垂直腔面激光器自混合振动传感的应用研究
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摘要
光学传感测量是一种非接触式测量,具有高精度,稳定性好等优点,在精密测量领域发挥着重要的作用。在众多的光学测量中,以激光干涉法应用最为广泛。近年来以垂直腔面发射激光器(VCSEL)作为新兴的激光光源受到了人们的广泛关注,以其发射角小、极短的光学谐振腔易于实现动态单模工作、极低的功耗等优点已经成为光学信息处理、光通讯的主要光源。VCSEL加速了激光自混合干涉(SMI)技术的应用发展,自混合干涉的主要优点是系统简单、结构紧凑、易准直,解决了传统干涉光路的复杂、尺寸大的问题。
本文对垂直激光器自混合技术进行深入研究,主要研究内容包括以下几个方面:
1.用三镜腔模型和激光速率方程深入研究了激光自混合效应的基本理论,建立了自混合干涉的数学模型,为后期的实验和分析奠定理论基础。
2.建立单模VCSEL自混合测振实验装置,设计系统的光电信号处理电路。采用单模VCSEL代替普通半导体激光器,使得外部光路简单紧凑,提高了测振精度。
3.研究了外腔振动下的自混合信号的特点。通过改变振动源的频率、振幅和波形进行振动传感测量实验,观察到了相应的自混合干涉信号,并对实验结果进行了理论分析。
4.基于信号的统计特性,利用短时傅立叶变换获取自混合信号的时频分布特征。
5.根据傅立叶变换的信息,利用比值法对频谱进行校正。
6.根据表征信号奇异点的特征,对多普勒信号脱落引起的频率奇异点进行跟踪识别,并拟合修正,进一步提高信号时频分布精度。
7.采用扬声器作为振动源,通过一系列对比实验,定性分析系统测试性能。
Optical sensing and measuring technologies are non-contacted;they have a lot of advantages such as high accuracy,perfect stability,etc and play an important role in the field of metrological measurements of various optical sensing and measuring methods.Laser interferometry is the most widely used.Vertical cavity surface emitting lasrs(VCSEL) as a new laser light source has received a huge amount of attention in recent years. VCSEL have become the ideal light sources for optical signal processing and optical communication by their attracvtive such as low emission angle , inherent single longitudinal mode operation due to short optical resonator and low power consumption. VCSEL accelerate the application development of laser self-mixing interference(SMI).Its main advantages include simplicity, compact conformation and easy alignment providing a better solution to the problems of complexity and large size of the conventional interferometric systems.
The mechanism and technology of the SMI based on vibration sensing and measuring has been studied theoretically and experimentally in this thesis. The main contents are included as follows:
1.The fundamental principle of sensing technology have been deseribed based on the self-mixinge effet of laser diode using three-mirror model and rate equation. It has laid the theoretic foundation for the latter part of the experiment and analysis.
2.Single mode VCSEL laser doppler vibration experimental setup is constructed and optoelectronic singal proeessing circuits of the system is designed. The precision vibration has been improved for using single mode VCSEL in place of common semiconductor.
3.The characteristic of the SMI of the external cavity vibration has been studied. The vibration measuring experiments had been carried out by changing the frequency,amplitude and waveform of the vibrating object,respectively. The corresponding SMI singals had been observed experimentally and the experiment results had been analyzed.
4.On the basis of statistical characteristic of signal short time discrete Fourier transform has been used to obtain time-frequency distribution of Doppler signal.
5.According to the information of Fourier transform, ratio regulate method has been employed to correct the frequency of maximum spectrum in the result of Doppler signal’s Fourier transform.
6.According to the spread characteristic of singular point’s Modulus Maximum from big scale to small , the frequency singular point caused by Doppler signal’s drop-off can be identified. The accuracy of time-frequency distribution can be improved.
7.The system uses a speaker as the source of the vibration.It has been analysised test performance of the system through a series of comparative experiments
本文对垂直激光器自混合技术进行深入研究,主要研究内容包括以下几个方面:
1.用三镜腔模型和激光速率方程深入研究了激光自混合效应的基本理论,建立了自混合干涉的数学模型,为后期的实验和分析奠定理论基础。
2.建立单模VCSEL自混合测振实验装置,设计系统的光电信号处理电路。采用单模VCSEL代替普通半导体激光器,使得外部光路简单紧凑,提高了测振精度。
3.研究了外腔振动下的自混合信号的特点。通过改变振动源的频率、振幅和波形进行振动传感测量实验,观察到了相应的自混合干涉信号,并对实验结果进行了理论分析。
4.基于信号的统计特性,利用短时傅立叶变换获取自混合信号的时频分布特征。
5.根据傅立叶变换的信息,利用比值法对频谱进行校正。
6.根据表征信号奇异点的特征,对多普勒信号脱落引起的频率奇异点进行跟踪识别,并拟合修正,进一步提高信号时频分布精度。
7.采用扬声器作为振动源,通过一系列对比实验,定性分析系统测试性能。
Optical sensing and measuring technologies are non-contacted;they have a lot of advantages such as high accuracy,perfect stability,etc and play an important role in the field of metrological measurements of various optical sensing and measuring methods.Laser interferometry is the most widely used.Vertical cavity surface emitting lasrs(VCSEL) as a new laser light source has received a huge amount of attention in recent years. VCSEL have become the ideal light sources for optical signal processing and optical communication by their attracvtive such as low emission angle , inherent single longitudinal mode operation due to short optical resonator and low power consumption. VCSEL accelerate the application development of laser self-mixing interference(SMI).Its main advantages include simplicity, compact conformation and easy alignment providing a better solution to the problems of complexity and large size of the conventional interferometric systems.
The mechanism and technology of the SMI based on vibration sensing and measuring has been studied theoretically and experimentally in this thesis. The main contents are included as follows:
1.The fundamental principle of sensing technology have been deseribed based on the self-mixinge effet of laser diode using three-mirror model and rate equation. It has laid the theoretic foundation for the latter part of the experiment and analysis.
2.Single mode VCSEL laser doppler vibration experimental setup is constructed and optoelectronic singal proeessing circuits of the system is designed. The precision vibration has been improved for using single mode VCSEL in place of common semiconductor.
3.The characteristic of the SMI of the external cavity vibration has been studied. The vibration measuring experiments had been carried out by changing the frequency,amplitude and waveform of the vibrating object,respectively. The corresponding SMI singals had been observed experimentally and the experiment results had been analyzed.
4.On the basis of statistical characteristic of signal short time discrete Fourier transform has been used to obtain time-frequency distribution of Doppler signal.
5.According to the information of Fourier transform, ratio regulate method has been employed to correct the frequency of maximum spectrum in the result of Doppler signal’s Fourier transform.
6.According to the spread characteristic of singular point’s Modulus Maximum from big scale to small , the frequency singular point caused by Doppler signal’s drop-off can be identified. The accuracy of time-frequency distribution can be improved.
7.The system uses a speaker as the source of the vibration.It has been analysised test performance of the system through a series of comparative experiments
引文
[1]王小方,四波耦合微振动光学测量的研究,南京:南京师范大学,2006-01-04
[2]杜振辉,李淑清,蒋诚志,激光光栅多普勒效应微小振动测量,光学学报,2004,24(6):835~837
[3]P.G.R.King,G.J.Stepward.Metrolongy with an optical master.Rev.Sci, 1963,17:182~182
[4]T.Kanada and K.Nawata ,IEEE J.Quantum Electron,vol.18,1982:559~565
[5]R.Lang , K.Kobayashi , External optical feedback effects on semiconductor injection Laser properties. IEEE.J.Quant.Electron,1980,16(3):347~355
[6]W.M.Wang,K.T.V.Grattan,W.J.O.Boyle.ActiveOptical Feedback in a Dual-diode LaserConfiguration Applied to Displacement Measurements with a Wide Dynamic Range[J].AppliedOptics,1994,33(10):1795~1801
[7] W.M.Wang et al.Appl.Opt,vol.32,1993:1551~1558
[8] J.A.Smith Opt.Eng,vol.34,1995:2802-2810
[9]M.J.Rudd,A Later Doppler Velocimeter Employing the Laser as a Mixer Oscillator.J.Phys.e,1968,1:723-726
[10]J.Mark et al.Electron.Lett,vol.21,pp.1008-1009,1985
[11] P.J.Groot and et al.Appl.Opt,vol.28.1989:2462-2464
[12]张书练,刘刚,朱钧等,自混合干涉效应及其在位移测量应用中的进展,自然科学进展,2005,15(7):788-797
[13]王鸣,聂守平,李达成,半导体激光器的光学反馈干涉及传感应用,中国激光,2002,29(12):1121-1126
[14]季新昕,刘劲松,半导体激光器自混合干涉理论与研究现状,光电技术应用,2005,20(6):40-45
[15]王涛,王晓东,王立鼎等,MEMS中微结构动态测试技术进展,中国机械工程,2005,16(1):83-88
[16]郝辉,半导体激光自混合干涉理论分析及实验研究,光电子技术,2005,25(4):244-247
[17]张力,薛景峰,激光测振技术的最新进展,航空及测试技术,2004,24(5):1-3
[18]黄德修、刘雪峰,半导体激光器及其应用,国防工业出版社,1999
[19]伊贺健一,小山二三夫,面发射激光器基础与应用,科学出版社,2002
[20]曾为,陈培峰,朱明珠,激光振动测量的发展与展望,光机电信息,2005,(05):16-19
[21]P.J.Groot,J.Mod.Opt,vol.37,pp.1199-1214,1990
[22] W.M.Wang et al.Appl.Opt,vol.32,1993:1577~1587
[23]钱瑞海,孟迎军,半导体激光干涉仪在微振动测量中的应用,红外与激光工程,1999,28(2):37-39
[24]刘芸,焦明星,半导体激光器用电流源的设计,应用光学,2005,26(3):9-11
[25]黄德修,刘雪峰,半导体激光器及其应用,国防工业出版社,1999
[26]金银花,许文海,杨明伟等,改善半导体激光器驱动电源性能的研究,光电子技术,2005,25(1):44-47
[27]霍戌文,李伟,李进等,光电探测微信号放大器设计,浙江理土大学学报,2005,22(3):259-262
[28]刘进明,应怀樵,FFT谱连续细化分析的傅立叶变换法,振动工程学报,1995,8(2):162—166
[29]高晋占,微弱信号检测,北京:清华大学出版社,2004
[30]洪昕,远距离固体散射面内位移激光多普勒测量技术的研究,天津:天津大学,1999
[31]姚欣,激光多普勒振动检测系统的研究,天津:天津大学,2004
[32]陈佳圭,微弱信号检测,北京:中央广播电视大学出版社,1987
[33]常丹华,郑德忠,郑绳楦,微弱信号检测的调理电路研究,电子测量与仪器学报,2000,14(1):7～12
[34]杜斯特F,梅林F,怀洛特J H著,沈熊,许宏庆,周作元译,激光多普勒测速技术的原理和实践,北京:科学出版社,1992
[35]桑波,赵宏,激光多普勒扭转振动测试技术的研究,中国激光,2003,30(8):743~746
[36]胡昌华,李国华,基于MATLAB 6.x的系统分析与设计——小波分析,西安:西安电子科技大学出版社,2001.292~300
[37]葛哲学,陈仲生,Matlab时频分析技术及其应用,北京:人民邮电出版社,2006.243~250
[38]胡昌华,李国华,基于MATLAB 6.x的系统分析与设计——小波分析,西安:西安电子科技大学出版社,2001.286~291
[39] Haase, J, Ponisch, G. Singular points in electromechanical systems and their determination [J], Mathematical and Computer Modelling of Dynamical Systems, 2004, 10(2): 107-121
[40]张厥盛,郑继禹,万心平,锁相技术,西安电子科技大学出版社,1994,6
[41]余英林,信号处理新方法导论,北京:清华大学出版社,2004.140~142
[42] Romanov. A. M,How the Doppler effect affects the estimates of correlations and spectra in continuous-scanning Fourier spectrometers, Journal of Optical Technology,Nov. 2002, p 798-801
[43] Kuang. W. T., Using short-time Fourier transform and wavelet packet filter banks for improved frequency measurement in a Doppler robot tracking system, IEEE Transactions on Instrumentation and Measurement, v 51, n 3, June 2002, p 440-444
[44]钱云襄,刘渝,线性调频连续波信号参数估计算法,现代雷达,2006,28(3):40~43
[45]黄埔堪,陈建文,楼生强,现代数字信号处理,北京:电子工业出版社,1988:176-191
[46]Joyce Van de Vegte,Fundamentals of Digital Singal Processing, Publishing House or Electronics Industry,2003:470-481
[47]魏松,李琦,赵任才,基于短时傅立叶变换语言信号分析算法,电子测量技术,2006,2:29(1)
[48]朱小勇,丁康,离散频谱校正方法的综合比较,信号处理,2001,17 (1):91~97
[49]丁康,罗江凯,谢明,离散频谱时移相位差校正法,应用数学和力学,2002,23(7):729~732
[50]丁康,谢明,离散频谱三点卷积幅值校正法的误差分析,振动工程学报,Vol.9,No.1,1996:92-98
[51]周建勇,宋国乡,基于小波变换的信号重构,西安电子科技大学学报,1998,(02)
[52]刘渝,正弦波频率快速成估计方法,数据采集与处理,vol.3,NO.1,1998:7-11
[53]余佳兵,史铁林,杨叔子,窗谱校正方法的实用峰值搜索算法研究,振动工程学报,vol.10,No.2,1997:12-16
[54]张旭俊,用小波变换矩阵做小波分析,电力系统自动化,199,23(24):36-38
[55]张旭俊,小波分解和小波的平滑重构,华中电力,2000(3):1-4
[56]赵松年,熊小芸,子波变换与子波分析,北京:电子工业出版社,1997
[57]王丽娜,刁文静,小波分析在信号调制方式识别中的应用,无线电工程,2006,(06)
[58]薛磊,刘小秋,基于小波变换的数字通信信号识别,电讯技术,2006,(03)
[59]朱洪俊,秦树人,彭丽玲,小波变换对突变信号峰值奇异点的精确检测,机械工程学报,2002,(12)
[60]陈善学,郑建宏,由小波变换模极大值实现信号重构,重庆邮电学院学报, 2000,(02)
[61]何永红,文鸿雁,靳鹏伟,基于小波模极大值改进算法的变形模型研究,测绘科学,2007,(04)
[62]潘金凤,基于小波变换模极大值的脉冲噪声去除方法,山东理工大学学报,2007,(05)
[2]杜振辉,李淑清,蒋诚志,激光光栅多普勒效应微小振动测量,光学学报,2004,24(6):835~837
[3]P.G.R.King,G.J.Stepward.Metrolongy with an optical master.Rev.Sci, 1963,17:182~182
[4]T.Kanada and K.Nawata ,IEEE J.Quantum Electron,vol.18,1982:559~565
[5]R.Lang , K.Kobayashi , External optical feedback effects on semiconductor injection Laser properties. IEEE.J.Quant.Electron,1980,16(3):347~355
[6]W.M.Wang,K.T.V.Grattan,W.J.O.Boyle.ActiveOptical Feedback in a Dual-diode LaserConfiguration Applied to Displacement Measurements with a Wide Dynamic Range[J].AppliedOptics,1994,33(10):1795~1801
[7] W.M.Wang et al.Appl.Opt,vol.32,1993:1551~1558
[8] J.A.Smith Opt.Eng,vol.34,1995:2802-2810
[9]M.J.Rudd,A Later Doppler Velocimeter Employing the Laser as a Mixer Oscillator.J.Phys.e,1968,1:723-726
[10]J.Mark et al.Electron.Lett,vol.21,pp.1008-1009,1985
[11] P.J.Groot and et al.Appl.Opt,vol.28.1989:2462-2464
[12]张书练,刘刚,朱钧等,自混合干涉效应及其在位移测量应用中的进展,自然科学进展,2005,15(7):788-797
[13]王鸣,聂守平,李达成,半导体激光器的光学反馈干涉及传感应用,中国激光,2002,29(12):1121-1126
[14]季新昕,刘劲松,半导体激光器自混合干涉理论与研究现状,光电技术应用,2005,20(6):40-45
[15]王涛,王晓东,王立鼎等,MEMS中微结构动态测试技术进展,中国机械工程,2005,16(1):83-88
[16]郝辉,半导体激光自混合干涉理论分析及实验研究,光电子技术,2005,25(4):244-247
[17]张力,薛景峰,激光测振技术的最新进展,航空及测试技术,2004,24(5):1-3
[18]黄德修、刘雪峰,半导体激光器及其应用,国防工业出版社,1999
[19]伊贺健一,小山二三夫,面发射激光器基础与应用,科学出版社,2002
[20]曾为,陈培峰,朱明珠,激光振动测量的发展与展望,光机电信息,2005,(05):16-19
[21]P.J.Groot,J.Mod.Opt,vol.37,pp.1199-1214,1990
[22] W.M.Wang et al.Appl.Opt,vol.32,1993:1577~1587
[23]钱瑞海,孟迎军,半导体激光干涉仪在微振动测量中的应用,红外与激光工程,1999,28(2):37-39
[24]刘芸,焦明星,半导体激光器用电流源的设计,应用光学,2005,26(3):9-11
[25]黄德修,刘雪峰,半导体激光器及其应用,国防工业出版社,1999
[26]金银花,许文海,杨明伟等,改善半导体激光器驱动电源性能的研究,光电子技术,2005,25(1):44-47
[27]霍戌文,李伟,李进等,光电探测微信号放大器设计,浙江理土大学学报,2005,22(3):259-262
[28]刘进明,应怀樵,FFT谱连续细化分析的傅立叶变换法,振动工程学报,1995,8(2):162—166
[29]高晋占,微弱信号检测,北京:清华大学出版社,2004
[30]洪昕,远距离固体散射面内位移激光多普勒测量技术的研究,天津:天津大学,1999
[31]姚欣,激光多普勒振动检测系统的研究,天津:天津大学,2004
[32]陈佳圭,微弱信号检测,北京:中央广播电视大学出版社,1987
[33]常丹华,郑德忠,郑绳楦,微弱信号检测的调理电路研究,电子测量与仪器学报,2000,14(1):7～12
[34]杜斯特F,梅林F,怀洛特J H著,沈熊,许宏庆,周作元译,激光多普勒测速技术的原理和实践,北京:科学出版社,1992
[35]桑波,赵宏,激光多普勒扭转振动测试技术的研究,中国激光,2003,30(8):743~746
[36]胡昌华,李国华,基于MATLAB 6.x的系统分析与设计——小波分析,西安:西安电子科技大学出版社,2001.292~300
[37]葛哲学,陈仲生,Matlab时频分析技术及其应用,北京:人民邮电出版社,2006.243~250
[38]胡昌华,李国华,基于MATLAB 6.x的系统分析与设计——小波分析,西安:西安电子科技大学出版社,2001.286~291
[39] Haase, J, Ponisch, G. Singular points in electromechanical systems and their determination [J], Mathematical and Computer Modelling of Dynamical Systems, 2004, 10(2): 107-121
[40]张厥盛,郑继禹,万心平,锁相技术,西安电子科技大学出版社,1994,6
[41]余英林,信号处理新方法导论,北京:清华大学出版社,2004.140~142
[42] Romanov. A. M,How the Doppler effect affects the estimates of correlations and spectra in continuous-scanning Fourier spectrometers, Journal of Optical Technology,Nov. 2002, p 798-801
[43] Kuang. W. T., Using short-time Fourier transform and wavelet packet filter banks for improved frequency measurement in a Doppler robot tracking system, IEEE Transactions on Instrumentation and Measurement, v 51, n 3, June 2002, p 440-444
[44]钱云襄,刘渝,线性调频连续波信号参数估计算法,现代雷达,2006,28(3):40~43
[45]黄埔堪,陈建文,楼生强,现代数字信号处理,北京:电子工业出版社,1988:176-191
[46]Joyce Van de Vegte,Fundamentals of Digital Singal Processing, Publishing House or Electronics Industry,2003:470-481
[47]魏松,李琦,赵任才,基于短时傅立叶变换语言信号分析算法,电子测量技术,2006,2:29(1)
[48]朱小勇,丁康,离散频谱校正方法的综合比较,信号处理,2001,17 (1):91~97
[49]丁康,罗江凯,谢明,离散频谱时移相位差校正法,应用数学和力学,2002,23(7):729~732
[50]丁康,谢明,离散频谱三点卷积幅值校正法的误差分析,振动工程学报,Vol.9,No.1,1996:92-98
[51]周建勇,宋国乡,基于小波变换的信号重构,西安电子科技大学学报,1998,(02)
[52]刘渝,正弦波频率快速成估计方法,数据采集与处理,vol.3,NO.1,1998:7-11
[53]余佳兵,史铁林,杨叔子,窗谱校正方法的实用峰值搜索算法研究,振动工程学报,vol.10,No.2,1997:12-16
[54]张旭俊,用小波变换矩阵做小波分析,电力系统自动化,199,23(24):36-38
[55]张旭俊,小波分解和小波的平滑重构,华中电力,2000(3):1-4
[56]赵松年,熊小芸,子波变换与子波分析,北京:电子工业出版社,1997
[57]王丽娜,刁文静,小波分析在信号调制方式识别中的应用,无线电工程,2006,(06)
[58]薛磊,刘小秋,基于小波变换的数字通信信号识别,电讯技术,2006,(03)
[59]朱洪俊,秦树人,彭丽玲,小波变换对突变信号峰值奇异点的精确检测,机械工程学报,2002,(12)
[60]陈善学,郑建宏,由小波变换模极大值实现信号重构,重庆邮电学院学报, 2000,(02)
[61]何永红,文鸿雁,靳鹏伟,基于小波模极大值改进算法的变形模型研究,测绘科学,2007,(04)
[62]潘金凤,基于小波变换模极大值的脉冲噪声去除方法,山东理工大学学报,2007,(05)