscription waveguide contributes typeⅠand typeⅡwaveguide which distinguish with the writing conditions.The dependence of waveguide type on pulse width,focusing optics and polarization of laser has been investigated.Also it is depicted how to obtain characteristic parameters of waveguide such as near field mode,far field mode,refractive index distribution,and waveguide loss,repsectively.
3) Nonlinear effect of waveguide arrays prepared by femtosecond laser photoinscription has been studied.Nonlinear refractive index of ultrashort pulse laser propagating in the waveguide array leads to nonlinear localization and delocalization, which are decided by the relationship between initiate refractive index change of waveguide array(Δn_0),nonlinear refractive index change(Δn_(non)),and optimum refractive index change(Δn_s) which corresponds to optimal coupling constant.Also nonlinear localization and delocalization are observed in experiment with help of high repetition-rate femtosecond laser inscription waveguide array injected by low repetition rate femtosecond laser.
引文
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