基于像散原理的并行共焦微结构形貌检测系统及信息处理技术研究
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摘要
并行共聚焦检测技术以其非接触、高精度、高分辨率、三维层析能力、非扫描的快速检测能力以及易于实现三维可视化测量的独特优势,使其能够在微结构表面形貌检测中发挥重要作用。近年来报道有多种形式的并行共聚焦检测系统,以实现非扫描的快速共焦测量,但多数应用领域仍局限于生物切片的观测,应用于微结构表面形貌检测的并行共焦检测系统的研究和开发都还处于基础理论与方法研究阶段,实现的测量精度离微结构形貌和轮廓要素检测的要求还有较大差距,仍未见应用于微结构表面形貌和轮廓要素检测的商品化仪器。
学位论文选题“基于像散原理的并行共焦微结构形貌检测系统及信息处理技术研究”,来源于国家自然科学基金项目“基于并行像散共焦探测的微结构三维形貌测量技术基础研究(50775063)”。论文的研究重点是：①基于像散原理的并行共焦光学系统的三维光学衍射成像理论研究；②构建实验系统,通过仿真与实验验证理论研究结论的正确性；③研究开发被测微结构表面形貌三维信息萃取方法,实验评估系统的特性；④研究基于表面三维重构的微结构形貌可视化测量方法。研究工作对促进并行共焦检测技术的实用化具有理论意义和应用价值。
本论文主要研究工作和取得的创新性成果如下：
1.从光学三维相干成像理论出发,推导了基于像散原理的并行共焦系统相干衍射成像的数学模型,提出了基于远心光路的并行像散共焦检测系统的设计思路；证明了提高系统的放大倍率并选择两片相同的薄柱面镜组成像散镜组,并优化像散镜组参数,将有利于提高全场检测灵敏度和对称性、有利于确保全场检测特性的一致性；通过理论分析和仿真指出在基于像散原理的并行共焦检测系统中应避免对并行光束设置共同的光学限制,否则物面倾斜将严重干扰像散效应的正常发挥,引起检测特性畸变。
2.基于实用性和可靠性的考量,确定了20倍系统放大：对系统进行了Zemax仿真,考察了系统横向和轴向特性,确定了系统的结构参数,证明了通过优化配置两柱面镜之间的距离,能够优化系统全场检测曲线灵敏度。
3.设计并研制了实现全场并行测点正焦位置信息萃取的信息处理模块。提出采用先创建模板实现光场横向定位分割,再根据模板提供的光场横向位置等相关信息实现四象限差动光能统计的两步走策略；研究了“定点萃取”与“浮点萃取”两种正焦信息萃取算法,克服了被测物面几何特性造成的光场横向漂移,保证了测点正焦信息萃取的可靠性。
4.进行了若干实验研究：①证实了当两柱面镜之间的距离为3.4mm时,全场检测曲线平均灵敏度得到优化(0.292/μm)、线性范围±2μm；②研究了图像预处理对全场检测曲线的改进作用：图像进行“暗化”处理,检测曲线过“零”灵敏度能够提高100%；图像的“非线性增强”处理对“零”点辨识精度有改进作用,实验获得的最佳效果是将测点正焦位置辨识精度提高了17%；③进行重复测量评估了检测曲线的稳定性,四象限差动光强统计值变动的全场平均标准差值在0.0030～0.0044之间,全场测点正焦位置辨识精度达到50nm。
5.考虑到运算的便捷和曲面重构的高精度,选择双三次插值样条函数曲面作为三维重构的数学模型；建立了被测表面形貌、测点密度和重构精度的关系模型,即可根据要求的重构精度确定合理细分倍率,也可计算特定测量任务的重构误差；研究了“点拾取”和“要素拾取”两种鼠标拾取方式以满足不同测量任务的需求。
论文的研究成果为并行像散共焦检测系统商品化提供了一些有价值的设计理念和设计方法,并在改善并行共焦检测系统性能、提高其分辨力和测量精度、增强系统适应性等方面做了一些有价值的探索,取得了一些宝贵的经验。
The technology of the parallel confocal detection has played an important role in the measurement the3-D profile of the micro-structure due to its good features, e.g. non-contact measurement, high accuracy and high resolution,3-D sectioning strength, rapid detection as well as easy to implement3-D visualization measurement. In recent years, reports indicate that various types of parallel confocal detecting systems which can execute the non-scanning confocal detecting have been emerging. But most of them have been restricted to inspection biological slices. The parallel confocal detecting systems which can be used to detecting the3-D profile of micro-structure still have been theoretical exploratory. There are still great gaps between the existing measurement accuracy for the3-D profile of micro-structure and claimed. And the corresponding commercial instruments still has not come out.
The title of this dissertation is "Research on the Parallel Astigmatic Confocal Detecting System and its Information Processing Technology for Measurement the3-D Profile of Micro-structure", and comes from the People's Republic of China natural science fund project (Fundamental Research on Measurement the3D Profile of Micro-structure Based on the Detecting Principle of Parallel Astigmatic Confocal,50775063). The main points of the dissertation includes modeling on the3-D diffraction coherent imaging of the parallel confocal detecting system based on the astigmatic principle, building the experimental system and with which verifying the theoretical research results, researching the measured profile's3-D information extraction methods and by which the performances of the system are estimated, researching visualization method to measure the profile of microstructure based on3-D reconstruction, et al. The research work is significant and substantial in the theory and application to promote the practical application of parallel confocal detecting technologies.
The main work and the originalities of the dissertation are as follows:
1. According to3-D diffraction coherent imaging theory, the3-D diffraction coherent imaging mathematical models of the parallel confocal detecting system based on the astigmatic principle are derived. The dissertation proposes that the essential light path of the parallel confocal detecting system based on the astigmatic principle should conform to the telecentric light path, and proves that increasing system's magnification, selecting two exact uniform cylindrical thin lenses to form the astigmatic unit, optimizing the unit's parameters are good for raising the whole field detecting curves' sensitivity, symmetry, consistency and stability. Through theoretical analysis and simulation, the dissertation points out that a common optical limitation should not be set in the parallel confocal detecting system based on the astigmatic principle, otherwise the slope of the measured surface could disturb seriously astigmatic effect and result in obvious distortion of the detecting curves.
2. In view of usability and reliability, the system's magnifying power is set20. Through the Zemax simulation, the system's transverse and axial performances are investigated and the system's structural parameters are determined. It is also proved that optimizing the distance between two cylindrical lenses can optimized the sensitivity of whole field detecting curves.
3. Several primary algorithms that deal with extracting whole field parallel probing points' in-focus information have been designed and implemented. An effective in-focus information extraction strategy, first to create a data template and than to calculate whole field four-quadrant differential light statistics based on the template, has been proposed and executed. Two algorithms, i.e."fixed-point extracting" and "floating-point extracting" are proposed in order to remove the effect coming from parallel faculae's transverse drift and ensure whole field parallel probing points' in-focus position identification accuracy.
4. Several experimental studies have been executed. The experiments prove that when the distance between the two cylindrical lenses is3.4mm, the average sensitivity of whole field detecting curves can reach0.292/μm, linearity range has been±2μm. Several image preprocessing methods are investigated to improve whole field detecting curves. The experiments also prove that "darkening" images can raise the sensitivity of detecting curves'100%and "nonlinear strengthening" images can decrease17%distinguishing errors of whole field probing points' in-focus position. By iterative measurements, the stability of whole field detecting curves is estimated, The standard deviations of the whole field four-quadrant differential light statistic are within0.0030-0.0044, which implies that the identification accuracy of whole field probing points'in-focus position can reach50nm.
5. Taking the uncomplicated calculation and reconstruction accuracy into account, bi-cubic-spline interpolation curve surface fitting method is selected to reconstruct the measured profile of micro-structure. A model about the error between the triangular plane and local bi-cubic-spline interpolation curve surface is derived, which can be used to not only assess reconstruction accuracy for measured micro-structure but also estimate necessary subdivision rate to a specific micro-structure according to a given reconstruction accuracy. Two mouse pickup modes,"the point pickup" and "the feature pickup", are designed to make the system adapt easily different measurement tasks.
The research results could have provided some valuable design ideas and methods for commercializing the parallel confocal detecting system. The author has accomplished several significant explorations within improving the performance, raising the resolving power and measurement accuracy as will as strengthening adaptability of the parallel confocal detecting system, and accumulated some rewarding experiences.
学位论文选题“基于像散原理的并行共焦微结构形貌检测系统及信息处理技术研究”,来源于国家自然科学基金项目“基于并行像散共焦探测的微结构三维形貌测量技术基础研究(50775063)”。论文的研究重点是：①基于像散原理的并行共焦光学系统的三维光学衍射成像理论研究；②构建实验系统,通过仿真与实验验证理论研究结论的正确性；③研究开发被测微结构表面形貌三维信息萃取方法,实验评估系统的特性；④研究基于表面三维重构的微结构形貌可视化测量方法。研究工作对促进并行共焦检测技术的实用化具有理论意义和应用价值。
本论文主要研究工作和取得的创新性成果如下：
1.从光学三维相干成像理论出发,推导了基于像散原理的并行共焦系统相干衍射成像的数学模型,提出了基于远心光路的并行像散共焦检测系统的设计思路；证明了提高系统的放大倍率并选择两片相同的薄柱面镜组成像散镜组,并优化像散镜组参数,将有利于提高全场检测灵敏度和对称性、有利于确保全场检测特性的一致性；通过理论分析和仿真指出在基于像散原理的并行共焦检测系统中应避免对并行光束设置共同的光学限制,否则物面倾斜将严重干扰像散效应的正常发挥,引起检测特性畸变。
2.基于实用性和可靠性的考量,确定了20倍系统放大：对系统进行了Zemax仿真,考察了系统横向和轴向特性,确定了系统的结构参数,证明了通过优化配置两柱面镜之间的距离,能够优化系统全场检测曲线灵敏度。
3.设计并研制了实现全场并行测点正焦位置信息萃取的信息处理模块。提出采用先创建模板实现光场横向定位分割,再根据模板提供的光场横向位置等相关信息实现四象限差动光能统计的两步走策略；研究了“定点萃取”与“浮点萃取”两种正焦信息萃取算法,克服了被测物面几何特性造成的光场横向漂移,保证了测点正焦信息萃取的可靠性。
4.进行了若干实验研究：①证实了当两柱面镜之间的距离为3.4mm时,全场检测曲线平均灵敏度得到优化(0.292/μm)、线性范围±2μm；②研究了图像预处理对全场检测曲线的改进作用：图像进行“暗化”处理,检测曲线过“零”灵敏度能够提高100%；图像的“非线性增强”处理对“零”点辨识精度有改进作用,实验获得的最佳效果是将测点正焦位置辨识精度提高了17%；③进行重复测量评估了检测曲线的稳定性,四象限差动光强统计值变动的全场平均标准差值在0.0030～0.0044之间,全场测点正焦位置辨识精度达到50nm。
5.考虑到运算的便捷和曲面重构的高精度,选择双三次插值样条函数曲面作为三维重构的数学模型；建立了被测表面形貌、测点密度和重构精度的关系模型,即可根据要求的重构精度确定合理细分倍率,也可计算特定测量任务的重构误差；研究了“点拾取”和“要素拾取”两种鼠标拾取方式以满足不同测量任务的需求。
论文的研究成果为并行像散共焦检测系统商品化提供了一些有价值的设计理念和设计方法,并在改善并行共焦检测系统性能、提高其分辨力和测量精度、增强系统适应性等方面做了一些有价值的探索,取得了一些宝贵的经验。
The technology of the parallel confocal detection has played an important role in the measurement the3-D profile of the micro-structure due to its good features, e.g. non-contact measurement, high accuracy and high resolution,3-D sectioning strength, rapid detection as well as easy to implement3-D visualization measurement. In recent years, reports indicate that various types of parallel confocal detecting systems which can execute the non-scanning confocal detecting have been emerging. But most of them have been restricted to inspection biological slices. The parallel confocal detecting systems which can be used to detecting the3-D profile of micro-structure still have been theoretical exploratory. There are still great gaps between the existing measurement accuracy for the3-D profile of micro-structure and claimed. And the corresponding commercial instruments still has not come out.
The title of this dissertation is "Research on the Parallel Astigmatic Confocal Detecting System and its Information Processing Technology for Measurement the3-D Profile of Micro-structure", and comes from the People's Republic of China natural science fund project (Fundamental Research on Measurement the3D Profile of Micro-structure Based on the Detecting Principle of Parallel Astigmatic Confocal,50775063). The main points of the dissertation includes modeling on the3-D diffraction coherent imaging of the parallel confocal detecting system based on the astigmatic principle, building the experimental system and with which verifying the theoretical research results, researching the measured profile's3-D information extraction methods and by which the performances of the system are estimated, researching visualization method to measure the profile of microstructure based on3-D reconstruction, et al. The research work is significant and substantial in the theory and application to promote the practical application of parallel confocal detecting technologies.
The main work and the originalities of the dissertation are as follows:
1. According to3-D diffraction coherent imaging theory, the3-D diffraction coherent imaging mathematical models of the parallel confocal detecting system based on the astigmatic principle are derived. The dissertation proposes that the essential light path of the parallel confocal detecting system based on the astigmatic principle should conform to the telecentric light path, and proves that increasing system's magnification, selecting two exact uniform cylindrical thin lenses to form the astigmatic unit, optimizing the unit's parameters are good for raising the whole field detecting curves' sensitivity, symmetry, consistency and stability. Through theoretical analysis and simulation, the dissertation points out that a common optical limitation should not be set in the parallel confocal detecting system based on the astigmatic principle, otherwise the slope of the measured surface could disturb seriously astigmatic effect and result in obvious distortion of the detecting curves.
2. In view of usability and reliability, the system's magnifying power is set20. Through the Zemax simulation, the system's transverse and axial performances are investigated and the system's structural parameters are determined. It is also proved that optimizing the distance between two cylindrical lenses can optimized the sensitivity of whole field detecting curves.
3. Several primary algorithms that deal with extracting whole field parallel probing points' in-focus information have been designed and implemented. An effective in-focus information extraction strategy, first to create a data template and than to calculate whole field four-quadrant differential light statistics based on the template, has been proposed and executed. Two algorithms, i.e."fixed-point extracting" and "floating-point extracting" are proposed in order to remove the effect coming from parallel faculae's transverse drift and ensure whole field parallel probing points' in-focus position identification accuracy.
4. Several experimental studies have been executed. The experiments prove that when the distance between the two cylindrical lenses is3.4mm, the average sensitivity of whole field detecting curves can reach0.292/μm, linearity range has been±2μm. Several image preprocessing methods are investigated to improve whole field detecting curves. The experiments also prove that "darkening" images can raise the sensitivity of detecting curves'100%and "nonlinear strengthening" images can decrease17%distinguishing errors of whole field probing points' in-focus position. By iterative measurements, the stability of whole field detecting curves is estimated, The standard deviations of the whole field four-quadrant differential light statistic are within0.0030-0.0044, which implies that the identification accuracy of whole field probing points'in-focus position can reach50nm.
5. Taking the uncomplicated calculation and reconstruction accuracy into account, bi-cubic-spline interpolation curve surface fitting method is selected to reconstruct the measured profile of micro-structure. A model about the error between the triangular plane and local bi-cubic-spline interpolation curve surface is derived, which can be used to not only assess reconstruction accuracy for measured micro-structure but also estimate necessary subdivision rate to a specific micro-structure according to a given reconstruction accuracy. Two mouse pickup modes,"the point pickup" and "the feature pickup", are designed to make the system adapt easily different measurement tasks.
The research results could have provided some valuable design ideas and methods for commercializing the parallel confocal detecting system. The author has accomplished several significant explorations within improving the performance, raising the resolving power and measurement accuracy as will as strengthening adaptability of the parallel confocal detecting system, and accumulated some rewarding experiences.
引文
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