变线距光栅单色器设计及关键技术
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摘要
同步辐射光源不断发展,从最初的高能物理加速装置到第四代光源自由电子激光,光源的性能不断提高。光束线作为连接光源和实验站的桥梁,需要能够充分利用光源的特性,因此对光束线的光谱分辨率、光传输效率等方面提出了更高的要求。光束线的核心是单色器,在软X-光波段中,有三种主要的单色器：定包含角球面光栅单色器(Dragon)、变包含角平面光栅单色器(SX-700类)和变线距光栅单色器。由于变线距光栅单色器中光学元件少和元件面型简单,容易实现高的光谱分辨率和达到高的传输效率,近年来得到了广泛应用。本文讨论变线距光栅单色器原理、设计及实现高光谱分辨率需要的关键技术。主要内容包括：
1、合肥光源(NSRL)重大改造中的表面物理光束线建设。表面物理光束线从真空波荡器中引出,覆盖的能量范围为20-600eV,整个光束线的长度为19300mm。前置聚焦系统采用柱面镜垂直放置5：1聚焦到入射狭缝,采用自聚焦平面变线距光栅单色器作为分光系统,后置聚焦系统采用超环面镜在两个方向上聚焦到样品处。光束线的技术指标为：光通量5×1010photons/s@29eV,样品处光斑0.2x0.1mm2,能量分辨本领10000(E/△E)@29eV。
2、大连化物所相干光源(DCLS)光束线建设。DCLS作为第四代同步辐射光源,具有辐射波长可调、不受电子跃迁能级的限制；频谱范围广；亮度和峰值功率极高、且可调；相干性好,又有偏振性；具有短脉冲时间结构、且时间结构可调等诸多优点。建成后的DCLS将是世界上第一台工作在极紫外波段(50-150nm)的自由电子激光器。
同基于储存环的同步辐射光束线相比,四代光源的光束线设计将会面临新的挑战。比如光源脉冲结构与光谱分辨的关系,高瞬时功率对光学元件镀膜的影响,光源的光谱在线诊断等。DICP-FEL共建有四条分支光束线,每条分支光束线分时用光,光源点(饱和长度)在6m-12m内变化。各条光束线光学传输效率(反射率)不同,最高可达85%,最低的可达到45%,可以根据需要开展实验。利用超环面镜和平面变线距光栅构成了光谱仪,用于对光源进行在线的诊断,光谱诊断系统的分辨本领达12000。在FERMI@Elettra实验室,其光谱诊断系统的波长扫描是通过两个相互垂直的直线导轨配合工作。本方案直接将聚焦曲线拟合成圆,通过弧形导轨实现波长扫描,精度以及稳定性将会更加强,具有创新性。
3、光栅单色器的高光谱分辨不仅与光学设计相关,同工程实施中的各项误差控制等关键技术也息息相关。掌握相应的关键技术,是保证实现光学设计的高光谱分辨率指标的基础。这些关键技术主要包括：高精度直线导轨、转角测量机构、光学元件检测技术、狭缝在线检测技术、光束线安装准直技术和单色器调试技术等。本文对这些关键技术进行了相应的研究,其中狭缝的宽度在线检测、对光学元件装夹的研究以减少装夹对元件面形的影响等都具有创新性。
高精度直线导轨是单色器中的波长扫描机构的关键部件,它推动正弦杆转动,带动光学元件转动从而实现波长扫描。为了实现表面物理光束线的光谱分辨率,自行研制了行程150mm,分辨率30nm的高精度直线导轨。同时表面物理光束线还采用了一套角度测量机构,通过光栅尺直接测量光学元件的转动角度,该角度测量机构的分辨率可达0.05"。通过高精度直线导轨和转角测量机构配合,精确标定光学元件的转角以及对应的波长。
光学元件的测试对象主要包括光学元件的面形误差以及光栅的刻线精度。利用长程面形干涉仪对表面物理光束线单色器中的光学元件的面形误差进行测量,结果显示光学元件的面形精度满足要求。利用实验室自建的二维线密度系统对平面光栅的刻线精度进行检测,4001/mm光栅的线密度精度为3-7×104,12001/mm光栅的刻线精度为1-3×10-5。
在表面物理光束线中,狭缝的开口宽度比较小,最小值达131am,同时真空环境和大气环境下狭缝的开口大小会发生改变,因此需要对狭缝宽度有一个较为精确的测量。搭建了一套狭缝宽度在线系统对狭缝宽度进行测量,该测量系统的测量精度在±5μm以内。
作为光束线的核心部件,单色器的部件离线调试和光谱分辨率直接相关。单色器的安装调试包括离轴转动参数的测试以及双轴平行性的测试、安装准直技术。离轴转动参数最终测得和理论值有所差别,但是偏离光栅中心量在0.07mm以内,对能量的影响在10-4eV以内,而双轴平行性误差在±5"以内,这些误差为实现光学系统的光谱分辨率奠定了基础。
From accelerators and storage rings for high energy physics to the free-electron laser source, the development of synchrotron radiation leads to greatly improved performance of the light source. Thus, a higher spectral resolution and higher transmission efficiency beamline, which acts as a bridge between the light source and the experimental station, is needed to ultimately exploit the advantages of the light source. Monochromator is the key part of a beamline. In soft x-ray and extreme ultraviolet wavelength range, grating monochromators are commonly used. There are three main kinds of grating monochromator in this energy range, which includes the Dragon type spherical grating monochromator, SX-700plane grating monochromator and variable-line-spacing plane grating monochromator. Because of less optical components and simple component surface shape, the variable-line-spacing plane grating monochromator is easy to achieve both high spectral resolution and high transmission efficiency. It has been extensively used in recent years at different synchrotron radiation laboratories.
This paper discusses the principle and the design of the variable-line-spacing plane grating monochromator, and key techniques to achieve high spectral resolution. It is described in three parts.
First is the optical design of the surface physics beamline in Hefei Light Source. The surface physics beamline, which utilizes radiation from an in-vacuum undulator, covers the energy range from20eV to600eV. Undulator radiation is horizontally deflected and vertically focused by a cylinder mirror to the entrance slit, whose focusing demagnification is5, and monochromatized by a variable-line-spacing plane grating, and then horizontally and vertically focused onto the experiment station's sample by a toroidal mirror. The total length of the beamline is19300mm. The resolving power (E/△E) is10000@29eV. Spot size at the sample is0.2(h) x0.1(V) mm2with flux of5x1010photons/s@29eV.
Second is the optical design of the beamline in Dalian Coherent Light Source (DCLS). This is a fourth generation synchrotron radiation source, based on free-electron lasers, which is currently under construction in the northeast of China. The light source has unique features as the turntable radiation frequency, wide spectral range, high brightness and peak power, very short pulse time structure, et al. It is a user facility based on the principle of single-pass, high-gain harmonic generation (HGHG). It covers the EUV regime of50-150nm with pulse energy exceeds100μJ.
Compare to the beamline of the synchrotron radiation, the beamline of free-electron-laser facility has new challenges, like the influence of the high peak power onto the mirror coating, and relationship between the pulse length and the spectral resolution, et al. There are four branch beamlines planed in DCLS which share beam time. The total length of the beamlines is about50m. Owing to the variations of saturation length for different wavelengths, the light source point will change at different wavelengths from6m-12m. Optical components reflective efficiency of the beamlines is from maximum of85%to45%. A key diagnostic tool in DCLS is the on-line source spectral characteristic recording during the source development, and for the definition of the experimental conditions. For this purpose, an online grazing incidence spectrometer with a toroidal mirror and a variable-line-spacing plane grating is designed. Resolving power of this spectrometer is better than12000for most of the wavelength covered. In the FERMI@Elettra facility, two orthogonal linear stages is used to scan wavelength, one is used to bring the desired wavelength on the detector center, and the other is used to change the grating-detector distance for focusing purpose. In our design, a circular stage is chosen to fit the focal curve and to realize the wavelength scanning. This scanning mechanics is simpler and stable.
The third part is the key techniques of achieving the high spectral resolution of the monochromator. Based on the offline commissioning of the surface physics beamline, some key techniques techniques, including the high-resolution linear guide, rotation angle measurement system, online monitoring system to the opening of the slits, testing of the optical component, are developed and tested. Some of these techniques are innovative, like the online monitoring system to the opening of the slits, and the optical component clamping techniques, et al.
A sine drive is typically used in spectrometers to convert a linear displacement to axis rotation while wavelength scanning. One high-precision linear guide, which has150mm travel with30nm resolution, is designed to meet the need of the spectral resolution. At the same time, a UHV compatible precision rotation angle measurement system is developed in this beamline to measure the rotation angle of the mirror and grating. The angle resolution of this system is0.05arcsec
The slope error of the mirrors in surface physics beamline is examined by long trace profile. The test result shows that slope error of the optical components in monochromator meets the needs. Groove density of the variable-line-spacing plane gratings is examined by a self-built2D grating groove density measurement system. Groove density accuracy△N/N of the400lines/mm is about3-7×10-5, and1-3×10-5for the1200lines/mm.
The opening of the slits in surface physics beamline need to be very small to achieve the required spectral resolution, and minimum opening is about13μm. Therefore, we have designed one online interference fringe monitoring system to realize online monitoring of the slit opening. The accuracy of this system is about5μm.
Monochromator is a kernel part of the beamline. Its off-line test and alignment, which includes parameters measurement of the off-axis rotation (mirror roattion), the parallelism between the grating axis and the plane mirror axis, are related directly to the spectral resolution. At the end, the deviation WG of the reflected beam from the central spot of the grating is less than0.07mm, which makes energy shift of10-4eV, and the unparallelism of the grating axis and the plane mirror axes is within5arcsec. These errors have no significant influences on the spectral resolution and fulfill the engineering requirement of the optical system.
1、合肥光源(NSRL)重大改造中的表面物理光束线建设。表面物理光束线从真空波荡器中引出,覆盖的能量范围为20-600eV,整个光束线的长度为19300mm。前置聚焦系统采用柱面镜垂直放置5：1聚焦到入射狭缝,采用自聚焦平面变线距光栅单色器作为分光系统,后置聚焦系统采用超环面镜在两个方向上聚焦到样品处。光束线的技术指标为：光通量5×1010photons/s@29eV,样品处光斑0.2x0.1mm2,能量分辨本领10000(E/△E)@29eV。
2、大连化物所相干光源(DCLS)光束线建设。DCLS作为第四代同步辐射光源,具有辐射波长可调、不受电子跃迁能级的限制；频谱范围广；亮度和峰值功率极高、且可调；相干性好,又有偏振性；具有短脉冲时间结构、且时间结构可调等诸多优点。建成后的DCLS将是世界上第一台工作在极紫外波段(50-150nm)的自由电子激光器。
同基于储存环的同步辐射光束线相比,四代光源的光束线设计将会面临新的挑战。比如光源脉冲结构与光谱分辨的关系,高瞬时功率对光学元件镀膜的影响,光源的光谱在线诊断等。DICP-FEL共建有四条分支光束线,每条分支光束线分时用光,光源点(饱和长度)在6m-12m内变化。各条光束线光学传输效率(反射率)不同,最高可达85%,最低的可达到45%,可以根据需要开展实验。利用超环面镜和平面变线距光栅构成了光谱仪,用于对光源进行在线的诊断,光谱诊断系统的分辨本领达12000。在FERMI@Elettra实验室,其光谱诊断系统的波长扫描是通过两个相互垂直的直线导轨配合工作。本方案直接将聚焦曲线拟合成圆,通过弧形导轨实现波长扫描,精度以及稳定性将会更加强,具有创新性。
3、光栅单色器的高光谱分辨不仅与光学设计相关,同工程实施中的各项误差控制等关键技术也息息相关。掌握相应的关键技术,是保证实现光学设计的高光谱分辨率指标的基础。这些关键技术主要包括：高精度直线导轨、转角测量机构、光学元件检测技术、狭缝在线检测技术、光束线安装准直技术和单色器调试技术等。本文对这些关键技术进行了相应的研究,其中狭缝的宽度在线检测、对光学元件装夹的研究以减少装夹对元件面形的影响等都具有创新性。
高精度直线导轨是单色器中的波长扫描机构的关键部件,它推动正弦杆转动,带动光学元件转动从而实现波长扫描。为了实现表面物理光束线的光谱分辨率,自行研制了行程150mm,分辨率30nm的高精度直线导轨。同时表面物理光束线还采用了一套角度测量机构,通过光栅尺直接测量光学元件的转动角度,该角度测量机构的分辨率可达0.05"。通过高精度直线导轨和转角测量机构配合,精确标定光学元件的转角以及对应的波长。
光学元件的测试对象主要包括光学元件的面形误差以及光栅的刻线精度。利用长程面形干涉仪对表面物理光束线单色器中的光学元件的面形误差进行测量,结果显示光学元件的面形精度满足要求。利用实验室自建的二维线密度系统对平面光栅的刻线精度进行检测,4001/mm光栅的线密度精度为3-7×104,12001/mm光栅的刻线精度为1-3×10-5。
在表面物理光束线中,狭缝的开口宽度比较小,最小值达131am,同时真空环境和大气环境下狭缝的开口大小会发生改变,因此需要对狭缝宽度有一个较为精确的测量。搭建了一套狭缝宽度在线系统对狭缝宽度进行测量,该测量系统的测量精度在±5μm以内。
作为光束线的核心部件,单色器的部件离线调试和光谱分辨率直接相关。单色器的安装调试包括离轴转动参数的测试以及双轴平行性的测试、安装准直技术。离轴转动参数最终测得和理论值有所差别,但是偏离光栅中心量在0.07mm以内,对能量的影响在10-4eV以内,而双轴平行性误差在±5"以内,这些误差为实现光学系统的光谱分辨率奠定了基础。
From accelerators and storage rings for high energy physics to the free-electron laser source, the development of synchrotron radiation leads to greatly improved performance of the light source. Thus, a higher spectral resolution and higher transmission efficiency beamline, which acts as a bridge between the light source and the experimental station, is needed to ultimately exploit the advantages of the light source. Monochromator is the key part of a beamline. In soft x-ray and extreme ultraviolet wavelength range, grating monochromators are commonly used. There are three main kinds of grating monochromator in this energy range, which includes the Dragon type spherical grating monochromator, SX-700plane grating monochromator and variable-line-spacing plane grating monochromator. Because of less optical components and simple component surface shape, the variable-line-spacing plane grating monochromator is easy to achieve both high spectral resolution and high transmission efficiency. It has been extensively used in recent years at different synchrotron radiation laboratories.
This paper discusses the principle and the design of the variable-line-spacing plane grating monochromator, and key techniques to achieve high spectral resolution. It is described in three parts.
First is the optical design of the surface physics beamline in Hefei Light Source. The surface physics beamline, which utilizes radiation from an in-vacuum undulator, covers the energy range from20eV to600eV. Undulator radiation is horizontally deflected and vertically focused by a cylinder mirror to the entrance slit, whose focusing demagnification is5, and monochromatized by a variable-line-spacing plane grating, and then horizontally and vertically focused onto the experiment station's sample by a toroidal mirror. The total length of the beamline is19300mm. The resolving power (E/△E) is10000@29eV. Spot size at the sample is0.2(h) x0.1(V) mm2with flux of5x1010photons/s@29eV.
Second is the optical design of the beamline in Dalian Coherent Light Source (DCLS). This is a fourth generation synchrotron radiation source, based on free-electron lasers, which is currently under construction in the northeast of China. The light source has unique features as the turntable radiation frequency, wide spectral range, high brightness and peak power, very short pulse time structure, et al. It is a user facility based on the principle of single-pass, high-gain harmonic generation (HGHG). It covers the EUV regime of50-150nm with pulse energy exceeds100μJ.
Compare to the beamline of the synchrotron radiation, the beamline of free-electron-laser facility has new challenges, like the influence of the high peak power onto the mirror coating, and relationship between the pulse length and the spectral resolution, et al. There are four branch beamlines planed in DCLS which share beam time. The total length of the beamlines is about50m. Owing to the variations of saturation length for different wavelengths, the light source point will change at different wavelengths from6m-12m. Optical components reflective efficiency of the beamlines is from maximum of85%to45%. A key diagnostic tool in DCLS is the on-line source spectral characteristic recording during the source development, and for the definition of the experimental conditions. For this purpose, an online grazing incidence spectrometer with a toroidal mirror and a variable-line-spacing plane grating is designed. Resolving power of this spectrometer is better than12000for most of the wavelength covered. In the FERMI@Elettra facility, two orthogonal linear stages is used to scan wavelength, one is used to bring the desired wavelength on the detector center, and the other is used to change the grating-detector distance for focusing purpose. In our design, a circular stage is chosen to fit the focal curve and to realize the wavelength scanning. This scanning mechanics is simpler and stable.
The third part is the key techniques of achieving the high spectral resolution of the monochromator. Based on the offline commissioning of the surface physics beamline, some key techniques techniques, including the high-resolution linear guide, rotation angle measurement system, online monitoring system to the opening of the slits, testing of the optical component, are developed and tested. Some of these techniques are innovative, like the online monitoring system to the opening of the slits, and the optical component clamping techniques, et al.
A sine drive is typically used in spectrometers to convert a linear displacement to axis rotation while wavelength scanning. One high-precision linear guide, which has150mm travel with30nm resolution, is designed to meet the need of the spectral resolution. At the same time, a UHV compatible precision rotation angle measurement system is developed in this beamline to measure the rotation angle of the mirror and grating. The angle resolution of this system is0.05arcsec
The slope error of the mirrors in surface physics beamline is examined by long trace profile. The test result shows that slope error of the optical components in monochromator meets the needs. Groove density of the variable-line-spacing plane gratings is examined by a self-built2D grating groove density measurement system. Groove density accuracy△N/N of the400lines/mm is about3-7×10-5, and1-3×10-5for the1200lines/mm.
The opening of the slits in surface physics beamline need to be very small to achieve the required spectral resolution, and minimum opening is about13μm. Therefore, we have designed one online interference fringe monitoring system to realize online monitoring of the slit opening. The accuracy of this system is about5μm.
Monochromator is a kernel part of the beamline. Its off-line test and alignment, which includes parameters measurement of the off-axis rotation (mirror roattion), the parallelism between the grating axis and the plane mirror axis, are related directly to the spectral resolution. At the end, the deviation WG of the reflected beam from the central spot of the grating is less than0.07mm, which makes energy shift of10-4eV, and the unparallelism of the grating axis and the plane mirror axes is within5arcsec. These errors have no significant influences on the spectral resolution and fulfill the engineering requirement of the optical system.
引文
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