基于矩形孔径微透镜阵列的红外焦平面集成技术研究
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摘要
红外探测器是将入射的红外辐射信号通过光电效应转变成电信号的一种器件,一个国家红外探测器的技术水平可以代表其红外技术的发展水平。随着红外技术的不断发展,焦平面阵列探测技术应运而生,它代表了红外探测技术发展的一个里程碑。红外焦平面探测技术使红外探测系统在民用行业、军事领域以及空间技术中都得到广泛的应用。军事领域和空间技术中对红外探测器小型化提出更高的要求,即在保证红外焦平面探测器的灵敏度和分辨率尽量高的条件下,又要求红外焦平面尺寸尽量小,这一矛盾是红外探测器微小型化发展中必须攻克的一个难题。本文针对这一问题,设计了一种可用于红外焦平面阵列的矩形孔径球面微透镜阵列,开展矩形、六边形等特殊孔径形状微透镜阵列的制作、测试及其与红外焦平面集成技术研究,通过高填充系数矩形孔径球面微透镜阵列对光能的汇聚作用来解决由于焦平面尺寸减小而影响探测器灵敏度和分辨率的问题,促进红外探测器的微小型化发展。
论文从理论上对微透镜阵列的光学特性进行了分析,应用几何光学理论研究微透镜阵列近轴光线传播规律,系统地分析了单层球面微透镜阵列光学成像特性及光照度特性、双层球面微透镜阵列光学成像特性及光照度特性,对比双层球面微透镜阵列与单层球面微透镜阵列在成像和光照度上的区别,分析了矩形孔径球面微透镜阵列相比于圆形孔径球面微透镜阵列在光能利用上所具备的优势。同时研究了球面微透镜阵列设计理论与方法,并针对用于3～5μm波段的HgCdTe红外焦平面阵列设计了一种矩形孔径球面微透镜阵列。
研究激光直写变剂量曝光制作矩形孔径球面微透镜阵列的工艺原理,在掌握光致抗蚀剂感光及显影特性的基础上,建立了变剂量曝光与显影的数理模型,该模型可推广用于所有采用光致抗蚀剂的微光学器件的光刻制作中。研究了激光直写系统光功率控制、微位移驱动等关键子系统工作原理,根据建立的数理模型和微透镜阵列结构研究了激光直写变剂量曝光的控制方法。
设计并制定矩形孔径球面微透镜阵列制作工艺流程,通过理论分析与大量实验分析各个工艺环节的影响因素,优化了相关工艺参数。采用原子力显微镜对所制作的微透镜阵列外形结构进行测试,搭建一套微透镜阵列光学性能参数测试系统,采用该系统对微透镜阵列的焦距、截距、点扩散函数等光学性能进行了测试。
研究红外焦平面阵列工作原理与结构,分别从光折射理论和衍射理论两个方面分析微透镜阵列与红外焦平面集成的光聚能效应,提出利用分子间结合力的光胶技术将微透镜阵列与焦平面进行集成。设计并制作“栅线”和“方孔”双图形对准标记,采用衍射光栅同轴对准方法实现两种器件的高精度对准。通过对集成前、后探测器性能的测试对比,得到结论为：矩形孔径微透镜阵列的引入可将红外焦平面的光能利用率从原来的55%提高到90%以上,集成后红外焦平面的响应率、探测率、分辨率等性能都得到大幅度的提高,其它性能未受到明显影响。
Infrared detector is one of the devices that it can turn incident infrared radiation signal into electrical signal by photoelectric effect, infrared detector technology level represents a Country's level of infrared technology development level. Infrared focal plane array detection technology generatiing with the development of infrared technology development, it represents the milestone of infrared detector technology. Infrared detection system has been applied widely in civil industry, military field, and space technology. Because of the particularity in military field and space technology, sensitivity and resolution is required as high as possible, but infrared focal plane array size is required as small as possible, so this contradiction must be solved in the development process of infrared detector. We proposed that rectangular aperture spherical micro-lens arrays was manufactured by varing dose exposuring, that integrating infrared focal flane and micro-lens arrays was studied by optical cement technology, then the problems of detector sensitivity and resolution were solved.
Micro-lens arrays paraxial ray propagation law was studied by geometrical optics theory, we analysised single layer spherical micro-lens array optical imaging and illumination properties, double layer spherical micro-lens arrays optical imaging and illumination properties, the comparison study of optical imaging and illumination about single layer and double-layer spherical micro-lens arrays. Meanwhile, the advantages of light energy utilization was analysised that rectangular aperture spherical micro-lens arrays in comparison to circular aperture spherical micro-lens arrays.
We studied the technics principle that manufactureing rectangular aperture spherical micro-lens arrays by laser direct writing varing dose exposuring, that mathematical model of varing dose exposure was established on the Basis of mastering exposure and developing properties. It was analysed the working principle of subsystem that laser direct writing optical power controlling, micro-displacement driving etc. Studied on controlling method of laser direct writing varing dose exposuring according to mathematical model and micro-lens arrays structure.
Manufactureing technics process of rectangular aperture spherical micro-lens arrays was designed, effect factors of each technics taches were analysised by theoretics analysis and a great deal experiments, process parameter optimized. We tested micro-lens arrays structure by atom force microscope, that micro-lens arrays optical performance parameter testing system was built, optical performance of that focus, the intercept, point-spread function were tested.
Studied on working theory and structure of infrared focal plane array, optical assembling energy assemble was analysed form light refraction theory and light diffraction theory, the technology was put forward that integrating infrared focal plane array and micro-lens arrays by optical cement method. That double marker of aimming at infrared focal plane array and micro-lens arrays were designed and manufactured, two elements were aimmed by diffraction gratting coaxial optical system. Contrasted the performance change of the front and back of integration by infrared focal plane array testing system, and analysed the testing result. The conclusion as follows:light energy utilization ratio of infrared focal plane raised to90%from55%by integrating rectangular aperture micro-lens arrays, others properties keep invariant.
论文从理论上对微透镜阵列的光学特性进行了分析,应用几何光学理论研究微透镜阵列近轴光线传播规律,系统地分析了单层球面微透镜阵列光学成像特性及光照度特性、双层球面微透镜阵列光学成像特性及光照度特性,对比双层球面微透镜阵列与单层球面微透镜阵列在成像和光照度上的区别,分析了矩形孔径球面微透镜阵列相比于圆形孔径球面微透镜阵列在光能利用上所具备的优势。同时研究了球面微透镜阵列设计理论与方法,并针对用于3～5μm波段的HgCdTe红外焦平面阵列设计了一种矩形孔径球面微透镜阵列。
研究激光直写变剂量曝光制作矩形孔径球面微透镜阵列的工艺原理,在掌握光致抗蚀剂感光及显影特性的基础上,建立了变剂量曝光与显影的数理模型,该模型可推广用于所有采用光致抗蚀剂的微光学器件的光刻制作中。研究了激光直写系统光功率控制、微位移驱动等关键子系统工作原理,根据建立的数理模型和微透镜阵列结构研究了激光直写变剂量曝光的控制方法。
设计并制定矩形孔径球面微透镜阵列制作工艺流程,通过理论分析与大量实验分析各个工艺环节的影响因素,优化了相关工艺参数。采用原子力显微镜对所制作的微透镜阵列外形结构进行测试,搭建一套微透镜阵列光学性能参数测试系统,采用该系统对微透镜阵列的焦距、截距、点扩散函数等光学性能进行了测试。
研究红外焦平面阵列工作原理与结构,分别从光折射理论和衍射理论两个方面分析微透镜阵列与红外焦平面集成的光聚能效应,提出利用分子间结合力的光胶技术将微透镜阵列与焦平面进行集成。设计并制作“栅线”和“方孔”双图形对准标记,采用衍射光栅同轴对准方法实现两种器件的高精度对准。通过对集成前、后探测器性能的测试对比,得到结论为：矩形孔径微透镜阵列的引入可将红外焦平面的光能利用率从原来的55%提高到90%以上,集成后红外焦平面的响应率、探测率、分辨率等性能都得到大幅度的提高,其它性能未受到明显影响。
Infrared detector is one of the devices that it can turn incident infrared radiation signal into electrical signal by photoelectric effect, infrared detector technology level represents a Country's level of infrared technology development level. Infrared focal plane array detection technology generatiing with the development of infrared technology development, it represents the milestone of infrared detector technology. Infrared detection system has been applied widely in civil industry, military field, and space technology. Because of the particularity in military field and space technology, sensitivity and resolution is required as high as possible, but infrared focal plane array size is required as small as possible, so this contradiction must be solved in the development process of infrared detector. We proposed that rectangular aperture spherical micro-lens arrays was manufactured by varing dose exposuring, that integrating infrared focal flane and micro-lens arrays was studied by optical cement technology, then the problems of detector sensitivity and resolution were solved.
Micro-lens arrays paraxial ray propagation law was studied by geometrical optics theory, we analysised single layer spherical micro-lens array optical imaging and illumination properties, double layer spherical micro-lens arrays optical imaging and illumination properties, the comparison study of optical imaging and illumination about single layer and double-layer spherical micro-lens arrays. Meanwhile, the advantages of light energy utilization was analysised that rectangular aperture spherical micro-lens arrays in comparison to circular aperture spherical micro-lens arrays.
We studied the technics principle that manufactureing rectangular aperture spherical micro-lens arrays by laser direct writing varing dose exposuring, that mathematical model of varing dose exposure was established on the Basis of mastering exposure and developing properties. It was analysed the working principle of subsystem that laser direct writing optical power controlling, micro-displacement driving etc. Studied on controlling method of laser direct writing varing dose exposuring according to mathematical model and micro-lens arrays structure.
Manufactureing technics process of rectangular aperture spherical micro-lens arrays was designed, effect factors of each technics taches were analysised by theoretics analysis and a great deal experiments, process parameter optimized. We tested micro-lens arrays structure by atom force microscope, that micro-lens arrays optical performance parameter testing system was built, optical performance of that focus, the intercept, point-spread function were tested.
Studied on working theory and structure of infrared focal plane array, optical assembling energy assemble was analysed form light refraction theory and light diffraction theory, the technology was put forward that integrating infrared focal plane array and micro-lens arrays by optical cement method. That double marker of aimming at infrared focal plane array and micro-lens arrays were designed and manufactured, two elements were aimmed by diffraction gratting coaxial optical system. Contrasted the performance change of the front and back of integration by infrared focal plane array testing system, and analysed the testing result. The conclusion as follows:light energy utilization ratio of infrared focal plane raised to90%from55%by integrating rectangular aperture micro-lens arrays, others properties keep invariant.
引文
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