可实现激光扫描的液晶闪耀光栅的设计与研究
摘要
闪耀光栅可以将光束能量集中到某一特定的闪耀级次上,但普通闪耀光栅一经制成其光栅常数及闪耀角便确定下来。利用液晶在电场的作用下光学性质得到改变的特性,液晶闪耀光栅可以通过编程控制灵活改变光栅常数及闪耀角,从而与光束扫描技术很好的结合起来,有望成为一种体积小、重量轻、功耗低、无机械转动、响应速度快的光束扫描器,能够应用于光开关、投影显示、空间光通信、光学加工、目标探测、激光雷达等广泛的领域,成为国际上研究的热点。但是受器件制作工艺水平的限制,目前国内的研究多处于理论阶段,对液晶闪耀光栅制作工艺的研究就显得非常重要。
本文依托具体的科研项目,针对液晶闪耀光栅的研制开展了如下工作:
1)建立并分析理论模型
基于衍射光学理论和二元光学原理,结合液晶的连续弹性体理论及电控双折射效应,建立液晶闪耀光栅的理论模型,分析液晶闪耀光栅的偏转特性及衍射效率;
2)制定实施方案
分析液晶闪耀光栅的设计要点,根据具体要求与技术指标形成可行的实施方案,明确器件研制的努力方向;
3)关键制作工艺的研究与实现
对于器件制作中的关键工艺,选择合适的加工手段,根据理论指导,通过实验研究获得其恰当的工艺参数,不断总结经验,提高制作工艺水平,对于实际中可能遇到的问题,进行深入研究和探讨,力争制作出与设计方案一致的器件;
4)器件效果及性能测试
对制作完成的器件进行一系列测试,验证器件理论模型的准确性,检验器件制作的可靠性,对器件的制作工艺水平进行定量评价,以指导制作工艺的优化方向;
5)提出优化方案
分析可能存在的问题,提出优化解决的方案,为器件的不断改进奠定基础。
Blazed grating can concentrate beam energy to a specific order, but its grating constant and the blaze angle will be determined after the blazed grating was made. With the liquid crystal characteristics that the optical properties were changeable under the electric field, liquid crystal blazed grating could flexibility change the grating periods and blaze angles by programmed control. With beam scanning technology,it was expected to become a small, light weight, low power consumption, no mechanical rotation, fast response light beam scanner, and can be used in optical switching, projection displays, optical communication, optical processing, target detection, laser radar, wide area. However, because of restrictions on the level of the device manufacturing process, the current multi-national research in theoretical, to study on the liquid crystal blazed grating fabrication process is very important.
This relies on specific research projects, for liquid crystal blazed grating work carried out as follows:
1) Created and analyzed theoretical models
Based on diffraction optics and Binary optics theory, combined with the continuous elastic theory of liquid crystal and electrically controlled birefringence effect of liquid crystal blazed grating, a theoretical model was established to analyze the deflection characteristics of liquid crystal blazed grating and the diffraction efficiency;
2) Developed implementation plans
Liquid crystal blazed grating design elements were analyzed; a possible solution was generated according to the specific requirements and technical indicators; a clear direction for the device was developed;
3) Key production process and its implementation
Suitable processing means were chosen for the key device production process, according to the theoretical guidance; the appropriate process parameters were got through the experimental study, and the level of production process were improved by experience were constantly summed up; the problems that may be encountered in practice were in-depth study and exploration, and strive to produce the device consistent with the design;
4) Tests of device results and performances
Finished devices were tested to verify the accuracy of the theoretical model and the reliability of the device production; the level of the device manufacturing process was quantitative appraised to guide the direction of manufacturing process optimization;
5) Proposed optimization scheme
According to the test results, possible problems were analyzed; optimal solution to the problem was proposed for the basis of continuously improvement of the devices.
本文依托具体的科研项目,针对液晶闪耀光栅的研制开展了如下工作:
1)建立并分析理论模型
基于衍射光学理论和二元光学原理,结合液晶的连续弹性体理论及电控双折射效应,建立液晶闪耀光栅的理论模型,分析液晶闪耀光栅的偏转特性及衍射效率;
2)制定实施方案
分析液晶闪耀光栅的设计要点,根据具体要求与技术指标形成可行的实施方案,明确器件研制的努力方向;
3)关键制作工艺的研究与实现
对于器件制作中的关键工艺,选择合适的加工手段,根据理论指导,通过实验研究获得其恰当的工艺参数,不断总结经验,提高制作工艺水平,对于实际中可能遇到的问题,进行深入研究和探讨,力争制作出与设计方案一致的器件;
4)器件效果及性能测试
对制作完成的器件进行一系列测试,验证器件理论模型的准确性,检验器件制作的可靠性,对器件的制作工艺水平进行定量评价,以指导制作工艺的优化方向;
5)提出优化方案
分析可能存在的问题,提出优化解决的方案,为器件的不断改进奠定基础。
Blazed grating can concentrate beam energy to a specific order, but its grating constant and the blaze angle will be determined after the blazed grating was made. With the liquid crystal characteristics that the optical properties were changeable under the electric field, liquid crystal blazed grating could flexibility change the grating periods and blaze angles by programmed control. With beam scanning technology,it was expected to become a small, light weight, low power consumption, no mechanical rotation, fast response light beam scanner, and can be used in optical switching, projection displays, optical communication, optical processing, target detection, laser radar, wide area. However, because of restrictions on the level of the device manufacturing process, the current multi-national research in theoretical, to study on the liquid crystal blazed grating fabrication process is very important.
This relies on specific research projects, for liquid crystal blazed grating work carried out as follows:
1) Created and analyzed theoretical models
Based on diffraction optics and Binary optics theory, combined with the continuous elastic theory of liquid crystal and electrically controlled birefringence effect of liquid crystal blazed grating, a theoretical model was established to analyze the deflection characteristics of liquid crystal blazed grating and the diffraction efficiency;
2) Developed implementation plans
Liquid crystal blazed grating design elements were analyzed; a possible solution was generated according to the specific requirements and technical indicators; a clear direction for the device was developed;
3) Key production process and its implementation
Suitable processing means were chosen for the key device production process, according to the theoretical guidance; the appropriate process parameters were got through the experimental study, and the level of production process were improved by experience were constantly summed up; the problems that may be encountered in practice were in-depth study and exploration, and strive to produce the device consistent with the design;
4) Tests of device results and performances
Finished devices were tested to verify the accuracy of the theoretical model and the reliability of the device production; the level of the device manufacturing process was quantitative appraised to guide the direction of manufacturing process optimization;
5) Proposed optimization scheme
According to the test results, possible problems were analyzed; optimal solution to the problem was proposed for the basis of continuously improvement of the devices.
引文
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[3] R. A. Meyer. Optical beam steering using a multichannel lithium tantalate crystal. Appl. Opt.,1972,11:613~616
[4] Y. Ninomiya, Ultrahigh resolving electro-optic prism array light deflector. IEEE Quantum Electron.,1973,QE-9(6):791~795
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[10] Ronghui Qu, Feng Liu, Qing Ye, et al. Polarization independent PLZT electro-optical switch based on fiber sagnac interferometer.OECC,2005,5E1-4:78~79
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[12] T. Utsunomiya. Optical deflector with tandem electrodes using PLZT ceramics. Jpn. J. Appl. Phys.,1989,28(Suppl.):164~166
[13] J. A. Thomas, Y. Fainman. Optimal cascade operation of optical phased-array beam deflectors. Appl. Opt.,1998,37(26):6196~6212
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[15] Boulder Nonlinear Systems Inc. Spatial Light Modulators 1×12288 Linear Series. 2006:1~4
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[23]马骥,刘永刚,阮圣平,任洪文,宣丽.光刻法制备聚合物/液晶光栅,功能材料与器件学报,2003,9(3):309~312
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[35] R. L. Sutherland, V. P. Tondiglia, L. V. Natarajan et al., Electrically switchable volume gratings in polymer dispersed liquid crystals. Appl. Phys. Lett., 1994, 64 (9):1074~1076
[36] Tang Xionggui, Fu Kexiang, Wang Zhiheng, et al. Analysis of rigorous modal theory for arbitrary dielectric gratings made with antisotropic materials. Acta Optica Sinica , 2002 , 22 (7) :774~779
[37] Sutherland R.L, Tondiglia V.P, Natarajan L.V. Evolution of anisotropic reflection gratings formed in holographic polymer-dispersed liquid crystals. Appl. Phys. Lett., 2001, 79 (10) :1420~1422
[38] Y. Hori, K. A.sai, M. Fukai, Field-controllable liquid crystal phase grating. IEEE Trans. Electron.Devices, 1979, ED-26 (11):1734~ 1737
[39]陈绍山,姚文太,龙建辉.两次斜蒸一氧化硅在多路驱动液晶显示器中的应用.物理10(12)
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[41] Andy Y G, Tsai M S, Huang L J, et al. Optically switchable gratings based on polymer- dispersed liquid crystal films doped with a guest-host dye. Appl. Phys.Lett., 1999, 74 (18) :2572~2574
[42] Zhan He, To shiaki Nose, Susumu Sato, Diffraction and polarization properties of a liquid crystal grating. Jpn. J. Appl. Phys. , 1996, 35 (6A ):3529~3530
[43] Max Born, Emil Wolf, Principles of optics ,Publishing House of Electronics Industry,2006
[44]郁道银,谈恒英,工程光学,机械工业出版社
[45] Cao Zhaoliang, et al. Diffractive characteristics of the liquid crystal spatial light modulator, Chinese Physics,16,1665~1671(2007)
[46] Katherine Creath. Choosing a phase measurement algorithm for measurement of coated LIGO optics. Proc. SPIE, 2000, Vol.4101:47~56
[47] Xinghua Wang, Bin Wang, John Pouch, et al. Liquid Crystal on Silicon (LCOS) Wavefront Corrector and Beam Steerer. Proc. SPIE, 2003, Vol.5162:139~146
[48] Manuel Bouvier, Toralf Scharf. Analysis of nematic-liquid-crystal binary gratings with high spatial frequency. Optical Engineering, 2000, 39(8):2129~2137
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[2]虞益挺,苑伟政,燕斌等.一种新型的微型可编程闪耀光栅及其多光谱成像应用.科学通报,2009,54(19):2993~2997
[3] R. A. Meyer. Optical beam steering using a multichannel lithium tantalate crystal. Appl. Opt.,1972,11:613~616
[4] Y. Ninomiya, Ultrahigh resolving electro-optic prism array light deflector. IEEE Quantum Electron.,1973,QE-9(6):791~795
[5] Y. Ninomiya. High S/N ratio electro-optic prism array light deflector. IEEE Quantum Electron.,1974,QE-10:358~362
[6] D. P. Wight, J. M. Heaton, B. T. Hughes, et al. Novel phased array optical scanning device implemented using GaAs/AlGaAs technology. Appl. Phys. Lett.,1991,59:899~901
[7] D. Goldring, Z. Zalevsky, E. Goldenberg, et al. Optical characteristics of the compound PLZT. Appl. Opt., 2003,42(32):6536~6543
[8] G. H. Haertling. PLZT electro-optic materials and application a review. Ferroelectrics, 1987, 75: 25~55
[9]刘峰,叶青,瞿荣辉等.基于光纤环形镜的偏振无关的掺镧锆钛酸铅电光开关.光学学报, 2006,26(1):107~110
[10] Ronghui Qu, Feng Liu, Qing Ye, et al. Polarization independent PLZT electro-optical switch based on fiber sagnac interferometer.OECC,2005,5E1-4:78~79
[11] Zuoren Dong, Qing Ye, Ronghui Qu, et al. Characteristics of a PLZT electro-optical deflector. Chin. Opt. Lett.,2007,5(9):540~542
[12] T. Utsunomiya. Optical deflector with tandem electrodes using PLZT ceramics. Jpn. J. Appl. Phys.,1989,28(Suppl.):164~166
[13] J. A. Thomas, Y. Fainman. Optimal cascade operation of optical phased-array beam deflectors. Appl. Opt.,1998,37(26):6196~6212
[14] Boulder Nonlinear Systems Inc. Beam Steering Using Liquid Crystals. White Paper, 2001:1~4
[15] Boulder Nonlinear Systems Inc. Spatial Light Modulators 1×12288 Linear Series. 2006:1~4
[16] Paul F. Mcmanamon, Terry A. Dorschner, David L. Corkum, et al. Optical phased array technology. Proc. IEEE,1996,84(2):268~298
[17] Liu Xiang, Zhang Jian, Wu Liying, et al. Driving method to reduce data refresh rate in nematic liquid crystal optical phased array. Proc. SPIE, Vol.7133, 71333M:1~6
[18]张健,徐林,吴丽莹等.液晶光学相控阵可编程光束偏转研究.光子学报, 2008, 38(7): 1497 ~1502
[19] Toralf Scharf,Manuel Bouvier and Rene Dandliker. Multilevel Nematic Liquid Crystal phase gratings, Proc. SPIE.2001,4418,31~37
[20] Hiroo, Ken Yamatan, Masayyuki Yamamoto, Yukitoshi. Three-dimensional profilometry using l iquid crystal grating. Proc. SPIE, 2003, 5058:51~60
[21]王丽,张成.液晶光栅的技术进展及应用.现代显示,2006,61(5),39~44
[22]任洪文,黄锡珉,王宗凯,马凯.聚合物分散液晶(PDLC)光栅的制备及其光衍射特性,光散射学报,1997,9(2~3):352~354
[23]马骥,刘永刚,阮圣平,任洪文,宣丽.光刻法制备聚合物/液晶光栅,功能材料与器件学报,2003,9(3):309~312
[24]阮圣平,马骥,刘永刚,于涛,任洪文,宣丽.新型聚合物分散液晶相位光栅的制备,光学学报,2004,24(3):369~372
[25]宋静,马骥,刘永刚,宣丽.新型聚合物网络稳定液晶光栅的制备,液晶与显示,2005,20(2):119~122
[26]马骥,刘永刚,于涛,鲁兴海,穆全全,宣丽.全息法制备二维电调谐聚合物/液晶光栅,液晶与显示,2005,20(2):115~118
[27]廖延彪.物理光学,北京:电子工业出版社,1986年3月第1版,201~202
[28]金国藩,严瑛白,邬敏贤.二元光学国防工业出版社
[29]金国藩.二元光学.物理与工程,2000,10(5),2~5
[30]黄子强,《液晶显示基础》,2006.1,国家工业出版社
[31]张翠玉,黄子强.二元光学液晶闪耀光栅的特性分析.光学学报,2008,28(7):1231~1235
[32] N. Konforti, E. M arom, S-T. Wu, Phase-only modulation with twisted nematic liquid crystal spatial light modulators. Opt. Lett., 1988, 13 (22):251~ 253
[33] M. W. Fritsch, C. Kohler, G. Hass, et al. Diffraction properties of rectangular phase gratings in a liquid crystal phase modulator. Mol Cryst. Liq Cryst., 1991, 198 (1):1~ 14
[34] S. J. Kloscowica, Edward now inow ski-Kruszelnicki, PDLC diffract ion grating. Proc. SPIE,1994, 2372:367~3670
[35] R. L. Sutherland, V. P. Tondiglia, L. V. Natarajan et al., Electrically switchable volume gratings in polymer dispersed liquid crystals. Appl. Phys. Lett., 1994, 64 (9):1074~1076
[36] Tang Xionggui, Fu Kexiang, Wang Zhiheng, et al. Analysis of rigorous modal theory for arbitrary dielectric gratings made with antisotropic materials. Acta Optica Sinica , 2002 , 22 (7) :774~779
[37] Sutherland R.L, Tondiglia V.P, Natarajan L.V. Evolution of anisotropic reflection gratings formed in holographic polymer-dispersed liquid crystals. Appl. Phys. Lett., 2001, 79 (10) :1420~1422
[38] Y. Hori, K. A.sai, M. Fukai, Field-controllable liquid crystal phase grating. IEEE Trans. Electron.Devices, 1979, ED-26 (11):1734~ 1737
[39]陈绍山,姚文太,龙建辉.两次斜蒸一氧化硅在多路驱动液晶显示器中的应用.物理10(12)
[40]陈绍山.倾斜蒸发一氧化硅的若干问题的探讨.真空科学与技术,1984,4(2)
[41] Andy Y G, Tsai M S, Huang L J, et al. Optically switchable gratings based on polymer- dispersed liquid crystal films doped with a guest-host dye. Appl. Phys.Lett., 1999, 74 (18) :2572~2574
[42] Zhan He, To shiaki Nose, Susumu Sato, Diffraction and polarization properties of a liquid crystal grating. Jpn. J. Appl. Phys. , 1996, 35 (6A ):3529~3530
[43] Max Born, Emil Wolf, Principles of optics ,Publishing House of Electronics Industry,2006
[44]郁道银,谈恒英,工程光学,机械工业出版社
[45] Cao Zhaoliang, et al. Diffractive characteristics of the liquid crystal spatial light modulator, Chinese Physics,16,1665~1671(2007)
[46] Katherine Creath. Choosing a phase measurement algorithm for measurement of coated LIGO optics. Proc. SPIE, 2000, Vol.4101:47~56
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