原子力显微镜（AFM）的几种成像模式研究
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摘要
目前扫描探针显微镜的发展趋势是功能的复合化，根据原子力显微镜(AFM)的工作原理，可以开发适用于不同领域的显微镜，即AFM不同扫描模式的拓展。
本文首先介绍了几种基本的AFM成像模式，并从针尖-样品相互作用动力学理论、能耗理论以及A-P-Z曲线原理分析了轻敲模式下AFM的相位成像，讨论了如何由A-P-Z(振幅-相位-针尖至样品距离)曲线选择扫描振幅的设置参数，扫描振幅参数的不同选择将直接影响相位图像的好坏，甚至是真假，所以选择一个好的扫描振幅参数是至关重要的。其次介绍了新型复合显微镜原子力／光子扫描隧道显微镜(AF／PSTM)的成像模式，并给出了很多具体实验结果，最后还对脉冲力成像模式(Pulsed Force Mode-PFM)进行了详细的介绍。
A general trend to Scanning Probe Microscope (SPM) is multiple functionalities. According to the principle of AFM, microscopes that are applicable for various domains can be developed, namely the extending of different scanning mode of AFM.
Several elementary imaging modes of AFM are first introduced. Phase imaging in Tapping Mode AFM using dynamics theory, energy dissipation theory in tip-sample interaction and the principle of A-P-Z curve have been analyzed. How to set the scanning amplitude parameters by A-P-Z curve is discussed. Stand or fall of phase images is determined by the choosing of scanning amplitude parameters. False parameters may lead to false reports of experiment results in phase image and consequently the images are unauthentic. Choosing a good scanning amplitude parameter is very important in phase imaging. A new type multiple microscope AF/PSTM (Atomic Force/Photon Scanning Tunnel combined Microscope) is introduced and some experimental results are given. At last, Pulsed Force Mode in AFM is introduced in detail.
本文首先介绍了几种基本的AFM成像模式，并从针尖-样品相互作用动力学理论、能耗理论以及A-P-Z曲线原理分析了轻敲模式下AFM的相位成像，讨论了如何由A-P-Z(振幅-相位-针尖至样品距离)曲线选择扫描振幅的设置参数，扫描振幅参数的不同选择将直接影响相位图像的好坏，甚至是真假，所以选择一个好的扫描振幅参数是至关重要的。其次介绍了新型复合显微镜原子力／光子扫描隧道显微镜(AF／PSTM)的成像模式，并给出了很多具体实验结果，最后还对脉冲力成像模式(Pulsed Force Mode-PFM)进行了详细的介绍。
A general trend to Scanning Probe Microscope (SPM) is multiple functionalities. According to the principle of AFM, microscopes that are applicable for various domains can be developed, namely the extending of different scanning mode of AFM.
Several elementary imaging modes of AFM are first introduced. Phase imaging in Tapping Mode AFM using dynamics theory, energy dissipation theory in tip-sample interaction and the principle of A-P-Z curve have been analyzed. How to set the scanning amplitude parameters by A-P-Z curve is discussed. Stand or fall of phase images is determined by the choosing of scanning amplitude parameters. False parameters may lead to false reports of experiment results in phase image and consequently the images are unauthentic. Choosing a good scanning amplitude parameter is very important in phase imaging. A new type multiple microscope AF/PSTM (Atomic Force/Photon Scanning Tunnel combined Microscope) is introduced and some experimental results are given. At last, Pulsed Force Mode in AFM is introduced in detail.
引文
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[2] U. Durig, D. Pohl, F. Rohner, J. Appl. Phys., 59 (1986), 3318.
[3] Betzig and J. K. Trautman, Science, 257(1992), 189.
[4] Courjon, J. M. Vigoureux et al., Appl. Optics, 29(1990)3734.
[5] Lewis, K. Lieberman, Nature, 354(1991),214.
[6] Kupka, Y.Chenet al.,J. Vac. Sci. Technol. B, 12(1993),667; Y. Chen et al, Ultramicroscopy, (1995).
[7] 白春礼编 扫描隧道显微镜技术及其应用，上海科技出版社
[8] 扫描隧道显微镜简介与基本原理，www．nni．com．cn／microscope／
[9] Reddick R C, Warmack R J, Ferrel T L, et al. Photon scanning tunneling microscopy. Rev Sci Instrum, 1990,61(12) Bohm O. Quantum theory. Printic-Hall, Englewood Cliffs. NJ, 1951:240P
[10] 吴世法，潘石等AF／PSTM图像分解方法及其数值模拟结果，中国工程科学，2001，8，VOl-3，33-36
[11] 吴世法，近代成像技术与图像处理，国防工业出版社
[12] 吴世法，光子隧道扫描图像分解方法，中国发明专利，ZL93 1 04111．2，1999-07-09(授权日)
[13] 吴世法，原子力与光子扫描隧道组合显微镜图像分解方法 中国发明专利，申请号96 1 11979．9，CN1177738A，1998-04-01
[14] Alexander S, et al. J Apply Phys, 1989, 65:164
[15] Molecular Imaging, VHIC Newsletter, 1st edition, June 2003
[16] MartinY, et al. Magnetic Imaging by "Force Microscopy" with 1000 Resolution. Appl Phys Lett, 1987, 50:1455
[17] MartinY, et al. High-Resolution Capacitance Measurement and Potentiometry by Force. Appl Phys Lett, 1988, 52:1103
[18] 赵清亮，王景贺等．扫描探针显微镜的最新技术进展及应用．电子显微学报，2000，12 VOl-19，NO．1
[2] U. Durig, D. Pohl, F. Rohner, J. Appl. Phys., 59 (1986), 3318.
[3] Betzig and J. K. Trautman, Science, 257(1992), 189.
[4] Courjon, J. M. Vigoureux et al., Appl. Optics, 29(1990)3734.
[5] Lewis, K. Lieberman, Nature, 354(1991),214.
[6] Kupka, Y.Chenet al.,J. Vac. Sci. Technol. B, 12(1993),667; Y. Chen et al, Ultramicroscopy, (1995).
[7] 白春礼编 扫描隧道显微镜技术及其应用，上海科技出版社
[8] 扫描隧道显微镜简介与基本原理，www．nni．com．cn／microscope／
[9] Reddick R C, Warmack R J, Ferrel T L, et al. Photon scanning tunneling microscopy. Rev Sci Instrum, 1990,61(12) Bohm O. Quantum theory. Printic-Hall, Englewood Cliffs. NJ, 1951:240P
[10] 吴世法，潘石等AF／PSTM图像分解方法及其数值模拟结果，中国工程科学，2001，8，VOl-3，33-36
[11] 吴世法，近代成像技术与图像处理，国防工业出版社
[12] 吴世法，光子隧道扫描图像分解方法，中国发明专利，ZL93 1 04111．2，1999-07-09(授权日)
[13] 吴世法，原子力与光子扫描隧道组合显微镜图像分解方法 中国发明专利，申请号96 1 11979．9，CN1177738A，1998-04-01
[14] Alexander S, et al. J Apply Phys, 1989, 65:164
[15] Molecular Imaging, VHIC Newsletter, 1st edition, June 2003
[16] MartinY, et al. Magnetic Imaging by "Force Microscopy" with 1000 Resolution. Appl Phys Lett, 1987, 50:1455
[17] MartinY, et al. High-Resolution Capacitance Measurement and Potentiometry by Force. Appl Phys Lett, 1988, 52:1103
[18] 赵清亮，王景贺等．扫描探针显微镜的最新技术进展及应用．电子显微学报，2000，12 VOl-19，NO．1