液晶技术用于计算机光学元件的研究
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摘要
激光束横向光强分布为高斯分布,在应用过程中经常要对其横向光强分布加以变换。目前多用计算机光学元件(computer optical elements)来实现这种变换过程。计算机光学元件能够产生任意形状的波面分布,且衍射效率较高,然而其制作工艺复杂,加工设备比较昂贵,这就限制了元件的应用范围。
论文以激光光束整形为切入点,从一个新的角度进行探索,尝试用液晶技术来实现计算机光学元件的功能。论文主要涉及到计算机光学元件的研究概况、所用的设计理论、加工方法,另外还包括液晶技术实现该类元件的基本原理及实现方法,黑栅效应的理论分析等几个方面。
论文首先用几何设计理论设计出将激光光束整形为一个均匀正方形光斑、两个均匀椭圆形光斑的光学元件,用MATLAB7.1软件进行了模拟,得到了预期的结果。另外还研究了影响整形效果的各个参数,并进行了实验验证。
随后,最为对比,用标量衍射理论重新设计了上述计算机光学元件,主要是采用G-S算法,对该算法进行了相应的优化后,其运算速度提高了近15%。通过上述的设计过程,分析了两种理论的优缺点,对计算机光学元件的设计有了较深的理解。
最后重点介绍了液晶技术实现计算机光学元件的基本原理,并做了用液晶技术实现上述光学整形元件功能的实验验证,分析了影响整形效果的因素。在验证过程中,深入研究了黑栅效应,建立了黑栅效应的理论模型,用傅里叶光学的理论对黑栅效应进行了分析。为了定量分析黑栅效应对整形结果的干扰,用MATLAB7.1软件进行了模拟,并在此基础上提出了减小黑栅效应干扰的措施。
The transverse intensity distributing of laser beam is gaussian distribution, in actual application, the distribution often need to be reshaped. Now Computer Optical Elements (COES) are used to realize this function. This kind of elements can generate arbitrary shape of wave surface theoretically and their average diffraction efficiency are very high, but the manufacturing processes of elements are so complicated that the application scope of them is restricted.
In this dissertation, laser beam shaping is selected as the breakthrough point, and liquid technology is used to realize the function of COES. The design theory, manufacture methods of COES, the liquid technology to realize COES, and the theoretical analysis of black matrix effect are studied deeply.
Firstly, two kinds of simple elements which reshape the laser beam to one flat square and two flat ellipses are designed using geometric theory, at the same time, the design results are simulated using MATLAB7.1 .
Then, the elements mentioned above are designed again using scalar diffractive theory for comparison, during this process, G-S algorithm is used and optimized. After the optimization the calculation speed is increased almost 15% . In this part , two design theories of COES are studied deeply, and the advantages and disadvantages of two theories are analyzed.
Finally, the basic principle of realizing COES using liquid technology is introduced, some experiments are conducted to verify the theory, at the same time, a few factors that influence the imaging effect are analyzed. During this process, black matrix effect is studied intensely, then the black matrix effect is analyzed using Fourier optics. In order to know the black matrix effect vividly, the interference of the effect is simulated using MATLAB7.1, according to the simulation results, some measures that can be used to reduce the interference of black matrix effect are put forward.
论文以激光光束整形为切入点,从一个新的角度进行探索,尝试用液晶技术来实现计算机光学元件的功能。论文主要涉及到计算机光学元件的研究概况、所用的设计理论、加工方法,另外还包括液晶技术实现该类元件的基本原理及实现方法,黑栅效应的理论分析等几个方面。
论文首先用几何设计理论设计出将激光光束整形为一个均匀正方形光斑、两个均匀椭圆形光斑的光学元件,用MATLAB7.1软件进行了模拟,得到了预期的结果。另外还研究了影响整形效果的各个参数,并进行了实验验证。
随后,最为对比,用标量衍射理论重新设计了上述计算机光学元件,主要是采用G-S算法,对该算法进行了相应的优化后,其运算速度提高了近15%。通过上述的设计过程,分析了两种理论的优缺点,对计算机光学元件的设计有了较深的理解。
最后重点介绍了液晶技术实现计算机光学元件的基本原理,并做了用液晶技术实现上述光学整形元件功能的实验验证,分析了影响整形效果的因素。在验证过程中,深入研究了黑栅效应,建立了黑栅效应的理论模型,用傅里叶光学的理论对黑栅效应进行了分析。为了定量分析黑栅效应对整形结果的干扰,用MATLAB7.1软件进行了模拟,并在此基础上提出了减小黑栅效应干扰的措施。
The transverse intensity distributing of laser beam is gaussian distribution, in actual application, the distribution often need to be reshaped. Now Computer Optical Elements (COES) are used to realize this function. This kind of elements can generate arbitrary shape of wave surface theoretically and their average diffraction efficiency are very high, but the manufacturing processes of elements are so complicated that the application scope of them is restricted.
In this dissertation, laser beam shaping is selected as the breakthrough point, and liquid technology is used to realize the function of COES. The design theory, manufacture methods of COES, the liquid technology to realize COES, and the theoretical analysis of black matrix effect are studied deeply.
Firstly, two kinds of simple elements which reshape the laser beam to one flat square and two flat ellipses are designed using geometric theory, at the same time, the design results are simulated using MATLAB7.1 .
Then, the elements mentioned above are designed again using scalar diffractive theory for comparison, during this process, G-S algorithm is used and optimized. After the optimization the calculation speed is increased almost 15% . In this part , two design theories of COES are studied deeply, and the advantages and disadvantages of two theories are analyzed.
Finally, the basic principle of realizing COES using liquid technology is introduced, some experiments are conducted to verify the theory, at the same time, a few factors that influence the imaging effect are analyzed. During this process, black matrix effect is studied intensely, then the black matrix effect is analyzed using Fourier optics. In order to know the black matrix effect vividly, the interference of the effect is simulated using MATLAB7.1, according to the simulation results, some measures that can be used to reduce the interference of black matrix effect are put forward.
引文
[1] Lu Si, Yi Deer, Yan Yingbai, etc. Beam-shaping application in laser heat processing. Laser Applications in Microelectronic and Optoelectronic Manufacturing, Proceedings of SPIE, 2001,VOL.4274
[2]周崇喜,周宇,税必继.激光淬火中二元光学光束整形器的设计.应用激光,1997,17(4):164-166
[3] Wilfrid B.Veldkamp, James R.Leger, Gary J.Swanson.coherent summation of laser beams using binary phase gratings. OSA OPTICS LETTERS,1986,11(5):303-305
[4]赵远,蔡喜平,陈忠贤,等.成像激光雷达技术概述.红外与激光,2000,30(6):328-330
[5]蔡喜平,黄建明,赵远,等.成像激光雷达系统性能的研究.光学技术,2001,27(1):60-62
[6] Marek Skeren, Ivan Richter, Pavel Fiala. Laser beam shaping by binary and muti-level phase-only diffraction optical elements.Proceedings of SPIE,2001, Vol.4443:1-15
[7] A.Kathman. Binary optics New Diffractive Elements For The Designer’s Tool Kit. Photonics Spectra,1992,26(9):125-132
[8]金国藩,严瑛白,邬敏贤,等.二元光学.北京:国防工业出版社1999,18-20
[9] Margaret B.Stern,Michael Holz,Theresa R.Jay. Fabricating binary optics in infrared and visible materials. Miniature and Micro-Optics,1992, Vol.1751
[10]张成.液晶实现计算机光学元件的研究:[硕士学位论文].成都:电子科技大学,2006,2-3
[11] Corey Dunsky, Beam Shaping application in laser micromaching for the microelectronics industry. Proceedings of SPIE. Vol. 4443 (2001)
[12] Joseph N.Mait, Dennis W.Parther, Mark S.Mirotznik. Binary subwavelength diffractive-lens design. OPTICS LETTERS,1998, Vol.23:1343-1345
[13] J.R.Leger, G.J.Swanson. Efficient array illuminator using binary-optics phase plates at fractional-Talbot planes. OPTICS LETTERS,1990, Vol.15:288-290
[14] Gordon D.Love. Binary adaptive optics: atmospheric wave-front correction with a half-wave phase shifter:addenda. APPLIED OPTICS, 1996, Vol.35:347-350
[15] N.K.Bao, T.J.Wang, P.S.Chung. Programmable binary optical elements using CRT-LCLV spatial modulator. SPIE, 1999, Vol.2408:108-112
[16] Daniel M.Brown, Alan D.Kathman. Off-axis spherical element telescope with binary optic corrector. SPIE,1991,Vol.1555:114-127
[17] Min Chen, Daxiang Yu, Yiqing Gao etc. Transverse-adding fabrication technique of binary element and alignment error analysis.Proc. of SPIE,2006,Vol.6027:156-163
[18]谭峭峰,严瑛白,金国藩,等.实现ICF束匀滑的二元光学器件设计与制作.强激光与粒子束,1999,11(4):445-449
[19] Zhang Guoping.Binary optical resonator for mode optimization in a high-power laser. SPIE 1996, Vol.2889:441-447
[20] Wang Li,Zhang Cheng. The Technical Evolvement of Liquid Crystal Grating and Its Application .Advanced Display,2006,39(6):39-43
[21]苏联第一届计算机光学工作会议.国外激光,1987,(4):14-19
[22] Neal C.Gallagher. Binary Optics in 90’s.SPIE VOL.1396 Applications of Optical Engineering :processing of OE:722-733
[23]杨国桢,顾本源.衍射光学元件的设计方法.物理,1994,23(4):200-205
[24]金国蕃,谭峭峰.二元光学.光电子技术与信息,2001,14(5):2-9
[25]张成,王丽,幺周石,等.液晶技术实现计算机光学元件.光电子技术,26(1):34-41
[26]邹凯.基于改进的G-S算法的COE设计信息处理系统研究:[硕士学位论文].成都:电子科技大学,2007,8-10
[27]张羽,杨坤涛,杨长城.二元光学元件的制作技术与进展.光学仪器,2005,27(2):80-85
[28] Huang Wei, Zhou Chongxi, Zhu Jin,etc. Fabrication of binary optical elements by thin film deposition. Advanced Optical manufacturing and Testing Technology, Proceedings of SPIE,2000,VOL.4231
[29]张景和,廖江红,刘伟,等.二元光学元件激光直写设备的研制.仪器仪表学报,2001,22(2):154-157
[30]吴健,严高师.光学原理教程.北京:国防工业出版社,2007,53-55
[31]卢亚雄,余学才,张晓霞.激光物理.北京:北京邮电大学出版社,2005,12-13
[32]陈彩花.二元光学元件分析方法概述.长春光学精密机械学院学报,2000,23(3):58-63
[33]谢敬辉,赵达尊,阎吉祥.物理光学教程.北京:北京理工大学出版社,2004,153-155
[34]吕乃光.傅里叶光学.北京:机械工业出版社,2006,75-76
[35]顾书龙.惠更斯-菲涅尔原理和基尔霍夫衍射公式的讨论.商丘师范学院学报,2002, 18(5):19-21
[36] Li Jun-chang, Chen Jin-bo, Fan Ze-bin,etc. The Kirchhoff Transfer Function and Rayleigh-Sommerfeld Transfer Function of Diffraction. Journals of Optoelectronics·Laser,2002,13 (1):87-89
[37]钱小凡,胡涛,张晔.基于MATLAB的衍射场模拟计算.昆明理工大学学报,2004, 29(3):132-134
[38] Jiri Komrska. Simple derivation of formulas for Fraunhofer diffraction at polygonal apertures. Optical Society of America,1982, 1382-1384
[39]吕乃光.傅里叶光学.北京:机械工业出版社,2006,74-82
[40] W.witz. Fraunhofer diffraction pattern of an aperture. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 65(9):1077-1078
[41]周杰,徐满平.基于MATLAB的二元光学元件设计研究.嘉应学院学报,2005,23(3):22-24
[42] Gerchberg R W, Saxton W O, A practical algorithm for the determination of phase from image and diffraction plan pictures, Optik, 1972, 35:237-246
[43] Guo-zhen Yang, Bi-zhen Dong, Ben-yuan Gu,etc.Gerchberg-Saxton and Yang-Gu algorithms for phase retrieval in a nonunitary transform system: a comparison. APPLIED OPTICS,1994, 33(2):209-218
[44]颜树华.加权杨-顾算法研究.光子学报,2007,36(3):530-534
[45] Gaylord T K, Moharam M G. Planar dielectric grating diffraction theories, Appl. Phys.1982, B28:1-14
[46] Zhang Jun. Analysis of Surface Temperature Distribution on Exoatmospheric Ballistic Target by FEM. Journal of Astronautics, 2009,30(1):344-349
[47]谢毓章.液晶物理学.北京:科学出版社,1988,1-9
[48]廖延彪.物理光学.北京:电子工业出版社,1986,194
[49] Zhang Huijuan, Wang Zhaoqi, Liu Hongli.Application of liquid crystal display for binary optics. Micromachining and Microfabrication Process Technology and Devices, proceeding of SPIE,2001,VOL.4601
[50] Liu Bohan, Zhang Jian.Agile multi-spot beams steering with a phase-only nematic liquid crystal spatial light modulator. International Conference On Space Information Technology, Proc of SPIE VOL.5985
[51]黄子强.液晶显示原理.北京:国防工业出版社,2006,116-122
[52] Chen Qianrong,Zhou Jinpeng,Li Quan. Disturbance of the diffraction of TFT-LCD Pixels Structure on Optical Information Process. APPLIED LASER,2003,23(1):37-40
[2]周崇喜,周宇,税必继.激光淬火中二元光学光束整形器的设计.应用激光,1997,17(4):164-166
[3] Wilfrid B.Veldkamp, James R.Leger, Gary J.Swanson.coherent summation of laser beams using binary phase gratings. OSA OPTICS LETTERS,1986,11(5):303-305
[4]赵远,蔡喜平,陈忠贤,等.成像激光雷达技术概述.红外与激光,2000,30(6):328-330
[5]蔡喜平,黄建明,赵远,等.成像激光雷达系统性能的研究.光学技术,2001,27(1):60-62
[6] Marek Skeren, Ivan Richter, Pavel Fiala. Laser beam shaping by binary and muti-level phase-only diffraction optical elements.Proceedings of SPIE,2001, Vol.4443:1-15
[7] A.Kathman. Binary optics New Diffractive Elements For The Designer’s Tool Kit. Photonics Spectra,1992,26(9):125-132
[8]金国藩,严瑛白,邬敏贤,等.二元光学.北京:国防工业出版社1999,18-20
[9] Margaret B.Stern,Michael Holz,Theresa R.Jay. Fabricating binary optics in infrared and visible materials. Miniature and Micro-Optics,1992, Vol.1751
[10]张成.液晶实现计算机光学元件的研究:[硕士学位论文].成都:电子科技大学,2006,2-3
[11] Corey Dunsky, Beam Shaping application in laser micromaching for the microelectronics industry. Proceedings of SPIE. Vol. 4443 (2001)
[12] Joseph N.Mait, Dennis W.Parther, Mark S.Mirotznik. Binary subwavelength diffractive-lens design. OPTICS LETTERS,1998, Vol.23:1343-1345
[13] J.R.Leger, G.J.Swanson. Efficient array illuminator using binary-optics phase plates at fractional-Talbot planes. OPTICS LETTERS,1990, Vol.15:288-290
[14] Gordon D.Love. Binary adaptive optics: atmospheric wave-front correction with a half-wave phase shifter:addenda. APPLIED OPTICS, 1996, Vol.35:347-350
[15] N.K.Bao, T.J.Wang, P.S.Chung. Programmable binary optical elements using CRT-LCLV spatial modulator. SPIE, 1999, Vol.2408:108-112
[16] Daniel M.Brown, Alan D.Kathman. Off-axis spherical element telescope with binary optic corrector. SPIE,1991,Vol.1555:114-127
[17] Min Chen, Daxiang Yu, Yiqing Gao etc. Transverse-adding fabrication technique of binary element and alignment error analysis.Proc. of SPIE,2006,Vol.6027:156-163
[18]谭峭峰,严瑛白,金国藩,等.实现ICF束匀滑的二元光学器件设计与制作.强激光与粒子束,1999,11(4):445-449
[19] Zhang Guoping.Binary optical resonator for mode optimization in a high-power laser. SPIE 1996, Vol.2889:441-447
[20] Wang Li,Zhang Cheng. The Technical Evolvement of Liquid Crystal Grating and Its Application .Advanced Display,2006,39(6):39-43
[21]苏联第一届计算机光学工作会议.国外激光,1987,(4):14-19
[22] Neal C.Gallagher. Binary Optics in 90’s.SPIE VOL.1396 Applications of Optical Engineering :processing of OE:722-733
[23]杨国桢,顾本源.衍射光学元件的设计方法.物理,1994,23(4):200-205
[24]金国蕃,谭峭峰.二元光学.光电子技术与信息,2001,14(5):2-9
[25]张成,王丽,幺周石,等.液晶技术实现计算机光学元件.光电子技术,26(1):34-41
[26]邹凯.基于改进的G-S算法的COE设计信息处理系统研究:[硕士学位论文].成都:电子科技大学,2007,8-10
[27]张羽,杨坤涛,杨长城.二元光学元件的制作技术与进展.光学仪器,2005,27(2):80-85
[28] Huang Wei, Zhou Chongxi, Zhu Jin,etc. Fabrication of binary optical elements by thin film deposition. Advanced Optical manufacturing and Testing Technology, Proceedings of SPIE,2000,VOL.4231
[29]张景和,廖江红,刘伟,等.二元光学元件激光直写设备的研制.仪器仪表学报,2001,22(2):154-157
[30]吴健,严高师.光学原理教程.北京:国防工业出版社,2007,53-55
[31]卢亚雄,余学才,张晓霞.激光物理.北京:北京邮电大学出版社,2005,12-13
[32]陈彩花.二元光学元件分析方法概述.长春光学精密机械学院学报,2000,23(3):58-63
[33]谢敬辉,赵达尊,阎吉祥.物理光学教程.北京:北京理工大学出版社,2004,153-155
[34]吕乃光.傅里叶光学.北京:机械工业出版社,2006,75-76
[35]顾书龙.惠更斯-菲涅尔原理和基尔霍夫衍射公式的讨论.商丘师范学院学报,2002, 18(5):19-21
[36] Li Jun-chang, Chen Jin-bo, Fan Ze-bin,etc. The Kirchhoff Transfer Function and Rayleigh-Sommerfeld Transfer Function of Diffraction. Journals of Optoelectronics·Laser,2002,13 (1):87-89
[37]钱小凡,胡涛,张晔.基于MATLAB的衍射场模拟计算.昆明理工大学学报,2004, 29(3):132-134
[38] Jiri Komrska. Simple derivation of formulas for Fraunhofer diffraction at polygonal apertures. Optical Society of America,1982, 1382-1384
[39]吕乃光.傅里叶光学.北京:机械工业出版社,2006,74-82
[40] W.witz. Fraunhofer diffraction pattern of an aperture. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 65(9):1077-1078
[41]周杰,徐满平.基于MATLAB的二元光学元件设计研究.嘉应学院学报,2005,23(3):22-24
[42] Gerchberg R W, Saxton W O, A practical algorithm for the determination of phase from image and diffraction plan pictures, Optik, 1972, 35:237-246
[43] Guo-zhen Yang, Bi-zhen Dong, Ben-yuan Gu,etc.Gerchberg-Saxton and Yang-Gu algorithms for phase retrieval in a nonunitary transform system: a comparison. APPLIED OPTICS,1994, 33(2):209-218
[44]颜树华.加权杨-顾算法研究.光子学报,2007,36(3):530-534
[45] Gaylord T K, Moharam M G. Planar dielectric grating diffraction theories, Appl. Phys.1982, B28:1-14
[46] Zhang Jun. Analysis of Surface Temperature Distribution on Exoatmospheric Ballistic Target by FEM. Journal of Astronautics, 2009,30(1):344-349
[47]谢毓章.液晶物理学.北京:科学出版社,1988,1-9
[48]廖延彪.物理光学.北京:电子工业出版社,1986,194
[49] Zhang Huijuan, Wang Zhaoqi, Liu Hongli.Application of liquid crystal display for binary optics. Micromachining and Microfabrication Process Technology and Devices, proceeding of SPIE,2001,VOL.4601
[50] Liu Bohan, Zhang Jian.Agile multi-spot beams steering with a phase-only nematic liquid crystal spatial light modulator. International Conference On Space Information Technology, Proc of SPIE VOL.5985
[51]黄子强.液晶显示原理.北京:国防工业出版社,2006,116-122
[52] Chen Qianrong,Zhou Jinpeng,Li Quan. Disturbance of the diffraction of TFT-LCD Pixels Structure on Optical Information Process. APPLIED LASER,2003,23(1):37-40